Berkeley Sensor & Actuator Center

The Berkeley Sensor & Actuator Center (BSAC) is the Graduated National Science Foundation Industry/University Cooperative Research Center for Microsensors and Microactuators. We conduct industry-relevant, interdisciplinary research on micro- and nano-scale sensors, moving mechanical elements, microfluidics, materials, processes & systems that take advantage of progress made in integrated-circuit, bio, and polymer technologies.

Number of records: 124

POSTER	RESEARCH THRUST	ABSTRACT click link to view abstract	PROJECT MATERIALS WEBSITE, Login Required	PROJECT TITLE	ADVISOR
1	Package, Process & Microassembly	BPN354	BPN354 Website	The Nanoshift Concept: Process Design, Development, Prototyping, Fabrication and Consultation Services for MEMS, Microfluidics and Nanotechnology at the UC Berkeley NanoLab	John M. Huggins
2	Wireless, RF & Smart Dust	BPN574	BPN574 Website	On-Chip Micro-Inductor	Liwei Lin
3	Wireless, RF & Smart Dust	BPN624	BPN624 Website	The Internet of Things: IPv6 for Multihop Wireless Sensor Networks	Kristofer S.J. Pister, Steven D. Glaser
4	Wireless, RF & Smart Dust	BPN596	BPN596 Website	Smart Fence	Kristofer S.J. Pister
5	Wireless, RF & Smart Dust	RMW29	RMW29 Website	Electric Power Sensing for Demand Response	Richard M. White, Paul K. Wright
6	Wireless, RF & Smart Dust	BPN392	BPN392 Website	Mobile Airborne Particulate Matter Monitor for Cellular Deployment	Richard M. White
7	Physical Sensors & Devices	BPN656	BPN656 Website	Airborne Particulate Monitoring Using a Micromechanical Electrometer New Project	David A. Horsley
8	BioMEMS	BPN571	BPN571 Website	Implantable Microengineered Neural Interface for Studying and Controlling Insects	Michel M. Maharbiz
9	BioMEMS	BPN573	BPN573 Website	Cyborg Fly: Wireless Control of a Housefly	Michel M. Maharbiz, Kristofer S.J. Pister
10	Micropower	BPN520	BPN520 Website	Miniaturized, Implantable Power Generator	Michel M. Maharbiz
11	Micropower	BPN648	BPN648 Website	Fully Integrated, Low Input Voltage, Switched-Capacitor DC-DC Converter for Energy Harvesting Applications	Kristofer S.J. Pister
12	Physical Sensors & Devices	APP96	APP96 Website	HEaTS Sensors for Extreme Harsh Environments	Albert P. Pisano
13	Physical Sensors & Devices	BPN424	BPN424 Website	HEaTS: Silicon Carbide Thin Film and Nanostructures for Harsh Environment Sensing and Energy Applications	Roya Maboudian, Carlo Carraro
14	Package, Process & Microassembly	BPN681	BPN681 Website	High Temperature Bonding Technology for SiC Devices - Au-Sn SLID New Project	Albert P. Pisano, Knut Aasmundtveit, Andreas Larsson, Maaike M.V. Taklo
15	Package, Process & Microassembly	BPN413	BPN413 Website	HEaTS: Bonding of SiC MEMS Sensors for Harsh Environments	Albert P. Pisano
16	Micropower	BPN544	BPN544 Website	HEaTS: Piezoelectric Energy Harvesting for Extreme Harsh Environments	Albert P. Pisano
17	Micropower	BPN564	BPN564 Website	HEaTS: Harsh Environment MEMS for Downhole Geothermal Monitoring	Albert P. Pisano
18	Physical Sensors & Devices	BPN644	BPN644 Website	HEaTS: Lateral Bipolar Junction Transistors for Harsh Environment Sensing	Albert P. Pisano
19	Physical Sensors & Devices	BPN638	BPN638 Website	HEaTS: SiC Devices and ICs for Harsh Environment Sensing	Albert P. Pisano
20	Physical Sensors & Devices	BPN616	BPN616 Website	HEaTS: SiC Harsh Environment Pressure Sensors	Albert P. Pisano
21	Physical Sensors & Devices	BPN614	BPN614 Website	HEaTS: 4H-SiC FET Technology for Harsh Environment Sensing Application	Albert P. Pisano
22	Physical Sensors & Devices	BPN661	BPN661 Website	HEaTS: SiC Thin-Film Flame Ionization Sensor New Project	Albert P. Pisano
23	Physical Sensors & Devices	BPN663	BPN663 Website	HEaTS: SiC Diodes and JFETs for Harsh Environment Sensing Applications New Project	Albert P. Pisano
24	Physical Sensors & Devices	BPN499	BPN499 Website	HEaTS: Aluminum Nitride Inertial Sensors for Harsh Environments	Albert P. Pisano
25	Wireless, RF & Smart Dust	BPN369	BPN369 Website	HEaTS: AlN Narrowband RF Filters	Albert P. Pisano, Clark T.-C. Nguyen
26	Wireless, RF & Smart Dust	BPN441	BPN441 Website	HEaTS: Temperature-Compensated & High-Q Aluminum Nitride Lamb Wave Resonators	Albert P. Pisano
27	Physical Sensors & Devices	BPN534	BPN534 Website	Fully Integrated Micromechanical Clock Oscillator	Clark T.-C. Nguyen
28	Physical Sensors & Devices	BPN435	BPN435 Website	A Micromechanical Power Amplifier	Clark T.-C. Nguyen
29	Physical Sensors & Devices	BPN433	BPN433 Website	A Micromechanical Power Converter	Clark T.-C. Nguyen
