Berkeley Sensor & Actuator Center

The Berkeley Sensor & Actuator Center (BSAC) is the Graduated National Science Foundation Industry/University Cooperative Research Center for Microsensors and Microactuators. We conduct industry-relevant, interdisciplinary research on micro- and nano-scale sensors, moving mechanical elements, microfluidics, materials, processes & systems that take advantage of progress made in integrated-circuit, bio, and polymer technologies.

Number of records: 97

POSTER	RESEARCH THRUST	ABSTRACT click link to view abstract	PROJECT MATERIALS WEBSITE, Login Required	PROJECT TITLE	ADVISOR
-1	BioMEMS	BPN757	BPN757 Website	Early Detection of Circulation-Reactive Oxygen Species Using a Novel Stimuli Responsive Polymer-Based Lab-on-a-Chip New Project	Dorian Liepmann, Niren Murthy
-1	BioMEMS	BPN756	BPN756 Website	A Battery-Less Jet Injector Device for Oral-to-Systemic Delivery of Proteins and Peptides New Project	Dorian Liepmann, Niren Murthy
1	Physical Sensors & Devices	BPN741	BPN741 Website	Programmable Gyroscope Test Platform New Project	Bernhard E. Boser
2	Physical Sensors & Devices	BPN753	BPN753 Website	Ratio-metric Readout Technique for MEMS Gyroscopes with Force Feedback New Project	Bernhard E. Boser
3	Physical Sensors & Devices	BPN722	BPN722 Website	Ultrasonic Fingerprint Sensor Using Piezoelectric Micro-Machined Ultrasonic Transducer (PMUT)	Bernhard E. Boser
4	BioMEMS	BPN649	BPN649 Website	Magnetic Particle Flow Cytometer	Bernhard E. Boser
5	BioMEMS	BPN685	BPN685 Website	In-Vivo Imaging of Microscopic Residual Disease in Cancer	Bernhard E. Boser
6	Physical Sensors & Devices	BPN608	BPN608 Website	FM Gyroscope	Bernhard E. Boser
7	NanoPlasmonics, Microphotonics & Imaging	BPN665	BPN665 Website	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) System Demonstrator: High Resolution FMCW LADAR	Bernhard E. Boser, Ming C. Wu, Connie Chang-Hasnain, Eli Yablonovitch
8	Microfluidics	BPN733	BPN733 Website	Single-Cell Culture and Analysis on an Optoelectronic Tweezers Platform New Project	Ming C. Wu, Song Li
9	Microfluidics	BPN552	BPN552 Website	Light-Actuated Digital Microfluidics (Optoelectrowetting)	Ming C. Wu
10	NanoPlasmonics, Microphotonics & Imaging	BPN751	BPN751 Website	Large scale MEMS Silicon photonics Switch New Project	Ming C. Wu
11	NanoPlasmonics, Microphotonics & Imaging	BPN721	BPN721 Website	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) Component Characterization	Ming C. Wu
12	NanoPlasmonics, Microphotonics & Imaging	BPN678	BPN678 Website	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)	Ming C. Wu, Bernhard E. Boser
13	NanoPlasmonics, Microphotonics & Imaging	BPN651	BPN651 Website	Low Power, Low noise Cavity Optomechanical Oscillators	Ming C. Wu, Clark T.-C. Nguyen
14	NanoPlasmonics, Microphotonics & Imaging	BPN458	BPN458 Website	Optical Antenna-Based nanoLED	Ming C. Wu
15	NanoPlasmonics, Microphotonics & Imaging	BPN703	BPN703 Website	Directly Modulated High-Speed nanoLED Utilizing Optical Antenna Enhanced Light Emission	Ming C. Wu
16	NanoPlasmonics, Microphotonics & Imaging	BPN609	BPN609 Website	Ultra-compact photodetectors on Silicon photonics	Ming C. Wu
17	Microfluidics	BPN732	BPN732 Website	The Role of Erythrocyte Size and Shape in Microchannel Fluid Dynamics New Project	Dorian Liepmann
18	Microfluidics	BPN621	BPN621 Website	Microfluidic Separation of Blood for SIMBAS Biosensor	Dorian Liepmann
19	BioMEMS	BPN729	BPN729 Website	Functional Plastic Microstructures Fabricated Using Electroplating and Hot Embossing	Dorian Liepmann
20	Microfluidics	BPN711	BPN711 Website	Point-of-Care System for Quantitative Measurements of Blood Analytes Using Graphene-Based Sensors	Dorian Liepmann
21	BioMEMS	BPN622	BPN622 Website	Design of an Ex-vivo Prototype of a Bioartificial Kidney	Dorian Liepmann, Shuvo Roy
23	Physical Sensors & Devices	BPN687	BPN687 Website	QES: Robust Optical Flame Detection in Harsh Environments	Liwei Lin
24	NanoTechnology: Materials, Processes & Devices	BPN736	BPN736 Website	Atomic Layer Deposition Ruthenium Oxide-Carbon Nanotube Electrodes for Supercapacitor Applications New Project	Liwei Lin
25	NanoTechnology: Materials, Processes & Devices	BPN672	BPN672 Website	Solar Hydrogen Production by Photocatalytic Water Splitting	Liwei Lin
26	Micropower	BPN737	BPN737 Website	Stackable Microliter-Scale Microbial Fuel Cells for Low Power Output Applications New Project	Liwei Lin
27	Micropower	BPN742	BPN742 Website	3D Carbon-based Materials for Electrochemical Applications New Project	Liwei Lin
28	Physical Sensors & Devices	BPN743	BPN743 Website	Highly Responsible Curved pMUTs New Project	Liwei Lin
29	BioMEMS	BPN715	BPN715 Website	Stimuli Responsive Capsules for Drug Delivery and Diagnostic Applications	Liwei Lin
30	Wireless, RF & Smart Dust	BPN574	BPN574 Website	On-Chip Micro-Inductor	Liwei Lin
31	BioMEMS	BPN473	BPN473 Website	Next-Generation Microfluidic Components, Circuits and Systems	Liwei Lin, Luke P. Lee
32	Microfluidics	BPN706	BPN706 Website	Single-Layer Microfluidic Gain Valves via Optofluidic Lithography	Liwei Lin
33	Microfluidics	BPN586	BPN586 Website	Integrated Finger-Powered Microfluidic Pumps for Point-of-Care Diagnostics	Liwei Lin
34	Microfluidics	BPN702	BPN702 Website	A Continuous-Flow Microdroplets Lysis System	Liwei Lin
35	BioMEMS	BPN438	BPN438 Website	Microengineered Technologies for Controlling Cellular Functions	Liwei Lin, Song Li
36	BioMEMS	BPN675	BPN675 Website	Implantable Micro Drug Delivery System	Liwei Lin
37	Physical Sensors & Devices	BPN708	BPN708 Website	Direct-Write Graphene Channel Field Effect with Self-Aligned Top Gate	Liwei Lin
38	NanoTechnology: Materials, Processes & Devices	BPN606	BPN606 Website	Carbon Nanotube Films for Energy Storage Applications	Liwei Lin
39	Physical Sensors & Devices	BPN424	BPN424 Website	Silicon Carbide Technology for Harsh Environment Sensing and Energy Applications	Roya Maboudian, Carlo Carraro
40	Physical Sensors & Devices	BPN738	BPN738 Website	Sensor instrumentation to improve safety of U. S. underground coal mines New Project	Igor Paprotny, Richard M. White, Paul K. Wright
42	Wireless, RF & Smart Dust	BPN392	BPN392 Website	Mobile Airborne Particulate Matter Monitor for Cellular Deployment	Richard M. White, Lara Gundel, Igor Paprotny
43	Micropower	BPN562	BPN562 Website	AC Energy Scavenging for Smart Grid Sensing	Richard M. White, Igor Paprotny
44	Physical Sensors & Devices	BPN697	BPN697 Website	Natural Gas Pipeline Research	Richard M. White, Paul K. Wright, Igor Paprotny
45	Micropower	BPN654	BPN654 Website	Electret-Based Voltage Sensing and Energy Harvesting from Energized Conductors	Richard M. White, Paul K. Wright, Igor Paprotny
46	Physical Sensors & Devices	BPN505	BPN505 Website	Deployment of Wireless Stick-On Circuit Breaker PEM AC Sensors for the Smart Grid	Richard M. White, Paul K. Wright, Igor Paprotny
47	Physical Sensors & Devices	BPN746	BPN746 Website	Liquid Heterojunction Sensors New Project	Ali Javey
48	Physical Sensors & Devices	BPN747	BPN747 Website	Fully Printed High Performance Flexible Electronics New Project	Ali Javey
49	Physical Sensors & Devices	BPN698	BPN698 Website	Multifunctional Electronic Skin	Ali Javey
50	NanoTechnology: Materials, Processes & Devices	BPN748	BPN748 Website	Highly-sensitive electronic-whiskers based on patterned carbon nanotube and silver nanoparticle composite films New Project	Ali Javey
51	NanoTechnology: Materials, Processes & Devices	BPN752	BPN752 Website	Highly Efficient and Stable Photocathode for Solar Hydrogen Production New Project	Ali Javey
52	Physical Sensors & Devices	BPN755	BPN755 Website	Carrier selective oxide contacts for silicon electronics New Project	Ali Javey
53	NanoTechnology: Materials, Processes & Devices	BPN704	BPN704 Website	Vapor-Liquid-Solid Growth of Polycrystalline Indium Phosphide Thin Films on Metal	Ali Javey
54	NanoTechnology: Materials, Processes & Devices	BPN694	BPN694 Website	Monolayer Semiconductor Devices	Ali Javey
55	Microfluidics	BPN723	BPN723 Website	Organ-on-a-chip for Personalized Medicine Development	Luke P. Lee
56	Microfluidics	BPN730	BPN730 Website	Microfluidic Blood Plasma Separation for Point-of-Care Diagnostics	Luke P. Lee
57	NanoTechnology: Materials, Processes & Devices	BPN727	BPN727 Website	On-Chip Single Molecule miRNA Detection for Cancer Diagnosis	Luke P. Lee
58	Microfluidics	BPN679	BPN679 Website	Digital Plasma Separation for One-Step Quantitative Nucleic Acid Detection	Luke P. Lee
59	Package, Process & Microassembly	BPN480	BPN480 Website	AM Fitzgerald: MEMS Design, Prototyping, Modeling, Failure Prediction and Foundry Transfer	John M. Huggins
60	Package, Process & Microassembly	BPN354	BPN354 Website	The Nanoshift Concept: Innovation through Design, Development, Prototyping and Fabrication for MEMS, Microfluidics, Nano and Clean Technologies at the UC Berkeley NanoLab	John M. Huggins
61	Package, Process & Microassembly	BPN712	BPN712 Website	Bridging Research-to-Commercialization Gaps through Facilitated Intermediaries	John M. Huggins
62	Wireless, RF & Smart Dust	BPN735	BPN735 Website	Autonomous Microrobotic Systems New Project	Kristofer S. J. Pister
63	Wireless, RF & Smart Dust	BPN744	BPN744 Website	Mr. Phelps' Motes: Self-Destructing Silicon New Project	Kristofer S.J. Pister, Ana Arias, Michel M. Maharbiz, Vivek Subramanian
64	Wireless, RF & Smart Dust	BPN713	BPN713 Website	Ring GINA: Highly Miniaturized Ring-Format Wearable Mote	Kristofer S.J. Pister
65	Wireless, RF & Smart Dust	BPN683	BPN683 Website	OpenWSN: A Standards-Based Low-Power Wireless Development Environment	Kristofer S.J. Pister
66	Micropower	BPN648	BPN648 Website	Fully-Integrated, Low Input Voltage, Switched-Capacitor DC-DC Converter for Energy Harvesting Applications	Kristofer S.J. Pister
67	Physical Sensors & Devices	BPN705	BPN705 Website	Standard CMOS-Based, Fully Integrated, Stick-On Electricity Meters for Building Sub-Metering	Kristofer S.J. Pister, Steven Lanzisera
68	Wireless, RF & Smart Dust	BPN596	BPN596 Website	Smart Fence and Other Wireless Sensing Applications for Critical Industrial Environments	Kristofer S.J. Pister
69	BioMEMS	BPN745	BPN745 Website	Wafer-Scale Intracellular Carbon Nanotube Based Neural Probes New Project	Michel M. Maharbiz
70	BioMEMS	BPN716	BPN716 Website	Neural Dust: An Ultrasonic, Low Power Solution for Chronic BrainMachine Interfaces	Michel M. Maharbiz
71	BioMEMS	BPN717	BPN717 Website	Proof of Concept: Self-Assembly of a Multi-Cellular Synthetic-Biological Hybrid	Michel M. Maharbiz
72	BioMEMS	BPN718	BPN718 Website	Direct Electron-Mediated Control of Hybrid Multi-Cellular Robots	Michel M. Maharbiz
73	Physical Sensors & Devices	BPN714	BPN714 Website	Electronic Bandage for Wound Healing	Michel M. Maharbiz
74	Physical Sensors & Devices	BPN731	BPN731 Website	Flexible Electrodes and Insertion Machine for Stable, Minimally-Invasive Neural Recording	Michel M. Maharbiz, Philip N. Sabes
75	Physical Sensors & Devices	BPN726	BPN726 Website	Transparent Microelectrode Arrays for Hybrid Experiments in Neuroscience	Michel M. Maharbiz, Timothy J. Blanche
76	BioMEMS	BPN573	BPN573 Website	Carbon Fiber Microelectrode Arrays for Chronic Stimulation and Recording in Insects	Michel M. Maharbiz, Kristofer S.J. Pister
77	BioMEMS	BPN571	BPN571 Website	Implantable Microengineered Neural Interfaces for Studying and Controlling Insects	Michel M. Maharbiz
78	BioMEMS	BPN699	BPN699 Website	A Modular System for High-Density, Multi-Scale Electrophysiology	Michel M. Maharbiz, Timothy J. Blanche
79	NanoTechnology: Materials, Processes & Devices	BPN518	BPN518 Website	Synthetic Turing Patterns	Michel M. Maharbiz, Murat Arcak
80	Physical Sensors & Devices	BPN599	BPN599 Website	MEMS Electronic Compass: Three-axis Magnetometer	David A. Horsley
81	Physical Sensors & Devices	BPN466	BPN466 Website	Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers	David A. Horsley
82	Physical Sensors & Devices	BPN628	BPN628 Website	High Frequency Piezoelectric Micromachined Ultrasound Transducers (PMUTs)	David A. Horsley
83	Physical Sensors & Devices	BPN603	BPN603 Website	Hemispherical Resonator Gyroscope	David A. Horsley
84	Physical Sensors & Devices	BPN684	BPN684 Website	Integrated Microgyroscopes with Improved Scale-Factor and Bias Stability	David A. Horsley
85	Physical Sensors & Devices	BPN655	BPN655 Website	Materials for High Quality-Factor Resonating Gyroscopes	David A. Horsley
86	Package, Process & Microassembly	BPN734	BPN734 Website	Package-Derived Influences on Micromechanical Resonator Stability New Project	Clark T.-C. Nguyen
87	Wireless, RF & Smart Dust	BPN540	BPN540 Website	Temperature-Stable Micromechanical Resonators and Filters	Clark T.-C. Nguyen
88	Wireless, RF & Smart Dust	BPN359	BPN359 Website	Micromechanical Disk Resonator-Based Oscillators	Clark T.-C. Nguyen, Elad Alon
89	Physical Sensors & Devices	BPN534	BPN534 Website	Fully-Integrated Micromechanical Clock Oscillator	Clark T.-C. Nguyen
90	Wireless, RF & Smart Dust	BPN707	BPN707 Website	High-Order Micromechanical Electronic Filters	Clark T.-C. Nguyen
91	Physical Sensors & Devices	BPN433	BPN433 Website	A Micromechanical Power Converter	Clark T.-C. Nguyen
92	Physical Sensors & Devices	BPN435	BPN435 Website	A Micromechanical Power Amplifier	Clark T.-C. Nguyen
93	Wireless, RF & Smart Dust	BPN434	BPN434 Website	A Micromechanical RF Channelizer	Clark T.-C. Nguyen
94	Wireless, RF & Smart Dust	BPN682	BPN682 Website	Strong I/O Coupled High-Q Micromechanical Filters	Clark T.-C. Nguyen
95	Wireless, RF & Smart Dust	BPN676	BPN676 Website	Q-boosted Optomechanical Oscillators	Clark T.-C. Nguyen, Ming C. Wu
96	Wireless, RF & Smart Dust	BPN701	BPN701 Website	Bridged Micromechanical Filters	Clark T.-C. Nguyen
97	Wireless, RF & Smart Dust	BPN709	BPN709 Website	Tunable & Switchable Micromechanical RF Filters	Clark T.-C. Nguyen

