Berkeley Sensor & Actuator Center

The Berkeley Sensor & Actuator Center (BSAC) is the Graduated National Science Foundation Industry/University Cooperative Research Center for Microsensors and Microactuators. We conduct industry-relevant, interdisciplinary research on micro- and nano-scale sensors, moving mechanical elements, microfluidics, materials, processes & systems that take advantage of progress made in integrated-circuit, bio, and polymer technologies.

Number of records: 108

POSTER	RESEARCH THRUST	ABSTRACT click link to view abstract	PROJECT MATERIALS WEBSITE, Login Required	PROJECT TITLE	ADVISOR
1	Wireless, RF & Smart Dust	BPN540	BPN540 Website	Temperature-Stable Micromechanical Resonators and Filters	Clark T.-C. Nguyen
2	Wireless, RF & Smart Dust	BPN359	BPN359 Website	Fully-Integrated Micromechanical Resonator-Based Reference Oscillators	Clark T.-C. Nguyen, Elad Alon
3	Physical Sensors & Devices	BPN534	BPN534 Website	Fully-Integrated Micromechanical Clock Oscillator	Clark T.-C. Nguyen
4	Physical Sensors & Devices	BPN433	BPN433 Website	A Micromechanical Power Converter	Clark T.-C. Nguyen
5	Physical Sensors & Devices	BPN435	BPN435 Website	A Micromechanical Power Amplifier	Clark T.-C. Nguyen
6	Wireless, RF & Smart Dust	BPN434	BPN434 Website	A Micromechanical RF Channelizer	Clark T.-C. Nguyen
7	Wireless, RF & Smart Dust	BPN682	BPN682 Website	Strong I/O Coupled High-Q Micromechanical Filters	Clark T.-C. Nguyen
8	Wireless, RF & Smart Dust	BPN676	BPN676 Website	Q-boosted Optomechanical Resonators	Clark T.-C. Nguyen, Ming C. Wu
9	Wireless, RF & Smart Dust	BPN701	BPN701 Website	Bridged Micromechanical Filters	Clark T.-C. Nguyen
10	Wireless, RF & Smart Dust	BPN707	BPN707 Website	High-Order Micromechanical Electronic Filters	Clark T.-C. Nguyen
11	Wireless, RF & Smart Dust	BPN709	BPN709 Website	Tunable & Switchable Micromechanical RF Filters	Clark T.-C. Nguyen
12	NanoTechnology: Materials, Processes & Devices	BPN625	BPN625 Website	Direct Growth of High Quality III-V Semiconductors on Metal Foils for Low-Cost, High-Efficiency PVs	Ali Javey
13	NanoTechnology: Materials, Processes & Devices	BPN704	BPN704 Website	Vapor-Liquid-Solid Growth of Polycrystalline Indium Phosphide Thin Films on Metal	Ali Javey
14	NanoTechnology: Materials, Processes & Devices	BPN686	BPN686 Website	Spatially Controlled Growth of III-V Semiconductors Toward Low-Cost and High-Efficiency PVs	Ali Javey
15	NanoTechnology: Materials, Processes & Devices	BPN694	BPN694 Website	Monolayer Semiconductor Devices	Ali Javey
16	Physical Sensors & Devices	BPN634	BPN634 Website	Low Voltage and Fast Response Actuators	Ali Javey
17	Physical Sensors & Devices	BPN698	BPN698 Website	Nanomaterial-Based Macroscale Flexible Sensor System	Ali Javey
18	NanoPlasmonics, Microphotonics & Imaging	BPN721	BPN721 Website	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) Component Characterization	Ming C. Wu
19	Microfluidics	BPN552	BPN552 Website	Light-Actuated Digital Microfluidics (Optoelectrowetting)	Ming C. Wu
20	NanoPlasmonics, Microphotonics & Imaging	BPN595	BPN595 Website	Fast Optical Phased Array for 10MHz Beamforming	Ming C. Wu, David A. Horsley
21	NanoPlasmonics, Microphotonics & Imaging	BPN651	BPN651 Website	Cavity Optomechanics Experimentation	Ming C. Wu, Clark T.-C. Nguyen
22	NanoPlasmonics, Microphotonics & Imaging	BPN498	BPN498 Website	Integrated Silica Optomechanical Oscillators	Ming C. Wu
23	NanoPlasmonics, Microphotonics & Imaging	BPN678	BPN678 Website	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)	Ming C. Wu, Bernhard E. Boser
24	NanoPlasmonics, Microphotonics & Imaging	BPN710	BPN710 Website	Reconfigurable Silicon Photonic Integrated Circuits	Ming C. Wu
25	NanoPlasmonics, Microphotonics & Imaging	BPN671	BPN671 Website	Tunable Silicon Photonics for Microsecond Wavelength Selective Switching	Ming C. Wu
26	NanoPlasmonics, Microphotonics & Imaging	BPN458	BPN458 Website	Optical Antenna-Based nanoLED	Ming C. Wu
27	NanoPlasmonics, Microphotonics & Imaging	BPN703	BPN703 Website	Directly Modulated High-Speed nanoLED Utilizing Optical Antenna Enhanced Light Emission	Ming C. Wu
28	NanoPlasmonics, Microphotonics & Imaging	BPN609	BPN609 Website	Optical Antenna-Based Photodetectors	Ming C. Wu
29	Microfluidics	BPN725	BPN725 Website	One-Step Electrokinetic Nucleic Acid Preconcentrator for PCR-Based Point-of-Care Diagnosis	Luke P. Lee
30	Microfluidics	BPN723	BPN723 Website	Organ-on-a-chip for Personalized Medicine Development	Luke P. Lee
32	Microfluidics	BPN730	BPN730 Website	Microfluidic Blood Plasma Separation for Point-of-Care Diagnostics	Luke P. Lee
33	NanoTechnology: Materials, Processes & Devices	BPN727	BPN727 Website	On-Chip Single Molecule miRNA Detection for Cancer Diagnosis	Luke P. Lee
34	Physical Sensors & Devices	BPN653	BPN653 Website	Biologically-Inspired, Self-Activated Building Envelope Regulation System (SABERS)	Luke P. Lee, Maria-Paz Gutierrez
35	Microfluidics	BPN679	BPN679 Website	One-Step Point-of-Care Quantitative Nucleic Acid Detection Based on Digital Plasma Separation	Luke P. Lee
38	BioMEMS	BPN715	BPN715 Website	Stimuli Responsive Capsules for Drug Delivery and Diagnostic Applications	Liwei Lin
39	Wireless, RF & Smart Dust	BPN574	BPN574 Website	On-Chip Micro-Inductor	Liwei Lin
40	BioMEMS	BPN473	BPN473 Website	Next-Generation Microfluidic Components, Circuits and Systems	Liwei Lin, Luke P. Lee
41	Microfluidics	BPN706	BPN706 Website	Single-Layer Microfluidic Gain Valves via Optofluidic Lithography	Liwei Lin
42	Microfluidics	BPN586	BPN586 Website	Integrated Finger-Powered Microfluidic Pumps for Point-of-Care Diagnostics	Liwei Lin
43	Microfluidics	BPN702	BPN702 Website	A Continuous-Flow Microdroplets Lysis System	Liwei Lin
44	BioMEMS	BPN438	BPN438 Website	Microengineered Technologies for Controlling Cellular Functions	Liwei Lin, Song Li
45	BioMEMS	BPN675	BPN675 Website	Implantable Micro Drug Delivery System	Liwei Lin
46	Physical Sensors & Devices	BPN708	BPN708 Website	Direct-Write Graphene Channel Field Effect with Self-Aligned Top Gate	Liwei Lin
47	NanoTechnology: Materials, Processes & Devices	BPN606	BPN606 Website	Carbon Nanotube Films for Energy Storage Applications	Liwei Lin
48	NanoTechnology: Materials, Processes & Devices	BPN517	BPN517 Website	Facile Synthesis of Nanostructures for Renewable Energy and Gas Sensing Applications	Liwei Lin
49	NanoTechnology: Materials, Processes & Devices	BPN672	BPN672 Website	Solar Hydrogen Production by Photocatalytic Water Splitting	Liwei Lin
50	Physical Sensors & Devices	BPN722	BPN722 Website	Ultrasonic Fingerprint Sensor Using Piezoelectric Micro-Machined Ultrasonic Transducer (PMUT)	Bernhard E. Boser
51	BioMEMS	BPN649	BPN649 Website	Magnetic Particle Flow Cytometer	Bernhard E. Boser
52	BioMEMS	BPN685	BPN685 Website	In-Vivo Imaging of Microscopic Residual Disease in Cancer	Bernhard E. Boser
53	Physical Sensors & Devices	BPN608	BPN608 Website	FM Gyroscope	Bernhard E. Boser
54	Physical Sensors & Devices	BPN485	BPN485 Website	Ultrasonic Gesture Recognition on a Chip	Bernhard E. Boser
55	NanoPlasmonics, Microphotonics & Imaging	BPN665	BPN665 Website	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) System Demonstrator: High Resolution FMCW LADAR	Bernhard E. Boser, Ming C. Wu, Connie Chang-Hasnain, Eli Yablonovitch
56	Wireless, RF & Smart Dust	BPN713	BPN713 Website	Ring GINA: Highly Miniaturized Ring-Format Wearable Mote	Kristofer S.J. Pister
57	Wireless, RF & Smart Dust	BPN683	BPN683 Website	OpenWSN: A Standards-Based Low-Power Wireless Development Environment	Kristofer S.J. Pister
58	Micropower	BPN648	BPN648 Website	Fully-Integrated, Low Input Voltage, Switched-Capacitor DC-DC Converter for Energy Harvesting Applications	Kristofer S.J. Pister
59	Physical Sensors & Devices	BPN705	BPN705 Website	Standard CMOS-Based, Fully Integrated, Stick-On Electricity Meters for Building Sub-Metering	Kristofer S.J. Pister, Steven Lanzisera
60	Wireless, RF & Smart Dust	BPN596	BPN596 Website	Smart Fence and Other Wireless Sensing Applications for Critical Industrial Environments	Kristofer S.J. Pister
61	BioMEMS	BPN729	BPN729 Website	Functional Plastic Microstructures Fabricated Using Electroplating and Hot Embossing	Dorian Liepmann
62	BioMEMS	BPN622	BPN622 Website	Design of an Ex-vivo Prototype of a Bioartificial Kidney for Small Animals	Dorian Liepmann, Shuvo Roy
63	Microfluidics	BPN695	BPN695 Website	Hydrodynamics of Marine Larval Locomotion	Dorian Liepmann, Mimi Koehl
64	Microfluidics	BPN621	BPN621 Website	Microfluidic Separation of Blood for SIMBAS Biosensor	Dorian Liepmann
65	Microfluidics	BPN711	BPN711 Website	Point-of-Care System for Quantitative Measurements of Blood Analytes Using Graphene-Based Sensors	Dorian Liepmann
66	Microfluidics	BPN719	BPN719 Website	Single Cell Micro-Chambers for Circulating Tumor Cell Detection	Albert P. Pisano
67	NanoTechnology: Materials, Processes & Devices	BPN720	BPN720 Website	Selective Chemical Detection with Full Atom-Thick Material Platform	Albert P. Pisano
68	Micropower	BPN394	BPN394 Website	QES: Micro LHP Chip Cooling System	Albert P. Pisano
69	Micropower	BPN660	BPN660 Website	QES: Micro LHP Chip Cooling System - Evaporator Design and Testing	Albert P. Pisano
70	Micropower	BPN670	BPN670 Website	QES: Micro LHP Cooler - Coherent Porous Silicon Wick for High Heat Flux and Capillary Pumping	Albert P. Pisano
71	NanoTechnology: Materials, Processes & Devices	BPN658	BPN658 Website	QES: Nano-Composite Capacitor for High Performance Energy Storage	Albert P. Pisano
72	Physical Sensors & Devices	BPN687	BPN687 Website	QES: Robust Optical Flame Detection in Harsh Environments	Albert P. Pisano, Liwei Lin
73	Micropower	BPN544	BPN544 Website	HEaTS: Piezoelectric Energy Harvesters for Harsh Environments	Albert P. Pisano
74	Physical Sensors & Devices	BPN424	BPN424 Website	HEaTS: SiC Thin-Film and Nanostructures for Harsh Environment Sensing and Energy Applications	Roya Maboudian, Carlo Carraro
75	Package, Process & Microassembly	BPN413	BPN413 Website	HEaTS: Bonding of SiC MEMS Sensors for Harsh Environments	Albert P. Pisano
76	Physical Sensors & Devices	BPN638	BPN638 Website	HEaTS: SiC Devices and ICs for Harsh Environment Sensing	Albert P. Pisano
77	Physical Sensors & Devices	BPN614	BPN614 Website	HEaTS: 4H-SiC FET Technology for Harsh Environment Sensing Applications	Albert P. Pisano
78	Physical Sensors & Devices	BPN663	BPN663 Website	HEaTS: SiC Diodes and Rectifiers for Harsh Environment Sensing Applications	Albert P. Pisano
79	Physical Sensors & Devices	BPN644	BPN644 Website	HEaTS: SiC Bipolar Junction Transistors for Harsh Environment Sensing Applications	Albert P. Pisano
81	Wireless, RF & Smart Dust	BPN693	BPN693 Website	HEaTS: Thermally Stable Aluminum Nitride Lamb Wave Resonators for Harsh Environment Applications	Albert P. Pisano
82	Physical Sensors & Devices	BPN616	BPN616 Website	HEaTS: SiC Harsh Environment Pressure Sensors	Albert P. Pisano
83	Physical Sensors & Devices	BPN661	BPN661 Website	HEaTS: SiC Thin-Film Flame Ionization Sensor	Albert P. Pisano
84	Microfluidics	BPN645	BPN645 Website	Highly-Parallel Magnetically-Actuated Microvalves	David A. Horsley
85	Physical Sensors & Devices	BPN599	BPN599 Website	MEMS Electronic Compass: Three-axis Magnetometer	David A. Horsley
86	Physical Sensors & Devices	BPN642	BPN642 Website	10 MHz Optical Phased Array Metrology and Control	Dave A. Horsley, Ming C. Wu
87	Physical Sensors & Devices	BPN466	BPN466 Website	Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers	David A. Horsley
88	Physical Sensors & Devices	BPN628	BPN628 Website	High Frequency Piezoelectric Micromachined Ultrasound Transducers	David A. Horsley
89	Physical Sensors & Devices	BPN603	BPN603 Website	Hemispherical Resonator Gyro	David A. Horsley
90	Physical Sensors & Devices	BPN684	BPN684 Website	Integrated Microgyroscopes with Improved Scale-Factor and Bias Stability	David A. Horsley
91	Physical Sensors & Devices	BPN655	BPN655 Website	Materials for High Quality-Factor Resonating Gyroscopes	David A. Horsley
92	BioMEMS	BPN716	BPN716 Website	Neural Dust: An Ultrasonic, Low Power Solution for Chronic BrainMachine Interfaces	Michel M. Maharbiz
93	BioMEMS	BPN717	BPN717 Website	Proof of Concept: Self-Assembly of a Multi-Cellular Synthetic-Biological Hybrid	Michel M. Maharbiz
94	BioMEMS	BPN718	BPN718 Website	Direct Electron-Mediated Control of Hybrid Multi-Cellular Robots	Michel M. Maharbiz
95	Physical Sensors & Devices	BPN714	BPN714 Website	Electronic Bandage for Wound Healing	Michel M. Maharbiz
96	Physical Sensors & Devices	BPN731	BPN731 Website	Flexible Electrodes and Insertion Machine for Stable, Minimally-Invasive Neural Recording	Michel M. Maharbiz, Philip N. Sabes
97	Physical Sensors & Devices	BPN726	BPN726 Website	Transparent Microelectrode Arrays for Hybrid Experiments in Neuroscience	Michel M. Maharbiz, Timothy J. Blanche
98	BioMEMS	BPN573	BPN573 Website	Carbon Fiber Microelectrode Arrays for Chronic Stimulation and Recording in Insects	Michel M. Maharbiz, Kristofer S.J. Pister
99	BioMEMS	BPN571	BPN571 Website	Implantable Microengineered Neural Interfaces for Studying and Controlling Insects	Michel M. Maharbiz
100	BioMEMS	BPN584	BPN584 Website	Design, Fabrication and Testing of a High Density, Large Area µECoG Array	Michel M. Maharbiz
101	BioMEMS	BPN699	BPN699 Website	A Modular System for High-Density, Multi-Scale Electrophysiology	Michel M. Maharbiz, Timothy J. Blanche
102	BioMEMS	BPN690	BPN690 Website	Manipulating Cellular Behavior and Wound Healing via Local Electric Field Stimulation	Michel M. Maharbiz
103	NanoTechnology: Materials, Processes & Devices	BPN518	BPN518 Website	Synthetic Turing Patterns	Michel M. Maharbiz, Murat Arcak
104	Physical Sensors & Devices	BPN448	BPN448 Website	Integrity Assessment of Underground Power Distribution Cables	Richard M. White, Paul K. Wright
105	Wireless, RF & Smart Dust	BPN392	BPN392 Website	Mobile Airborne Particulate Matter Monitor for Cellular Deployment	Richard M. White, Lara Gundel
106	Micropower	BPN562	BPN562 Website	AC Energy Scavenging for Smart Grid Sensing	Richard M. White
107	Micropower	BPN654	BPN654 Website	Electret-Based Voltage Sensing and Energy Harvesting from Energized Conductors	Richard M. White, Paul K. Wright
108	Physical Sensors & Devices	BPN505	BPN505 Website	Deployment of Wireless Stick-On Circuit Breaker PEM AC Sensors for the Smart Grid	Richard M. White, Paul K. Wright
109	Physical Sensors & Devices	BPN697	BPN697 Website	Natural Gas Pipeline Research	Richard M. White, Paul K. Wright
110	Package, Process & Microassembly	BPN712	BPN712 Website	Bridging Research-to-Commercialization Gaps through Facilitated Intermediaries	John M. Huggins
111	Package, Process & Microassembly	BPN480	BPN480 Website	AM Fitzgerald: MEMS Design, Prototyping, Modeling, Failure Prediction and Foundry Transfer	John M. Huggins
112	Package, Process & Microassembly	BPN354	BPN354 Website	The Nanoshift Concept: Innovation through Design, Development, Prototyping and Fabrication for MEMS, Microfluidics, Nano and Clean Technologies at the UC Berkeley NanoLab	John M. Huggins