30	Physical Sensors & Devices	BPN388	BPN388 Website	Micro Autonomous Air Vehicles	Kristofer S.J. Pister
31	BioMEMS	BPN538	BPN538 Website	Lipid Membrane Biosensors	David A. Horsley
32	BioMEMS	BPN649	BPN649 Website	Magnetic Particle Flow Cytometer	Bernhard E. Boser
33	BioMEMS	BPN475	BPN475 Website	A CMOS Magnetic Sensor Chip for Biomedical Assay	Bernhard E. Boser
34	BioMEMS	BPN612	BPN612 Website	High-Throughput CMOS Detector for Magnetic Immunoassays	Bernhard E. Boser
35	BioMEMS	BPN664	BPN664 Website	Blocks in Cells' Clothing: Mechanical Design of Tissues New Project	Michel M. Maharbiz
36	BioMEMS	BPN622	BPN622 Website	Design of an Ex-vivo Prototype of a Bioartificial Kidney for Small Animals	Dorian Liepmann, Shuvo Roy
37	BioMEMS	BPN675	BPN675 Website	Implantable Micro Drug Delivery System New Project	Liwei Lin
38	Microfluidics	BPN586	BPN586 Website	Finger-Powered Microfluidic System for Point-of-Care Diagnostics	Liwei Lin
39	Microfluidics	BPN645	BPN645 Website	Highly-Parallel Magnetically-Actuated Microvalves	David A. Horsley
40	Microfluidics	BPN621	BPN621 Website	Microfluidic Separation of Blood for SIMBAS Biosensor	Dorian Liepmann
41	Microfluidics	BPN620	BPN620 Website	Surface Topology Optimization for Directing Fluid Flow	Dorian Liepmann, Paul Lum
42	Microfluidics	BPN495	BPN495 Website	QES: Continuous Flow Cell Lysometer	Albert P. Pisano, Frans Kuypers
43	Microfluidics	BPN679	BPN679 Website	A Diagnostic Chip Using Isothermal Amplification for Emerging Pandemic Diseases New Project	Luke P. Lee
44	Microfluidics	BPN627	BPN627 Website	Stencil Patterning Method Improves Uniformity of Human Pluripotent Stem Cell Colonies	Luke P. Lee
45	Microfluidics	BPN632	BPN632 Website	Advanced Lateral Flow Assay (ALFA) to Monitor Tuberculosis Patient Response	Luke P. Lee
46	Microfluidics	BPN669	BPN669 Website	Universal Blood Sample Preparation New Project	Luke P. Lee
47	Microfluidics	BPN668	BPN668 Website	Microfluidic Chemo-sensitivity Assay Platform (�CAP) for Personalized Breast Cancer Therapy and Research New Project	Luke P. Lee
48	Microfluidics	BPN633	BPN633 Website	Numerical Simulation of Degas-driven Flow in Microfluidic Devices	Luke P. Lee
49	Microfluidics	BPN650	BPN650 Website	Nanopores Generated by Photothermal Plasmic Antennas for Patterable In Situ Transfection in Tissue-scale	Luke P. Lee
50	Microfluidics	BPN611	BPN611 Website	Integrated Amplification and Readout for Multiplexed Biomarker Detection in a Rapid, Simple, and Inexpensive Microfluidic System	Luke P. Lee
51	Microfluidics	BPN543	BPN543 Website	Modular Biomolecular Signal Amplification for Colorimetric Point-of-Care Diagnostics	Luke P. Lee
52	Microfluidics	BPN674	BPN674 Website	Integrated Microfluidic Array Plate (iMAP) for Cellular and Molecular Analysis New Project	Luke P. Lee
53	NanoTechnology: Materials, Processes & Devices	BPN598	BPN598 Website	Toward Silk-based Biomedical Devices	Luke P. Lee
54	Microfluidics	BPN552	BPN552 Website	Light-Actuated Digital Microfluidics (Optoelectrowetting)	Ming C. Wu
55	NanoPlasmonics, Microphotonics & Imaging	BPN651	BPN651 Website	Cavity Optomechanics Experimentation	Ming C. Wu, Clark Nguyen
56	NanoPlasmonics, Microphotonics & Imaging	BPN609	BPN609 Website	Optical Antenna-Based Photodetectors	Ming C. Wu
57	NanoPlasmonics, Microphotonics & Imaging	BPN595	BPN595 Website	Fast Optical Phased Array for 10MHz Beamforming	Ming C. Wu
58	Physical Sensors & Devices	BPN642	BPN642 Website	10 MHz Optical Phased Array Metrology and Control	Dave A. Horsley, Ming C. Wu
59	Micropower	BPN394	BPN394 Website	QES: �cLHP Chip Cooling System	Albert P. Pisano
60	Micropower	BPN662	BPN662 Website	QES: Micro LHP Cooler - An In-Situ Hermetic Seal for High Heat Flux Microfluidic Devices New Project	Albert P. Pisano
61	Micropower	BPN670	BPN670 Website	QES: Micro LHP Cooler - Coherent Porous Silicon Wick for High Heat Flux and Capillary Pumping New Project	Albert P. Pisano
62	Micropower	BPN660	BPN660 Website	QES: Micro LHP Chip Cooling System - Evaporator Design and Testing New Project	Albert P. Pisano
63	Package, Process & Microassembly	BPN480	BPN480 Website	AM Fitzgerald: MEMS Design, Prototyping, Modeling, Failure Prediction and Technology Strategy	John M. Huggins
64	BioMEMS	BPN584	BPN584 Website	Design, Fabrication and Testing of a High Density, Large Area uECoG Array	Michel M. Maharbiz
65	BioMEMS	BPN403	BPN403 Website	Functional and Organized Cellular Substrates	Liwei Lin, Song Li
66	BioMEMS	BPN438	BPN438 Website	Controlling Cellular Functions via Unidirectional Biophysical Stimuli	Liwei Lin, Song Li
67	BioMEMS	BPN473	BPN473 Website	Autonomous Particulate-Based Microfluidic Systems	Liwei Lin, Luke P. Lee
