BERKELEY SENSOR & ACTUATOR CENTER
UC BERKELEY UC DAVIS
User: Guest |  Site Map |  My BSAC Profile
HOME  PROJECTS  THRUSTS  PUBLICATIONS  ABOUT BSAC  DIRECTORY  ALUMNI  FOR BSAC RESEARCHERS  EVENTS CALENDAR  SECURE LOGIN
Table of all Projects
     
 

BPN817: Ultra-Low Power AlN MEMS-CMOS Microphones and Accelerometers

Project ID BPN817
Website
Start Date Fri 2016-Jan-22 15:45:44
Last Updated Sun 2017-Aug-13 10:40:04
Abstract State-of-the-art (SOA) physical sensors used to monitor changes in the environment require active electronics that continuously consume power (in the order of mW) limiting the sensor lifetime to months or less. This project targets the integration of low frequency sensors with wake-up electronics that operates below 10nW (50dB lower than the SOA) and achieve high probability of detection (POD) (>95%) and low false alarm rate (FAR) (<1h^-1). To improve the sensor performance at low frequencies we design piezoelectric AlN MEMS microphones and accelerometers with high voltage sensitivities, CMOS circuits with low bias current that operate in subthreshold, and lower the interconnect parasitics (<50fF) by directly bonding both MEMS and CMOS wafers. In particular, the sensor output voltage is boosted by 1) segmenting and stacking the electrodes in series, and 2) optimizing the size, number of electrodes and materials that form the multilayer structure. Regarding to the circuit, we exploit the multiple threshold voltages that are available in the process to reduce leakage on switches, increase input gain, and decrease overdrive voltage in current mirrors. Finally, we achieve the detection specs (POD and FAR) by implementing a programmable 4-stage comparator that allows us to adjust the circuit threshold according to the maximum level of input signal.
Status Continuing
Funding Source DARPA
IAB Research Area Physical Sensors & Devices
Researcher(s) Yuri Kusano
Advisor(s) David A. Horsley
Detailed Information
Secure Access

Private Abstract
Research Report
Poster
Summary Slide PDF | VIDEO
Active Feedback (or Request for Response)

 

  • Copyright Notification: All papers downloaded from this site are © University of California or the publisher, all rights reserved. Contact the BSAC Webmaster for permission related to copyrighted materials.
  • Links on these pages to commercial sites do not represent endorsements by UC or its affiliates.
  • Privacy Policy
  • Contact Us

   webmaster@bsac.eecs.berkeley.edu
  User logged in as: Guest
  User Idle since: September 23, 2017, 4:46 pm