Project Abstracts

 

Document Top Table of Projects	BioMEMS
Project ID	BPN756 New Project
Project Title	A Battery-Less Jet Injector Device for Oral-to-Systemic Delivery of Proteins and Peptides
Status	Continuing
Funding Source	Federal
Keywords	MEMS, Oral Drug Delivery
Researchers	Kiana Aran, Jacobo Paredes
Abstract	Oral delivery of proteins and large molecule drugs has been a challenge due to the denaturing effects of digestive environment, enzymatic destruction and poor GI mucus permeability, leading to extremely low drug bioavailability and therapeutic efficacy. In spite of considerable efforts over the past decades, oral delivery of proteins and large molecule drugs with low therapeutic efficacy and bioavailability remains a major challenge. There is a great need for a suitable oral delivery system which can maintain the protein integrity, improve bioavailability and overcome the mucus barrier for maximum absorption. MucuJet is a high pressure jet-injector oral pill, for oral to systemic delivery of drugs. MucuJet can protect drugs from digestive destruction and can eject drugs with high pressure in the lumen of small intestine which can penetrate intestinal mucus, thereby overcoming the limitation associated with low diffusion rate across mucosal barrier. The feasibility of using MucuJet for enhancing intestinal absorption was tested in vitro which indicated that MucuJet is capable of high velocity drug release and is able to increase protein absorption in short amount of time with no significant effect on cell viability.
Contact Information	k.aran@berkeley.edu
Advisor	Dorian Liepmann, Niren Murthy

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN741 New Project
Project Title	Programmable Gyroscope Test Platform
Status	New
Funding Source	DARPA
Keywords
Researchers	Oleg I. Izyumin
Abstract	This project aims to develop a compact and self-contained universal test platform for DSP-based control of MEMS gyroscopes and resonant sensors. Many operating modes require features not available in off-the-shelf laboratory instruments, and it is difficult to perform sensor testing and validation with laboratory test equipment due to size and power constraints. We have implemented a multi- channel digital lock-in amplifier in FPGA hardware, providing PLLs, modulators, demodulators, filters, and the capability to add custom functionality. Software-based baseband DSP allows sophisticated control algorithms to be easily implemented and tested. The main system board provides data conversion for sense and drive signals at sampling rates up to 2 MHz, as well as flexible power and biasing options to the sensor daughterboard. The system interfaces to a PC for algorithm development and data acquisition, and can also operate autonomously.
Contact Information	oleg.izyumin@gmail.com
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN753 New Project
Project Title	Ratio-metric Readout Technique for MEMS Gyroscopes with Force Feedback
Status	New
Funding Source	Federal
Keywords	MEMS Gyroscope, Inertial Sensors, Force Feedback
Researchers	Burak Eminoglu, Mitchell H. Kline, Igor Izyumin, Yu-Ching Yeh
Abstract	Scale factor accuracy is critical for navigation grade gyroscopes. Traditional MEMS vibratory gyroscopes with force feedback provide good resolution, but their scale factor depends on a plethora of parameters including proof mass bias voltage, drive mode velocity, dimensions of the forcer electrodes, and mass. This project develops a ratio-metric readout technique for force feedback gyroscopes that provides a precise scale factor.
Contact Information	eminoglu@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN722
Project Title	Ultrasonic Fingerprint Sensor Using Piezoelectric Micro-Machined Ultrasonic Transducer (PMUT)
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Fingerprints, ultrasonic, MEMS, integrated circuits
Researchers	Hao-Yen Tang, Yipeng Lu
Abstract	The proliferation of electronic devices such as smartphones creates a pressing need for reliable biometric authentication. Present solutions such as capacitive fingerprint sensors have failed to gain wide acceptance due to there susceptibility to contamination from oils, perspiration, and dirt. Ultrasonic fingerprint sensors solve these problems but currently available devices too large and costly for deployment in consumer devices. The goal of this project is to fabricate a fingerprint sensor based on a piezoelectric micro-machined ultrasonic transducer (PMUT) array and integrated electronics. A test chip comprising an 8 by 24 array of PMUTs fabricated on a 125um pitch and per-transducer readout electronics is presently in fabrication.
Contact Information	b96901108@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	BioMEMS
Project ID	BPN649
Project Title	Magnetic Particle Flow Cytometer
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	magnetic flow cytometry
Researchers	Pramod Murali
Abstract	Flow Cytometry is a powerful technique used in health and disease diagnostics. This technique is used to analyze and sort individual cells of a biological sample. Some of the applications include, HIV and cancer detection, water quality monitoring, food safety among many others. Commercial equipments use laser source and an optical detector to study cells labeled with fluorescent molecules. Such an approach is expensive, bulky and suffers from optical background noise. We propose to replace the fluorescent markers with magnetic nano-particles (MNPs) to be detected by CMOS chips. Apart from eliminating the need for sample preparation, this approach has the advantage of being low cost, portable and disposable. Neel�s relaxation of MNPs leads to a frequency dependent complex susceptibility behaviour. The relaxation time constant depends on the nano-particle size and material. We use this phenomenon to distinguish different cells. Currently, we are in the process of characterizing different MNPs to observe Neel�s relaxation. Our goal is to combine the advantages of CMOS technology and the numerous applications of Flow Cytometry to meet the needs of point-of-care diagnostics.
Contact Information	pramodm@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	BioMEMS
Project ID	BPN685
Project Title	In-Vivo Imaging of Microscopic Residual Disease in Cancer
Status	Continuing
Funding Source	NIH
Keywords	cancer, imaging, radiation, surgery, breast, oncology
Researchers	Mekhail Anwar
Abstract	Successful treatment of early stage cancer depends on the ability to resect both gross and microscopic disease. Microscopic residual disease (MRD) can lead to increased risk for local recurrence (LR) and reduced overall survival (OS). Currently, no methods exist to intraoperatively assess whether individual cancer cells remain in the tumor bed; only post- operative pathologic evaluation of the tumor for molecular tumor markers, requiring several days in a laboratory setting, can definitely identify MRD. A prime example of this occurs in the over 50,000 women each year who are diagnosed with breast cancer, and are found to have MRD after lumpectomy. Elimination of MRD in breast cancer is known to reduce the need for second surgical procedures, half the LR rate from 30% to 15%, and increase breast cancer survival. Therefore a method of imaging MRD intraoperatively to guide complete resection is essential. This projects seeks to develop a method for intraoperatively identifying microscopic residual disease.
Contact Information	anwarme@radonc.ucsf.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN608
Project Title	FM Gyroscope
Status	Continuing
Funding Source	Federal
Keywords	gyroscope, calibration
Researchers	Mitchell H. Kline, Igor Izyumin, Yu-Ching Yeh, Burak Eminoglu
Abstract	MEMS gyroscopes for consumer devices, such as smartphones and tablets, suffer from high power consumption and drift which precludes their use in inertial navigation applications. Conventional MEMS gyroscopes detect Coriolis force through measurement of very small displacements on a sense axis, which requires low-noise, and consequently high-power, electronics. The sensitivity of the gyroscope is improved through mode-matching, but this introduces many other problems, such as low bandwidth and unreliable scale factor. Additionally, the conventional Coriolis force detection method is very sensitive to asymmetries in the mechanical transducer because the rate signal is derived from only the sense axis. Parasitic coupling between the drive and sense axis introduces unwanted bias errors which could be rejected by a perfectly symmetric readout scheme. This project develops frequency modulated (FM) gyroscopes that overcome the above limitations. FM gyroscopes also promise to improve the power dissipation and drift of MEMS gyroscopes. We present results from a prototype FM gyroscope with integrated CMOS readout electronics demonstrating the principle.
Contact Information	mitchellk@berkeley.edu, izyumin@eecs.berkeley.edu, ycyeh@eecs.berkeley.edu, eminoglu@eecs.berkeley.e
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN665
Project Title	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) System Demonstrator: High Resolution FMCW LADAR
Status	Continuing
Funding Source	DARPA
Keywords	Photonics, LADAR, LIDAR, MEMS Tuning, EOPLL, Optoelectronics, Ranging
Researchers	Behnam Behroozpour, Niels Quack, Phillip Sandborn
Abstract	In recent years we have seen a growing demand for 3D cameras for applications such as gaming, entertainment, and autonomous vehicles. Present solutions suffer from high power dissipation and large size. This project leverages heterogeneous integration of standard CMOS electronics with high performance optical components including lasers, photo-diodes, interferometers and waveguides to reduce size, cost, and power dissipation.
Contact Information	behroozpour@berkeley.edu, quack@eecs.berkeley.edu
Advisor	Bernhard E. Boser, Ming C. Wu, Connie Chang-Hasnain, Eli Yablonovitch

 

Document Top Table of Projects	Microfluidics
Project ID	BPN733 New Project
Project Title	Single-Cell Culture and Analysis on an Optoelectronic Tweezers Platform
Status	New
Funding Source	BSAC Member Fees
Keywords	Optoelectronic tweezers, OET, single cell, single cell analysis
Researchers	Shao Ning Pei, Tiffany Dai
Abstract	In contrast to bulk analysis, analyzing biological samples on a single-cell level is a powerful tool in deriving a more complete, quantitative understanding of cellular behavior. The optoelectronic tweezers (OET) platform utilizes light-generated dielectrophoretic force to manipulate micro-scale objects reconfigurably on the device surface. Consequently, OET is able to select for individual cells and manipulate them into a specific configuration where these cells are cultured and studied for an extended period of time. Compared to trap-based single-cell techniques, the OET platform provides advantages such as specific selection of an individual cell and subsequent culturing over a larger-scale area at a particular address on the surface of the device. We are looking to apply the OET platform for long- term culture of single cells and gain useful insights into topics such as rate of proliferation, differentiation, and changes in morphology and protein expression.
Contact Information	shaoning@eecs.berkeley.edu
Advisor	Ming C. Wu, Song Li

 