Project Abstracts

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN359
Project Title	Fully-Integrated Micromechanical Resonator-Based Reference Oscillators
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, Oscillators
Researchers	Thura Lin Naing, Tristan Rocheleau
Abstract	This project aims to achieve a micromechanical-based reference oscillator that meets or exceeds the requirements of the GSM standard and investigates short-term stability of MEMS oscillators, particularly, phase noise and acceleration sensitivity. In addition to providing a highly accurate, on-chip frequency reference, a fully-integrated oscillator can achieve greater stability (particularly acceleration sensitivity) and far less power consumption than any comparable off-chip oscillator. In the process of achieving a fully-integrated oscillator, much of the research is expected to focus on low temperature metal processes that allow MEMS-last integration with MOS devices while retaining the stability and Q performance already offered by polysilicon counterparts.
Contact Information	thura@eecs.berkeley.edu, tristan@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen, Elad Alon

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN534
Project Title	Fully-Integrated Micromechanical Clock Oscillator
Status	Continuing
Funding Source	DARPA
Keywords	Oscillator, 32kHz, RTC, Real Time Clock, Fully Integrated MEMS
Researchers	Henry G. Barrow
Abstract	This project aims to develop a fully integrated micromechanical clock oscillator which outperforms current quartz-based clock oscillators in terms of both size and cost. A 32-kHz micromechanical resonator with a temperature coefficient better than 10 ppm over the commercial temperature range will act as the oscillator's reference. In addition, this oscillator will utilize an integrated fabrication process above modern transistor circuits in order to minimize device footprint and production expense.
Contact Information	hbarrow@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN433
Project Title	A Micromechanical Power Converter
Status	Continuing
Funding Source	DARPA
Keywords	Power Converter, MEMS Switch
Researchers	Yang Lin, Ruonan Liu
Abstract	The overall goal of this project is to demonstrate a switched-mode power converter (e.g., a charge pump) using micromechanical switching elements that allow substantially higher voltages and potentially higher conversion efficiencies than transistor-switch based counterparts.
Contact Information	linyang@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN435
Project Title	A Micromechanical Power Amplifier
Status	Continuing
Funding Source	DARPA
Keywords	MEMS switch, switching mode power amplifier, MEMS resonator
Researchers	Wei-Chang Li
Abstract	This overall project aims to demonstrate methods for amplifying signals with higher efficiency compared to transistor circuitry using strictly mechanical means for ultra-low-power signal processing applications.
Contact Information	wcli@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN434
Project Title	A Micromechanical RF Channelizer
Status	Continuing
Funding Source	DARPA
Keywords	micromechanical, RF, filter, mixer, channel selection, channelizer, ALD, capacitive gap scaling
Researchers	Mehmet Akgul
Abstract	Vibrating mechanical tank components, such as crystal and SAW resonators, are widely used for frequency selection in communication systems because of their high Q and exceptional stability. However, being off-chip components, these devices pose an important bottleneck against the ultimate miniaturization and performance of wireless transceivers. This project aims to explore the use of capacitively transduced micromechanical circuits to realize micromechanical mixer-filters with reconfigurable attributes. With their substantial size, cost and performance advantages, these devices can be used to realize a bank of tunable/switchable micromechanical filters for multi-band RF channel selection. By replacing all off-chip components with micromachined passive elements, micromechanical mixer-filters offer an alternative set of strategies for transceiver miniaturization and improvement. In the long term, this overall project aims to demonstrate an RF channelizer utilizing micromechanical elements in its signal path, exclusively, that presents one of the keys to eventually realizing a cognitive radio.
Contact Information	akgul@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN682
Project Title	Strong I/O Coupled High-Q Micromechanical Filters
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Robert A. Schneider
Abstract	This project will use the high-Q design techniques of traditional capacitive resonators to demonstrate novel low impedance (10-1000 Ohm) and high-Q (Q=10,000) resonators at VHF and UHF frequencies, that are mechanically coupled, to realize 2nd and 3rd order channel-select filters with fractional bandwidths of 0.1-1%, insertion losses of less than 2-dB and that can handle high out-of- band and in- band power. These filters will be implemented using capacitive-piezo AlN technology, to achieve higher Q's than those achievable using traditional AlN technology with contacting electrodes, while maintaining reasonably low impedance in a small form factor.
Contact Information	bschneid@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN676
Project Title	Q-boosted Optomechanical Resonators
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Turker Beyazoglu, Alejandro Grine, Karen Grutter, Tristan Rocheleau, Niels Quack
Abstract	This project aims to demonstrate optomechanical resonators with simultaneous high optical and mechanical quality factors for realization of a new class of low phase noise RF oscillators driven by radiation pressure of light. The proposed research will make it possible to boost the effective mechanical quality factor of an optical microcavity by coupling it to a high mechanical-Q resonator array. This resonant structure will in turn realize a low phase noise RF optomechanical oscillator.
Contact Information	turker@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen, Ming C. Wu

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN701
Project Title	Bridged Micromechanical Filters
Status	Continuing
Funding Source	DARPA
Keywords	Micromechanical Filters, High-order Filters,
Researchers	Jalal Naghsh Nilchi
Abstract	The overall project aims to explore the use of bridging between non-adjacent resonators to generate loss poles in the filter response toward better filter shape factor, sharper passband-to-stopband roll-off and better stopband rejection.
Contact Information	jalal.naghsh.nilchi@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN707
Project Title	High-Order Micromechanical Electronic Filters
Status	New
Funding Source	DARPA
Keywords	MEMS, micromechanical, filter, high-order, bandpass, rolloff, stopband, rejection
Researchers	Henry G. Barrow
Abstract	This project aims to develop multi-resonator micromechanical electronic filters for use in communication systems requiring bandpass filters with sharp rolloffs and large stopband rejections. A complete analysis of the design, fabrication and testing of filters comprised of 2-8 micromechanical resonators coupled by flexural mode springs will establish a greater understanding this exciting MEMS device. In addition, the implementation of an automated tuning scheme will provide complete corrective control over the filter’s passband by negating the effects of fabrication error.
Contact Information	hbarrow@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN709
Project Title	Tunable & Switchable Micromechanical RF Filters
Status	Continuing
Funding Source	DARPA
Keywords	micromechanical resonators, RF filters, channel selection, wideband filter
Researchers	Lingqi Wu
Abstract	This project aims to explore the use of on-chip capacitively transduced micromechanical resonators to realize RF filters with substantial size and performance advantages. With their extremely high quality factor in UHF range and strong coupling coefficient enabled by nanometer electrode-to-resonator gap spacings, capacitive-gap transduced micromechanical resonators should be able to realize both banks of narrowband filter for reconfigurable RF channel selection and wideband filters targeting fast data transmission.
Contact Information	wulingqi@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN625
Project Title	Direct Growth of High Quality III-V Semiconductors on Metal Foils for Low-Cost, High-Efficiency PVs
Status	Completed
Funding Source	Federal
Keywords	III-Vs, solar cells, photovoltaics
Researchers	Maxwell S. Zheng, Zhibin Yu, Rehan Kapadia
Abstract	The intrinsic advantages of III-V semiconductors for solar cells have been hobbled by the lack of low-cost substrates and processes, which has thus far limited market success of III-V solar cells. Here at Berkeley we are exploring a non-traditional approach which addresses these drawbacks. High optical quality polycrystalline InP films have been grown on non-epitaxial molybdenum substrates. Remarkably, these films with micron-sized grains have similar photoluminescence qualities as single- crystalline InP, and show great promise for high-efficiency, low-cost solar cells.
Contact Information	mzheng27@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN704
Project Title	Vapor-Liquid-Solid Growth of Polycrystalline Indium Phosphide Thin Films on Metal
Status	New
Funding Source	Federal
Keywords	Solar Cells, Photovoltaics, Indium Phosphide, InP, VLS, Thin Film
Researchers	Rehan R. Kapadia, Zhibin Yu, Maxwell Zheng, Corsin Battaglia, Peter Lobaccaro
Abstract	Here, we develop a technique that enables direct growth of III-V materials on non-epitaxial substrates. Here, by utilizing a planar liquid phase template, we extend the VLS growth mode to enable polycrystalline indium phosphide (InP) thin film growth on Mo foils.
Contact Information	r.kapadia@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN686
Project Title	Spatially Controlled Growth of III-V Semiconductors Toward Low-Cost and High-Efficiency PVs
Status	Continuing
Funding Source	Fellowship
Keywords
Researchers	Daisuke Kiriya, Maxwell Zheng, Rehan Kapadia, Zhibin Yu
Abstract	So far, extensive research has been carried out for III-V semiconductor materials from crystal growth to device fabrications. The reason for this is that III-V shows the highest energy conversion efficiency due to high absorption coefficient and optimal and direct band gap. However, there is problem for III-V applications, which is the high cost of raw materials. We are exploring a method which addresses this limitation. High optical quality crystals have been grown on selected tiny areas to make array of crystals such as on metal foils. This should be useful as a PV without any loss by shut pass or surface recombinations. This method would be useful for making high-quality and cost-effective method for III-V PVs.
Contact Information	kiriya@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN694
Project Title	Monolayer Semiconductor Devices
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Hui Fang, Mahmut Tosun, Steven Chuang
Abstract	Monolayer chalcogenides have recently been shown promising for future scaled electronics. We've reported high performance both n- and p- type field-effect transistors based on single layered (thickness, ~0.7 nm) WSe2 as the active channel with chemically doped source/drain contacts and high-k gate dielectrics. The top-gated monolayer transistors exhibit a high effective hole mobility of ~250 cm^2/V.s and electron mobility of 110 cm^2/V.s, perfect subthreshold swing of ~60 mV/dec, and ION/IOFF of >10^6 at room temperature. Special attention is given to lowering the contact resistance for electron or hole injection by degenerate surface dopings. The results here present a promising material system and device architecture for monolayer transistors with excellent characteristics. Different monolayer semiconductor heterostructures will also be explored.
Contact Information	huifang@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN634
Project Title	Low Voltage and Fast Response Actuators
Status	Continuing
Funding Source	NSF
Keywords	electrostatic actuator, low power, fast response
Researchers	Zhibin Yu
Abstract	The conventional electrostatic actuators are operated at very high voltage relative slow response which prevents them from useful applications in providing mobility for making microrobots. There has been a lot of study on making electrostatic actuators based on polymers such as acrylic elastomers, HS3 silicone and silicon NuSil. All these materials need over one thousands volts to operate. We are going to make low operation voltage and fast response actuators using nanowire polymer composites. We are going to deposit polymer thin films on vertically aligned nanotube (nanowire) forest grown on a Si substrate. Peeling off the polymer films results in nanotube (nanowire)-polymer composites with all the nanowires and nanotubes fully incorporated into the polymer matrix. By using this method we are going to explore several material systems such as CNT/silicone rubber, CNT/PVDF etc. The motivation for making nano material-polymer composites based actuators is that nano structured materials have potential advantage to enhance the local electric field and therefore lower the operation voltage for the actuators. Meanwhile, the mechanical property of the composite can be greatly improved for high force actuation.
Contact Information	zhbin.yu@gmail.com
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN698
Project Title	Nanomaterial-Based Macroscale Flexible Sensor System
Status	Continuing
Funding Source	NSF
Keywords	Sensors, Flexible, Nanomaterials,
Researchers	Kevin Chen
Abstract	We explore the integration of a system of wearable sensors designed for interaction with the surrounding environment. Sensors designed to detect touch, light, and temperature are explored and then integrated into an active matrix backplane of carbon nanotube transistors from which their outputs can be obtained. The whole system is fabricated upon a flexible substrate so that it can conform to the surface that it is attached to.
Contact Information	kqchen@eecs.berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN721
Project Title	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) Component Characterization
Status	New
Funding Source	DARPA
Keywords	LADAR, optical phase-locked loop, silicon photonics, 3D integration,
Researchers	Phillip A.M. Sandborn, Behnam Behroozpour, Niels Quack, Sangyoon Han
Abstract	Active III-V photonic components and passive Si photonic circuits are integrated with CMOS electronic circuits to create an integrated optoelectronic phase-locked loop. The OPLL will be utilized to generate an optical linear frequency chirp for target detection and ranging. One goal of the project is to develop the ability to fabricate 3D-integrated devices on the wafer level. This requires proper device and module characterization and a deep understanding of the integration process as well as system feedback parameters. Many characterization methods are being been developed and used to constrain device and module design parameters and predict LADAR performance before and after integration processes.
Contact Information	sandborn@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	Microfluidics
Project ID	BPN552
Project Title	Light-Actuated Digital Microfluidics (Optoelectrowetting)
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Digital Microfluidics, Droplet Microfluidics, Electrowetting, Optoelectrowetting, EWOD, Optofluidics
Researchers	Shao Ning Pei
Abstract	The ability to quickly perform large numbers of chemical and biological reactions in parallel using low reagent volumes is a field well addressed by droplet-based digital microfluidics. Compared to continuous flow-based techniques, digital microfluidics offers the added advantages such as individual sample addressing and reagent isolation. We are developing a Light- Actuated Digital Microfluidics device (also known as optoelectrowetting) that optically manipulates nano- to micro-liter scale aqueous droplets on the device surface. The device possesses many advantages including ease of fabrication (no lithography required) and the ability for real-time, reconfigurable, large-scale droplets control (simply by altering the low-intensity projected light pattern). We hope to develop Light-Actuated Digital Microfluidics into a powerful platform for lab- on-a-chip (LOC) applications.
Contact Information	shaoning@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN595
Project Title	Fast Optical Phased Array for 10MHz Beamforming
Status	Continuing
Funding Source	DARPA
Keywords	beam steering, beam focusing, MEMS, HCG
Researchers	Byung-Wook Yoo, Mischa Megens
Abstract	We developed an optical phased array incorporating a single-layer high-index-contrast sub-wavelength grating (HCG) for 2D beamsteering. There are a number of other approaches for optical phased arrays such as liquid-crystal-based phased arrays and microelectromechanical system (MEMS) phased array. Switching of liquid-crystal based phased arrays typically takes on the order of milliseconds. Arrays of MEMS mirrors moving perpendicular to the substrate are usually made of silicon so that a metal-coated layer is required on top, resulting in thermal induced stress when very high optical power application (~10 W) is applied. Our approach needs only a thin single-layer HCG made of silicon, widening its application in terms of high optical power, thanks to the highly reflective HCG across a wide bandwidth, and considerably improving its speed due to the low mass of the thin HCG. The measured resonant frequency of MEMS mirrors was 0.46 MHz. The 2D beamsteering angle was from -10 degrees to +10 degrees in both directions.
Contact Information	yoo@eecs.berkeley.edu
Advisor	Ming C. Wu, David A. Horsley