68	BioMEMS	BPN512	BPN512 Website	Electrophysiological Cell Sorting	Luke P. Lee
69	BioMEMS	BPN484	BPN484 Website	Effects of Cell Contact in Differentiation of Adult Neural Progenitor Cells	Michel M. Maharbiz
70	BioMEMS	BPN643	BPN643 Website	Characterization of Growth and Osteogenic Differentiation of Human Bone Marrow Stromal Cells on Precisely Defined Surface Microtopographies	Shuvo Roy
71	BioMEMS	BPN666	BPN666 Website	Dynamic Fetal Airway Occlusion for Treatment of Congenital Pulmonary Hypoplasia New Project	Shuvo Roy, Douglas Miniati
72	NanoPlasmonics, Microphotonics & Imaging	BPN667	BPN667 Website	Optical Absorption Study of 2-Dimensional III-Vs New Project	Ali Javey
73	NanoPlasmonics, Microphotonics & Imaging	BPN673	BPN673 Website	Gold Virus Nanoparticle for Molecular Imaging New Project	Luke P. Lee
74	NanoPlasmonics, Microphotonics & Imaging	BPN460	BPN460 Website	Optical Antenna for Ultra-High Efficiency Surface-Enhanced Raman Spectroscopy	Ming C. Wu
75	NanoPlasmonics, Microphotonics & Imaging	BPN498	BPN498 Website	Optomechanical Oscillators and Silica-Based Bandwidth Tunable Filters	Ming C. Wu
76	NanoPlasmonics, Microphotonics & Imaging	BPN458	BPN458 Website	Optical Antenna-Based nanoLED	Ming C. Wu
77	NanoPlasmonics, Microphotonics & Imaging	BPN457	BPN457 Website	Nanopatch Lasers	Ming C. Wu
78	NanoPlasmonics, Microphotonics & Imaging	BPN510	BPN510 Website	High Linearity RF Photonic Links	Ming C. Wu
79	NanoPlasmonics, Microphotonics & Imaging	BPN671	BPN671 Website	Photonic Integrated Circuits for Scalable Wavelength-Selective Switching New Project	Ming C. Wu
80	NanoPlasmonics, Microphotonics & Imaging	BPN678	BPN678 Website	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) New Project	Ming C. Wu, Bernhard Boser, Connie Chang-Hasnain, Shun Lien Chuang, , Eli Yablanovitch
81	NanoPlasmonics, Microphotonics & Imaging	BPN665	BPN665 Website	Electronic Photonic Heterogeneous Integration (EPHI) System Demonstrator: High Bandwidth LADAR Source New Project	Bernhard E. Boser, Ming C. Wu, Connie Chang-Hasnain
82	NanoTechnology: Materials, Processes & Devices	BPN672	BPN672 Website	Solar Hydrogen Production by Photocatalytic Water Splitting New Project	Liwei Lin
83	Package, Process & Microassembly	BPN317	BPN317 Website	Direct-Write Piezoelectric PVDF Nanogenerator via Near-Field Electrospinning	Liwei Lin
84	Micropower	BPN519	BPN519 Website	Harvesting Energy from Evaporation	Michel M. Maharbiz
85	Micropower	BPN562	BPN562 Website	AC Energy Scavenging for Smart Grid Sensing	Richard M. White
86	Micropower	BPN654	BPN654 Website	Electret-Based Voltage Sensing and Energy Harvesting from Energized Conductors	Richard M. White, Paul K. Wright
87	Physical Sensors & Devices	BPN505	BPN505 Website	Deployment of Wireless Stick-On Circuit Breaker PEM AC Sensors for the Smart Grid	Richard M. White, Paul K. Wright
88	Physical Sensors & Devices	BPN448	BPN448 Website	Integrity Assessment of Underground Power Distribution Cables	Richard M. White, Paul K. Wright
89	Micropower	BPN555	BPN555 Website	Power Transfer Over a Capacitive Interface	Bernhard E. Boser, Seth Sanders
90	Physical Sensors & Devices	BPN608	BPN608 Website	Microscale Rate Integrating Gyroscope	Bernhard E. Boser
91	Physical Sensors & Devices	BPN485	BPN485 Website	Ultrasonic 3D Imaging Using Piezoelectric Micromachined Ultrasound Transducers	Bernhard E. Boser
92	Physical Sensors & Devices	BPN466	BPN466 Website	Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers	David A. Horsley
93	Physical Sensors & Devices	BPN628	BPN628 Website	High Frequency Piezoelectric Micromachined Ultrasound Transducers	David A. Horsley
94	Physical Sensors & Devices	BPN603	BPN603 Website	Hemispherical Resonator Gyro	David A. Horsley
95	Physical Sensors & Devices	BPN655	BPN655 Website	Materials for High Quality-Factor Resonating Gyroscopes New Project	David A. Horsley
96	Physical Sensors & Devices	BPN539	BPN539 Website	Micromechanically-Enhanced Magnetoresistive Sensors	David A. Horsley
97	Physical Sensors & Devices	BPN599	BPN599 Website	MEMS Electronic Compass: Three-axis Magnetometer	David A. Horsley
98	Physical Sensors & Devices	BPN634	BPN634 Website	Low Voltage and Fast Response Actuators	Ali Javey
99	NanoTechnology: Materials, Processes & Devices	BPN636	BPN636 Website	Extremely Elastic Strain Gauges via Nanotube Percolation Poisson Capacitors	Michel M. Maharbiz
100	NanoTechnology: Materials, Processes & Devices	BPN496	BPN496 Website	Chemomechanical Nanomachine for Artificial Biomolecular Signal Transduction and Drug Delivery	Michel M. Maharbiz
