Additional Material                                                                  

Errata for the course text, Microsystem Design, by Steve Senturia
(Follow links from MIT MTL's homepage to Personnel/MTL Faculty/Stephen Senturia/Microsystem Design/Errata)

Silicon crystal origami cube

Richard Feynman's paper, "There's Plenty of Room at the Bottom"

Kurt Peterson's paper, "Silicon as a Mechanical Material"

MEMSCAP MUMPs page

MUMPS Design Rules

Fall 2001

Fall 1997

M. Krishnan et al. review article (incomplete in reader)  for Lab-on-a-Chip lecture posted here.

Sundberg article for microfluidic chip fabrication in glass;  references page 1 page 2