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN651
Project Title	Cavity Optomechanics Experimentation
Status	Continuing
Funding Source	DARPA
Keywords	Optomechanics, Radiation Pressure
Researchers	Alejandro J. Grine, Karen Grutter, Niels Quack, Tristan Rocheleau, Turker Beyazoglu
Abstract	Cavity optomechanics is a new and rapidly advancing field in which light is used to alter the properties of a mechanical element. Our project specifically aims to enhance mechanical motion by means of optical radiation pressure in a cavity of both high optical and mechanical quality factors. When enough light is built up in such a cavity, the mechanical self-oscillation results in precisely modulated light at the cavity output. Though there may be numerous applications for cavity optomechanics, we seek to use optomechanical oscillators as a replacement for power-hungry microwave oscillators in chip scale atomic clocks. This work focuses on the RF photonic experimentation necessary to characterize and improve microfabricated optomechanical devices for the target application which requires a low phase noise optical carrier oscillator capable of operating at 3GHz.
Contact Information	grine@eecs.berkeley.edu
Advisor	Ming C. Wu, Clark T.-C. Nguyen

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN498
Project Title	Integrated Silica Optomechanical Oscillators
Status	Continuing
Funding Source	DARPA
Keywords	actuator, waveguide, microdisk, resonator, silica
Researchers	Karen E. Grutter, Alejandro Grine, Niels Quack, Tristan Rocheleau, Turker Beyazoglu
Abstract	Optical microring/disk resonators are the central component in many micro-optical applications, including optomechanical devices. Optomechanical devices that use light to stimulate mechanical resonance have applications in displacement sensing, optical mixing, and reference oscillators. High optical Q is necessary for these applications, so we are exploring the use of silica, which has low optical loss. So far, using a wafer-scale reflow process, we have achieved an optical Q of 15 million and have observed self-excited optomechanical oscillations. We have also fabricated nitride optomechanical rings, which have lower optical Q but better phase noise performance for self-excited optomechanical oscillations.
Contact Information	kgrutter@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN678
Project Title	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, CMOS, VCSEL, HCG, PIC, FMCW LADAR, photonics
Researchers	Niels Quack, Behnam Behroozpour, Sangyoon Han, Phillip Sandborn
Abstract	Active III-V photonic components and passive Si photonic circuits are integrated with CMOS electronic circuits in this project. The modular MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) platform will make use of the high performance of the individual components and integrate (1) MEMS tunable VCSEL with high-index-contrast grating (HCG) mirrors, (2) photodetectors, (3) Si photonic waveguides, couplers, and interferometers, (4) high-efficiency vertical optical coupler between III-V and Si waveguides, and (5) CMOS circuits for frequency control and temperature compensation. In order to demonstrate the capabilities of the proposed MEPHI platform, a frequency-modulated continuous-wave laser detection and ranging (FMCW LADAR) source is being developed.
Contact Information	quack@eecs.berkeley.edu, behroozpour@berkeley.edu
Advisor	Ming C. Wu, Bernhard E. Boser

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN710
Project Title	Reconfigurable Silicon Photonic Integrated Circuits
Status	New
Funding Source	DARPA
Keywords
Researchers	Sangyoon Han
Abstract	Silicon photonics has emerged as one of the key technologies for data communications, especially in datacenters. Using standard CMOS fabrication steps, optical modulators, photodetectors, and passive optical components have been realized. The photonic circuits demonstrated so far are mostly static. We are interested in dynamically reconfigurable or tunable circuits in Si photonics, such as tunable filters or optical switches. In this project, we integrate MEMS with Si photonics on an silicon-on-insulator (SOI) platform. The optical waveguides and passive optical components are realized in the standard 220nm-thick SOI layer. We have added an additional Polysilicon layer on top of the SOI, separated by a low-temperature oxide (LTO) layer. The Polysilicon can be used to realize MEMS actuators, such as combdrive actuators or thermal actuators, as well as an additional high- refractive-index layer for controlling light. Our first demonstration vehicle is a tunable filter. The filter consists of a Fabry-Perot cavity formed between two waveguide reflectors. The reflector itself is made of Polysilicon grating on top of the SOI waveguide. We call this high-contrast-grating (HCG) reflector. The Polysilicon HCG reflectors released from the SOI waveguide, and are thus movable by MEMS actuators. We have integrated a combdrive actuator with the tunable filter. The transmission wavelength can be tuned by changing the cavity length. We have finished the development of the basic platform technology on 6-inch SOI wafers using deep-UV lithography, and have demonstrated optical grating couplers, waveguide splitters/combiners, and optical delay lines. We are in the process of optimizing our Polysilicon HCG reflector design, and hope to measure the performance of the device in a few months.
Contact Information	sangyoon@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN671
Project Title	Tunable Silicon Photonics for Microsecond Wavelength Selective Switching
Status	Continuing
Funding Source	NSF
Keywords	silicon, integrated, photonics, optical, switching, networking
Researchers	Anthony M. Yeh
Abstract	The wavelength selective switch (WSS) is a key enabling component for many optical circuit switching (OCS) architectures, which have the potential to allow datacenters to continue scaling beyond the cost and power efficiency constraints of current electrical networks. The applicability of these OCS networks in real-world datacenters is highly dependent on the speed and optical loss of the WSS elements. We have demonstrated a grating-based WSS in silicon photonics that improves on these metrics and allows greater integration potential relative to previously demonstrated MEMS-based WSS devices.
Contact Information	yeh@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN458
Project Title	Optical Antenna-Based nanoLED
Status	Continuing
Funding Source	Federal
Keywords	Plasmonics, Laser, Light Emitting Diode, Nanophotonics, Nanocavity, Optical Interconnects
Researchers	Michael Eggleston, Seth Fortuna
Abstract	Spontaneous emission has been considered slower and weaker than stimulated emission. As a result, light-emitting diodes (LEDs) have only been used in applications with bandwidth < 1 GHz. Spontaneous emission is inefficient because the radiating dipole is much smaller than wavelength and such short dipoles are poor radiators. By attaching an optical antenna to the radiating dipole at the nanoscale, the emission rate can be significantly increased enabling high modulation bandwidths theoretically >100 GHz. This project focuses on the physical demonstration of this new type of nanophotonic device. Current fabrication and experimental results of waveguide-coupled devices will be presented.
Contact Information	eggles@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN703
Project Title	Directly Modulated High-Speed nanoLED Utilizing Optical Antenna Enhanced Light Emission
Status	Continuing
Funding Source	Federal
Keywords	nano-photonics, optical antenna, photonics, optical interconnect, nanotechnology, optoelectronics, plasmonics
Researchers	Seth A. Fortuna, Michael Eggleston
Abstract	Coupling an optical antenna to a nanoscale light emitter has been shown to increase the spontaneous emission rate by compensating for the large size mismatch between the emitter and emission wavelength. This spontaneous emission rate enhancement has been predicted to be as large as several orders of magnitude, easily surpassing the stimulated emission rate and enabling high direct modulation bandwidths. The aim of this project is to utilize this concept to demonstrate a directly modulated nanoscale semiconductor light emitting diode (nanoLED) with modulation speeds in excess of 10s of GHz, exceeding the bandwidth of semiconductor lasers. Unlike lasers, such nanoLEDs are also inherently low-power and do not require minimum threshold current density for operation and are therefore a promising light generating source for use, for example, in intra-chip communication.
Contact Information	fortuna@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN609
Project Title	Optical Antenna-Based Photodetectors
Status	Continuing
Funding Source	Industry
Keywords
Researchers	Ryan Going, Tae Joon Seok
Abstract	As CMOS devices shrink in physical size, electrical interconnects between the devices will consume an ever-greater proportion of total chip power. A promising solution is to use silicon photonics for intra- and inter-chip communications. To be cost effective, both the optical transmitter and receiver should be made small, highly efficient, and CMOS compatible. Shrinking the photodiode will increase sensitivity and energy efficiency, but as it gets very small, the capacitance of the wire to the first amplifying stage in the receiver becomes significant. We present a solution which integrates the photodiode and first stage transistor in the form of an integrated germanium gate photoMOSFET. The rapid melt growth technique is used to integrate high quality single crystal germanium onto a silicon waveguide integrated device in a CMOS process. Due to the high quality of the germanium, the responsivity of the photoMOSFETs can be driven to over 10 A/W at 1550nm. Further scaling of these devices is possible only if the reduced absorption from a small size is addressed. Electromagnetic simulations describe a highly efficient metal-optic cavity, supporting efficient absorption in sub-fF scale devices.
Contact Information	rwgoing@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	Microfluidics
Project ID	BPN725
Project Title	One-Step Electrokinetic Nucleic Acid Preconcentrator for PCR-Based Point-of-Care Diagnosis
Status	New
Funding Source	Industry
Keywords	nucleic acid preconcentrator, PCR, diagnosis
Researchers	Chi-Cheng Fu, Qiong Pan, Brian N. Kim
Abstract	One of the key avenues to improving global health is to diagnose and control infectious diseases, such as HIV and malaria. Viral-specific nucleic acid (NA) amplification (such as polymerase chain reaction, PCR) is often used to meet such a requirement; however, complicated blood sample preparation (NA purification) by sophisticated equipments inevitably restricts its applications for portable point-of-care diagnosis, especially in third-world countries. For instance, solid phase NA extraction methods require a multistep protocol (NA binding, washing and elution) with pipetting and centrifugation. Here, we developed a one-step and ultra-rapid (10 min) method for separation of proteins (PCR inhibitors) and NA and preconcentration of purified NA (>100-fold). By simply applying low DC electric field (1-3V) to pairs of electrodes patterned in microfluidic chips, the positively and negatively charged molecules (protein and NA, respectively) can be separated based on electrophoresis and then concentrated in different downstream chambers for NA amplification. The ratio of the absorbance at 260nm and 280 nm of purified samples can be >1.8 to meet the standard requirement of NA purity. In addition, PCR results can show better (or equal) sensitivity and selectivity than gold standard NA purification kits. The simple one-step process, together with portable and integratable features, makes this electrokinetic sample preparation a promising universal module for point-of-care diagnosis.
Contact Information	chichengfu@berkeley.edu, pang.ya@gmail.com, briannkim@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN723
Project Title	Organ-on-a-chip for Personalized Medicine Development
Status	New
Funding Source	NIH
Keywords	Organ-on-a-chip, Induced pluripotent stem cell, human-on-a-chip, microfluidics
Researchers	SoonGweon Hong, Sanghoon Lee, Albert Kim
Abstract	A new era of drug discovery and development is being marched with the concept of “personalized medicine”. “Organ-on-a-chips or OCs” are one of the movements, which are to recapitulate 3- dimensional organ models in microfluidic culture platforms. By combining iPSC-derived human organ cells, individuals’ physiological response can be investigated so that the needs of animal model, inadequately representing human physiology, will be vanished in drug development in a near future. Herein, we are challenging the development of liver- and heart-on-a-chip for the two organs most frequently facing drug failure issues in the current market. Also we envision to expand the types of OCs to brain, muscle, gut and lung, in order to ultimately represent physiological response of human on a chip. Based on personalized iPSC-derived cells, investigations on individual OCs as well as interconnection between OCs will bring meaningful inquiries in pharmacokinetics and pharmacodynamics in personalized medicine.
Contact Information	gweon1@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN730
Project Title	Microfluidic Blood Plasma Separation for Point-of-Care Diagnostics
Status	New
Funding Source	Foundation
Keywords	Microfluidic, Blood plasma separation, Point-of-care
Researchers	Jun Ho Son, Sanghun Lee
Abstract	Microfluidic lab-on-a-chip (LOC) device for point-of-care (POC) diagnostics have been widely developed for the rapid detection of infectious diseases such as HIV, TB and Malaria. Blood plasma separation is an initial step for most blood-based diagnostics. Although, centrifuge method is the classical bench- top technique, it is time and labor intensive, and therefore, automation and integration of blood plasma separation in the LOC device is ideal for POC diagnostics. Here, we propose a novel microfluidic blood plasma separation device for POC diagnostics. This investigation will hopefully lead to a simple and reliable blood plasma separation device that can be utilized by individuals with minimal training in resource-limited environments for POC diagnostics.
Contact Information	jhson78@berkeley.edu, sanghun.lee@berkeley.edu, lplee@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN727
Project Title	On-Chip Single Molecule miRNA Detection for Cancer Diagnosis
Status	Continuing
Funding Source	Industry
Keywords	miRNA, Detection, Cancer
Researchers	Julian A. Diaz, Inhee Choi, Chi-Cheng Fu, Sang Hun Lee
Abstract	Early stage cancer diagnosis may mean the difference between a successful or an ineffective treatment. Therefore, development of methods that allow the detection of premature signatures of cancer are necessary. Mature microRNAs are short non-coding RNAs strands (~18-21 nt) involved in gene regulation of eukaryotic cells. In cancer cells some miRNAs appear over or under expressed, and serve as a markers to signal the presence of these malignancies. MicroRNAs, however, are present in very low concentrations, thus sensitive and multiplexed methods that detect specific miRNAs are needed to enable the patient with timely and better treatment of this disease. Currently, we are developing a method that offers sensitive, fast, and multiplexed detection of miRNAs in blood samples. This method can be easily adapted to chip technology paving the way to recognize miRNAs without the need of either sample preparation or enzymatic/chemical modification. Due to the multiplexed and sensitive capabilities of our device, we also expect it to provide accurate cancer type characterization.
Contact Information	jdiaz1@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN653
Project Title	Biologically-Inspired, Self-Activated Building Envelope Regulation System (SABERS)
Status	Continuing
Funding Source	NSF
Keywords
Researchers	Younggeun Park
Abstract	The objective of this work is to establish self-active building envelope regulation systems (SABERS) by integrating optical and hygrothermal sensor and actuator networks on a thin membrane. The system is specifically designed for lightweight membrane applications such as deployable emergency housing in tropical climates with the aim to supplant the use of traditional air conditioning systems responsible for the most significant energy expenditure in built environments in these regions. The expected outcome of this research is the development of a membrane prototype that consists of a self-activated opto-mechanical sensor/actuator polymeric network that controls airflow due to the temperature, light and humidity changes. It is composed by activating air mechanics (ventilation and dehumidification) though microvalves controlled by integrated optomechanical and hygrothermal sensors and actuators associated to an internal desiccant membrane to block moisture. SABERs will provide a basis for the future development of newly integrated environmental sensor technologies for thin film building membranes applicable to building climatic regulation (light and hygrothermal).
Contact Information	ygpark@berkeley.edu, ygpark221@gmail.com
Advisor	Luke P. Lee, Maria-Paz Gutierrez