Document Top Table of Projects	Microfluidics
Project ID	BPN552
Project Title	Light-Actuated Digital Microfluidics (Optoelectrowetting)
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Digital Microfluidics, Droplet Microfluidics, Electrowetting, Optoelectrowetting, EWOD, Optofluidics
Researchers	Shao Ning Pei
Abstract	The ability to quickly perform large numbers of chemical and biological reactions in parallel using low reagent volumes is a field well addressed by droplet-based digital microfluidics. Compared to continuous flow-based techniques, digital microfluidics offers the added advantages such as individual sample addressing and reagent isolation. We are developing a Light- Actuated Digital Microfluidics device (also known as optoelectrowetting) that optically manipulates nano- to micro-liter scale aqueous droplets on the device surface. The device possesses many advantages including ease of fabrication (no lithography required) and the ability for real-time, reconfigurable, large-scale droplets control (simply by altering the low-intensity projected light pattern). We hope to develop Light-Actuated Digital Microfluidics into a powerful platform for lab- on-a-chip (LOC) applications.
Contact Information	shaoning@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN751 New Project
Project Title	Large scale MEMS Silicon photonics Switch
Status	New
Funding Source	DARPA
Keywords	optical switch, large scale, fast, small footprint
Researchers	Sangyoon Han, Tae Joon Seok, Niels Quack
Abstract	Fast and large scale optical switch is demonstrated in this project. MEMS is integrated with Silicon photonics waveguides to actively route light. MEMS and Silicon photonics wavegudies are integrated in monotonically in SOI platform to make the fabrication easy and robust. We demonstrated 50x50 network with 2us switching time in a chip has area less than 1cmx1cm. Our near goal is to demonstrate scale larger than 200x200 with ~100ns switching time.
Contact Information	sangyoon@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN721
Project Title	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) Component Characterization
Status	Continuing
Funding Source	DARPA
Keywords	LADAR, optical phase-locked loop, silicon photonics, 3D integration,
Researchers	Phillip A.M. Sandborn, Behnam Behroozpour, Niels Quack, Sangyoon Han
Abstract	Active III-V photonic components and passive Si photonic circuits are integrated with CMOS electronic circuits to create an integrated optoelectronic phase-locked loop. The OPLL will be utilized to generate an optical linear frequency chirp for target detection and ranging. One goal of the project is to develop the ability to fabricate 3D-integrated devices on the wafer level. This requires proper device and module characterization and a deep understanding of the integration process as well as system feedback parameters. Many characterization methods are being been developed and used to constrain device and module design parameters and predict LADAR performance before and after integration processes.
Contact Information	sandborn@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN678
Project Title	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, CMOS, VCSEL, HCG, PIC, FMCW LADAR, photonics
Researchers	Niels Quack, Behnam Behroozpour, Sangyoon Han, Phillip Sandborn
Abstract	Active III-V photonic components and passive Si photonic circuits are integrated with CMOS electronic circuits in this project. The modular MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) platform will make use of the high performance of the individual components and integrate (1) MEMS tunable VCSEL with high-index-contrast grating (HCG) mirrors, (2) photodetectors, (3) Si photonic waveguides, couplers, and interferometers, (4) high-efficiency vertical optical coupler between III-V and Si waveguides, and (5) CMOS circuits for frequency control and temperature compensation. In order to demonstrate the capabilities of the proposed MEPHI platform, a frequency-modulated continuous-wave laser detection and ranging (FMCW LADAR) source is being developed.
Contact Information	quack@eecs.berkeley.edu, behroozpour@berkeley.edu
Advisor	Ming C. Wu, Bernhard E. Boser

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN651
Project Title	Low Power, Low noise Cavity Optomechanical Oscillators
Status	Continuing
Funding Source	DARPA
Keywords	Optomechanics, Radiation Pressure
Researchers	Alejandro J. Grine, Turker Beyazoglu, Niels Quack, Tristan Rocheleau
Abstract	Cavity optomechanics is a new and rapidly advancing field in which light is used to alter the properties of a mechanical element. Our project specifically aims to enhance mechanical motion by means of optical radiation pressure in a cavity of both high optical and mechanical quality factors. When enough light is built up in such a cavity, the mechanical self-oscillation results in precisely modulated light at the cavity output. Though there may be numerous applications for cavity optomechanics, we seek to use optomechanical oscillators as a replacement for power-hungry microwave oscillators in chip scale atomic clocks. This work focuses on the RF photonic experimentation necessary to characterize and improve microfabricated optomechanical devices for the target application which requires a low phase noise optical carrier oscillator capable of operating at 3GHz.
Contact Information	grine@eecs.berkeley.edu
Advisor	Ming C. Wu, Clark T.-C. Nguyen

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN458
Project Title	Optical Antenna-Based nanoLED
Status	Continuing
Funding Source	Federal
Keywords	Plasmonics, Laser, Light Emitting Diode, Nanophotonics, Nanocavity, Optical Interconnects
Researchers	Michael Eggleston, Seth Fortuna
Abstract	Spontaneous emission has been considered slower and weaker than stimulated emission. As a result, light-emitting diodes (LEDs) have only been used in applications with bandwidth < 1 GHz. Spontaneous emission is inefficient because the radiating dipole is much smaller than wavelength and such short dipoles are poor radiators. By attaching an optical antenna to the radiating dipole at the nanoscale, the emission rate can be significantly increased enabling high modulation bandwidths theoretically >100 GHz. This project focuses on the physical demonstration of this new type of nanophotonic device. Current fabrication and experimental results of waveguide-coupled devices will be presented.
Contact Information	eggles@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN703
Project Title	Directly Modulated High-Speed nanoLED Utilizing Optical Antenna Enhanced Light Emission
Status	Continuing
Funding Source	Federal
Keywords	nano-photonics, optical antenna, photonics, optical interconnect, nanotechnology, optoelectronics, plasmonics
Researchers	Seth A. Fortuna, Michael Eggleston
Abstract	Coupling an optical antenna to a nanoscale light emitter has been shown to increase the spontaneous emission rate by compensating for the large size mismatch between the emitter and emission wavelength. This spontaneous emission rate enhancement has been predicted to be as large as several orders of magnitude, easily surpassing the stimulated emission rate and enabling high direct modulation bandwidths. The aim of this project is to utilize this concept to demonstrate a directly modulated nanoscale semiconductor light emitting diode (nanoLED) with modulation speeds in excess of 10s of GHz, exceeding the bandwidth of semiconductor lasers. Unlike lasers, such nanoLEDs are also inherently low-power and do not require minimum threshold current density for operation and are therefore a promising light generating source for use, for example, in intra-chip communication.
Contact Information	fortuna@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN609
Project Title	Ultra-compact photodetectors on Silicon photonics
Status	Continuing
Funding Source	Industry
Keywords	phototransistor, silicon photonics, metal-optics
Researchers	Ryan Going, Tae Joon Seok
Abstract	As CMOS devices shrink in physical size, electrical interconnects between the devices will consume an ever-greater proportion of total chip power. A promising solution is to use silicon photonics for intra- and inter-chip communications. To be cost effective, both the optical transmitter and receiver should be made small, highly efficient, and CMOS compatible. Shrinking the photodiode will increase sensitivity and energy efficiency, but as it gets very small, the capacitance of the wire to the first amplifying stage in the receiver becomes significant. We present a solution which integrates the photodiode and first stage transistor in the form of an integrated germanium gate photoMOSFET. The rapid melt growth technique is used to integrate high quality single crystal germanium onto a silicon waveguide integrated device in a CMOS process. Due to the high quality of the germanium, the responsivity of the photoMOSFETs can be driven to over 10 A/W at 1550nm. Further scaling of these devices is possible only if the reduced absorption from a small size is addressed. Electromagnetic simulations describe a highly efficient metal-optic cavity, supporting efficient absorption in sub-fF scale devices.
Contact Information	rwgoing@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	Microfluidics
Project ID	BPN732 New Project
Project Title	The Role of Erythrocyte Size and Shape in Microchannel Fluid Dynamics
Status	New
Funding Source	NSF
Keywords
Researchers	Kathryn Fink, Karthik Prasad
Abstract	The unique properties of blood flow in microchannels have been studied for nearly a century; much of the observed blood-specific dynamics is attributed to the biconcave shape of red blood cells. However, for almost twice as long biologists have observed and characterized the differences in the size and shape of red blood cells among vertebrates. With a few exceptions, mammals share the denucleated biconcave shape of erythrocytes but vary in size; oviparous vertebrates have nucleated ovoid red blood cells with size variations of a full order of magnitude. We utilize micro-PIV and pressure drop measurements to analyze blood flow of vertebrate species in microchannels, with a focus on understanding how cell size and shape alter the cell-free layer and velocity profile of whole blood. The results offer insight into the Fahraeus-Lindqvist effect and the selection of animal blood for the design and evaluation of biological microfluidic devices.
Contact Information	kdfink@berkeley.edu, liepmann@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Microfluidics
Project ID	BPN621
Project Title	Microfluidic Separation of Blood for SIMBAS Biosensor
Status	Continuing
Funding Source	NSF
Keywords
Researchers	Kathryn Fink
Abstract	The goal of this research is to characterize and optimize a continuous-flow, blood fractionation platform using particle image velocimetry to analyze the critical operating parameters. The microfluidic system will separate from a blood sample a platelet-enriched plasma containing pathogens and pathogenic biomarkers. It will also provide a stream of concentrated blood cells including pathogenic plasmodial cells. The project supports the development of a Universal Sample Preparation and Pre-Concentration (USB) module for the SIMBAS project.
Contact Information	kdfink@berkeley.edu, kdfink@gmail.com
Advisor	Dorian Liepmann

 

Document Top Table of Projects	BioMEMS
Project ID	BPN729
Project Title	Functional Plastic Microstructures Fabricated Using Electroplating and Hot Embossing
Status	New
Funding Source	BSAC Member Fees
Keywords
Researchers	Jacobo Paredes, Kathryn Fink
Abstract	The overall goal of this research is the development of fabrication techniques for simple, cheap, and rapid creation of plastic or polymer based microfluidic devices. Currently microfluidic systems are made using PDMS because it is ideal for rapid laboratory research. However, PDMS is not an ideal material for commercialization because of its material and chemical properties especially for any applications that require hydrophilic compounds. Our long-term goals are to further explore the potential of hot-embossed microscale devices as platforms for complete BioMEMS devices. This includes the integration of flow diagnostic elements and silicon-based biosensors.
Contact Information	jparedes@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Microfluidics
Project ID	BPN711
Project Title	Point-of-Care System for Quantitative Measurements of Blood Analytes Using Graphene-Based Sensors
Status	New
Funding Source	NSF
Keywords	Biosensor, healthcare, graphene, microfluidics
Researchers	Jacobo Paredes, Kathryn Fink
Abstract	Serum glucose, cholesterol, triglyceride and HbA1C monitoring are all valuable tools in the health management of the aging population, especially given the increase in diabetes and cardiovascular diseases. Even for glucose monitoring, the challenges obtaining sufficiently accurate and reliable measurements are so significant that the FDA is contemplating more stringent standards. Guido Freckmann, et al., J. Diabetes Sci. Tech. 6, 1060-1075, 2012, have compared 43 blood glucose self-monitoring systems. Out of this, 34 systems were completely assessed and 27 (79.4%) systems fulfilled the minimal accuracy requirements and only 18 (52.9%) of 34 systems fulfilled the requirements of the proposed tighter criteria in the current standards draft. None of them meet the even more stringent requirement of ISO 2012 and FDA. Because inaccurate systems bear the risk of false therapeutic decisions and rising health care costs, there is an urgent need for significantly enhanced BG monitoring systems for PC applications. POC tests for other biomedically important analytes are generally even less accurate. The overall goal of the proposed research is to develop new sensor platforms that will provide increased sensitivity and accuracy in point-of-care situations. This is a joint project with Harvard Medical School and Vanderbilt University.
Contact Information	liepmann@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	BioMEMS
Project ID	BPN622
Project Title	Design of an Ex-vivo Prototype of a Bioartificial Kidney
Status	Continuing
Funding Source	Fellowship
Keywords	Microfluidics, BioMEMS, Artificial Kidney, Medical Devices
Researchers	Peter Soler
Abstract	The goal of this project is to design, fabricate, and study a bioartificial kidney. The motivation behind the project is to further the development toward an implantable bioartificial human kidney that will improve quality of life and reduce cost for end stage renal disease (ESRD) patients. My proposed device contains two units: i) a hemofilter based upon nanoporous silicon membranes, and ii) a bioreactor composed of kidney proximal tubule (PT) cells. The focus of my study is to develop a device design that is optimized for adequate mass transport so as to mimic natural kidney function. The Roy group has pioneered work in membranes that have been engineered with the use of silicon- based microfabrication techniques to attain pore slits with a height of 8-11 nm. The fabricated nanoporous membranes allow for a device with tight pore size distribution, complete immunoisolation, and durability. These are critical membrane specifications that make them well suited for this application.
Contact Information	soler@berkeley.edu
Advisor	Dorian Liepmann, Shuvo Roy