101	NanoTechnology: Materials, Processes & Devices	BPN518	BPN518 Website	Synthetic Turing Patterns	Michel M. Maharbiz, Murat Arcak
102	NanoTechnology: Materials, Processes & Devices	BPN469	BPN469 Website	Ultra-Short Channel 1D-2D Compound Semiconductor on Insulator (XOI) FETs	Ali Javey
103	NanoTechnology: Materials, Processes & Devices	BPN533	BPN533 Website	Nanomaterial-Based Artificial Skin Sensor	Ali Javey
104	NanoTechnology: Materials, Processes & Devices	BPN567	BPN567 Website	Compound Semiconductor on Insulator (XOI) FETs	Ali Javey
105	NanoTechnology: Materials, Processes & Devices	BPN625	BPN625 Website	Direct Growth of High Quality III-V Semiconductors on Metal Foils for Low-cost, High-efficiency PVs New Project	Ali Javey
106	NanoTechnology: Materials, Processes & Devices	BPN629	BPN629 Website	Large-Scale Carbon Nanotube Network Active Matrix Circuitry for Flexible and Stretchable Electronics	Ali Javey
107	NanoTechnology: Materials, Processes & Devices	BPN659	BPN659 Website	High Performance Flexible Integrated Circuits Using Carbon Nanotube Networks New Project	Ali Javey
108	Wireless, RF & Smart Dust	BPN434	BPN434 Website	A Micromechanical RF Channelizer	Clark T.-C. Nguyen
109	Wireless, RF & Smart Dust	BPN359	BPN359 Website	Micromechanical Resonator Based Reference Oscillators	Elad Alon, Clark T.-C. Nguyen
110	Wireless, RF & Smart Dust	BPN540	BPN540 Website	Temperature Stable Micromechanical Resonators and Filters	Clark T.-C. Nguyen
111	Wireless, RF & Smart Dust	BPN542	BPN542 Website	New Materials for MEMS Resonators	Clark T.-C. Nguyen
112	Wireless, RF & Smart Dust	BPN676	BPN676 Website	Q-boosted Optomechanical Resonators New Project	Clark T.-C. Nguyen
113	Wireless, RF & Smart Dust	BPN630	BPN630 Website	Capacitive-Gap Micromechanical Local Oscillator At GHz Frequencies	Clark T.-C. Nguyen
114	NanoTechnology: Materials, Processes & Devices	BPN658	BPN658 Website	QES: Nanoparticle/Polymer Composite Material Supercapacitor New Project	Albert P. Pisano
115	NanoTechnology: Materials, Processes & Devices	BPN487	BPN487 Website	QES: High-Resolution Direct Patterning of Nanoparticles and Polymers by a Template-Based Microfluidic Process	Albert P. Pisano
116	NanoTechnology: Materials, Processes & Devices	BPN490	BPN490 Website	QES: Microfluidic Reactors for Controlled Synthesis of Monodisperse Nanoparticles	Albert P. Pisano
117	NanoTechnology: Materials, Processes & Devices	BPN594	BPN594 Website	QES: Fast, High-Throughput Micro, Nanoparticle Printing with Tunable Resolution & Size	Albert P. Pisano
118	NanoTechnology: Materials, Processes & Devices	BPN606	BPN606 Website	Carbon Nanotube Films for Energy Storage Applications New Project	Liwei Lin
119	NanoTechnology: Materials, Processes & Devices	BPN517	BPN517 Website	Facile Synthesis of Nanostructures for Renewable Energy Applications	Liwei Lin
120	NanoTechnology: Materials, Processes & Devices	BPN554	BPN554 Website	TiO2 Nanoswords for Clean Energy Applications	Liwei Lin
121	BioMEMS	BPN680	BPN680 Website	Solar Optics-based Active Panels (SOAP) for Photocatalytic Greywater Treatment: Design and Kinetics New Project	Luke P. Lee
122	Physical Sensors & Devices	BPN653	BPN653 Website	Biologically Inspired Self-Activated Building Envelope Regulation System (SABERS)	Luke P. Lee, Maria-Paz Gutierrez
123	Package, Process & Microassembly	BPN570	BPN570 Website	Semi-Permeable Membranes with Carbon Nanotubes for Encapsulation	Liwei Lin
124	Package, Process & Microassembly	LWL20	LWL20 Website	CMOS-Compatible Synthesis of Carbon Nanotubes for Sensor Applications New Project	Liwei Lin, Knut E. Aasmundtveit

Project Abstracts

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN574
Project Title	On-Chip Micro-Inductor
Status	Continuing
Funding Source	DARPA
Keywords	Inductor, On-Chip, RF
Researchers	Kisik Koh
Abstract	On-chip inductors are key passive elements to high-power and radio frequency (RF) integrated circuits (ICs). This project aims to realize super-compact on-chip micro-inductor with magnetic media for high-power and RF IC's, including: 1) to explore low-loss, high resonance frequency magnetic material for inductor application; 2) to develop magnetic-material integration process; 3) to realize the super-compact magnetic-embedded inductor. The long-term objectives for this project are to resolve the current problem of lacking compact-size high-performance on-chip inductors, and then reduces the whole circuit cost significantly and helps the practical realization of RF systems-on-a- chip (SoCs) for real-world applications.