 

Document Top Table of Projects	Microfluidics
Project ID	BPN679
Project Title	One-Step Point-of-Care Quantitative Nucleic Acid Detection Based on Digital Plasma Separation
Status	Continuing
Funding Source	Foundation
Keywords	point-of-care, diagnostics, microfluidics, rapid test, isothermal, amplification
Researchers	Erh-Chia Yeh
Abstract	We propose a one-step diagnostic device using isothermal nucleic acid detection to detect infectious diseases.
Contact Information	erh-chia-yeh@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	BioMEMS
Project ID	BPN715
Project Title	Stimuli Responsive Capsules for Drug Delivery and Diagnostic Applications
Status	New
Funding Source	KAUST
Keywords	Core-Shell Particles, Smart Capsules, Stimuli Responsive Capsules, Drug Delivery, Diagnostics
Researchers	Fatemeh Nazly Pirmoradi, Kosuke Iwai
Abstract	Particulate-based vaccines offer a safer alternative to traditional organism-based vaccines; however, their effectiveness to provoke immune response largely depends on the micro/nanodelivery systems carrying the antigen. In this project, we introduce a new class of functional microcapsules that offer the potential to not only overcome a number of hurdles associated with current particulate vaccine manufacturing technology (e.g., exposure of antigens to organic solvents or degradation during encapsulation), but also enable new functionalities for transporting the microcapsules and releasing their contents on-demand.
Contact Information	pirmoradi@berkeley.edu, k.iwai@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN574
Project Title	On-Chip Micro-Inductor
Status	Continuing
Funding Source	Industry
Keywords	Inductor, On-Chip, RF
Researchers	Kisik Koh
Abstract	On-chip inductors are key passive elements to high-power and radio frequency (RF) integrated circuits (ICs). This project aims to realize super-compact on-chip micro-inductor with magnetic media for high-power and RF IC's, including: 1) to explore low-loss, high resonance frequency magnetic material for inductor application; 2) to develop magnetic-material integration process; 3) to realize the super-compact magnetic-embedded inductor. The long-term objectives for this project are to resolve the current problem of lacking compact-size high-performance on-chip inductors, and then reduces the whole circuit cost significantly and helps the practical realization of RF systems-on-a- chip (SoCs) for real-world applications.
Contact Information	kskoh@berkeley.edu, lwlin@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	BioMEMS
Project ID	BPN473
Project Title	Next-Generation Microfluidic Components, Circuits and Systems
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Microparticles, Lab-on-a-chip, Microbeads, Dynamic Microarrays, Cells, Optofluidic Lithography,
Researchers	Ryan D. Sochol
Abstract	Mechanical engineering methods and microfabrication techniques offer powerful means for solving biological challenges. In particular, microfabrication processes enable researchers to develop technologies at scales that are biologically relevant and advantageous for executing biochemical reactions. Here, microfluidic and optofluidic methodologies are employed to develop autonomous microfluidic components, circuits, and systems for chemical and biological applications.
Contact Information	rsochol@me.berkeley.edu,
Advisor	Liwei Lin, Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN706
Project Title	Single-Layer Microfluidic Gain Valves via Optofluidic Lithography
Status	New
Funding Source	Fellowship
Keywords	microfluidic, gain, valve
Researchers	Casey C. Glick, Ryan D. Sochol, Christopher Deeble, Niloofar Shahmohammad, Ki Tae Wolf, Vishnu Jayaprakash, Kosuke Iwai
Abstract	This project aims to create single-layer microfluidic gain valves for use in microfluidic devices. Autonomous microfluidic devices are essential for the long-term development of versatile biological and chemical platforms; however, the challenges of creating effective control mechanisms – e.g., the need for variable pressure sources, signal degradation in cascaded devices, and multi-stage manufacture methods – have proven considerable. Using in situ optofluidic lithography, we develop a single-layer pressure-based valve system with a static gain greater than unity. We will demonstrate the device in several microfluidic circuits, including logic gates and amplifiers. These pressure gain-based systems will enable microfluidic devices with a wide range of applications, such as flow rectifiers, oscillators, and high-precision pressure measurements. Due to ease of manufacture and design flexibility, this valve design could have widespread Lab-on- a-Chip applications by enabling self-regulation of microfluidic devices.
Contact Information	cglick@berkeley.edu, rsochol@gmail.com, k.iwai@berkeley.edu, lwlin@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Microfluidics
Project ID	BPN586
Project Title	Integrated Finger-Powered Microfluidic Pumps for Point-of-Care Diagnostics
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Micropump, Microfluidics, Point-of-care Diagnostics, Lab-on-a-chip
Researchers	Kosuke Iwai, Ryan D. Sochol
Abstract	This project aims for developing a new 'human-powered' microfluidic system for point-of-care diagnostics applications. Chip- based microfluidics offers a promising platform for biological studies; however, bulky and expensive equipments such as syringe pumps limit the application. To minimize the total setup, we propose an alternative 'human-powered' fluid pumping device. Pressure generated by human finger works as a major power source to pump fluids into microfluidic devices without any electricity. As we use common softlithography fabrication process, our system can be easily integrated with existing microfluidic systems such as microdroplet generator or cell encapsulating system. In addition, it is possible, in the future, to apply injection molding to significantly reduce the cost for industrial applications. Our portable, easy-to-operate system offers an effective method for pumping fluid into microfluidic devices for expanding biological applications such as drug screening or point-of-care diagnostics.
Contact Information	k.iwai@berkeley.edu, rsochol@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Microfluidics
Project ID	BPN702
Project Title	A Continuous-Flow Microdroplets Lysis System
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Railing, Continuous Flow, Microdroplets, Lab-on-a Chip
Researchers	Kosuke Iwai, Ryan D. Sochol
Abstract	This Project aims for developing a versatile continuous-flow system for lysing microdroplet. Microdroplets have been widely utilized in diverse chemical and biological research and applications such as DNA sequencing or nanoparticle synthesis. Although highly robust and easy handling techniques of droplets are essential for those purposes, difficulties still remain in retrieving inner contents (e.g. cells, microbeads, biomolecules, reagents) of droplets for further experiments. Here we present a novel microfluidic system to achieve three distinctive accomplishments: (i) guiding droplets between different phase flows, oil flow and water flow, (ii) rapid washing process of surfactant on droplets, and (iii) quick and easy lysing of droplets and releasing their contents into water flow. The presented system offers a high-throughput method to wash and water-in-oil droplets for expanding droplet-based applications.
Contact Information	k.iwai@berkeley.edu, rsochol@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	BioMEMS
Project ID	BPN438
Project Title	Microengineered Technologies for Controlling Cellular Functions
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	cell migration, cell motility, cell locomotion, BAECs, microtopography, Durotaxis, Anisotropy, Elliptical, Mechanotaxis, Spatiotaxis, MicroSprings, Microposts, Micropillars,
Researchers	Ryan D. Sochol
Abstract	Mechanical engineering methods and microfabrication techniques offer powerful means for solving biological challenges. In particular, micro/nanofabrication processes enable researchers to engineer technologies at scales that are biologically relevant and advantageous for both controlling and sensing cellular functions. Here, novel micro/nanoengineered platforms are employed to investigate and regulate cellular processes.
Contact Information	rsochol@me.berkeley.edu
Advisor	Liwei Lin, Song Li

 

Document Top Table of Projects	BioMEMS
Project ID	BPN675
Project Title	Implantable Micro Drug Delivery System
Status	Continuing
Funding Source	KAUST
Keywords	Drug delivery, implantable, magnetic membrane, controlled delivery, external actuation, on-demand delivery
Researchers	Fatemeh Nazly Pirmoradi, Casey C. Glick
Abstract	Implantable drug delivery devices that allow for remote, repeatable, and reliable drug delivery are expected to greatly improve the efficacy of medical treatments in the near future. However, few delivery systems to date have met the necessary requirements – sufficient drug storage, precision control over drug delivery, and on-demand activation – to be broadly useful. In this project, we develop an implantable drug delivery device that can be remotely controlled and provide drug on the on-demand basis for several years without replacement. We develop drug release mechanisms and nanomaterials, and incorporate all the components into a biocompatible system by establishing new fabrication methods. These devices are characterized by conducting in vitro, ex vivo, and in vivo studies.
Contact Information	pirmoradi@berkeley.edu, cglick@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN708
Project Title	Direct-Write Graphene Channel Field Effect with Self-Aligned Top Gate
Status	Continuing
Funding Source	NSF
Keywords	Near Field Electrospinning, Graphene Transistor, Top Gate, Self Alignment
Researchers	Yumeng Liu
Abstract	The project amis at using Near Field Electrospinnin to fabricate top gate graphene transistor that is capable to pattern the source and drain electrodes through a self-alignment process, and the long range goals is to direct writing graphene transistors onto flexible and transparent substrate for low cost circuit applications, say RF mixer. As the conventional top gated device fabrication process often introduces the deposition of thin inorganic dielectric onto graphene layer with extra surface functionalizations, leading to an undesired damage of graphene lattice, or a non-ideal device geometry with excessive serial resistance or parasitic capacitance, here we investigate a self-aligned top gate graphene transistor process that could address those challenges by directly writing organic gate dielectrics onto graphene channel and precisely position the source, drain and gate electrode by self-alignment without significant overlappings or gaps between electrodes.
Contact Information	yumengliu@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN606
Project Title	Carbon Nanotube Films for Energy Storage Applications
Status	Continuing
Funding Source	Federal
Keywords	Carbon Nanotube, Supercapacitor, Energy Storage, Flexible
Researchers	Alina Kozinda
Abstract	As energy demands continue to rise, it becomes imperative to have efficient energy storage devices with high energy and power density. At the same time, the space inside devices continues to shrink, making energy storage devices which possess not only high energy/power density, but also an adjustable shape to fit into various form factors an ideal solution. Energy storage devices made from flexible electrodes could be attractive in a roll-up or surface-conformed format to minimize space usage. A mechanically flexible CNT supercapacitor electrode is demonstrated using a water solution-assisted film lift-off and densification process. The electrode exhibits the following three features: (1) each CNT has a natural contact to its as-fabricated current- collecting metal layer; (2) the CNTs and the bottom metal layer are intact during the water-assisted lift-off process; and (3) the in- situ liquid evaporation and densification process naturally occurs to dramatically increase volumetric energy density. Because of the ability of the film to be lifted off of its original growth substrate, the application for same-chip CMOS energy storage devices is feasible. In addition, this flexible CNT supercapacitor electrode has the potential to conform to various surfaces, as well as to be implemented in devices which are required to bend with use, such as in roll-up electronics.
Contact Information	kozinda@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN517
Project Title	Facile Synthesis of Nanostructures for Renewable Energy and Gas Sensing Applications
Status	Continuing
Funding Source	KAUST
Keywords	nanostructures, renewable energy, copper oxide, gas sensing
Researchers	Kevin Limkrailassiri
Abstract	Oxide semiconductors have been attracting great interest for renewable energy and sensing applications due to their earth- abundance, stability, and cost-effectiveness. In this project, we explore cupric oxide (CuO) nanowires, which are grown in highly dense and vertically aligned arrays via thermal oxidation of copper foil in ambient air. This material shows great promise for photoelectrochemical hydrogen evolution owing to a desirable electronic band gap and exceptional light-trapping properties. Initial results reveal a photocurrent comparable to other high-performing oxide photoelectrodes. In addition, we demonstrate a top contact methodology for instant integration of CuO nanowires for hydrogen gas sensing. This methodology provides a simple solution to the ongoing challenge of harvesting nanostructured materials for gas sensing application, bypassing laborious and expensive photolithography and thin-film metallization steps. In sum, these applications highlight the great versatility of CuO nanowires.
Contact Information	kevinlim@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN672
Project Title	Solar Hydrogen Production by Photocatalytic Water Splitting
Status	Continuing
Funding Source
Keywords	Solar energy, photocatalysis, titanium dioxide, nanostructures
Researchers	Roseanne H. Warren
Abstract	Photocatalytic water splitting is the process of converting water into hydrogen and oxygen with solar energy using a photocatalytic material. When light is absorbed by the photocatalyst, an electron-hole pair is generated that interacts with water molecules in a surface reduction- oxidation reaction to decompose the water into hydrogen and oxygen. One of the greatest challenges in photocatalysis is engineering the photocatalytic material for high conversion efficiency and wide absorption spectrum in the visible light range. Metal oxide nanomaterials have demonstrated promising capabilities as photocatalysts due to their high surface area-to- volume ratios, ability to be densely grown at large scales, cost-effectiveness, and stability in water. This project aims to improve the performance of metal oxide nanomaterials for water splitting, in particular TiO2 nanowires and TiO2-coated carbon nanotubes, using innovative growth processes, co-catalytic materials, and band-gap manipulation.
Contact Information	warrenr@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN722
Project Title	Ultrasonic Fingerprint Sensor Using Piezoelectric Micro-Machined Ultrasonic Transducer (PMUT)
Status	New
Funding Source	BSAC Member Fees
Keywords	Fingerprints, ultrasonic, MEMS, integrated circuits
Researchers	Hao-Yen Tang, Yipeng Lu
Abstract	The proliferation of electronic devices such as smartphones creates a pressing need for reliable biometric authentication. Present solutions such as capacitive fingerprint sensors have failed to gain wide acceptance due to there susceptibility to contamination from oils, perspiration, and dirt. Ultrasonic fingerprint sensors solve these problems but currently available devices too large and costly for deployment in consumer devices. The goal of this project is to fabricate a fingerprint sensor based on a piezoelectric micro-machined ultrasonic transducer (PMUT) array and integrated electronics. A test chip comprising an 8 by 24 array of PMUTs fabricated on a 125um pitch and per-transducer readout electronics is presently in fabrication.
Contact Information	b96901108@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	BioMEMS
Project ID	BPN649
Project Title	Magnetic Particle Flow Cytometer
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	magnetic flow cytometry
Researchers	Pramod Murali
Abstract	Flow Cytometry is a powerful technique used in health and disease diagnostics. This technique is used to analyze and sort individual cells of a biological sample. Some of the applications include, HIV and cancer detection, water quality monitoring, food safety among many others. Commercial equipments use laser source and an optical detector to study cells labeled with fluorescent molecules. Such an approach is expensive, bulky and suffers from optical background noise. We propose to replace the fluorescent markers with magnetic nano-particles (MNPs) to be detected by CMOS chips. Apart from eliminating the need for sample preparation, this approach has the advantage of being low cost, portable and disposable. Neel’s relaxation of MNPs leads to a frequency dependent complex susceptibility behaviour. The relaxation time constant depends on the nano-particle size and material. We use this phenomenon to distinguish different cells. Currently, we are in the process of characterizing different MNPs to observe Neel’s relaxation. Our goal is to combine the advantages of CMOS technology and the numerous applications of Flow Cytometry to meet the needs of point-of-care diagnostics.
Contact Information	pramodm@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	BioMEMS
Project ID	BPN685
Project Title	In-Vivo Imaging of Microscopic Residual Disease in Cancer
Status	Continuing
Funding Source	NIH
Keywords	cancer, imaging, radiation, surgery, breast, oncology
Researchers	Mekhail Anwar
Abstract	Successful treatment of early stage cancer depends on the ability to resect both gross and microscopic disease. Microscopic residual disease (MRD) can lead to increased risk for local recurrence (LR) and reduced overall survival (OS). Currently, no methods exist to intraoperatively assess whether individual cancer cells remain in the tumor bed; only post- operative pathologic evaluation of the tumor for molecular tumor markers, requiring several days in a laboratory setting, can definitely identify MRD. A prime example of this occurs in the over 50,000 women each year who are diagnosed with breast cancer, and are found to have MRD after lumpectomy. Elimination of MRD in breast cancer is known to reduce the need for second surgical procedures, half the LR rate from 30% to 15%, and increase breast cancer survival. Therefore a method of imaging MRD intraoperatively to guide complete resection is essential. This projects seeks to develop a method for intraoperatively identifying microscopic residual disease.
Contact Information	anwarme@radonc.ucsf.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN608
Project Title	FM Gyroscope
Status	Continuing
Funding Source	Federal
Keywords	gyroscope, calibration, rate-integrating, whole-angle
Researchers	Mitchell H. Kline, Igor Izyumin, Yu-Ching Yeh, Burak Eminoglu
Abstract	We present a gyroscope operating mode that reduces bias errors and scale factor drift and allows whole angle read-out. The gyroscope proof mass orbits in a circle at its natural frequency. An outside observer rotating under the proof mass then perceives a frequency change. If the observer rotates in the same direction as the orbital spin, the perceived frequency decreases, and in the opposite direction, the frequency increases. The addition of a second gyroscope that spins in the opposite direction enables a differential measurement, reducing temperature sensitivity. The frequency difference is exactly the angular rate; thus, the phase difference is the whole angle. Rate bias errors due to mechanical quadrature and cross-axis damping are periodic on the current angle of the proof mass relative to the sensor frame and are hence averaged out over one cycle. A 3-theta dual ring gyroscope chip with integrated CMOS buffer electronics and an off-chip controller demonstrates the technique.
Contact Information	mitchellk@berkeley.edu, izyumin@eecs.berkeley.edu, ycyeh@eecs.berkeley.edu, eminoglu@eecs.berkeley.e
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN485
Project Title	Ultrasonic Gesture Recognition on a Chip
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	MEMS, ultrasound, ultrasonic transducer, pMUT, piezoelectric, CMOS, rangefinder, distance sensor, depth sensor, gesture recognition
Researchers	Richard J. Przybyla, Hao-Yen Tang
Abstract	Optical 3D imagers for gesture recognition, such as Microsoft Kinect, suffer from large size and high power consumption. Their performance depends on ambient illumination and they generally cannot operate in sunlight. These factors have prevented widespread adoption of gesture interfaces in energy- and volume-limited environments such as tablets and smartphones. Gesture recognition using sound is an attractive candidate to overcome these difficulties because of the potential for chip-scale solution size, low power consumption, and ambient light insensitivity. Our research focuses on building an ultrasonic depth sensor system using batch-fabricated micromachined aluminum nitride (AlN) ultrasonic transducer arrays and custom CMOS electronics.
Contact Information	rjp@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN665
Project Title	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) System Demonstrator: High Resolution FMCW LADAR
Status	Continuing
Funding Source	DARPA
Keywords	Photonics
Researchers	Behnam Behroozpour, Niels Quack, Frank Rao, Phillip Sandborn
Abstract	In recent years we have seen a growing demand for 3D cameras for applications such as gaming, entertainment, and autonomous vehicles. Present solutions suffer from high power dissipation and large size. This project leverages wafer-level assembly of standard CMOS electronics with high performance optical components including lasers, photo-diodes, interferometers and waveguides to reduce size, cost and power dissipation.
Contact Information	behroozpour@berkeley.edu, quack@eecs.berkeley.edu
Advisor	Bernhard E. Boser, Ming C. Wu, Connie Chang-Hasnain, Eli Yablonovitch

