Lectures

Lecture 1  Course Overview

Lecture 2  Bulk Micromachining

Lecture 3  Surface Micromachining I

Lecture 4  Surface Micromachining II

Lecture 5 Surface Micromachining III

Lecture 6 Scaling of Forces in the Microworld

Lecture 6B Mechanics of Materials for MEMS:  handouts

Lecture 6B Mechanics of Materials for MEMS:  complete

Lecture 7 Microstructural Elements:  handouts

Lecture 7 Microstructural Elements:  complete

Lecture 8 Energy Methods I:  handouts

Lecture 8 Energy Methods I:  complete

Lecture 9 Energy Methods II:  handouts

Lecture 9 Energy Methods II:  complete

Lecture 10 Electrostatic Actuators I:  handouts

Lecture 10 Electrostatic Actuators I:  complete

Lecture 11 Electrostatic Actuators II:  handouts

Lecture 11 Electrostatic Actuators II:  complete

Lecture 12 Capacitive Position Sensing:  handouts

Lecture 12 Capacitive Position Sensing:  complete

Lecture 13 Alternative Transduction Principles:  handouts

Lecture 16 Process Integration: handouts

Lecture 16 Process Integration: complete

Lecture 17 Fluid Dynamics: handouts

Lecture 18 Microfluidics: Electrokinetics and Fabrication: handouts

Lecture 19 Microfluidics for DNA Analysis

Lecture 20 Lab on a Chip

Lecture 21 Two-Terminal Integrated Circuit Elements

Lecture 22 Transistor Models for MEMS Design

Lecture 23 Capacitive Position Sensing:  Electronic and Mechanical Noise:  handouts

Lecture 23 Capacitive Position Sensing:  Electronic and Mechanical Noise: complete

Lecture 24 Wafer Bonding and Packaging

Lecture 25 Assembly Techniques for MEMS

Lecture 26 Micromechanical Resonators I:  handouts

Lecture 26 Micromechanical Resonators I:  complete

Lecture 27 Micromechanical Resonators II:  handouts