Contact Information	kskoh@berkeley.edu, lwlin@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN624
Project Title	The Internet of Things: IPv6 for Multihop Wireless Sensor Networks
Status	Continuing
Funding Source	Other
Keywords	Time Synchronization, Frequency Hopping, Medium Access Control, IEEE 802.15.4E
Researchers	Branko Kerkez, Fabien J. Chraim
Abstract	The Internet of Things enables great applications, such as energy-aware homes or real-time asset tracking. With these networks gaining maturity, standardization bodies have started to work on standardizing how these networks of tiny devices communicate. We strongly believe IEEE802.15.4e TSCH is the most reliable and energy-efficient MAC protocol for low-power motes. The goal of this project is to provide open-source implementations of a complete protocol stack based on the finalized Internet of Things standards. This implementation can then help academia and industry verify the applicability of these standards to the Internet of Things, for those networks to become truly ubiquitous.
Contact Information	bkerkez@berkeley.edu, chraim@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister, Steven D. Glaser

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN596
Project Title	Smart Fence
Status	Continuing
Funding Source	Industry
Keywords	Security, Fence Monitoring, Accelerometer, WirelessHART, Wireless Sensor Networks
Researchers	Fabien J. Chraim
Abstract	Conventional security systems have limitations. For example, in an industrial setting, fence monitoring using video surveillance becomes expensive and inefficient as the area under observation grows to cover several miles in length. The goal of this project is to provide a sensor network approach to this problem. Using WirelessHART compliant communication nodes and cheap MEMS-based accelerometers, the solution covers recording vibrations locally on each fence section and relaying the readings back to a central computer for processing and detection.
Contact Information	chraim@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	RMW29
Project Title	Electric Power Sensing for Demand Response
Status	Continuing
Funding Source	State
Keywords	demand response, magnetic field, voltage sensor, current sensor, piezoelectric, smart dust
Researchers	Christopher Sherman, Igor Paprotny
Abstract	The overarching goal of this multi-unit UCB project is to identify technology to enable domestic electricity users to make more effective use of electric power. Elements include inexpensive wireless metering of electric energy use, and thermal/humidity monitoring and control inside houses based on weather information -- both present conditions and short-range predictions -- and electric power prices. The term 'demand response' (DR) refers to the ability of electricity users to respond automatically to time- and location-dependent electric energy price and supply contingency information in order to tailor their electric energy usage.
Contact Information	igorpapa@eecs.berkeley.edu, ctsherman@berkeley.edu, rwhite@eecs.berkeley.edu,
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN392
Project Title	Mobile Airborne Particulate Matter Monitor for Cellular Deployment
Status	Continuing
Funding Source	Industry
Keywords	MEMS, Wireless, Particulates, Sensor, Mobile
Researchers	Igor Paprotny, Frederick Doering
Abstract	This project involves optimization of a portable MEMS-based instrument that quantifies and differentiates fine airborne particulate matter concentrations of such substances as diesel engine exhaust, environmental tobacco smoke, and wood smoke. The goal of the project is integration with and interfacing of the instrument to a cellular telephone for mobile monitoring.
Contact Information	rwhite@eecs.berkeley.edu, igorpapa@eecs.berkeley.edu, frederick.doering@berkeley.edu
Advisor	Richard M. White

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN656 New Project
Project Title	Airborne Particulate Monitoring Using a Micromechanical Electrometer
Status	New
Funding Source	BSAC Member Fees
Keywords	charge sensing, air-quality, electrometer
Researchers	Gerardo Jaramillo
Abstract	Environmental air quality is monitored by accurately sizing and quantifying nanometer-sized aerosol particles present in the atmosphere. One method of detection electrically charges the particles and then feeds a stream of charged particles into a Faraday cup electrometer. We present the first results of a MEMS based electrometer for the detection of small currents from ionized particles in a particle detection system.