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN713
Project Title	Ring GINA: Highly Miniaturized Ring-Format Wearable Mote
Status	New
Funding Source	Federal
Keywords
Researchers	Joseph Greenspun, David Burnett
Abstract	Computer input devices such as mice and keyboards have remained largely unchanged since the dawn of the personal computer. The Ring GINA platform is capable of sensing and interpreting a user’s hand and finger movements to emulate and enhance the functions of these standard input devices. A wearable platform frees the user from the need to know hand position relative to a keyboard or mouse, and grants the ability to perform gestures in open space or on any surface. Here, a method is presented that utilizes these rings as a text input system. In moving forward, efforts are being focused on creating a library of gestures to perform additional tasks, as well as further miniaturizing the mote and ring.
Contact Information	greenspun@eecs.berkeley.edu, db@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN683
Project Title	OpenWSN: A Standards-Based Low-Power Wireless Development Environment
Status	Continuing
Funding Source	Federal
Keywords	Wireless Sensor Networks, Protocol Stack, Ultra Low Power, Embedded systems, 802.15.4e, 6LowPAN, CoAP
Researchers	Xavier Vilajosana, Fabien Chraim, Qin Wang, Kevin Weekly
Abstract	The OpenWSN project is an open-source implementation of a fully standards-based protocol stack for capillary networks, rooted in the new IEEE802.15.4e Time Synchronized Channel Hopping standard. IEEE802.15.4e, coupled with Internet-of-Things standards, such as 6LoWPAN, RPL and CoAP, enables ultra-low power and highly reliable mesh networks which are fully integrated into the Internet. The resulting protocol stack will be cornerstone to the upcoming Machine-to-Machine revolution. OpenWSN is ported to numerous commercial available platforms from older 16-bit micro- controller to state-of-the-art 32-bit Cortex-M architectures. The tools developed around the low- power mesh networks include visualization and debugging software, a simulator to mimic OpenWSN networks on a PC, and the environment needed to connect those networks to the Internet. OpenWSN projects leads standardization efforts for ultra low power M2M networks while contributing with innovative protocols for scalable, distributed and energy efficient communications.
Contact Information	xvilajosana@eecs.berkeley.edu, chraim@eecs.berkeley.edu, pister@eecs.berkeley.edu, qinwang@berkeley.
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Micropower
Project ID	BPN648
Project Title	Fully-Integrated, Low Input Voltage, Switched-Capacitor DC-DC Converter for Energy Harvesting Applications
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	DC-DC Converter, Switched-Capacitor, Charge Pump, Energy Harvesting, Photovoltaics, Micropower
Researchers	Michael C. Lorek
Abstract	This project explores the design of a fully integrated, switched-capacitor DC-DC converter to convert small amounts of energy from photovoltaic or other low voltage energy sources. Clever bootstrapping techniques are used to ensure circuit startup without high-voltage or mechanical assists. Nanopower oscillator topologies are being investigated for minimum power and input voltage operation. Advanced timing schemes are used to minimize charge reversion loss and clock driver short circuit currents for increased efficiency. A boosted output voltage around 1.5V is targeted for compatibility with older CMOS technologies, offering a power advantage in heavily duty cycled applications where leakage is dominant. This work will enable the integration of CMOS circuitry and power supply on the same substrate for true single-chip, autonomous computing platforms.
Contact Information	mlorek@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN705
Project Title	Standard CMOS-Based, Fully Integrated, Stick-On Electricity Meters for Building Sub-Metering
Status	New
Funding Source	Federal
Keywords
Researchers	Michael C. Lorek
Abstract	We propose the development and testing of a system of technologies to minimize the installed cost of electricity sub-metering in buildings. This system utilizes non-contact, self-calibrating voltage and current sensors and wireless communication to eliminate the need for installation by an electrician, installation of conduit and enclosures, and installation of wired communication infrastructure. Electricity sub-metering is a critical component for continuous commissioning, fault detection and diagnosis, demand response, and other energy efficiency opportunities.
Contact Information	mlorek@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister, Steven Lanzisera

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN596
Project Title	Smart Fence and Other Wireless Sensing Applications for Critical Industrial Environments
Status	Continuing
Funding Source	Industry
Keywords	Gas Monitoring, Mobile Gas Sensing, Valve Position Monitoring, Machine Vibration Sensing, WirelessHART, Wireless Sensor Networks
Researchers	Fabien J. Chraim
Abstract	Following the successful showcase of the Smart Fence technology, this project aims at using MEMS and Optical Sensors in combination with Low-Power radios to implement industrial wireless sensing applications. Using inertial sensors, valve position monitoring and machine vibration sensing are added for safeguarding both personnel and equipment. Finally, gas leak detection is attempted using IR combustible gas sensors. This project is concerned both with the COTS-based hardware and software behind each application.
Contact Information	chraim@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	BioMEMS
Project ID	BPN729
Project Title	Functional Plastic Microstructures Fabricated Using Electroplating and Hot Embossing
Status	New
Funding Source	BSAC Member Fees
Keywords
Researchers	Jacobo Paredes, Kathryn Fink
Abstract	The overall goal of this research is the development of fabrication techniques for simple, cheap, and rapid creation of plastic or polymer based microfluidic devices. Currently microfluidic systems are made using PDMS because it is ideal for rapid laboratory research. However, PDMS is not an ideal material for commercialization because of its material and chemical properties especially for any applications that require hydrophilic compounds. Our long-term goals are to further explore the potential of hot-embossed microscale devices as platforms for complete BioMEMS devices. This includes the integration of flow diagnostic elements and silicon-based biosensors.
Contact Information	jparedes@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	BioMEMS
Project ID	BPN622
Project Title	Design of an Ex-vivo Prototype of a Bioartificial Kidney for Small Animals
Status	Continuing
Funding Source	Fellowship
Keywords	Microfluidics, BioMEMS, Artificial Kidney, Medical Devices
Researchers	Peter Soler
Abstract	The goal of this project is to design, fabricate, and study an implantable bioartificial rat kidney. The motivation behind the project is to further the development toward an implantable bioartificial human kidney that will improve quality of life and reduce cost for end stage renal disease (ESRD) patients. My proposed device contains two units: i) a hemofilter based upon nanoporous silicon membranes, and ii) a bioreactor composed of kidney proximal tubule cells. The focus of my study is to develop a device design that is optimized for adequate mass transport so as to mimic natural kidney function. The Roy group has pioneered work in membranes that have been engineered with the use of silicon-based microfabrication techniques to attain pore slits with a height of 8-11 nm. The fabricated nanoporous membranes allow for a device with tight pore size distribution, complete immunoisolation, and durability. These are critical membrane specifications that make them well suited for this application.
Contact Information	soler@berkeley.edu
Advisor	Dorian Liepmann, Shuvo Roy

 

Document Top Table of Projects	Microfluidics
Project ID	BPN695
Project Title	Hydrodynamics of Marine Larval Locomotion
Status	Continuing
Funding Source	NSF
Keywords	marine larvae, ocean, microscopic organisms, shear, extension, acceleration
Researchers	Rachel Pepper
Abstract	We want to understand how microscopic swimmers navigate in complicated flow fields where the ambient fluid flow speed is much greater than their swimming speed. Up to now, the motility of these organisms, ranging from bacteria to small planktonic animals, has been studied in still water. While this is an important first step, it is essential to connect the motion in still fluid to the locomotion of organisms in their more complicated natural environments. In flowing water, these organisms are carried by the flow around them and can make only minor adjustments to their trajectory by swimming or sinking. However, if these minor adjustments are applied strategically, they may take advantage of the flow to direct the organism to desirable habitats.
Contact Information	rachel.pepper@berkeley.edu
Advisor	Dorian Liepmann, Mimi Koehl

 

