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BPN849: Large-Amplitude PZT PMUTs

Project ID BPN849
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Start Date Tue 2016-Aug-30 15:46:30
Last Updated Sun 2017-Aug-13 11:48:04
Abstract Ultrasonic transducers are widely used in various applications including medical imaging, nondestructive evaluation, object/gesture recognition, automotive, and range-finding. Compared to conventional capacitive micromachined ultrasonic transducers (CMUTs), piezoelectric micromachined ultrasonic transducers (PMUTs) have an advantage that they can be utilized without high bias voltages, resulting in simpler electronic interfaces. This project targets air-coupled PMUTs with wide bandwidth to achieve high axial resolution in pulse-echo imaging, where air-coupled transducers typically operate in the frequency range of 40 kHz to 800 kHz. Regarding the piezoelectric material, the thin-film PZT (lead-zirconate-titanate) is widely used for piezoelectric devices and well-known to have higher piezoelectric coefficient e31,f as well as higher transmitting efficiency than those of another major piezoelectric material AlN. In this project, we design, model, and characterize PZT PMUTs with a large displacement amplitude for in-air operation to improve the sensor performance in pulse-echo imaging system.
Status Continuing
Funding Source BSAC Member Fees
IAB Research Area Physical Sensors & Devices
Researcher(s) Yuri Kusano
Advisor(s) David A. Horsley
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