Contact Information	geomartinez@ucdavis.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	BioMEMS
Project ID	BPN571
Project Title	Implantable Microengineered Neural Interface for Studying and Controlling Insects
Status	Continuing
Funding Source	Federal
Keywords	insect, vision, neural interface, micro aerial vehicle
Researchers	Joshua van Kleef, Daniel J. Cohen
Abstract	Our goal is to control the flight of an insect by hijacking its visual system. Flying insects still significantly outperform the most sophisticated flying robots in efficiency, stability and manoeuvrability and this gap is expected to continue for some years to come. Their incredible flying ability relies heavily on sensory feedback from a well-developed visual system that has been studied in significant detail. We use microtechnology to manufacture small biocompatible neural interfaces that are chronically implanted in pupae brains. By taking advantage of the healing that occurs when the pupae metamorphose into adult-form our interfaces can be embedded deep within the visual processing area without permanent impairment. These implanted devices are very stable and can be used to record or electrically stimulate responses from multiple neurons. By recording from multiple neurons we aim to gain new insight into how visual information is processed within the visual neural network, because, thus far, almost all recordings from the insect brain have been of individual neurons. The information we gain will aid in the biomimetic design of sensors for aerial vehicles. Further, by combining the data from multi-neuron recordings with the wealth of knowledge that already exists in the area of insect sensorimotor processing, we aim to design electrical stimulation patterns that would allow us to �trick� the insect into responding to fictitious self-movements. We aim to use these �ghost� stimuli to remote-control the insect�s flight while at the same time capitalizing on their remarkable natural flying abilities.
Contact Information	vankleef@berkeley.edu, dancohen@berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN573
Project Title	Cyborg Fly: Wireless Control of a Housefly
Status	Continuing
Funding Source	Other
Keywords	cyborg fly housefly musca domestica electrical stimulation neuronal neural integrated circuit basalar haltere photovoltaic charge pump optical receiver
Researchers	Travis L. Massey
Abstract	The goal of this project is to control the flight of the common housefly, Musca domestica, by electrical stimulation via implantable electrodes. A one square millimeter integrated circuit (IC) is being designed with a photovoltaic cell for energy harvesting and one-way optical communication, a charge pump voltage-boosting power supply, and a finite state machine for biological control. Direct stimulation of basalar muscles (B1 and B2) responsible for in-flight turning is being considered as a first method of electrical stimulation. Additionally, a second means of flight control is being considered in which the afferent neurons of the haltere, the fly's gyroscopic sensory organ derived from its vestigial hindwing, will be innervated. Upon completion of this project, we will have untethered control of a cyborg nano-air vehicle (NAV) via a self-sustaining IC. Additionally, we are developing a non-invasive muscular potential recording technique on Mecynorrhina torquata. The purpose of this is to enable us to discern the timing of the muscle contractions to inform the flight controller that will be developed for the cyborg beetle and cyborg fly.
Contact Information	tlmassey@eecs.berkeley.edu
Advisor	Michel M. Maharbiz, Kristofer S.J. Pister

 

Document Top Table of Projects	Micropower
Project ID	BPN520
Project Title	Miniaturized, Implantable Power Generator
Status	Continuing
Funding Source	DARPA
Keywords	biofuel cell, enzymatic reactions, power scavenger, electrochemistry, cyborg beetle
Researchers	Travis L. Massey
Abstract	This research presents an implantable, miniaturized power generating system, a biofuel cell, which scavenges power from living organisms. The system harvests carbohydrates such as sugars stored inside the organism and, via an enzyme catalyst, decomposes these carbohydrates to generate electrical power. Our initial target for these devices is as a power supply for cyborg beetles. Our group has previously developed cyborg beetles, live beetles driven by wireless neural stimulator mounted on the dorsal thorax (see BPN 451). The stimulators are currently powered by a conventional rechargeable lithium battery. The goal of this work is to employ the implantable biofuel cell to charge the lithium battery by using the insect's own sugar stores. Insects predominantly store trehalose which can be decomposed into two molecules of glucose by the enzyme trehalase. Glucose serves as an electron donor when catalyzed by oxidoreductases such as glucose oxidase or glucose dehydrogenase. Our biofuel cell uses both trehalase and glucose oxidoreductase at the anode. We will present modification of the electrode, its surface chemistry, implantation of the biofuel cell and whole system integration.
Contact Information	tlmassey@eecs.berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Micropower
Project ID	BPN648
Project Title	Fully Integrated, Low Input Voltage, Switched-Capacitor DC-DC Converter for Energy Harvesting Applications
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	DC-DC Converter, Switched-Capacitor, Charge Pump, Energy Harvesting, Photovoltaics, Micropower
Researchers	Michael C. Lorek
Abstract	This project explores the design of a fully integrated, switched-capacitor DC-DC converter to convert small amounts of energy from photovoltaic or other low voltage energy sources. Clever bootstrapping techniques are used to ensure circuit startup without high-voltage or mechanical assists. Nanopower oscillator topologies are being investigated for minimum power and input voltage operation. Advanced timing schemes are used to minimize charge reversion loss and clock driver short circuit currents for increased efficiency. A boosted output voltage around 1.5V is targeted for compatibility with older CMOS technologies, offering a power advantage in heavily duty cycled applications where leakage is dominant. This work will enable the integration of CMOS circuitry and power supply on the same substrate for true single-chip, autonomous computing platforms.
Contact Information	mlorek@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	APP96
Project Title	HEaTS Sensors for Extreme Harsh Environments
Status	Continuing
Funding Source	Federal
Keywords	silicon carbide, high temperature, harsh environment, sensor
Researchers	Debbie Senesky
Abstract	The goal of the Harsh Environment and Telemetry Systems (HEaTS) program is to deliver a wireless sensor module with MEMS-based silicon carbide (SiC)sensors integrated with SiC interface circuits for extreme harsh environment applications.