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN687
Project Title	QES: Robust Optical Flame Detection in Harsh Environments
Status	Continuing
Funding Source	Industry
Keywords	UV sensor
Researchers	Kaiyuan Yao
Abstract	The goal of this project is to create a UV sensor for use as a flame detection system in gas turbine engine applications. In many gas-turbine engines, unnecessary engine shutdowns arise from sensors failing to detect the engine flame because of deep films of oil and/or water that block the sensor. In the infrared- and visible-light regions of the optical spectrum there is limited penetration through oil/water mixtures. A UV sensor is to be designed that will be able to robustly detect flames through oil/water mixtures that may build up on lenses in the gas turbine engine. For this purpose, we're exploring difference device possibilities based on ZnO nanowires, graphene, diamond, etc.
Contact Information	pencilyao@gmail.com
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN736 New Project
Project Title	Atomic Layer Deposition Ruthenium Oxide-Carbon Nanotube Electrodes for Supercapacitor Applications
Status	New
Funding Source	Industry
Keywords	Atomic layer deposition, supercapacitor, energy storage
Researchers	Roseanne H. Warren, Alina Kozinda
Abstract	This work presents the first demonstration of atomic layer deposition (ALD) ruthenium oxide (RuO2) and its conformal coating onto vertically aligned carbon nanotube (CNT) forests as supercapacitor electrodes. Specific accomplishments include: (1) successful demonstration of ALD RuO2 deposition, (2) uniform coating of RuO2 on a vertically aligned CNT forest, and (3) an ultra-high specific capacitance of 100 mF/cm2 from prototype electrodes with a scan rate of 100 mV/s. Advantages of the ALD method include precise control of the RuO2 layer thickness and composition without the use of CNT- binder molecules. In addition to high capacitance, preliminary results indicate that the ALD RuO2- CNTs have good stability over repeated cycling. Besides its use in supercapacitors, ALD-RuO2 has potential NEMS applications: in biosensors and pH sensing, as a strong oxidative material in multiple chemical processes, and in catalytic reactions for photocatalytic systems.
Contact Information	warrenr@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN672
Project Title	Solar Hydrogen Production by Photocatalytic Water Splitting
Status	Continuing
Funding Source	KAUST
Keywords	Solar energy, photocatalysis, titanium dioxide, nanostructures
Researchers	Roseanne H. Warren
Abstract	Photocatalytic water splitting is the process of converting water into hydrogen and oxygen with solar energy using a photocatalytic material. When light is absorbed by the photocatalyst, an electron-hole pair is generated that interacts with water molecules in a surface reduction- oxidation reaction to decompose the water into hydrogen and oxygen. One of the greatest challenges in photocatalysis is engineering the photocatalytic material for high conversion efficiency and wide absorption spectrum in the visible light range. Metal oxide nanomaterials have demonstrated promising capabilities as photocatalysts due to their high surface area-to- volume ratios, ability to be densely grown at large scales, cost-effectiveness, and stability in water. This project aims to improve the performance of metal oxide nanomaterials for water splitting, in particular TiO2 nanowires and TiO2-coated carbon nanotubes, using innovative growth processes, co-catalytic materials, and band-gap manipulation.
Contact Information	warrenr@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Micropower
Project ID	BPN737 New Project
Project Title	Stackable Microliter-Scale Microbial Fuel Cells for Low Power Output Applications
Status	New
Funding Source	BSAC Member Fees
Keywords
Researchers	Vishnu Jayaprakash, Ryan D. Sochol, Roseanne Warren, Kosuke Iwai, Casey Glick
Abstract	Microbial fuel cells (MFCs) are energy harvesters that use the anaerobic respiration of micro- organisms to generate electricity. With the increase in demand for micro-scale, low power output energy harvesters over the last five years, microliter-scale microbial fuel cells (�MFCs) have received a great deal of scientific interest. Previously, researchers have operated these fuel cells under controlled anodic conditions to attain high current densities and columbic efficiencies. However, relatively low power outputs, inadequate working potentials, complex fabrication processes and tedious operating techniques have limited �MFCs from implementation in practical applications. To improve such performance and enhance the practicality of these fuel cells, this project presents new fuel cell architectures, electrode materials, fabrication techniques and operating procedures.
Contact Information	soorse@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Micropower
Project ID	BPN742 New Project
Project Title	3D Carbon-based Materials for Electrochemical Applications
Status	New
Funding Source	BSAC Member Fees
Keywords
Researchers	Xining Zang
Abstract	Carbon-based materials such as CNT (1D) and graphene (2D) have been widely studied as electrode materials in various applications, including sensing, catalyst and energy storage. The extraordinary properties of these carbon-based materials provide possible advantages in reduced reaction potential, low surface fouling, and large surface area. This project aims to investigate possible combination of the 1D and 2D carbon-based materials in the form of 3D structures. The possible new structure could exhibit the following desirable characteristics: 1) conformal deposition with ordered 3D CNT/graphene structures; 2) high surface area with active surfaces; 3) feasibility of embedding other catalysts for electrochemical reactions. The long term goals are to optimize the 3D graphene/CNT materials both structurally and functionally for applications in electrochemical sensors, catalysts, and energy storage devices.
Contact Information	xining.zang.me@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN743 New Project
Project Title	Highly Responsible Curved pMUTs
Status	New
Funding Source	BSAC Member Fees
Keywords
Researchers	Sina Akhbari
Abstract	Ultrasonic imaging is one of the most important and widely used medical imaging techniques, which uses high-frequency sound waves to view soft tissues such as muscles, internal organs as well as blood flowing through blood vessels in real time. With the advancement of microelectromechanical systems (MEMS), ultrasonic devices operated based on plate flexural mode have shown remarkable improvements in bandwidth, cost, and yield over the conventional thickness-mode PZT sensors. MEMS fabrication technologies can be utilized to realize both capacitive (cMUTs) and piezoelectric (pMUTs) micromachined ultrasonic transducers However, these devices could enjoy much more widespread applications if they were adjustable, better focused with lower energy requirements. This project aims to highly responsive pMUTs based on CMOS compatible fabrication processes with the potential to replace the plate-based pMUTs for high electromechanical coupling ultrasonic transducer arrays for applications in fingerprint IDs, body movement sensors, and hand-held medical imagers
Contact Information	sina.akhbari68@gmail.com
Advisor	Liwei Lin

 

Document Top Table of Projects	BioMEMS
Project ID	BPN715
Project Title	Stimuli Responsive Capsules for Drug Delivery and Diagnostic Applications
Status	Continuing
Funding Source	KAUST
Keywords	Core-Shell Particles, Smart Capsules, Stimuli Responsive Capsules, Drug Delivery, Diagnostics
Researchers	Fatemeh Nazly Pirmoradi, Kosuke Iwai
Abstract	Particulate-based vaccines offer a safer alternative to traditional organism-based vaccines; however, their effectiveness to provoke immune response largely depends on the micro/nanodelivery systems carrying the antigen. In this project, we introduce a new class of functional microcapsules that offer the potential to not only overcome a number of hurdles associated with current particulate vaccine manufacturing technology (e.g., exposure of antigens to organic solvents or degradation during encapsulation), but also enable new functionalities for transporting the microcapsules and releasing their contents on-demand.
Contact Information	pirmoradi@berkeley.edu, k.iwai@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN574
Project Title	On-Chip Micro-Inductor
Status	Continuing
Funding Source	Industry
Keywords	Inductor, On-Chip, RF
Researchers	Kisik Koh
Abstract	On-chip inductors are key passive elements to high-power and radio frequency (RF) integrated circuits (ICs). This project aims to realize super-compact on-chip micro-inductor with magnetic media for high-power and RF IC's, including: 1) to explore low-loss, high resonance frequency magnetic material for inductor application; 2) to develop magnetic-material integration process; 3) to realize the super-compact magnetic-embedded inductor. The long-term objectives for this project are to resolve the current problem of lacking compact-size high-performance on-chip inductors, and then reduces the whole circuit cost significantly and helps the practical realization of RF systems-on-a- chip (SoCs) for real-world applications.
Contact Information	kskoh@berkeley.edu, lwlin@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	BioMEMS
Project ID	BPN473
Project Title	Next-Generation Microfluidic Components, Circuits and Systems
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Microparticles, Lab-on-a-chip, Microbeads, Dynamic Microarrays, Cells, Optofluidic Lithography, 3D printing
Researchers	Ryan D. Sochol
Abstract	Mechanical engineering methods and microfabrication techniques offer powerful means for solving biological challenges. In particular, microfabrication processes enable researchers to develop technologies at scales that are biologically relevant and advantageous for executing biochemical reactions. Here, microfluidic, optofluidic, an 3D printing-based methodologies are employed to develop autonomous microfluidic components, circuits, and systems for chemical and biological applications.
Contact Information	rsochol@me.berkeley.edu,
Advisor	Liwei Lin, Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN706
Project Title	Single-Layer Microfluidic Gain Valves via Optofluidic Lithography
Status	New
Funding Source	Fellowship
Keywords	microfluidic, gain, valve
Researchers	Casey C. Glick, Ryan D. Sochol, Christopher Deeble, Ki Tae Wolf, Vishnu Jayaprakash, Kosuke Iwai
Abstract	This project aims to create single-layer microfluidic gain valves for use in microfluidic devices. Autonomous microfluidic devices are essential for the long-term development of versatile biological and chemical platforms; however, the challenges of creating effective control mechanisms � e.g., the need for variable pressure sources, signal degradation in cascaded devices, and multi-stage manufacture methods � have proven considerable. Using in situ optofluidic lithography, we develop a single-layer pressure-based valve system with a static gain greater than unity. We will demonstrate the device in several microfluidic circuits, including logic gates and amplifiers. These pressure gain-based systems will enable microfluidic devices with a wide range of applications, such as flow rectifiers, oscillators, and high-precision pressure measurements. Due to ease of manufacture and design flexibility, this valve design could have widespread Lab-on- a-Chip applications by enabling self-regulation of microfluidic devices.
Contact Information	cglick@berkeley.edu, rsochol@gmail.com, k.iwai@berkeley.edu, lwlin@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Microfluidics
Project ID	BPN586
Project Title	Integrated Finger-Powered Microfluidic Pumps for Point-of-Care Diagnostics
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Micropump, Microfluidics, Point-of-care Diagnostics, Lab-on-a-chip
Researchers	Kosuke Iwai, Ryan D. Sochol
Abstract	This project aims for developing a new 'human-powered' microfluidic system for point-of-care diagnostics applications. Chip- based microfluidics offers a promising platform for biological studies; however, bulky and expensive equipments such as syringe pumps limit the application. To minimize the total setup, we propose an alternative 'human-powered' fluid pumping device. Pressure generated by human finger works as a major power source to pump fluids into microfluidic devices without any electricity. As we use common softlithography fabrication process, our system can be easily integrated with existing microfluidic systems such as microdroplet generator or cell encapsulating system. In addition, it is possible, in the future, to apply injection molding to significantly reduce the cost for industrial applications. Our portable, easy-to-operate system offers an effective method for pumping fluid into microfluidic devices for expanding biological applications such as drug screening or point-of-care diagnostics.
Contact Information	k.iwai@berkeley.edu, rsochol@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Microfluidics
Project ID	BPN702
Project Title	A Continuous-Flow Microdroplets Lysis System
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Railing, Continuous Flow, Microdroplets, Lab-on-a Chip
Researchers	Kosuke Iwai, Ryan D. Sochol
Abstract	This Project aims for developing a versatile continuous-flow system for lysing microdroplet. Microdroplets have been widely utilized in diverse chemical and biological research and applications such as DNA sequencing or nanoparticle synthesis. Although highly robust and easy handling techniques of droplets are essential for those purposes, difficulties still remain in retrieving inner contents (e.g. cells, microbeads, biomolecules, reagents) of droplets for further experiments. Here we present a novel microfluidic system to achieve three distinctive accomplishments: (i) guiding droplets between different phase flows, oil flow and water flow, (ii) rapid washing process of surfactant on droplets, and (iii) quick and easy lysing of droplets and releasing their contents into water flow. The presented system offers a high-throughput method to wash and water-in-oil droplets for expanding droplet-based applications.
Contact Information	k.iwai@berkeley.edu, rsochol@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	BioMEMS
Project ID	BPN438
Project Title	Microengineered Technologies for Controlling Cellular Functions
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	cell migration, cell motility, cell locomotion, BAECs, microtopography, Durotaxis, Anisotropy, Elliptical, Mechanotaxis, Spatiotaxis, MicroSprings, Microposts, Micropillars, 3D printing
Researchers	Ryan D. Sochol
Abstract	Mechanical engineering methods and microfabrication techniques offer powerful means for solving biological challenges. In particular, micro/nanofabrication processes enable researchers to engineer technologies at scales that are biologically relevant and advantageous for both controlling and sensing cellular functions. Here, novel micro/nanoengineered platforms are employed to investigate and regulate cellular processes.
Contact Information	rsochol@me.berkeley.edu
Advisor	Liwei Lin, Song Li

 