Document Top Table of Projects	Microfluidics
Project ID	BPN621
Project Title	Microfluidic Separation of Blood for SIMBAS Biosensor
Status	Continuing
Funding Source	NSF
Keywords
Researchers	Kathryn Fink
Abstract	The goal of this research is to characterize and optimize a continuous-flow, blood fractionation platform using particle image velocimetry to analyze the critical operating parameters. The microfluidic system will separate from a blood sample a platelet-enriched plasma containing pathogens and pathogenic biomarkers. It will also provide a stream of concentrated blood cells including pathogenic plasmodial cells. The project supports the development of a Universal Sample Preparation and Pre-Concentration (USB) module for the SIMBAS project.
Contact Information	kdfink@berkeley.edu, kdfink@gmail.com
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Microfluidics
Project ID	BPN711
Project Title	Point-of-Care System for Quantitative Measurements of Blood Analytes Using Graphene-Based Sensors
Status	New
Funding Source	NSF
Keywords	Biosensor, healthcare, graphene, microfluidics
Researchers	Jacobo Paredes, Kathryn Fink
Abstract	Serum glucose, cholesterol, triglyceride and HbA1C monitoring are all valuable tools in the health management of the aging population, especially given the increase in diabetes and cardiovascular diseases. Even for glucose monitoring, the challenges obtaining sufficiently accurate and reliable measurements are so significant that the FDA is contemplating more stringent standards. Guido Freckmann, et al., J. Diabetes Sci. Tech. 6, 1060-1075, 2012, have compared 43 blood glucose self-monitoring systems. Out of this, 34 systems were completely assessed and 27 (79.4%) systems fulfilled the minimal accuracy requirements and only 18 (52.9%) of 34 systems fulfilled the requirements of the proposed tighter criteria in the current standards draft. None of them meet the even more stringent requirement of ISO 2012 and FDA. Because inaccurate systems bear the risk of false therapeutic decisions and rising health care costs, there is an urgent need for significantly enhanced BG monitoring systems for PC applications. POC tests for other biomedically important analytes are generally even less accurate. The overall goal of the proposed research is to develop new sensor platforms that will provide increased sensitivity and accuracy in point-of-care situations. This is a joint project with Harvard Medical School and Vanderbilt University.
Contact Information	liepmann@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Microfluidics
Project ID	BPN719
Project Title	Single Cell Micro-Chambers for Circulating Tumor Cell Detection
Status	New
Funding Source	NSF
Keywords	biomems, CTCs, electrophoresis
Researchers	Gordon D. Hoople
Abstract	Circulating tumor cells (CTCs) play a critical role in understanding cancer; however they are not yet well understood. Currently only one device, a benchtop solution manufactured by Verdex, is approved for use by the United States Food and Drug Administration to detect CTCs. This research project focuses on developing a microfluidic lab-on-a-chip solution for detecting and working with circulating tumor cells. Previous research in single microwell encapsulation of erythrocytes will be leveraged to create a device to capture CTCs in individual wells and screen them through mechanical forces induced by electrophoresis and chemical analysis of the cytosol. This dual approach will yield greater statistics for determination of characteristics and chemical pathways of CTCs.
Contact Information	ghoople@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN720
Project Title	Selective Chemical Detection with Full Atom-Thick Material Platform
Status	New
Funding Source	Federal
Keywords
Researchers	Joanne C. Lo
Abstract	Selective chemical sensing has a wide range of application in health and environmental monitoring. A small and flexible sensor that can detect a wide range of chemicals with precision can enable a host of new inventions, including clothing that detects environmental pollutants and soldier helmets that sense hazardous gases. Two-dimensional materials, such as graphene and molydenum disulfide, have many sought-after properties that will enable the creation of such a sensor. This project utilizes theses unique properties, such as high electron mobility and voltage-tunable optical response, to create a platform that contains an array of functionalized chemical sensors and full 2D material circuits.
Contact Information	jlo@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Micropower
Project ID	BPN394
Project Title	QES: Micro LHP Chip Cooling System
Status	Continuing
Funding Source	DARPA
Keywords	thermal management, cooling, thermal ground plane, electronic power density
Researchers	Jim C. Cheng
Abstract	Thermal management of high power density electronics is an essential, enabling technology for next generation electronic systems. Phase change is the preferred choice for heat transport solutions because of the ability to absorb large heat fluxes through latent heat. Current technology uses macro- scale capillary driven systems such as Loop Heat Pipes (LHP) and thermosyphons, which are passive devices that have proved to be efficient and reliable. However, these devices do not allow for chip- level integration and do not scale well for future (and even current cutting-edge high-performance) electronic requirements. The goal of the microColumnated Loop Heat Pipe (µcLHP) project is to develop a "thermal ground plane" (analogous to an electronic ground plane) which is a uniform, isothermal substrate for transporting heat away from high power density electronic devices.
Contact Information	chengjcm@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Micropower
Project ID	BPN660
Project Title	QES: Micro LHP Chip Cooling System - Evaporator Design and Testing
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, electronics cooling, microfluidics, heat pipe
Researchers	Lilla M. Smith
Abstract	The micro scale loop heat pipe (Micro-LHP) is an ongoing research project dedicated to the design and testing of a new cooling system for thermal management of high-power electronics. With the high power densities of current and future power systems and high performance electronics, comes a continuing need for novel thermal management and cooling solutions. Some of the most promising solutions utilize phase change, such as micro loop heat pipes and vapor chambers. A leading topic for several years has been pool boiling with different surfaces to raise the critical heat flux (CHF) bar as high as possible. This research explores a promising alternate research path, away from pool boiling and CHF work, and into convective flow boiling (CFB) with micro textured pin fin surfaces, for the long-term goal of integration into a closed system with looping fluid. The major innovation of this work is the use of coherent porous silicon leading to a micro- patterned surface intended to maximize evaporation. The results detail both the function of the evaporator and the effect of different roughness patterning on the performance and stability of the evaporator region. Detailed here are the evaporator designs, experimental set ups, measurement techniques and results.
Contact Information	saffordl@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Micropower
Project ID	BPN670
Project Title	QES: Micro LHP Cooler - Coherent Porous Silicon Wick for High Heat Flux and Capillary Pumping
Status	Continuing
Funding Source	DARPA
Keywords	capillary pressure, CPS (Coherent Porous Silicon) wick, electronic cooling, LHP (Loop Heat Pipe), thermal ground plane
Researchers	Hongyun So
Abstract	The main goal of this project is to develop a new technique to fabricate the coherent porous silicon (CPS) wick and integrate it into the micro loop heat pipe (micro-LHP). Another goal is to optimize the pore size, pitch, porosity and wick thickness to maximize the heat flux and capillary pressure in the device. Through control of pore size, the flow resistance of the micro-LHP will be defined. Finally, the novel design of the CPS wick will significantly increase the efficiency of micro-LHP while preventing the severe problems such as bubble formation, liquid- vapor interface oscillation, and wick dry out. The micro-LHP is a two phase thermal ground plane device for chip-level, integrated cooling. This system draws significant heat flux from electronics when the operating fluid changes to the vapor phase. The porous wick, a key component of the micro-LHP, is located between evaporator and reservoir and it serves as the engine which achieves continuous fluid circulation. It feeds coolant to the evaporator surface, determines the capillary pumping capability of the overall micro-LHP system and serves as thermal barrier between the coolant channels and evaporator chamber. The traditional sponge-like porous wicks have a randomly distributed pore size and irregular flow path. On the contrary, three- dimensional porous structures made via ion- track etching, photolithography, and replica molding have complex fabrication process and restrictions on the device design.
Contact Information	hyso@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN658
Project Title	QES: Nano-Composite Capacitor for High Performance Energy Storage
Status	Continuing
Funding Source	KAUST
Keywords	Supercapacitor, Nanoparticle, Nanocomposite, Composite Material
Researchers	Anju Toor
Abstract	The goal of this project is to design and develop an innovative nanoparticle/polymer composite material and then apply this nanocomposite to the development of a supercapacitor module with high energy and high power density. A new technique for creating films of core/shell nanoparticles in a polymer matrix could allow cost effective fabrication of capacitors with enhanced energy storage capacity as compared to conventional devices. The module can serve as efficient energy storage for back-up power in buildings and for hybrid/electric vehicles where lack of fast recharging time, limits their usage.
Contact Information	atoor@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN687
Project Title	QES: Robust Optical Flame Detection in Harsh Environments
Status	Continuing
Funding Source	Industry
Keywords	UV sensor, ZnO nanowires
Researchers	Kaiyuan Yao, Roseanne Warren
Abstract	The goal of this project is to create a UV sensor for use as a flame detection system in gas turbine engine applications. In many gas-turbine engines, unnecessary engine shutdowns arise from sensors failing to detect the engine flame because of deep films of oil and/or water that block the sensor. In the infrared- and visible-light regions of the optical spectrum there is limited penetration through oil/water mixtures. A UV sensor is to be designed that will be able to robustly detect flames through oil/water mixtures that may build up on lenses in the gas turbine engine. Zinc oxide (ZnO) nanowire arrays have been identified as a promising approach to developing a harsh- environment UV sensor because of their ease of preparation, tunability of optoelectronic properties, and inexpensive and scalable device fabrication methods.
Contact Information	pencilyao@gmail.com, warrenr@berkeley.edu
Advisor	Albert P. Pisano, Liwei Lin

 

Document Top Table of Projects	Micropower
Project ID	BPN544
Project Title	HEaTS: Piezoelectric Energy Harvesters for Harsh Environments
Status	Continuing
Funding Source	Industry
Keywords	Energy harvesting, Harsh environment, Silicon Carbide, Aluminum Nitride, Piezoelectric
Researchers	Matilda Yun-Ju Lai
Abstract	This project aims to develop a micromachined piezoelectric energy harvester for pulsed pressure sources by utilizing silicon carbide (SiC) as the structural material and aluminum nitride (AlN) as the active piezoelectric element for operation within extreme harsh environments. The SiC/AlN energy harvesters have great potentials for integrating energy harvesting power source with SiC sensors and circuitry and enabling self-powered wireless sensing technology for structural health monitoring of harsh environment energy systems.
Contact Information	matildal@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN424
Project Title	HEaTS: SiC Thin-Film and Nanostructures for Harsh Environment Sensing and Energy Applications
Status	Continuing
Funding Source	DARPA
Keywords	Silicon Carbide, LPCVD, Nanowires, RF MEMS, Harsh Environment, Supercapacitors
Researchers	Ben Hsia, Shuang Wang
Abstract	Silicon Carbide (SiC) is a material of interest to fabricate sensors and actuators able to operate in harsh environments. Particularly, its mechanical and electrical stability and its chemical inertness make SiC well suited for designing devices capable of operation in high temperature and corrosive environments. Harsh- environment stable metallization remains one of the key challenges with SiC technology. We are developing novel metallization schemes, utilizing solid- state graphitization, to improve the long term reliability of metal/SiC contacts in high temperature environments. In addition, strategies to integrate on-chip energy storage with SiC sensors and actuators could increase the portability, mobility, and utility of these harsh environment devices. Our group is currently developing all-solid state supercapacitors based on yttria- stabilized zirconia (YSZ), a high temperature solid electrolyte, and SiC nanowire- or carbon-based electrodes. We are studying a variety of YSZ deposition techniques and their integration with a variety of high surface area electrodes to determine the optimum combination.
Contact Information	benhsia@berkeley.edu, w.shuang25@gmail.com
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN413
Project Title	HEaTS: Bonding of SiC MEMS Sensors for Harsh Environments
Status	Completed
Funding Source	Federal
Keywords	Silicon Carbide, SiC, induction, inductive, heating, bond, bonding, braze, brazing, solder, packaging, strain, sensors, geothermal, harsh, environments
Researchers	Matthew W. Chan
Abstract	Silicon Carbide (SiC) Sensors are appealing for harsh environment MEMS applications, specifically because of their stability in corrosive environments and their ability to withstand high temperatures. The long range goal of this project is to develop a robust process to bond SiC sensors to various metal components in a way that will avoid disrupting high-precision measurements of strain, acceleration, pressure, and temperature in high-temperature, high-pressure, corrosive environments. Traditional bonding methods such as soldering, brazing, and welding are not suitable for joining SiC with metals due to melting point restrictions and induced thermal stresses. The bond pursued in this work is specifically designed to mitigate thermal strains and permit for bonding temperatures lower than final operating temperature.
Contact Information	mattc@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN638
Project Title	HEaTS: SiC Devices and ICs for Harsh Environment Sensing
Status	Continuing
Funding Source	Federal
Keywords	Analog, High Temperature, IC, JFET, Mixed signal, Sensor, Silicon Carbide, SiC
Researchers	Ayden Maralani
Abstract	The main objective of this research is to design and develop low power Silicon Carbide (SiC) based transistors and Integrated Circuits (ICs) that can withstand the elevated temperature, up to 600°C. The fabricated ICs will be integrated with the SiC-based sensors to develop high temperature sensing systems for various harsh environment applications.
Contact Information	maralani@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN614
Project Title	HEaTS: 4H-SiC FET Technology for Harsh Environment Sensing Applications
Status	Continuing
Funding Source	Industry
Keywords	4H-SiC IC, SiC JFET, SiC MOFET, High temperature electronics
Researchers	Wei-Cheng Lien
Abstract	The goal of this research is developing a wireless, multichip sensing module for addressing the inefficiencies in energy use. By doing so, power systems can be advanced by integration of electronics (communication, signal processing, microactuator control, etc.) to be operated at high temperature. Silicon carbide (SiC) has become the candidate for harsh environment sensing technology because its wide bandgap (3.2 eV), excellent chemical stability, high breakdown electric field strength (3-5 MV/cm), and high saturated electron drift velocity (2E7 cm/s). The goal of my research project is to develop matched differential pair amplifiers using either 4H-SiC junction field effect transistors (JFETs) or 4H-SiC metal-oxide-semiconductor field effect transistors (MOSFETs)and integrated with MEMS-based silicon carbide (SiC) TAPS (Temperature, Acceleration, Pressure and Strain) sensors for extreme harsh environment applications.
Contact Information	wclien@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN663
Project Title	HEaTS: SiC Diodes and Rectifiers for Harsh Environment Sensing Applications
Status	Continuing
Funding Source	Industry
Keywords	Silicon carbide, diode, rectifier bridge, harsh environment, sensing
Researchers	Shiqian Shao
Abstract	The goal of this project is to develop harsh environment rectification and sensing circuits. The devices and circuits are designed in silicon carbide (SiC) wafer due to its extraordinary performance in harsh environment such as high temperature, corrosive chemical. SiC diodes and rectifier bridges is designed, fabricated and tested in my research project to develop harsh environment sensing system.
Contact Information	shao@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN644
Project Title	HEaTS: SiC Bipolar Junction Transistors for Harsh Environment Sensing Applications
Status	Continuing
Funding Source	Industry
Keywords	Silicon Carbide, Bipolar Junction Transistors, Harsh Environment Sensing
Researchers	Nuo Zhang
Abstract	The goal of this project is to develop silicon carbide (SiC) bipolar junction transistors (BJTs) for harsh environment sensing applications. The wide bandgap energy (3.2eV) and low intrinsic carrier concentration allow SiC semiconductor device to function at a much higher temperature than Si. Moreover, high breakdown field (3-5MV/cm), high-saturated electron velocity (2E7cm/s) coupled with high thermal conductivity (3-5W/cmK) permit extreme working conditions for SiC devices. The SiC BJT has the potential for low specific on-resistance, low turn-on voltage and high temperature operation, which makes it a suitable candidate for low power, high temperature applications. This technology will enable the integration of SiC electronic devices with MEMS-based SiC sensors, and the development of self-powered sensing system with wireless telemetry capability for harsh environment applications.
Contact Information	nuozhang@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN693
Project Title	HEaTS: Thermally Stable Aluminum Nitride Lamb Wave Resonators for Harsh Environment Applications
Status	Continuing
Funding Source	DARPA
Keywords	Lamb Wave Resonator, Temperature Compensation, Aluminum Nitride, Silicon Dioxide, Quality Factor, Electromechanical Coupling,
Researchers	Jie Zou, Chih-Ming Lin
Abstract	This project aims at developing high quality factor (Q), large coupling coeffecient (k2) aluminum nitride (AlN) Lamb wave resonators (LWRs) exhibiting low loss and thermally stable performance for wireless communications (e.g. oscillators or filters) in harsh environments. Current technology using thin AlN membrane structures have proved to enable a high phase velocity, low velocity dispersion of the Lamb wave employing the lowest order symmetric mode (S0), thus ensures a high frequency and offers robust designs with low sensitivity to technological tolerances. However, these devices do not allow for open bottom electrode configurations because of the low coupling coefficient, and the existence of the bottom electrode layer brings additional stress especially when temperature rises, which degrades Q and frequency stability. The goal of the thick AlN temperature compensated open bottom electrode LWR project is to develop thermally compensated LWRs with high Q and moderate coupling coefficient working at high temperatures.
Contact Information	jiezou@berkeley.edu, cmlin@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN616
Project Title	HEaTS: SiC Harsh Environment Pressure Sensors
Status	Continuing
Funding Source	Federal
Keywords	SiC HEaTS pressure sensor mems corrugated capacitive touch-mode AlN resonating piezoelectric membrane cluster
Researchers	Kirti R. Mansukhani
Abstract	The goal of this project is to develop MEMs pressure sensors to survive harsh environments. Harsh environments (high temperature, high pressure, high shock and/or corrosive conditions) are encountered in various applications such as automobile engines, turbines, space, downhole oil and gas drilling, and geothermal logging.
Contact Information	kirti@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN661
Project Title	HEaTS: SiC Thin-Film Flame Ionization Sensor
Status	Continuing
Funding Source	KAUST
Keywords	SiC, Combustion, Harsh Environment, MEMS, Flame Sensor
Researchers	David A. Rolfe
Abstract	This project seeks to construct a thermally-isolated, SiC thin-film, ionization sensor to measure the propagation speed of flames in combustion chambers. Silicon carbide has been chosen as the sensor material because it is a ceramic semiconductor with low surface energy and excellent mechanical and electrical properties at high temperatures. A prototype MEMS planar sensor array has been designed and fabricated for parametric testing of sensor material and geometry. It is currently undergoing testing using a controlled flame. Future work will incorporate parametric optimization and thermal isolation of the sensor surface to minimize quenching. The creation of a flame ionization sensor capable of withstanding combustion environments will allow for measurement of flame speed, location and propagation around walls of a combustion chamber. Possible future applications include the real-time monitoring of flame speed in individual internal combustion engine cylinders or the monitoring of flame stability in turbine applications.
Contact Information	rolfe@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Microfluidics
Project ID	BPN645
Project Title	Highly-Parallel Magnetically-Actuated Microvalves
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	microfluidics, microvalves, magnetics, bioMEMS
Researchers	Pauline J. Chang
Abstract	This project aims to develop highly-parallel, magnetically-actuated microvalves using CMOS- compatible technology. Current state-of-the-art microvalve technologies require extensive supporting experimental apparatus and do not yield true lab-on-a-chip functionality. Here, the focus is placed on true chip-scale valve arrays based on low-power, on-chip magnetic coils which are used to actuate 100 micron diameter magnetic spheres that serve as the valve sealing surface. Prior studies of magnetic bead manipulation by planar coils, spin-valve arrays, and rotating magnetic fields have focused on the transport of small 1~50 micron diameter microbeads. In this work, the paramagnetic beads are magnetized using an external permanent magnet, allowing milliampere-level currents to generate large bipolar actuation force for valve opening/closure. The magnetically-actuated valves are self-assembled over each coil in a large chip-scale array by dispersing beads onto the chip and magnetically trapping a bead on top of each valve seat. Successful development of this technology will have various applications in parallel chemical synthesis and bioanalysis devices.
Contact Information	pjch@ucdavis.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN599
Project Title	MEMS Electronic Compass: Three-axis Magnetometer
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Vashwar T. Rouf, Mo Li
Abstract	The goal of this is project is to develop a low-power three axis MEMS magnetic sensor suitable for use as an electronic compass in smart phones and portable electronics. Our objective is to achieve a resolution of 200 nT/rt Hz and power consumption of 5 mW/axis with DC power supply of 3.3V. To enable co-integration with a 3-axis accelerometer, we seek to optimize sensor performance without the need for a vacuum seal. Although past devices designed by our group have demonstrated that our resolution goal is reachable, these devices suffered from dc offset larger than Earth's field and required an external programmable oscillator for operation. Here, we aim to reduce offset by two orders of magnitude and develop self-oscillation loops to excite the sensor at its natural frequency.
Contact Information	vtrouf@ucdavis.edu,dahorsley@ucdavis.edu,moxli@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN642
Project Title	10 MHz Optical Phased Array Metrology and Control
Status	Continuing
Funding Source	DARPA
Keywords	optical beam steering, phased array, interferometry, high contrast gratings, MEMS, near-infrared
Researchers	Mischa Megens
Abstract	Very fast optical beam steering and wave front correction can be achieved by employing phased arrays of lightweight High Contrast Grating (HCG) MEMS mirror etalons. The etalons provide a large phase shift for a small displacement, 100x more than traditional reflective mirror elements. Operating such etalon arrays requires exquisite control of the MEMS mirror displacements. Our aim is to use in-situ stroboscopic interferometric imaging of the etalons to ensure phase accuracy and combat long term-drift, while employing feed-forward electrical input shaping to achieve fast settling time and precise phase tracking in a power-efficient way.
Contact Information	megens@eecs.berkeley.edu, dahorsley@ucdavis.edu
Advisor	Dave A. Horsley, Ming C. Wu