Contact Information	dsenesky@EECS.Berkeley.EDU
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN424
Project Title	HEaTS: Silicon Carbide Thin Film and Nanostructures for Harsh Environment Sensing and Energy Applications
Status	Continuing
Funding Source	DARPA
Keywords	Silicon Carbide, LPCVD, Nanowires, RF MEMS, Harsh Environment, Supercapacitors
Researchers	Ben Hsia, Junqin Zhang
Abstract	Silicon Carbide (SiC) is a material of interest to fabricate sensors and actuators able to operate in harsh environments. Particularly, its mechanical and electrical stability and its chemical inertness make SiC well suited for designing devices capable of operation in high temperature and corrosive environments. Harsh-environment stable metallization remains one of the key challenges with SiC technology. We are developing novel metallization schemes, utilizing solid- state graphitization, to address this shortcoming. In addition, strategies to integrate on-chip energy storage with SiC sensors and actuators could increase the portability, mobility, and utility of these harsh environment devices. Our group is currently developing all-solid state supercapacitors based on yttria-stabilized zirconia (YSZ), a high temperature solid electrolyte, and SiC nanowire- or carbon-based electrodes. We are studying a variety of YSZ deposition techniques and their integration with a variety of high surface area electrodes to determine the optimum combination.
Contact Information	benhsia@berkeley.edu, zhangjunqin@berkeley.edu
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN681 New Project
Project Title	High Temperature Bonding Technology for SiC Devices - Au-Sn SLID
Status	New
Funding Source	Other
Keywords	Harsh Environment, eutectic, bonding, packaging,SiC, Silicon Carbide
Researchers	Torleif Andre Tollefsen, Matthew Chan
Abstract	Au-Sn solid-liquid-interdiffusion (SLID) bonding is a novel and promising interconnect technology for high temperature (HT) applications. In combination with Silicon Carbide (SiC) devices, Au-Sn SLID has the potential of being a key technology for the next generation of innovative, cost effective and environmentally friendly drilling and well intervention systems for the oil industry. However, limited knowledge about Au-Sn SLID bonding for HT applications is a major restriction to fully realize the high temperature potential of SiC devices. A uniform Au-rich Au-Sn bond interface is produced (the � phase with a melting point of 522 �C). The importance of excess Au on both substrate and chip side in the final bond is demonstrated. It is shown that Au-Sn SLID can absorb thermo-mechanical stresses induced by large CTE mismatches (up to 12 ppm/K) in a package during HT thermal cycling. The bonding strength of Au-Sn SLID is shown to be superb, exceeding 78 MPa. Importantly, Au-Sn SLID is shown to be an excellent bonding technology for HT packaging. The project is carried out within the collaboration program between Vestfold University College (Norway) and UC Berkeley and is partially funded by The Norwegian Centre for International Cooperation in Higher Education (SIU).
Contact Information	torleif.tollefsen@sintef.no, mattc@eecs.berkeley.edu, knut.aasmundtveit@hive.no
Advisor	Albert P. Pisano, Knut Aasmundtveit, Andreas Larsson, Maaike M.V. Taklo

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN413
Project Title	HEaTS: Bonding of SiC MEMS Sensors for Harsh Environments
Status	Continuing
Funding Source	Federal
Keywords	Silicon Carbide, SiC, induction, inductive, heating, bond, bonding, braze, brazing, solder, packaging, strain, sensors, geothermal, harsh, environments
Researchers	Matthew W. Chan
Abstract	Silicon Carbide (SiC) Sensors are appealing for harsh environment MEMS applications, specifically because of their ability to withstand high temperatures. The long range goal of this project is to develop a robust process to bond SiC sensors to various components in order to obtain high-precision measurements in high-temperature and high-pressure environments.
Contact Information	mattc@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Micropower
Project ID	BPN544
Project Title	HEaTS: Piezoelectric Energy Harvesting for Extreme Harsh Environments
Status	Continuing
Funding Source	Industry
Keywords	Energy harvesting, Harsh environment, Silicon Carbide, Aluminum Nitride, Piezoelectric
Researchers	Matilda Yun-Ju Lai
Abstract	This project aims to develop a micromachined piezoelectric energy harvester for pulsed pressure sources by utilizing silicon carbide (SiC) as the structural material and aluminum nitride (AlN) as the active piezoelectric element for operation within extreme harsh environments. The SiC/AlN energy harvesters have great potentials for integrating energy harvesting power source with SiC sensors and circuitry and enabling self-powered wireless sensing technology for structural health monitoring of harsh environment energy systems.
Contact Information	matildal@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Micropower
Project ID	BPN564
Project Title	HEaTS: Harsh Environment MEMS for Downhole Geothermal Monitoring
Status	Continuing
Funding Source	Federal
Keywords	SiC, Geothermal, Harsh Environment, MEMS, Energy
Researchers	Sarah Wodin-Schwartz
Abstract	The development of harsh environment sensor technology can aid in data logging and monitoring of geothermal reservoirs which are challenging to assess. State-of-the-art sensors based on silicon technology are limited to temperatures below 300oC and can not survive long exposure in geothermal conditions. As a result, new material platforms that utilize chemically inert, ceramic semiconductor materials are proposed for harsh environment applications. In the proposed work a temperature sensor that can withstand the harsh reservoir environment will be developed. The scope of the proposed research is to 1) perform experimental exposure testing of sensor materials in a small-scale pressure vessel at and around the critical point of water and geothermal brine and 2) develop a harsh environment temperature sensor that can operate in harsh supercritical conditions while maintaining high sensitivities. These tasks aid in the realization of advanced sensors for geothermal logging and monitoring. Ultimately, the harsh environment technology developed in this program can lead to improvements in geophysical models as well as increased reservoir lifetimes through direct monitoring.