Document Top Table of Projects	BioMEMS
Project ID	BPN675
Project Title	Implantable Micro Drug Delivery System
Status	Continuing
Funding Source	KAUST
Keywords	Drug delivery, implantable, magnetic membrane, controlled delivery, external actuation, on-demand delivery
Researchers	Fatemeh Nazly Pirmoradi, Chen Yang
Abstract	Implantable drug delivery devices that allow for remote, repeatable, and reliable drug delivery are expected to greatly improve the efficacy of medical treatments in the near future. However, few delivery systems to date have met the necessary requirements � sufficient drug storage, precision control over drug delivery, and on-demand activation � to be broadly useful. In this project, we develop an implantable drug delivery device that can be remotely controlled and provide drug on the on- demand basis for several years without replacement. We develop drug release mechanisms and nanomaterials, and incorporate all the components into a biocompatible system by establishing new fabrication methods. These devices are characterized by conducting in vitro, ex vivo, and in vivo studies.
Contact Information	pirmoradi@berkeley.edu, nazly_p@yahoo.com, chenyang@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN708
Project Title	Direct-Write Graphene Channel Field Effect with Self-Aligned Top Gate
Status	Continuing
Funding Source	NSF
Keywords	Near Field Electrospinning, Graphene Transistor, Top Gate, Self Alignment
Researchers	Yumeng Liu
Abstract	The project amis at using Near Field Electrospinnin to fabricate top gate graphene transistor that is capable to pattern the source and drain electrodes through a self-alignment process, and the long range goals is to direct writing graphene transistors onto flexible and transparent substrate for low cost circuit applications, say RF mixer. As the conventional top gated device fabrication process often introduces the deposition of thin inorganic dielectric onto graphene layer with extra surface functionalizations, leading to an undesired damage of graphene lattice, or a non-ideal device geometry with excessive serial resistance or parasitic capacitance, here we investigate a self-aligned top gate graphene transistor process that could address those challenges by directly writing organic gate dielectrics onto graphene channel and precisely position the source, drain and gate electrode by self-alignment without significant overlappings or gaps between electrodes.
Contact Information	yumengliu@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN606
Project Title	Carbon Nanotube Films for Energy Storage Applications
Status	Continuing
Funding Source	Federal
Keywords	Carbon Nanotube, Supercapacitor, Energy Storage, Flexible
Researchers	Alina Kozinda
Abstract	As energy demands continue to rise, it becomes imperative to develop efficient energy storage devices with high energy and power density. At the same time, the space inside devices continues to shrink, making energy storage devices which possess not only high energy/power density, but also an adjustable shape to fit into various form factors an ideal solution. Energy storage devices made from flexible electrodes are attractive in a roll-up or surface-conformed format to minimize space usage. A mechanically flexible CNT supercapacitor electrode is demonstrated, as well as a lithium-ion battery electrode using a high-surface area silicon-conformally-coated CNT forest. The CNT supercapacitor electrode is demonstrated using a water solution-assisted film lift-off and densification process. This electrode exhibits the following three features: (1) each CNT has a natural contact to its as- fabricated current-collecting metal layer; (2) the CNTs and the bottom metal layer are intact during the water-assisted lift-off process; and (3) the in-situ liquid evaporation and densification process naturally occurs to dramatically increase volumetric energy density. Because of the ability of the film to be lifted off of its original growth substrate, the application for same-chip CMOS energy storage devices is feasible. In addition, this flexible CNT supercapacitor electrode has the potential to conform to various surfaces, as well as to be implemented in devices which are required to bend with use, such as in roll-up electronics.
Contact Information	kozinda@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN424
Project Title	Silicon Carbide Technology for Harsh Environment Sensing and Energy Applications
Status	Continuing
Funding Source	DARPA
Keywords	Silicon Carbide, LPCVD, Nanowires, RF MEMS, Harsh Environment, Supercapacitors
Researchers	Shuang Wang, Candy Chang, Lunet Luna, Steve Chen
Abstract	Silicon Carbide (SiC) is a material of interest to fabricate sensors and actuators able to operate in harsh environments. Particularly, its mechanical and electrical stability and its chemical inertness make SiC well suited for designing devices capable of operation in high temperature and corrosive environments. Harsh-environment stable metallization remains one of the key challenges with SiC technology. We are developing novel metallization schemes, utilizing solid- state graphitization, to improve the long term reliability of metal/SiC contacts in high temperature environemnts. In addition, strategies to integrate on-chip energy storage with SiC sensors and actuators could increase the portability, mobility, and utility of these harsh environment devices. Our group is currently developing all-solid state supercapacitors based on yttria-stabilized zirconia (YSZ) or ionogel solid electrolytes, and SiC nanowire- or carbon-based electrodes. We are developing methods for conformal deposition of YSZ. We also are studying different types of ionogels, which maintain the electrochemical properties of ionic liquids and can be easily shaped for the desired applications. The ionogels have been demonstrated as an effective solid-state electrolyte material with good mechanical compliance and a large electrochemical window. Combination of electrode materials with high surface area and these solid-state electrolyte materials can be potentially used for harsh environment sensing and energy applications.
Contact Information	lunet@berkeley.edu, mingchen1993@gmail.com, maboudia@berkeley.edu,carraro@berkeley.edu
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN738 New Project
Project Title	Sensor instrumentation to improve safety of U. S. underground coal mines
Status	New
Funding Source	Federal
Keywords	coal mine, wireless sensor network, sensing inertness, data rate, power supply
Researchers	Pit Pillatsch
Abstract	Coal mining is recognized as a dangerous undertaking. Explosions of gases that may exist underground (such as methane) and of fine coal dust mixed with air are well-known hazards, in addition to which are unexpected structural collapses. This project is aimed at creating real-time sensors to determine the "inertness" of the mine atmosphere, and communication of the information from inside the mine to safety personnel.
Contact Information	paprotny@uic.edu, rwhite@eecs.berkeley.edu, pwright@me.berkeley.edu, p.pillatsch10@imperial.ac.uk :
Advisor	Igor Paprotny, Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN392
Project Title	Mobile Airborne Particulate Matter Monitor for Cellular Deployment
Status	Continuing
Funding Source	Industry
Keywords	MEMS, Wireless, Particulates, Sensor, Mobile
Researchers	Ben Gould
Abstract	This project involves optimization of a portable MEMS-based instrument that quantifies and differentiates fine airborne particulate matter concentrations of such substances as diesel engine exhaust, environmental tobacco smoke, and wood smoke. The goal of the project is integration with and interfacing of the instrument to a cellular telephone for mobile monitoring.
Contact Information	rwhite@eecs.berkeley.edu, paprotny@uic.edu, lagundel@lbl.gov, bgould@lbl.gov
Advisor	Richard M. White, Lara Gundel, Igor Paprotny

 

Document Top Table of Projects	Micropower
Project ID	BPN562
Project Title	AC Energy Scavenging for Smart Grid Sensing
Status	Continuing
Funding Source	Industry
Keywords
Researchers	Son Duy Nguyen, Richard Xu, Chris Sherman
Abstract	The goal of this project is to devise small, inexpensive modules for indoor or outdoor deployment that sense electrical variables on, and scavenge energy from, energized conductors such as appliance cords and the conductors on high-voltage power transmission lines and equipment. In addition to an energy scavenging element, the modules will contain sensors, their associated signal conditioning circuitry, power conditioning and storage elements, and a wireless radio and antenna. We have recently demonstrated the ability to scavenge 2mW from a nearby conductor carrying 20 Arms, which is 10-100x more than can be extracted using comparable coil-based approaches.
Contact Information	rwhite@eecs.berkeley.edu, igorpapa@eecs.berkeley.edu, qlxu@berkeley.edu, nguyen.duyson@berkeley.edu,
Advisor	Richard M. White, Igor Paprotny

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN697
Project Title	Natural Gas Pipeline Research
Status	Continuing
Funding Source	State
Keywords	Gas, pipeline, sensor, pressure, flow, vibration, methane, wireless, ultrasonic, laser, weld, crack
Researchers	Son Duy Nguyen
Abstract	The goal is to develop technologies for natural gas pipelines that provide increased system awareness and reliability, lower system costs, better assessment of pipeline integrity, and provide tangible benefits for utility customers. The benefits sought are natural gas pipelines that are more reliable, efficient, and secure. The BSAC research can be divided into three areas: 1. Microfabricated MEMS natural gas sensors 2. Low-power wireless sensor communication infrastructure 3. Ultrasonic diagnostic and test devices for natural gas pipelines.
Contact Information	igorpapa@eecs.berkeley.edu, rwhite@eecs.berkeley.edu, nguyen.duyson@berkeley.edu
Advisor	Richard M. White, Paul K. Wright, Igor Paprotny

 

Document Top Table of Projects	Micropower
Project ID	BPN654
Project Title	Electret-Based Voltage Sensing and Energy Harvesting from Energized Conductors
Status	Continuing
Funding Source	State
Keywords	Electret, voltage sensor, energy harvester, energized conductors, Smart Grid, Demand Response
Researchers	Richard Xu
Abstract	The goal of this project is to design and fabricate electret-based voltage sensors and energy harvesters for Smart Grid and Demand Response applications. The functions of the proposed devices are to sense the voltage variation and harvest energy from energized conductors such as appliance cords and high-voltage power transmission lines and equipment.
Contact Information	rwhite@eecs.berkeley.edu, qlxu@berkeley.edu, igorpapa@eecs.berkeley.edu,
Advisor	Richard M. White, Paul K. Wright, Igor Paprotny

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN505
Project Title	Deployment of Wireless Stick-On Circuit Breaker PEM AC Sensors for the Smart Grid
Status	Continuing
Funding Source	State
Keywords	Power; Passive Proximity Electric Sensors; MEMS; Wireless; Energy Scavenging
Researchers	Richard Xu
Abstract	The electric power consumption of the entire Berkeley campus ranges from 18MW to 30MW,of which Cory Hall, the Electrical Engineering building, comprises from 3% to 5%. Presently, the power entering the building is metered monthly at the primary terminals of its 12.4 kilovolt distribution step-down transformer. In order to increase energy efficiency and to experiment with, and further develop, our miniature electrical sensors, we are in the process of installing proximity sub-metering of loads accessed through a standard circuit breaker panel to which miniature proximity-based current sensors have been attached. We have made a two-minute video, available from the BSAC website, demonstrating the sensors in action.
Contact Information	rwhite@eecs.berkeley.edu,qlxu@berkeley.edu, igorpapa@eecs.berkeley.edu,paprotny@uic.edu
Advisor	Richard M. White, Paul K. Wright, Igor Paprotny

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN746 New Project
Project Title	Liquid Heterojunction Sensors
Status	New
Funding Source	NSF
Keywords	Microfluidics, flexible, sensor, hetero-junction
Researchers	Kevin Chen, Hiroki Ota
Abstract	In recent years, mechanically deformable devices and sensors have been widely explored for various applications such as paper-thin displays and electronic skin for prosthetics and robotics. Liquids are extremely deformable and have shown promise for these applications, with previous works demonstrating pressure sensors with the ability to be stretched by up to 250% before failure. However, current technology is limited to a single liquid material as liquids tend to intermix when placed together, limiting the range of sensors that can be achieved. Here, in this work, we show a new concept for a liquid-liquid �hetero-junction� temperature sensor with liquid InGaSn metal as a passive interconnect and an imidazolium based ionic liquid as the active sensing element. By proper choice of liquids and design of the liquid-liquid interface, we are able to prevent the liquids from mixing, leading to exciting prospects for more complex liquid based flexible electronics.
Contact Information	kqchen@eecs.berkeley.edu, hiroki.ota@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN747 New Project
Project Title	Fully Printed High Performance Flexible Electronics
Status	New
Funding Source	NSF
Keywords	Flexible, printed electronics, thin film transistor
Researchers	Kevin Chen
Abstract	A flexible sensor network able to conform to nonplanar surfaces is very important for such applications as prosthetics and large area touch panels. In many of these applications, an extremely large coverage area is necessary, making traditional fabrication methods such as photolithography and even shadow mask technology unfeasible approaches. In this project, we aim to solve this problem by creating flexible sensor networks via gravure printing technology. Carbon nanotubes are solution deposited onto a polyethylene terephthalate (PET) substrate upon which source/drain, gate dielectric, and gate metal are aligned and printed on using a plate to roll reverse gravure printer. Using this method, which can be easily transferred to a large scale roll to roll printing setup, we are able to achieve high performance thin film transistors (TFT) with mobilities of up to 9 cm2/Vs, the highest recorded for a fully printed TFT. Additionally, we are able to obtain yields of over 90% in an ambient environment outside of a clean room. Various sensors can then be integrated into the active matrix backplane to achieve a fully printed flexible sensor network.
Contact Information	kqchen@eecs.berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN698
Project Title	Multifunctional Electronic Skin
Status	Continuing
Funding Source	NSF
Keywords	Sensors, Flexible, Nanomaterials,
Researchers	Kevin Chen
Abstract	Flexible sensor networks have promising applications in fields such as touch sensors for touch sensitive prosthetics and wearable medical diagnosis devices. In this project, we aim to fabricate a multifunctional �e-skin� capable of detecting multiple forms of stimuli including light and pressure, so as to be able to mimic the human skin and beyond. Polyimide is spun onto a silicon wafer upon which traditional CMOS technology is used to fabricate flexible thin film transistors based on solution deposited carbon nanotube networks. Various types of sensors are then integrated to create a 16�16 sensor network array. After fabrication, the e-skin can be easily delaminated from the silicon wafer and both pressure and light can then be mapped out by attaching the flexible e-skin to a readout board via a flexible PCB board.
Contact Information	kqchen@eecs.berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN748 New Project
Project Title	Highly-sensitive electronic-whiskers based on patterned carbon nanotube and silver nanoparticle composite films
Status	New
Funding Source	DARPA
Keywords	Electronic whiskers, composites
Researchers	Zhibin Yu
Abstract	Mammalian whiskers present an important class of tactile sensors that complement the functionalities of skin for detecting wind with high sensitivity and navigation around local obstacles. Here, we developed electronic whiskers based on highly tunable composite films of carbon nanotubes and silver nanoparticles that are patterned on high-aspect ratio elastic fibers. The nanotubes form a conductive network matrix with excellent bendability, while nanoparticle loading enhances the conductivity and endows the composite with high strain sensitivity. The resistivity of the composites is highly sensitive to strain with a pressure sensitivity of up to ~8 %/Pa for the whiskers, which is >10� higher than all previously reported capacitive or resistive pressure sensors.
Contact Information	yuzhibin@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN752 New Project
Project Title	Highly Efficient and Stable Photocathode for Solar Hydrogen Production
Status	New
Funding Source	Federal
Keywords	Solar water splitting, hydrogen fuel, thin film
Researchers	Yongjing Lin, Corsin Battaglia, Joel W. Ager
Abstract	Solar hydrogen production by photoelectrochemical water splitting holds great promise for efficient solar energy harvesting and storage. To achieve spontaneous water splitting, developing efficient photoelectrodes with both high photovoltage and high photocurrent is highly desirable. However, current studied photocathodes such as p-Si, p-Cu2O and p-GaP have photovoltage lower than half of 1.23 V, the minimum voltage required for water splitting. To overcome these challenges, we are currently developing a photocathode using amorphous Si thin film with TiO2 encapsulation layer for efficient solar hydrogen production. With platinum as catalyst, a photocurrent onset potential of 0.93 V vs reversible hydrogen electrode potential and saturation photocurrent of 11.6 mA/cm2 are measured. This low-cost photocathode with high photo-voltage and current is a highly promising candidate for future tandem water splitting cells.
Contact Information	linyj632@gmail.com
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN755 New Project
Project Title	Carrier selective oxide contacts for silicon electronics
Status	New
Funding Source	Federal
Keywords	silicon, oxides, solar cells, sensors, transistors
Researchers	Corsin Battaglia, Xingtian Yin, Steven Chuang, Thomas Rembert, Hiroshi Shiraki
Abstract	Efficient carrier selective contacts are key to electronic devices based on silicon including sensors, microelectromechanical systems, field effect transistors and photovoltaics. We explore substoichiometric molybdenum trioxide (MoOx, x<3) as a dopant-free, hole-selective contact for silicon. As a proof of principle, we demonstrate a silicon solar cell with a MoOx hole contact delivering a high open-circuit voltage of 711 mV and a power conversion efficiency of 18.8%. Due to the wide band gap of MoOx, we observe a substantial gain in photocurrent of 1.9 mA/cm2 in the ultraviolet and visible part of the solar spectrum, when compared to a p-type hydrogenated amorphous silicon emitter of a traditional silicon heterojunction cell. With a high workfunction exceeding those of elemental metals, MoOx presents an important opportunity to contact holes in inorganic semiconductor materials beyond silicon including III-V semiconductors, carbon-based nanomaterials and layered transition metal dichalcogenide semiconductors.
Contact Information	corsin@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN704
Project Title	Vapor-Liquid-Solid Growth of Polycrystalline Indium Phosphide Thin Films on Metal
Status	Continuing
Funding Source	Federal
Keywords	Solar Cells, Photovoltaics, Indium Phosphide, InP, VLS, Thin Film
Researchers	Rehan R. Kapadia, Zhibin Yu, Maxwell Zheng, Corsin Battaglia, Peter Lobaccaro
Abstract	Here, we develop a technique that enables direct growth of III-V materials on non-epitaxial substrates. Here, by utilizing a planar liquid phase template, we extend the VLS growth mode to enable polycrystalline indium phosphide (InP) thin film growth on Mo foils.
Contact Information	r.kapadia@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN694
Project Title	Monolayer Semiconductor Devices
Status	Continuing
Funding Source	Federal
Keywords	Monolayer; Layered chalcogenide; Electronics
Researchers	Mahmut Tosun, Hui Fang, Steven Chuang
Abstract	Monolayer chalcogenides have recently been shown promising for future scaled electronics. We've reported high performance field-effect transistors based on single layered (thickness, ~0.7 nm) WSe2 as the active channel with chemically doped source/drain contacts and high-κ gate dielectrics. The top-gated monolayer transistors exhibit a high effective hole (electron) mobility of ~250 (110) cm^2/Vs, perfect subthreshold swing of ~60 mV/dec, and ION/IOFF of >10^6 at room temperature. Special attention is given to lowering the contact resistance for electron or hole injection by degenerate surface dopings. The results here present a promising material system and device architecture for monolayer transistors with excellent characteristics.
Contact Information	huifang@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Microfluidics
Project ID	BPN723
Project Title	Organ-on-a-chip for Personalized Medicine Development
Status	Continuing
Funding Source	NIH
Keywords	Organ-on-a-chip, Induced pluripotent stem cell, human-on-a-chip, microfluidics
Researchers	SoonGweon Hong, Sang Hun Lee
Abstract	A new era of drug discovery and development is being marched with the concept of �personalized medicine�. �Organ-on-a-chips or OCs� are one of the movements, which are to recapitulate 3-dimensional organ models in microfluidic culture platforms. By combining iPSC-derived human organ cells, individuals� physiological response can be investigated so that the needs of animal model, inadequately representing human physiology, will be vanished in drug development in a near future. Herein,we are challenging the development of liver- and heart-on-a-chip for the two organs most frequently facing drug failure issues in the current market. Also we envision to expand the types of OCs to brain, muscle, gut and lung, in order to ultimately represent physiological response of human on a chip. Based on personalized iPSC-derived cells, investigations on individual OCs as well as interconnection between OCs will bring meaningful inquiries in pharmacokinetics and pharmacodynamics in personalized medicine.
Contact Information	gweon1@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN730
Project Title	Microfluidic Blood Plasma Separation for Point-of-Care Diagnostics
Status	Continuing
Funding Source	Foundation
Keywords	Microfluidic, Blood plasma separation, Point-of-care
Researchers	Jun Ho Son, Sang Hun Lee
Abstract	Microfluidic lab-on-a-chip (LOC) device for point-of-care (POC) diagnostics have been widely developed for the rapid detection of infectious diseases such as HIV, TB and Malaria. Blood plasma separation is an initial step for most blood-based diagnostics. Although, centrifuge method is the classical bench- top technique, it is time and labor intensive, and therefore, automation and integration of blood plasma separation in the LOC device is ideal for POC diagnostics. Here, we propose a novel microfluidic blood plasma separation device for POC diagnostics. This investigation will hopefully lead to a simple and reliable blood plasma separation device that can be utilized by individuals with minimal training in resource-limited environments for POC diagnostics.
Contact Information	jhson78@berkeley.edu, sanghun.lee@berkeley.edu, lplee@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN727
Project Title	On-Chip Single Molecule miRNA Detection for Cancer Diagnosis
Status	Continuing
Funding Source	Industry
Keywords	miRNA, Detection, Cancer
Researchers	Julian A. Diaz, Inhee Choi, Chi-Cheng Fu, Sang Hun Lee
Abstract	Early stage cancer diagnosis may mean the difference between a successful or an ineffective treatment. Therefore, development of methods that allow the detection of premature signatures of cancer are necessary. Mature microRNAs are short non-coding RNAs strands (~18-21 nt) involved in gene regulation of eukaryotic cells. In cancer cells some miRNAs appear over or under expressed, and serve as a markers to signal the presence of these malignancies. MicroRNAs, however, are present in very low concentrations, thus sensitive and multiplexed methods that detect specific miRNAs are needed to enable the patient with timely and better treatment of this disease. Currently, we are developing a method that offers sensitive, fast, and multiplexed detection of miRNAs in blood samples. This method can be easily adapted to chip technology paving the way to recognize miRNAs without the need of either sample preparation or enzymatic/chemical modification. Due to the multiplexed and sensitive capabilities of our device, we also expect it to provide accurate cancer type characterization.
Contact Information	jdiaz1@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN679
Project Title	Digital Plasma Separation for One-Step Quantitative Nucleic Acid Detection
Status	Continuing
Funding Source	Foundation
Keywords	point-of-care, diagnostics, microfluidics, rapid test, isothermal, amplification
Researchers	Erh-Chia Yeh
Abstract	We propose a one-step diagnostic device using isothermal nucleic acid detection to detect infectious diseases.
Contact Information	erh-chia-yeh@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN480
Project Title	AM Fitzgerald: MEMS Design, Prototyping, Modeling, Failure Prediction and Foundry Transfer
Status	Continuing
Funding Source	Industry
Keywords
Researchers	Keith M. Jackson
Abstract	A.M. Fitzgerald & Associates provides product development and technical consulting services to clients ranging from start-ups to companies in the Fortune 500. Our capabilities include MEMS/Microsystems design and fabrication, multiphysics finite element analysis, failure prediction, and foundry transfer. We are experts at developing MEMS devices and can design and build a finished device from sketched concepts. Via our RocketMEMS� program, customers can get customized MEMS sensors built in proven standard foundry processes. Our clients benefit from rapid prototype fabrication thus reducing their time, cost and risk of product development, and speeding time-to-market.
Contact Information	kmj@amfitzgerald.com,jhuggins@berkeley.edu
Advisor	John M. Huggins