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN466
Project Title	Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers
Status	Continuing
Funding Source	DARPA
Keywords	Aluminum Nitride, Piezoelectric, Ultrasound Transducers, MEMS
Researchers	Stefon Shelton, Ofer Rozen
Abstract	The objective of the current research is to fabricate and characterize air-coupled aluminum nitride piezoelectric micromachined ultrasound transducers (pMUTs) for use in range finding and gesture recognition applications. MEMS Aluminum Nitride (AlN) piezoelectric sensor technology has been chosen due to the relatively simple deposition process and compatibility with CMOS technology which enables the potential integration of the sensor and drive electronics on the same chip. Guided by both analytic and finite element models the optimum design parameters are chosen to obtain the desired resonant frequency, bandwidth, maximum output sound pressure for the transmitter, and maximum sensitivity for the receiver. We are currently exploring both fully clamped and partially released circular membrane designs for single element and 2-D transducer arrays.
Contact Information	seshelton@ucdavis.edu, orozen@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN628
Project Title	High Frequency Piezoelectric Micromachined Ultrasound Transducers
Status	Continuing
Funding Source	Federal
Keywords	piezoelectric, ultrasound transducers, Aluminum Nitride, medical imaging, biometrics
Researchers	Yipeng Lu, Stefon Shelton
Abstract	The goal of the current research is to design and fabricate high frequency (40MHz) Aluminum Nitride (AlN) piezoelectric micromachined ultrasound transducers (pMUTs) to be used in photoacoustic and pulse echo imaging, such as real time three dimensional medical imaging and biometric fingerprint authentication. Piezoelectric membranes are to be fabricated and tested in annular arrays which enable acoustic focus control and/or phased array beam. These will then be integrated above CMOS on a silicon substrate.
Contact Information	yplu@ucdavis.edu,dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN603
Project Title	Hemispherical Resonator Gyro
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, Gyroscope, Silicon Wet Etch, Diamond
Researchers	Amir Heidari, Chen Yang, Hadi Najar, Parsa Taheri
Abstract	The goal of this project is to realize a micro rate-integrating gyroscope that produces an output signal proportional to rotation angle rather than rotation rate. If successful, this device would eliminate the need of integrating the gyroscope's rate output to obtain the angle. Realizing a micro rate-integrating gyroscope can be achieved by fabricating hemispherical resonating shells with extremely close frequency matching (Δf < 10 Hz) and a very high quality factor (Q > 1 million). Structures must be highly axisymmetric and micro-finished to nanometer scale roughness.
Contact Information	dahorsley@ucdavis.edu, aheidari@ucdavis.edu, chenyang@berkeley.edu, hnajar@ucdavis.edu, ptaheri@ucda
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN684
Project Title	Integrated Microgyroscopes with Improved Scale-Factor and Bias Stability
Status	Continuing
Funding Source	DARPA
Keywords	gyroscope, inertial sensor, signal processing, CMOS
Researchers	Jason Su, Sarah Nitzan
Abstract	Despite their small size, low power dissipation, and low cost, the large bias and scale factor errors of current MEMS inertial sensors preclude using them for dead reckoning navigation. Although these shortcomings can be overcome with precision manufacturing and extensive calibration, such solutions suffer from high cost and secondary effects such as long term drift. Presently, the use of in-situ calibration techniques in MEMS sensors is limited to the electronic interfaces, where they are instrumental for reducing drift arising from electronic components. This project extends the benefit of electronic background calibration to the MEMS transducer to continuously reduce scale factor and bias errors arising from manufacturing tolerances and drift.
Contact Information	dahorsley@ucdavis.edu, sarah.nitzan@gmail.com, thssu@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN655
Project Title	Materials for High Quality-Factor Resonating Gyroscopes
Status	Continuing
Funding Source	DARPA
Keywords	MEMS gyroscopes, inertial sensors, surface micromachining, High Q materials, CVD diamond
Researchers	Hadi Najar, Amir Heidari, Chen Yang
Abstract	This project will investigate new materials suitable for achieving Q-factors in excess of 1 million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and surface losses will be performed using resonator test structures. The effect of doping and microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined double ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond (NCD) and microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying levels of Boron doping. Higher boron doping resulted in reduced Q due to defect losses. Moreover, thermal conductivities of diamond films were measured using TDTR technique for further mapping of theory and experiment.
Contact Information	dahorsley@ucdavis.edu, hnajar@ucdavis.edu, chenyang@berkeley.edu, aheidari@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	BioMEMS
Project ID	BPN716
Project Title	Neural Dust: An Ultrasonic, Low Power Solution for Chronic BrainMachine Interfaces
Status	New
Funding Source	Fellowship
Keywords	brain-machine interfaces, ultrasonic energy transfer and harvesting, backscatter communication
Researchers	Dongjin Seo
Abstract	A seamless, high density, chronic interface to the human brain is essential to enable clinically relevant applications such as brain- machine interfaces (BMI). Currently, a major hurdle in BMI is the lack of an implantable neural interface system that remains viable for a lifetime due to the development of biological response near the electrode. Recently, sub-mm implantable RF-based wireless neural interfaces have been demonstrated in an effort to extend system longevity, but the implant size scaling (and therefore density) is ultimately limited by the power available to the implant. Therefore, my project investigates an entirely new method of wireless power and data telemetry using ultrasound, which can address fundamental issues associated with using RF to interrogate miniaturized implants, and enable scaling of implants down to 10's of um. Such ultra-miniature as well as extremely compliant implantable neural interface (we call neural dust) has the potential to allow massive scaling in the number of neural recordings from the brain while providing a path towards truly chronic BMI.
Contact Information	djseo@eecs.berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN717
Project Title	Proof of Concept: Self-Assembly of a Multi-Cellular Synthetic-Biological Hybrid
Status	New
Funding Source	Office of Naval Research (ONR)
Keywords	synthetic biology, multicellular patterning, microfluidics, microbiorobotics
Researchers	Tom J. Zajdel, Robin A. Herbert
Abstract	This year-long proof of concept explores the interplay between bacterial communication circuits and the surface topology of the substrate they are on, to see if certain designed surface features can be made to trigger genetic development switches. Differentiation due to a diffusible chemical signal is central in the development of multicellular organisms. Success in replicating this strategy on a synthetic structure enables a spatially programmable consortium of bacterial cells. Our aims were to enable the self-assembly of multicellular microbial films on the surface of synthetic silicon and polymer forms to form hybrid constructs, generation of construct polarity in gene expression driven by the topology of the synthetic form, and size control of the assembled multicellular film. These achievements would enable our long term vision, which is to create a micro scale, programmable cellular-synthetic hybrid robot capable of autonomous motility, sensing and response in aqueous environments. These millimeter-scale constructs would be fabricated through synthetic biological self-assembly and will allow the seamless fusion of control techniques that rely on both gene expression and cell-level sensing, actuation and computation.
Contact Information	zajdel@eecs.berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN718
Project Title	Direct Electron-Mediated Control of Hybrid Multi-Cellular Robots
Status	New
Funding Source	Office of Naval Research (ONR)
Keywords	microbiorobotics, synthetic biology, biosensors, stochastic control, hybrid biological systems, bacterial electrophysiology
Researchers	Tom J. Zajdel, Robin A. Herbert
Abstract	We propose to design, fabricate and test a millimeter-scale, programmable cellular- synthetic hybrid robot capable of autonomous motility, sensing and response in aqueous environments. Three integrated technologies will make this possible: 1) two-way electron transfer between an electrode and E. coli for rapid communication between abiotic core and cells; 2) a flexible polymer + CMOS sensing and computation abiotic core; 3) synthetic cell adhesion genes which allow for patternable self-assembly of bacterial cells onto the abiotic substrate. If successful, this will be the first demonstration of a millimeter-scale synthetic autonomous multi- cellular hybrid with organic and man-made components. These constructs, self-assembled through a methodology which allows for the programmable incorporation of synthetic components. A primary goal of this work will be to enable abiotic/biotic two-way communication via electron transfer channels engineered into cells in contact with electrodes on the abiotic component. We suggest that such a fusion would enable control techniques that rely on combinations of gene expression, cell- level sensing / actuation and CMOS digital computation.
Contact Information	zajdel@eecs.berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN714
Project Title	Electronic Bandage for Wound Healing
Status	New
Funding Source	NSF
Keywords	Wound Healing, Impedance Spectroscopy
Researchers	Amy Liao, Monica Lin
Abstract	Electrical stimulation has been shown to play a large role in the wound healing process by affecting angiogenesis, cell migration, antibacterial effects, etc. However, current electronic therapies have been limited to devices that can be safely and easily removed from patients because of the toxicity of the degradation products from the electrical components . Therefore, we propose a novel flexible "electronic bandage"ť that can be safely absorbed by the body. These bioresorbable systems will provide high-resolution, in-body mapping of the impedance field in the wound area in a minimally invasive way, providing significant knowledge and fundamental understanding of cell recovery in a number of medical procedures. These devices will also provide physicians with a way to monitor and eventually stimulate internal wound healing.
Contact Information	amy.liao@berkeley.edu, monica.lin@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN731
Project Title	Flexible Electrodes and Insertion Machine for Stable, Minimally-Invasive Neural Recording
Status	New
Funding Source	DARPA
Keywords	neural recording, scalable, flexible, surgical robot, minimally invasive
Researchers	Timothy L. Hanson
Abstract	Current approaches to interfacing with the nervous system mainly rely on stiff electrode materials, which work remarkably well, but suffer degradation from chronic immune response due to mechanical impedance mismatch and blood-brain barrier disruption. This current technology also poses limits on recording depth, spacing, and location. In this project we aim to ameliorate these issues by developing a system of very fine and flexible electrodes for recording from nervous tissue, a robotic system for manipulating and implanting these electrodes, and a means for integrating electrodes with neural processing chips. We have fabricated a first batch of parylene and platinum electrodes and demonstrated their insertion into an agarose brain tissue proxy using a notched tungsten needle, and have fabricated a first revision of an inserter robot. This utilized a micromachined belt mechanism for advancing electrodes into position, but this proved impractical due to difficulty in loading and that blood tends to wick up the electrodes and coagulate. To remedy these issues, we have designed a second revision of the inserter robot that uses replaceable electrode cartridges compatible with revision two of the electrodes, and are in the process of fabricating both. Simultaneously we are working with BSAC members Will Biederman and Dan Yeager to make electrodes compatible with the neural recording and stimulation chip they are designing.
Contact Information	tlh24@phy.ucsf.edu
Advisor	Michel M. Maharbiz, Philip N. Sabes

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN726
Project Title	Transparent Microelectrode Arrays for Hybrid Experiments in Neuroscience
Status	New
Funding Source	BSAC Member Fees
Keywords	MEMS, neural, optogenetics, electrocorticography
Researchers	Brian Pepin, Peter Ledochowitsch
Abstract	Optogenetics techniques that have been developed over the previous decade allow cell-type specific optical stimulation of neurons in-vivo. However, it remains a challenge to perform simultaneous electrical recording while providing optical stimulation due to photoelectric artifact generated at the microelectrode recording sites. This project aims to address this challenge by developing bio- compatible microelectrode arrays with optically transparent recording sites. Current devices are optimized for performing electrocorticography (ECoG) experiments and use Indium-Tin Oxide (ITO, a transparent conductive oxide) as the electrode material. Preliminary characterization of the arrays indicate electrode impedances as low as 100kOhm and show no photoelectric artifact. These micro- ECoG (uECoG) arrays are currently being validated in a variety of novel hybrid neuroscience experiments combining optical stimulation with electrical recording, both at Berkeley and with collaborators at other universities.
Contact Information	pepinb@eecs.berkeley.edu
Advisor	Michel M. Maharbiz, Timothy J. Blanche

 

Document Top Table of Projects	BioMEMS
Project ID	BPN573
Project Title	Carbon Fiber Microelectrode Arrays for Chronic Stimulation and Recording in Insects
Status	New
Funding Source	BSAC Member Fees
Keywords	carbon fiber microelectrode electrode array insect electrophysiology chronic stimulation recording fly
Researchers	Travis L. Massey
Abstract	This project aims to create an array of carbon fibers for insect electrophysiology.
Contact Information	tlmassey@eecs.berkeley.edu
Advisor	Michel M. Maharbiz, Kristofer S.J. Pister

