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BPN858: Zero Insertion Force MEMS Socket for Microrobotics Assembly

Project ID BPN858
Website
Start Date Mon 2017-Jan-30 08:45:54
Last Updated Mon 2017-Feb-06 18:29:19
Abstract To help resolve the control and power challenges present in developing micro robots, the research focus of this project is the design and development of a ZIF (zero insertion force) MEMS (micro electro mechanical systems) socket. A two-mask SOI (silicon- on- insulator) fabrication process is used to build the ZIF socket. The current goal is to make electrical connections between a 65nm single-chip mote and a multi-legged SOI micro robot. The ZIF socket will provide a smooth and simple approach to the integration of CMOS chips with MEMS structures. It will allow MEMS structures to easily probe the pads of CMOS chips, strongly connecting the two technologies both electrically and mechanically (the connection is designed to withstand 1000s of gs of vibration).
Status New
Funding Source Fellowship
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Hani Gomez, Daniel Contreras
Advisor(s) Kristofer S.J. Pister
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Summary Slide PDF | VIDEO
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