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN354
Project Title	The Nanoshift Concept: Innovation through Design, Development, Prototyping and Fabrication for MEMS, Microfluidics, Nano and Clean Technologies at the UC Berkeley NanoLab
Status	Continuing
Funding Source	Industry
Keywords	Nanoshift, nanolab, microlab, process, recharge, commercial
Researchers	Ning Chen, Salah Uddin
Abstract	Nanoshift, LLC is a privately-held Emerging Technology research and development company specializing in Bio-MEMS, MEMS, Microfluidics and Nanotechnologies. Nanoshift's talented team and use of flexible lab facilities provides high quality, flexible, custom services for process design, development, rapid prototyping, low-volume fabrication and consultation. Typical projects arrive from academics, government and industry; Nanoshift is positioned as the road map for the concept to commercialization process. Nanoshift collaborates with BSAC to make powerful resources available for BSAC members, such as offering valuable services and technical expertise to both academic and industrial members, while improving BSAC's visibility and funding.
Contact Information	nchen@nanoshift.net, suddin@nanoshift.net
Advisor	John M. Huggins

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN712
Project Title	Bridging Research-to-Commercialization Gaps through Facilitated Intermediaries
Status	New
Funding Source	NSF
Keywords	Commercialization,Industry,Managing Director,Executive Director,Nanoshift,AMFitzgerald,MIG,Standards,SBIR
Researchers	John M. Huggins
Abstract	This project aims to leverage private sector intermediaries to facilitate, measure,and report commercialization outcomes of Center activities. BSAC university-based precommercial research (�presearch� for short) has been successful in member recruiting and retention as measured by membership related research revenue for the center ($1.2M-$3M/year)and average longevity of members (~ 8 years). But members have increasingly had trouble bridging the gaps from �presearch� to manufacturable processes & devices. As MEMS processes and applications move mainstream, these gestation periods are dropping rapidly. Many members have, in our surveys and at IAB meetings, vocalized that we need to help bridge commercialization gaps and increase the speed of commercialization. Any such commercialization facilitation programs cannot compromise the fundamental research mission of the Center. We propose to do this with specialized or focused non- University agents who can facilitate the transition from laboratory proof of concept vehicles to precommercial prototypes to commercial production. These intermediaries will provide boundary spanning between university research and commercialization, including active participation in formalized multi-industrial participant university-based research projects with transition plans to university partners.
Contact Information	jhuggins@eecs.berkeley.edu
Advisor	John M. Huggins

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN735 New Project
Project Title	Autonomous Microrobotic Systems
Status	New
Funding Source	BSAC Member Fees
Keywords	Microrobotics, electrostatics, actuators, MEMS, autonomous sensors
Researchers	Daniel Contreras, Daniel Drew, Brad Wheeler, David Burnett, Joseph Greenspun, Michael Lorek
Abstract	Recent advances in MEMS technology have enabled a new generation of microrobotic engineering applications. This project aims at developing novel micro-scale actuation and transduction mechanisms for mobility. A motivation behind this research is the development of truly mobile, high resolution, and autonomous sensor networks. One of the key elements towards autonomy is the fusion of these mobility mechanisms with energy harvesting capabilities, including high-voltage solar arrays fabricated via novel processes. In addition, ultra-low power control and communications platforms must be designed with the constraints of a microrobotic system in mind.
Contact Information	dscontreras@eecs.berkeley.edu
Advisor	Kristofer S. J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN744 New Project
Project Title	Mr. Phelps' Motes: Self-Destructing Silicon
Status	New
Funding Source	DARPA
Keywords
Researchers	Brad Wheeler, Joey Greenspun, Konlin Shen
Abstract	Funded under the DARPA Vanishing Programmable Resources (VaPR) program, this project explores the fundamental issues associated with making wireless sensor nodes disappear after they have achieved their goal. Near-term goals include electro-chemical dissolution of circuit wiring, and XeF2 etch of the silicon substrate. The ultimate goal is to demonstrate a single-chip mote capable of self-destruction on receipt of specific RF command or environmental change. "Mr. Phelps" reference: http://en.wikipedia.org/wiki/Mission:_Impossible
Contact Information	ksjp@berkeley.edu, brad.wheeler@berkeley.edu, pinxisimitu@gmail.com, konlin.shen@gmail.com, maharbiz
Advisor	Kristofer S.J. Pister, Ana Arias, Michel M. Maharbiz, Vivek Subramanian

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN713
Project Title	Ring GINA: Highly Miniaturized Ring-Format Wearable Mote
Status	New
Funding Source	Federal
Keywords
Researchers	Joseph Greenspun, David Burnett
Abstract	Computer input devices such as mice and keyboards have remained largely unchanged since the dawn of the personal computer. The Ring GINA platform is capable of sensing and interpreting a user�s hand and finger movements to emulate and enhance the functions of these standard input devices. A wearable platform frees the user from the need to know hand position relative to a keyboard or mouse, and grants the ability to perform gestures in open space or on any surface. Here, a method is presented that utilizes these rings as a text input system. In moving forward, efforts are being focused on creating a library of gestures to perform additional tasks, as well as further miniaturizing the mote and ring.
Contact Information	greenspun@eecs.berkeley.edu, db@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN683
Project Title	OpenWSN: A Standards-Based Low-Power Wireless Development Environment
Status	Continuing
Funding Source	Federal
Keywords	Wireless Sensor Networks, Protocol Stack, Ultra Low Power, Embedded systems, 802.15.4e, 6LowPAN, CoAP
Researchers	Tengfei Chang, Fabien Chraim, Kevin Weekly
Abstract	The OpenWSN project is an open-source implementation of a fully standards-based protocol stack for capillary networks, rooted in the new IEEE802.15.4e Time Synchronized Channel Hopping standard. IEEE802.15.4e, coupled with Internet-of-Things standards, such as 6LoWPAN, RPL and CoAP, enables ultra-low power and highly reliable mesh networks which are fully integrated into the Internet. The resulting protocol stack will be cornerstone to the upcoming Machine-to-Machine revolution. OpenWSN is ported to numerous commercial available platforms from older 16-bit micro- controller to state-of-the-art 32-bit Cortex-M architectures. The tools developed around the low- power mesh networks include visualization and debugging software, a simulator to mimic OpenWSN networks on a PC, and the environment needed to connect those networks to the Internet. OpenWSN projects leads standardization efforts for ultra low power M2M networks while contributing with innovative protocols for scalable, distributed and energy efficient communications.
Contact Information	tengfei.chang@eecs.berkeley.com, chraim@eecs.berkeley.edu, pister@eecs.berkeley.edu, qinwang@berkele
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Micropower
Project ID	BPN648
Project Title	Fully-Integrated, Low Input Voltage, Switched-Capacitor DC-DC Converter for Energy Harvesting Applications
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	DC-DC Converter, Switched-Capacitor, Charge Pump, Energy Harvesting, Photovoltaics, Micropower
Researchers	Michael C. Lorek
Abstract	This project explores the design of a fully integrated, switched-capacitor DC-DC converter to convert small amounts of energy from photovoltaic or other low voltage energy sources. Clever bootstrapping techniques are used to ensure circuit startup without high-voltage or mechanical assists. Nanopower oscillator topologies are being investigated for minimum power and input voltage operation. Advanced timing schemes are used to minimize charge reversion loss and clock driver short circuit currents for increased efficiency. A boosted output voltage around 1.5V is targeted for compatibility with older CMOS technologies, offering a power advantage in heavily duty cycled applications where leakage is dominant. This work will enable the integration of CMOS circuitry and power supply on the same substrate for true single-chip, autonomous computing platforms.
Contact Information	mlorek@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN705
Project Title	Standard CMOS-Based, Fully Integrated, Stick-On Electricity Meters for Building Sub-Metering
Status	New
Funding Source	Federal
Keywords
Researchers	Michael C. Lorek
Abstract	We propose the development and testing of a system of technologies to minimize the installed cost of electricity sub-metering in buildings. This system utilizes non-contact, self-calibrating voltage and current sensors and wireless communication to eliminate the need for installation by an electrician, installation of conduit and enclosures, and installation of wired communication infrastructure. Electricity sub-metering is a critical component for continuous commissioning, fault detection and diagnosis, demand response, and other energy efficiency opportunities.
Contact Information	mlorek@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister, Steven Lanzisera