 

Document Top Table of Projects	BioMEMS
Project ID	BPN571
Project Title	Implantable Microengineered Neural Interfaces for Studying and Controlling Insects
Status	Continuing
Funding Source	Federal
Keywords	insect, vision, neural interface, micro aerial vehicle
Researchers	Joshua van Kleef, Daniel J. Cohen, Keegan Mann
Abstract	Our goal is to control the flight of an insect by hijacking its sensory systems. Although significant funding has gone into developing micro air vehicles (MAVs, wingspan< 15cm), flying insects still significantly outperform the most sophisticated flying robots in efficiency, flight time, stability and maneuverability. The restrictions that such a small spatial scale places on the amount of energy that can be stored on-board and on actuator efficiency, means this gap is expected to continue for some years to come. We are therefore pursuing a novel MAV design that uses an actual flying insect. We aim to produce small insect backpacks capable of receiving commands remotely and providing power to a combination of neural and optical stimulators. The patterns of stimulation will allow us to trick the insects motor-sensory system into responding to fictitious self-movements. We aim to use these ‘ghost’ stimuli to remote-control the insect’s flight while at the same time capitalizing on their remarkable natural flying abilities.
Contact Information	vankleef@berkeley.edu, dancohen@berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN584
Project Title	Design, Fabrication and Testing of a High Density, Large Area µECoG Array
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	ECoG, EEG, neuro prosthetics, neural interface, neural probe
Researchers	Peter Ledochowitsch, Raphael Tiefenauer
Abstract	Electrocorticography (ECoG) strives to bridge the gap between traditional electroencephalography (EEG) and microneedle array recordings. While requiring a craniectomy, ECoG does not damage cortical tissue and is thus less invasive than microneedles. ECoG can achieve significantly higher spatiotemporal resolution than EEG because ECoG-electrodes are placed much closer to the signal sources in the brain. Commercially available ECoG arrays feature a small number of channels (<64) and a large electrode pitch (> 4 mm). Such coarse arrays likely undersample the signals available on the cortex surface. There is currently no agreement on the optimal inter-electrode pitch in the community and surprisingly little research has been published on the topic of optimal inter- electrode spacing for ECoG. I am designing, fabricating, packaging and testing a flexible, large-scale (>256 electrodes) high- density (pitch < 0.5 mm) ECoG array. Scaling-down an ECoG array and increasing the number of recording sites poses many engineering challenges in terms of SNR, interconnects complexity and device lifetime. Addressing these challenges lies at the heart of my project. Data collected from the array in vivo will allow conclusions about optimal electrode spacing and size. All devices will be optimized for decreased impedance resulting in better SNR.
Contact Information	ledochowitsch@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN699
Project Title	A Modular System for High-Density, Multi-Scale Electrophysiology
Status	New
Funding Source	NSF
Keywords	Neuroengineering, Nanoprobes, Optogenetics, ASIC, BioMEMS
Researchers	Maysamreza Chamanzar
Abstract	Truly large-scale electrophysiology simultaneous recording of thousands of individual neurons in multiple brain areas remains an elusive goal of neuroscience. The traditional approach of studying single neurons in isolation assumes that the brain can be understood one component at a time. However, in order to fully understand the function of whole brain circuits, it is essential to observe the interactions of large numbers of neurons in multiple brain areas simultaneously with high spatiotemporal resolution. This project will establish a complete system for multi-scale electrophysiology in awake, freely behaving mice, using state-of-the-art nano neural interfaces comprising of tiny silicon probes integrated with on- chip optical waveguides and compliant monolithic polymer cables connected to a unique light-weight head-mounted recording system built around a commercially available application specific integrated circuit (ASIC) that has been custom designed for electrophysiological recordings, combining signal amplification, filtering, signal multiplexing, and digital sampling on a single chip. We demonstrate the high-resolution excitation of channelrhodopsin-expressing neurons imaged on a two-photon microscope by evoking action potentials in different parts of cortex. The entire process, including post-fabrication system integration, has been designed to leverage existing consumer manufacturing processes, making our probe technology mass-producible and widely accessible at low cost.
Contact Information	chamanzar@berkeley.edu
Advisor	Michel M. Maharbiz, Timothy J. Blanche

 

Document Top Table of Projects	BioMEMS
Project ID	BPN690
Project Title	Manipulating Cellular Behavior and Wound Healing via Local Electric Field Stimulation
Status	Continuing
Funding Source	Federal
Keywords	medicine, tissue engineering, microfabrication, bioengineering
Researchers	Daniel J. Cohen
Abstract	One of the first things that happens when you cut your skin is that a DC electric field arises at the wound site. This field, first discovered in the mid-1800s, is called 'the wound field', and has been shown to exist in a variety of forms in a variety of wounds. The salient point of the wound field is that there is reason to believe that we may be able to manipulate it to improve how our injuries heal in certain cases. In particular, we are considering assisting healing of injuries to skin, intestine, and bone using a device that can encompass the wound site, monitor particular physiological metrics (pH, endogenous electric signals, etc.), and electrically stimulate the wound to improve the quality and rate of healing. In order to better define how this device will look, we are currently conducting in vitro testing with our own microfabricated stimulation devices and epithelial cells that are involved in natural wound healing. While it has long been known that such cells will orient and move in the presence of DC electric fields, we are not aware of prior efforts to explore the degree of control that can be achieved by dynamically manipulating local electrical fields. For instance, if we take a cluster of cells and apply a localized field over just part of that cluster, can we locally sculpt the developing tissue? An interesting detail of this approach is that many of the analytical techniques we will be using are derived directly from those used to study emergent behavior in herding sheep, flocking birds, schooling fish, and large crowds of humans. Our goal is to use the minimum control inputs necessary to effect system level change in a tissue. Depending on how successful this is, these approaches could provide new ways of interacting not just with injuries but also with laboratory tissue engineering where we try to recapitulate the developmental environment to regenerate damaged organs or grow new organs.
Contact Information	daniel.cohen@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN518
Project Title	Synthetic Turing Patterns
Status	Continuing
Funding Source	Federal
Keywords	synthetic biology, pattern generation, developmental biology
Researchers	Justin Hsia, William J. Holtz
Abstract	Understanding symmetry breaking is at the heart of developmental biology, from the origins of polarity, cellular differentiations, and how the leopard got its spots, as well as crucial to the future engineering of complex cellular ensembles. Alan Turing proposed a simple mathematical model that explains how the reaction-diffusion mechanism can cause an initially uniform concentration in an ensemble of cells to spontaneously become non-uniform and form patterns (Turing patterns). To date, no true synthetic Turing patterns have been created using gene networks, so our goal is to design and implement the first synthetic gene circuit that can spontaneously produce patterning via diffusion-driven instability in an ensemble of cells (E. coli). In addition, the main engine driving Turing pattern formation is a robust nonlinear circuit, such as a bistable or oscillatory network. Creating these nonlinear circuits will be beneficial both as a major step in the eventual creation of Turing pattern generators as well as modular circuits for synthetic biology.
Contact Information	jhsia@eecs.berkeley.edu, arcak@eecs.berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor	Michel M. Maharbiz, Murat Arcak

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN448
Project Title	Integrity Assessment of Underground Power Distribution Cables
Status	Continuing
Funding Source	State
Keywords	MEMS, Power, Passive,proximity, Sensor, Wireless, Water Tree
Researchers	Igor Paprotny, Eric Talamantez
Abstract	A serious worldwide infrastructure problem is the sudden, often dramatic failure of underground high- voltage AC power distribution cables. This research is aimed at finding economical ways of measuring the health of in-service cables operating at tens of kilovolts, to permit their selective replacement.
Contact Information	rwhite@eecs.berkeley.edu
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN392
Project Title	Mobile Airborne Particulate Matter Monitor for Cellular Deployment
Status	Continuing
Funding Source	Industry
Keywords	MEMS, Wireless, Particulates, Sensor, Mobile
Researchers	Igor Paprotny, Adam Tornheim, Ben Gould, Rose Haft
Abstract	This project involves optimization of a portable MEMS-based instrument that quantifies and differentiates fine airborne particulate matter concentrations of such substances as diesel engine exhaust, environmental tobacco smoke, and wood smoke. The goal of the project is integration with and interfacing of the instrument to a cellular telephone for mobile monitoring.
Contact Information	rwhite@eecs.berkeley.edu, igorpapa@eecs.berkeley.edu, lagundel@lbl.gov
Advisor	Richard M. White, Lara Gundel

 

Document Top Table of Projects	Micropower
Project ID	BPN562
Project Title	AC Energy Scavenging for Smart Grid Sensing
Status	Continuing
Funding Source	Industry
Keywords
Researchers	Igor Paprotny, Son Duy Nguyen, Richard Xu, Chris Sherman
Abstract	The goal of this project is to devise small, inexpensive modules for indoor or outdoor deployment that sense electrical variables on, and scavenge energy from, energized conductors such as appliance cords and the conductors on high-voltage power transmission lines and equipment. In addition to an energy scavenging element, the modules will contain sensors, their associated signal conditioning circuitry, power conditioning and storage elements, and a wireless radio and antenna. We have recently demonstrated the ability to scavenge 2mW from a nearby conductor carrying 20 A_rms, which is 10-100x more than can be extracted using comparable coil-based approaches.
Contact Information	igorpapa@eecs.berkeley.edu, qlxu@berkeley.edu, nguyen.duyson@berkeley.edu, rwhite@eecs.berkeley.edu
Advisor	Richard M. White

 

Document Top Table of Projects	Micropower
Project ID	BPN654
Project Title	Electret-Based Voltage Sensing and Energy Harvesting from Energized Conductors
Status	Continuing
Funding Source	State
Keywords	Electret, voltage sensor, energy harvester, energized conductors, Smart Grid, Demand Response
Researchers	Richard Xu, Igor Paprotny
Abstract	The goal of this project is to design and fabricate electret-based voltage sensors and energy harvesters for Smart Grid and Demand Response applications. The functions of the proposed devices are to sense the voltage variation and harvest energy from energized conductors such as appliance cords and high-voltage power transmission lines and equipment.
Contact Information	qlxu@berkeley.edu, igorpapa@eecs.berkeley.edu, rwhite@eecs.berkeley.edu
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN505
Project Title	Deployment of Wireless Stick-On Circuit Breaker PEM AC Sensors for the Smart Grid
Status	Continuing
Funding Source	State
Keywords	Power; Passive Proximity Electric Sensors; MEMS; Wireless; Energy Scavenging
Researchers	Richard Xu, Igor Paprotny
Abstract	The electric power consumption of the entire Berkeley campus ranges from 18MW to 30MW, of which Cory Hall, the Electrical Engineering building, comprises from 3% to 5%. Presently, the power entering the building is metered monthly at the primary terminals of its 12.4 kilovolt distribution step-down transformer. In order to increase energy efficiency and to experiment with, and further develop, our miniature electrical sensors, we are in the process of installing proximity sub- metering of loads accessed through a standard circuit breaker panel to which miniature proximity- based current sensors have been attached. We have made a two-minute video, available from the BSAC website, demonstrating the sensors in action.
Contact Information	qlxu@berkeley.edu, igorpapa@eecs.berkeley.edu, chandler.j.miller@gmail.com, rwhite@eecs.berkeley.edu
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN697
Project Title	Natural Gas Pipeline Research
Status	Continuing
Funding Source	State
Keywords	Gas, pipeline, sensor, pressure, flow, vibration, methane, wireless, ultrasonic, laser, weld, crack
Researchers	Igor Paprotny, Adam Tornheim, Rafael Send, Son Duy Nguyen, Nasser Saber
Abstract	The goal is to develop technologies for natural gas pipelines that provide increased system awareness and reliability, lower system costs, better assessment of pipeline integrity, and provide tangible benefits for utility customers. The benefits sought are natural gas pipelines that are more reliable, efficient, and secure. The BSAC research can be divided into three areas: 1. Microfabricated MEMS natural gas sensors 2. Low-power wireless sensor communication infrastructure 3. Ultrasonic diagnostic and test devices for natural gas pipelines.
Contact Information	igorpapa@eecs.berkeley.edu, atornheim@gmail.com, rwhite@eecs.berkeley.edu, rsend@berkeley.edu, nguye
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN712
Project Title	Bridging Research-to-Commercialization Gaps through Facilitated Intermediaries
Status	New
Funding Source	NSF
Keywords	Commercialization,Industry,Managing Director,Executive Director,Nanoshift,AMFitzgerald,MIG,Standards,SBIR
Researchers	John M. Huggins
Abstract	This project aims to leverage private sector intermediaries to facilitate, measure, and report commercialization outcomes of Center activities. BSAC university-based precommercial research (“presearch” for short) has been successful in member recruiting and retention as measured by membership related research revenue for the center ($1.2M-$3M/year) and average longevity of members (~ 8 years). But members have increasingly had trouble bridging the gaps from “presearch” to manufacturable processes & devices. As MEMS processes and applications move mainstream, these gestation periods are dropping rapidly. Many members have, in our surveys and at IAB meetings, vocalized that we need to help bridge commercialization gaps and increase the speed of commercialization. Any such commercialization facilitation programs cannot compromise the fundamental research mission of the Center. We propose to do this with specialized or focused non- University agents who can facilitate the transition from laboratory proof of concept vehicles to precommercial prototypes to commercial production. These intermediaries will provide boundary spanning between university presearch and commercialization.
Contact Information	jhuggins@eecs.berkeley.edu
Advisor	John M. Huggins

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN480
Project Title	AM Fitzgerald: MEMS Design, Prototyping, Modeling, Failure Prediction and Foundry Transfer
Status	Continuing
Funding Source
Keywords
Researchers	Keith M. Jackson
Abstract	A.M. Fitzgerald & Associates provides product development and technical consulting services to clients ranging from start-ups to companies in the Fortune 500. Our capabilities include MEMS/Microsystems design and fabrication, multiphysics finite element analysis, failure prediction, and foundry transfer. We are experts at developing MEMS devices and can design and build a finished device from sketched concepts. Via our RocketMEMS™ program, customers can get customized MEMS sensors built in proven standard foundry processes. Our clients benefit from rapid prototype fabrication thus reducing their time, cost and risk of product development, and speeding time-to-market.
Contact Information	kmj@amfitzgerald.com
Advisor	John M. Huggins

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN354
Project Title	The Nanoshift Concept: Innovation through Design, Development, Prototyping and Fabrication for MEMS, Microfluidics, Nano and Clean Technologies at the UC Berkeley NanoLab
Status	Continuing
Funding Source
Keywords	Nanoshift, nanolab, microlab, process, recharge, commercial
Researchers	Ning Chen, Salah Uddin
Abstract	Nanoshift, LLC is a privately-held Emerging Technology research and development company specializing in Bio-MEMS, MEMS, Microfluidics and Nanotechnologies. Nanoshift's talented team and use of flexible lab facilities provides high quality, flexible, custom services for process design, development, rapid prototyping, low-volume fabrication and consultation. Typical projects arrive from academics, government and industry; Nanoshift is positioned as the road map for the concept to commercialization process. Nanoshift collaborates with BSAC to make powerful resources available for BSAC members, such as offering valuable services and technical expertise to both academic and industrial members, while improving BSAC's visibility and funding.
Contact Information	nchen@nanoshift.net, suddin@nanoshift.net
Advisor	John M. Huggins