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN596
Project Title	Smart Fence and Other Wireless Sensing Applications for Critical Industrial Environments
Status	Continuing
Funding Source	Industry
Keywords	Gas Monitoring, Mobile Gas Sensing, Valve Position Monitoring, Machine Vibration Sensing, WirelessHART, Wireless Sensor Networks
Researchers	Fabien J. Chraim
Abstract	Following the successful showcase of the Smart Fence technology, this project aims at using MEMS and Optical Sensors in combination with Low-Power radios to implement industrial wireless sensing applications. Using inertial sensors, valve position monitoring and machine vibration sensing are added for safeguarding both personnel and equipment. Finally, gas leak detection and localization is attempted using IR combustible gas sensors. This project is concerned both with the COTS-based hardware and software behind each application.
Contact Information	chraim@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	BioMEMS
Project ID	BPN745 New Project
Project Title	Wafer-Scale Intracellular Carbon Nanotube Based Neural Probes
Status	New
Funding Source	Fellowship
Keywords
Researchers	Konlin Shen
Abstract	Current in-vivo methods of electrical recordings of the brain are hampered by low spatial resolution, invasiveness to the surrounding tissue, and scalability. Carbon nanotube based electrodes are ideal for intracellular neural recordings due to their small size and flexibility, allowing for higher density arrays and less damage to the brain. However, current methods for selective placement and alignment of carbon nanotubes cannot be done easily on a wafer scale. This project aims to solve this issue in order to create wafer-scale carbon nanotube based neural probes for intracellular recordings.
Contact Information	konlin@berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN716
Project Title	Neural Dust: An Ultrasonic, Low Power Solution for Chronic BrainMachine Interfaces
Status	New
Funding Source	Fellowship
Keywords	brain-machine interfaces, ultrasonic energy transfer and harvesting, backscatter communication
Researchers	Dongjin Seo
Abstract	A major hurdle in brain-machine interfaces (BMI) is the lack of an implantable neural interface system that remains viable for a substantial fraction of a primate lifetime. Recently, sub-mm implantable, wireless electromagnetic (EM) neural interfaces have been demonstrated in an effort to extend system longevity. However, EM systems do not scale down in size well due to the severe inefficiency of coupling radio waves at mm and sub-mm scales. We propose an alternative wireless power and data telemetry scheme using distributed, ultrasonic backscattering systems to record high frequency (~kHz) neural activity. Such systems will require two fundamental technology innovations: 1) thousands of 10 � 100 um scale, free-floating, independent sensor nodes, or neural dust, that detect and report local extracellular electrophysiological data via ultrasonic backscattering, and 2) a sub-cranial ultrasonic interrogator that establishes power and communication links with the neural dust. We performed the first in vitro experiments which verified that the predicted scaling effects follow theory and that the extreme efficiency of ultrasonic transmission can enable the scaling of the sensing nodes down to 10's of um. Such ultra-miniature as well as extremely compliant implantable neural interface would pave the way for both truly chronic BMI and massive scaling in the number of neural recordings from the nervous system.
Contact Information	djseo@eecs.berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN717
Project Title	Proof of Concept: Self-Assembly of a Multi-Cellular Synthetic-Biological Hybrid
Status	Completed
Funding Source	Office of Naval Research (ONR)
Keywords	synthetic biology, multicellular patterning, microfluidics, microbiorobotics
Researchers	Tom J. Zajdel
Abstract	This year-long proof of concept explores the interplay between bacterial communication circuits and the surface topology of the substrate they are on, to see if certain designed surface features can be made to trigger genetic development switches. Differentiation due to a diffusible chemical signal is central in the development of multicellular organisms. Success in replicating this strategy on a synthetic structure enables a spatially programmable consortium of bacterial cells. Our aims were to enable the self-assembly of multicellular microbial films on the surface of synthetic silicon and polymer forms to form hybrid constructs, generation of construct polarity in gene expression driven by the topology of the synthetic form, and size control of the assembled multicellular film. These achievements would enable our long term vision, which is to create a micro scale, programmable cellular-synthetic hybrid robot capable of autonomous motility, sensing and response in aqueous environments. These millimeter-scale constructs would be fabricated through synthetic biological self-assembly and will allow the seamless fusion of control techniques that rely on both gene expression and cell-level sensing, actuation and computation.
Contact Information	zajdel@eecs.berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN718
Project Title	Direct Electron-Mediated Control of Hybrid Multi-Cellular Robots
Status	Continuing
Funding Source	Office of Naval Research (ONR)
Keywords	microbiorobotics, synthetic biology, biosensors, stochastic control, hybrid biological systems, bacterial electrophysiology
Researchers	Tom J. Zajdel
Abstract	We propose to design, fabricate and test a millimeter-scale, programmable cellular- synthetic hybrid robot capable of autonomous motility, sensing and response in aqueous environments. Three integrated technologies will make this possible: 1) two-way electron transfer between an electrode and E. coli for rapid communication between abiotic core and cells; 2) a flexible polymer + CMOS sensing and computation abiotic core; 3) synthetic cell adhesion genes which allow for patternable self-assembly of bacterial cells onto the abiotic substrate. If successful, this will be the first demonstration of a millimeter-scale synthetic autonomous multi- cellular hybrid with organic and man-made components. A primary goal of this work will be to enable abiotic/biotic two-way communication via electron transfer channels engineered into cells in contact with microelectrodes. We suggest that such a fusion would enable control techniques that rely on combinations of gene expression, cell- level sensing / actuation and CMOS digital computation.
Contact Information	zajdel@eecs.berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN714
Project Title	Electronic Bandage for Wound Healing
Status	Continuing
Funding Source	NSF
Keywords	Wound Healing, Impedance Spectroscopy
Researchers	Amy Liao, Monica Lin
Abstract	Electrical stimulation has been shown to play a large role in the wound healing process by affecting angiogenesis, cell migration, antibacterial effects, etc. However, current electronic therapies have been limited to devices that can be safely and easily removed from patients because of the toxicity of the degradation products from the electrical components . Therefore, we propose a novel flexible "electronic bandage"� that can be safely absorbed by the body. These bioresorbable systems will provide high-resolution, in-body mapping of the impedance field in the wound area in a minimally invasive way, providing significant knowledge and fundamental understanding of cell recovery in a number of medical procedures. These devices will also provide physicians with a way to monitor and eventually stimulate internal wound healing.
Contact Information	amy.liao@berkeley.edu, monica.lin@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN731
Project Title	Flexible Electrodes and Insertion Machine for Stable, Minimally-Invasive Neural Recording
Status	Continuing
Funding Source	DARPA
Keywords	neural recording, scalable, flexible, surgical robot, minimally invasive
Researchers	Timothy L. Hanson
Abstract	Current approaches to interfacing with the nervous system mainly rely on stiff electrode materials, which work remarkably well, but suffer degradation from chronic immune response due to mechanical impedance mismatch and blood-brain barrier disruption. This current technology also poses limits on recording depth, spacing, and location. In this project we aim to ameliorate these issues by developing a system of very fine and flexible electrodes for recording from nervous tissue, a robotic system for manipulating and implanting these electrodes, and a means for integrating electrodes with neural processing chips. We have fabricated three versions of the electrodes, and have demonstrated their manual and automated insertion into an agarose brain tissue proxy using a notched tungsten needle. We have also fabricated and tested in agarose three revisions of the inserter robot. The most recent inserter robot design uses a replaceable electrode cartridge to which electrodes are mounted; these electrodes are made on a 5um thick polyimide substrate with a parylene peel-away backing. The parylene backing holds the fine wires and keeps them from tangling until they are inserted, and provides a more robust means of handling and mounting the structures. We hope to test the full system in rats within 2 months. Simultaneously we are working with BSAC members Will Biederman, Dan Yeager, and other members of the Rabaey group to make electrodes compatible with the neural recording and stimulation chip they have fabricated.
Contact Information	tlh24@phy.ucsf.edu
Advisor	Michel M. Maharbiz, Philip N. Sabes

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN726
Project Title	Transparent Microelectrode Arrays for Hybrid Experiments in Neuroscience
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	MEMS, neural, optogenetics, electrocorticography
Researchers	Brian Pepin
Abstract	Optogenetics techniques that have been developed over the previous decade allow cell-type specific optical stimulation of neurons in-vivo. However, it remains a challenge to perform simultaneous electrical recording while providing optical stimulation due to photoelectric artifact generated at the microelectrode recording sites. This project aims to address this challenge by developing bio- compatible microelectrode arrays with optically transparent recording sites. Current devices are optimized for performing electrocorticography (ECoG) experiments and use Indium-Tin Oxide (ITO, a transparent conductive oxide) as the electrode material. Preliminary characterization of the arrays indicate electrode impedances as low as 100kOhm and show no photoelectric artifact. These micro- ECoG (uECoG) arrays are currently being validated in a variety of novel hybrid neuroscience experiments combining optical stimulation with electrical recording, both at Berkeley and with collaborators at other universities.
Contact Information	pepinb@eecs.berkeley.edu
Advisor	Michel M. Maharbiz, Timothy J. Blanche

 

Document Top Table of Projects	BioMEMS
Project ID	BPN573
Project Title	Carbon Fiber Microelectrode Arrays for Chronic Stimulation and Recording in Insects
Status	Continuing
Funding Source	State
Keywords	carbon fiber microelectrode electrode array insect electrophysiology chronic stimulation recording fly beetle
Researchers	Travis L. Massey
Abstract	This project aims to create an array of carbon fibers for insect electrophysiology.
Contact Information	tlmassey@eecs.berkeley.edu
Advisor	Michel M. Maharbiz, Kristofer S.J. Pister

 

Document Top Table of Projects	BioMEMS
Project ID	BPN571
Project Title	Implantable Microengineered Neural Interfaces for Studying and Controlling Insects
Status	Continuing
Funding Source	Federal
Keywords	insect, vision, neural interface, micro aerial vehicle
Researchers	Joshua van Kleef, Keegan Mann
Abstract	Our goal is to control the flight of an insect by hijacking its sensory systems. Although significant funding has gone into developing micro air vehicles (MAVs, wingspan< 15cm), flying insects still significantly outperform the most sophisticated flying robots in efficiency, flight time, stability and maneuverability. The restrictions that such a small spatial scale places on the amount of energy that can be stored on-board and on actuator efficiency, means this gap is expected to continue for some years to come. We are therefore pursuing a novel MAV design that uses an actual flying insect. We aim to produce small insect backpacks capable of receiving commands remotely and providing power to a combination of neural and optical stimulators. The patterns of stimulation will allow us to trick the insects motor-sensory system into responding to fictitious self-movements. We aim to use these �ghost� stimuli to remote-control the insect�s flight while at the same time capitalizing on their remarkable natural flying abilities. The project has now advanced to testing devices in free flight and optimizing the stimulation parameters.
Contact Information	vankleef@berkeley.edu, dancohen@berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN699
Project Title	A Modular System for High-Density, Multi-Scale Electrophysiology
Status	Continuing
Funding Source	NSF
Keywords	Neuroengineering, Nanoprobes, Optogenetics, ASIC, BioMEMS
Researchers	Maysamreza Chamanzar
Abstract	Truly large-scale electrophysiology simultaneous recording of thousands of individual neurons in multiple brain areas remains an elusive goal of neuroscience. The traditional approach of studying single neurons in isolation assumes that the brain can be understood one component at a time. However, in order to fully understand the function of whole brain circuits, it is essential to observe the interactions of large numbers of neurons in multiple brain areas simultaneously with high spatiotemporal resolution. This project will establish a complete system for multi-scale electrophysiology in awake, freely behaving mice, using state-of-the-art nano neural interfaces comprising of tiny silicon probes integrated with on- chip optical waveguides and compliant monolithic polymer cables connected to a unique light-weight head-mounted recording system built around a commercially available application specific integrated circuit (ASIC) that has been custom designed for electrophysiological recordings, combining signal amplification, filtering, signal multiplexing, and digital sampling on a single chip. We demonstrate the high-resolution excitation of channelrhodopsin-expressing neurons imaged on a two-photon microscope by evoking action potentials in different parts of cortex. The entire process, including post-fabrication system integration, has been designed to leverage existing consumer manufacturing processes, making our probe technology mass- producible and widely accessible at low cost.
Contact Information	chamanzar@berkeley.edu
Advisor	Michel M. Maharbiz, Timothy J. Blanche

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN518
Project Title	Synthetic Turing Patterns
Status	Continuing
Funding Source	Federal
Keywords	synthetic biology, pattern generation, developmental biology
Researchers	Justin Hsia, William J. Holtz
Abstract	Understanding symmetry breaking is at the heart of developmental biology, from the origins of polarity, cellular differentiations, and how the leopard got its spots, as well as crucial to the future engineering of complex cellular ensembles. Alan Turing proposed a simple mathematical model that explains how the reaction-diffusion mechanism can cause an initially uniform concentration in an ensemble of cells to spontaneously become non-uniform and form patterns (Turing patterns). To date, no true synthetic Turing patterns have been created using gene networks, so our goal is to design and implement the first synthetic gene circuit that can spontaneously produce patterning via diffusion-driven instability in an ensemble of cells (E. coli). In addition, the main engine driving Turing pattern formation is a robust nonlinear circuit, such as a bistable or oscillatory network. Creating these nonlinear circuits will be beneficial both as a major step in the eventual creation of Turing pattern generators as well as modular circuits for synthetic biology.
Contact Information	jhsia@eecs.berkeley.edu, arcak@eecs.berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor	Michel M. Maharbiz, Murat Arcak

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN599
Project Title	MEMS Electronic Compass: Three-axis Magnetometer
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Vashwar T. Rouf, Mo Li
Abstract	The goal of this is project is to develop a low-power three axis MEMS magnetic sensor suitable for use as an electronic compass in smart phones and portable electronics. Our objective is to achieve a resolution of 200 nT/rt Hz and power consumption of 5 mW/axis with DC power supply of 3.3V. To enable co-integration with a 3-axis accelerometer, we seek to optimize sensor performance without the need for a vacuum seal. Although past devices designed by our group have demonstrated that our resolution goal is reachable, these devices suffered from dc offset larger than Earth's field and required an external programmable oscillator for operation. Here, we aim to reduce offset by two orders of magnitude and develop self-oscillation loops to excite the sensor at its natural frequency.
Contact Information	vtrouf@ucdavis.edu,dahorsley@ucdavis.edu,moxli@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN466
Project Title	Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers
Status	Continuing
Funding Source	DARPA
Keywords	Aluminum Nitride, Piezoelectric, Ultrasound Transducers, MEMS
Researchers	Ofer Rozen
Abstract	Characterize air-coupled aluminum nitride piezoelectric micromachined ultrasound transducers (pMUTs) for use in range finding and gesture recognition applications. MEMS Aluminum Nitride (AlN) piezoelectric sensor technology has been chosen due to the relatively simple deposition process and compatibility with CMOS technology which enables the potential integration of the sensor and drive electronics on the same chip. Guided by both analytic and finite element models the optimum design parameters are chosen to obtain the desired resonant frequency, bandwidth, and maximum output sound pressure for the transmitter, and maximum sensitivity for the receiver. We are currently exploring several conceptual designs, using different fabrication processes, to improve robustness while maintaining the performance.
Contact Information	orozen@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN628
Project Title	High Frequency Piezoelectric Micromachined Ultrasound Transducers (PMUTs)
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	piezoelectric, ultrasound transducers, medical imaging, fingerprint sensors
Researchers	Yipeng Lu, Hao-Yen Tang, Stephanie Fung
Abstract	The goal of the current research is to design and fabricate high frequency piezoelectric micromachined ultrasound transducers (PMUTs) for medical imaging and fingerprint sensors, which requires a narrow acoustic beam and high transmitting and receiving sensitivities. The simple process is developed to enable PMUT array with a high fill factor and small size of devices. The fabricated PZT and AlN PMUTs are characterized in mechanical, electrical and acoustic domains. Further characterizations of acoustic beam size and pulse echo imaging are to be done for final demonstration.
Contact Information	yplu@ucdavis.edu,dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN603
Project Title	Hemispherical Resonator Gyroscope
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, Gyroscope, Silicon Wet Etch, Diamond
Researchers	Amir Heidari, Chen Yang, Hadi Najar, Parsa Taheri-Tehrani
Abstract	The goal of this project is to realize a micro rate-integrating gyroscope that produces an output signal proportional to rotation angle rather than rotation rate. If successful, this device would eliminate the need of integrating the gyroscope's rate output to obtain the angle. Realizing a micro rate-integrating gyroscope can be achieved by fabricating hemispherical resonating shells with extremely close frequency matching (delta f < 10 Hz) and a very high quality factor (Q > 1 million). Structures must be highly axisymmetric and micro-finished to nanometer scale roughness.
Contact Information	dahorsley@ucdavis.edu, aheidari@ucdavis.edu, chenyang@berkeley.edu, hnajar@ucdavis.edu, ptaheri@ucda
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN684
Project Title	Integrated Microgyroscopes with Improved Scale-Factor and Bias Stability
Status	Continuing
Funding Source	DARPA
Keywords	gyroscope, inertial sensor, signal processing, CMOS
Researchers	Jason Su, Sarah Nitzan
Abstract	Despite their small size, low power dissipation, and low cost, the large bias and scale factor errors of current MEMS inertial sensors preclude using them for dead reckoning navigation. Although these shortcomings can be overcome with precision manufacturing and extensive calibration, such solutions suffer from high cost and secondary effects such as long term drift. Presently, the use of in-situ calibration techniques in MEMS sensors is limited to the electronic interfaces, where they are instrumental for reducing drift arising from electronic components. This project extends the benefit of electronic background calibration to the MEMS transducer to continuously reduce scale factor and bias errors arising from manufacturing tolerances and drift.
Contact Information	dahorsley@ucdavis.edu, sarah.nitzan@gmail.com, thssu@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN655
Project Title	Materials for High Quality-Factor Resonating Gyroscopes
Status	Continuing
Funding Source	DARPA
Keywords	MEMS gyroscopes, inertial sensors, surface micromachining, High Q materials, CVD diamond
Researchers	Hadi Najar, Amir Heidari, Chen Yang
Abstract	This project will investigate new materials suitable for achieving Q-factors in excess of 1 million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and surface losses will be performed using resonator test structures. The effect of doping and microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined double ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond (NCD) and microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying levels of Boron doping. Higher boron doping resulted in reduced Q due to defect losses. Moreover, thermal conductivities of diamond films were measured using TDTR technique for further mapping of theory and experiment.
Contact Information	dahorsley@ucdavis.edu, hnajar@ucdavis.edu, chenyang@berkeley.edu, aheidari@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN734 New Project
Project Title	Package-Derived Influences on Micromechanical Resonator Stability
Status	New
Funding Source	Fellowship
Keywords	vacuum, encapsulation, hermetic, package, stress, finite element analysis
Researchers	Divya N. Kashyap
Abstract	Vacuum encapsulation of RF disk and beam resonators is necessary in order to maintain high Q and frequency stability. However, the difference in the coefficient of thermal expansion of the package material and the substrate lead to package induced stress. This project aims to explore the effects of this stress on the frequency response of the resonators using finite element analysis (FEA) software. Simulations performed on resonators packaged using conventional hermetic encapsulation techniques such as anodic and fusion bonding will be compared to that of an in situ packaging method where the resonators are housed in a polysilicon shell.
Contact Information	dnk003@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN540
Project Title	Temperature-Stable Micromechanical Resonators and Filters
Status	Continuing
Funding Source	Industry
Keywords	�mechanical resonator, electrical stiffness, compensation, frequency drift
Researchers	Alper Ozgurluk
Abstract	This project aims to suppress temperature-induced frequency shift in high frequency micromechanical resonators targeted for channel-select filter and oscillator applications. A novel electrical stiffness design technique is utilized to compensate for thermal drift, in which a temperature-dependent electrical stiffness counteracts the resonator�s intrinsic dependence on temperature caused mainly by Young�s modulus temperature dependence.
Contact Information	ozgurluk@eecs.berkeley.edu, ctnguyen@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN359
Project Title	Micromechanical Disk Resonator-Based Oscillators
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, Oscillators
Researchers	Thura Lin Naing, Tristan Rocheleau
Abstract	This project aims to achieve micromechanical-based frequency synthesizer components that meet or exceed the requirements of the GSM standard. Towards these goals, this project investigates short- term stability of MEMS-based oscillators, particularly, phase noise and acceleration sensitivity. In addition to providing a highly accurate, on-chip frequency reference, a fully-integrated oscillator can achieve greater stability (particularly acceleration sensitivity) and far less power consumption than any comparable off-chip oscillator. In the process of achieving a fully-integrated frequency synthesizer, much of the research is expected to focus on development of integrated resonators-ASIC oscillators, as well as other needed components such as MEMS-based frequency dividers.
Contact Information	thura@eecs.berkeley.edu, tristan@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen, Elad Alon

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN534
Project Title	Fully-Integrated Micromechanical Clock Oscillator
Status	Continuing
Funding Source	DARPA
Keywords	Oscillator, 32kHz, RTC, Real Time Clock, Fully Integrated MEMS
Researchers	Henry G. Barrow
Abstract	This project aims to develop a fully integrated micromechanical clock oscillator which outperforms current quartz-based clock oscillators in terms of both size and cost. A 32-kHz micromechanical resonator with a temperature coefficient better than 10 ppm over the commercial temperature range will act as the oscillator's reference. In addition, this oscillator will utilize an integrated fabrication process above modern transistor circuits in order to minimize device footprint and production expense.
Contact Information	hbarrow@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN707
Project Title	High-Order Micromechanical Electronic Filters
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, micromechanical, filter, high-order, bandpass, rolloff, stopband, rejection
Researchers	Henry G. Barrow
Abstract	This project aims to develop multi-resonator micromechanical electronic filters for use in communication systems requiring bandpass filters with sharp rolloffs and large stopband rejections. A complete analysis of the design, fabrication and testing of filters comprised of 2-8 micromechanical resonators coupled by flexural mode springs will establish a greater understanding this exciting MEMS device. In addition, the implementation of an automated tuning scheme will provide complete corrective control over the filter�s passband by negating the effects of fabrication error.
Contact Information	hbarrow@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN433
Project Title	A Micromechanical Power Converter
Status	Continuing
Funding Source	DARPA
Keywords	Power Converter, MEMS Switch
Researchers	Yang Lin, Ruonan Liu
Abstract	The overall goal of this project is to demonstrate a switched-mode power converter (e.g., a charge pump) using micromechanical switching elements that allow substantially higher voltages and potentially higher conversion efficiencies than transistor-switch based counterparts.
Contact Information	liur@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN435
Project Title	A Micromechanical Power Amplifier
Status	Continuing
Funding Source	DARPA
Keywords	MEMS switch, switching mode power amplifier, MEMS resonator
Researchers	Wei-Chang Li
Abstract	This overall project aims to demonstrate methods for amplifying signals with higher efficiency compared to transistor circuitry using strictly mechanical means for ultra-low-power signal processing applications.
Contact Information	wcli@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN434
Project Title	A Micromechanical RF Channelizer
Status	Continuing
Funding Source	DARPA
Keywords	micromechanical, RF, filter, mixer, channel selection, channelizer, ALD, capacitive gap scaling
Researchers	Mehmet Akgul
Abstract	Vibrating mechanical tank components, such as crystal and SAW resonators, are widely used for frequency selection in communication systems because of their high Q and exceptional stability. However, being off-chip components, these devices pose an important bottleneck against the ultimate miniaturization and performance of wireless transceivers. This project aims to explore the use of capacitively transduced micromechanical circuits to realize micromechanical mixer-filters with reconfigurable attributes. With their substantial size, cost and performance advantages, these devices can be used to realize a bank of tunable/switchable micromechanical filters for multi-band RF channel selection. By replacing all off-chip components with micromachined passive elements, micromechanical mixer-filters offer an alternative set of strategies for transceiver miniaturization and improvement. In the long term, this overall project aims to demonstrate an RF channelizer utilizing micromechanical elements in its signal path, exclusively, that presents one of the keys to eventually realizing a cognitive radio.
Contact Information	akgul@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN682
Project Title	Strong I/O Coupled High-Q Micromechanical Filters
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Robert A. Schneider
Abstract	This project applies some of the Q-factor improvement techniques currently used on capacitive resonators to realize better piezoelectric ones, thus enabling new narrowband filter and oscillator applications. Capacitive-piezo transduction provides a clear path for demonstrating low motional impedance (10-1000 Ohm) and high-Q (Q~10,000) AlN resonators at VHF and UHF frequencies, which notably possess much stronger coupling than capacitive resonators. Greatly improved Q-factors, afforded through capacitive-piezoelectric transduction, enable such AlN resonators to achieve higher kt^2-Q figures of merit than traditional AlN resonator counterparts having contacting electrodes. While resonator optimization is a necessary step that this project takes, the long range goal of this effort is to mechanically couple many such resonators to realize high-order, self-switchable, AlN, channel-select filters with fractional bandwidths of 0.1-0.3%, insertion losses of less than 2- dB, stop-band rejection exceeding 50-dB, and handling capability for high out-of-band and in-band power. Such work is nearing fruition.
Contact Information	bschneid@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN676
Project Title	Q-boosted Optomechanical Oscillators
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Turker Beyazoglu, Alejandro Grine, Tristan Rocheleau, Niels Quack
Abstract	This project aims to demonstrate Radiation Pressure driven Optomechanical Oscillators (RP-OMOs) with low phase noise and low power operation suitable for various applications in optical and RF communications. In particular, chip scale atomic clocks with low power consumption can be realized by replacing its power-hungry quartz-based microwave synthesizer with the proposed RP-OMO structure. The Q-boosted RP-OMO design approach of this work makes it possible to optimize both optical and mechanical design to simultaneously reduce the phase noise and threshold power of these oscillators while providing electromechanical coupling for electrical output and voltage controlled frequency tuning, as needed for the intended CSAC application.
Contact Information	turker@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen, Ming C. Wu

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN701
Project Title	Bridged Micromechanical Filters
Status	Continuing
Funding Source	DARPA
Keywords	Micromechanical Filters, High-order Filters,
Researchers	Jalal Naghsh Nilchi
Abstract	The overall project aims to explore the use of bridging between non-adjacent resonators to generate loss poles in the filter response toward better filter shape factor, sharper passband-to- stopband roll-off and better stopband rejection.
Contact Information	jalal.naghsh.nilchi@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN709
Project Title	Tunable & Switchable Micromechanical RF Filters
Status	Continuing
Funding Source	DARPA
Keywords	micromechanical resonators, RF filters, channel selection, wideband filter
Researchers	Lingqi Wu
Abstract	This project aims to explore the use of on-chip capacitively transduced micromechanical resonators to realize RF filters with substantial size and performance advantages. With their extremely high quality factor in UHF range and strong coupling coefficient enabled by nanometer electrode-to-resonator gap spacings, capacitive-gap transduced micromechanical resonators should be able to realize both banks of narrowband filter for reconfigurable RF channel selection and wideband filters targeting fast data transmission.
Contact Information	wulingqi@berkeley.edu
Advisor	Clark T.-C. Nguyen