Contact Information	swodin@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN644
Project Title	HEaTS: Lateral Bipolar Junction Transistors for Harsh Environment Sensing
Status	Continuing
Funding Source	Industry
Keywords	Silicon Carbide, Bipolar Junction Transistors, Harsh Environment Sensing
Researchers	Nuo Zhang
Abstract	The goal of this project is to develop silicon carbide (SiC) lateral bipolar junction transistors (BJTs) for harsh environment sensing applications. The wide bandgap energy (3.2eV) and low intrinsic carrier concentration allow SiC semiconductor device to function at much higher temperature than Si. Moreover, high breakdown field (3-5MV/cm), high-saturated electron velocity (2E7cm/s) coupled with high thermal conductivity (3-5W/cmK) permit extreme working conditions for SiC devices. The SiC BJT has the potential for low specific on-resistance, low turn-on voltage and high temperature operation, which makes it a suitable candidate for low power, high temperature applications. This technology will enable the integration of SiC electronic devices with MEMS-based SiC sensors, and the development of self-powered sensing system with wireless telemetry capability for harsh environment applications.
Contact Information	nuozhang@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN638
Project Title	HEaTS: SiC Devices and ICs for Harsh Environment Sensing
Status	Continuing
Funding Source	Federal
Keywords	Analog, High Temperature, IC, JFET, Mixed signal, Sensor, Silicon Carbide, SiC
Researchers	Ayden Maralani
Abstract	The main objective of this research is to design and develop low power Silicon Carbide (SiC) based transistors and Integrated Circuits (ICs) that can withstand the elevated temperature, up to 600�C. The fabricated ICs will be integrated with the SiC-based sensors to develop high temperature sensing systems for various harsh environment applications.
Contact Information	maralani@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN616
Project Title	HEaTS: SiC Harsh Environment Pressure Sensors
Status	Continuing
Funding Source	Federal
Keywords	SiC HEaTS pressure sensor mems corrugated capacitive touch-mode
Researchers	Kirti R. Mansukhani
Abstract	The goal of this project is to develop MEMs pressure sensors to survive harsh environments. Harsh environments (high temperature, high pressure, high shock and/or corrosive conditions) are encountered in various applications such as automobile engines, turbines, space, downhole oil and gas drilling, and geothermal logging.
Contact Information	kirti@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN614
Project Title	HEaTS: 4H-SiC FET Technology for Harsh Environment Sensing Application
Status	Continuing
Funding Source	Industry
Keywords	4H-SiC IC, SiC JFET, SiC MOFET, High temperature electronics
Researchers	Wei-Cheng Lien
Abstract	The goal of this research is developing a wireless, multichip sensing module for addressing the inefficiencies in energy use. By doing so, power systems can be advanced by integration of electronics (communication, signal processing, microactuator control, etc.) to be operated at high temperature. Silicon carbide (SiC) has become the candidate for harsh environment sensing technology because its wide bandgap (3.2 eV), excellent chemical stability, high breakdown electric field strength (3-5 MV/cm), and high saturated electron drift velocity (2E7 cm/s). The goal of my research project is to develop matched differential pair amplifiers using either 4H-SiC junction field effect transistors (JFETs) or 4H-SiC metal-oxide-semiconductor field effect transistors (MOSFETs)and integrated with MEMS-based silicon carbide (SiC) TAPS (Temperature, Acceleration, Pressure and Strain) sensors for extreme harsh environment applications.
Contact Information	wclien@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN661 New Project
Project Title	HEaTS: SiC Thin-Film Flame Ionization Sensor
Status	New
Funding Source	Other
Keywords	SiC, Combustion, Harsh Environment, MEMS, Flame Sensor
Researchers	David A. Rolfe
Abstract	This project seeks to construct a thermally-isolated, SiC thin-film, ionization sensor to measure the propagation speed of flames in combustion chambers. Silicon carbide has been chosen as the sensor material because it is a ceramic semiconductor with low surface energy and excellent mechanical and electrical properties at high temperatures. A MEMS planar sensor will be designed and fabricated so that it can monitor flame ionization along the combustion chamber walls despite boundary layer effects and quenching. The flame ionization data with respect to time could be used to determine flame speed and spatial flame propagation. Flame speed in internal combustion engines is a measurand of interest because it is highly sensitive to parameters such as pressure, temperature, equivalence ratio and fuel type. Ultimately this sensor could be used to create better engine feedback systems and increase combustion speed, uniformity and completeness.
Contact Information	rolfe@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN663 New Project
Project Title	HEaTS: SiC Diodes and JFETs for Harsh Environment Sensing Applications
Status	New
Funding Source	Industry
Keywords	Silicon carbide, diode, JFET, harsh environment, sensing
Researchers	Shiqian Shao
Abstract	The goal of this project is to develop harsh environment rectification and sensing circuits. The devices and circuits are designed in silicon carbide (SiC) wafer due to its extraordinary performance in harsh environment such as high temperature, corrosive chemical. SiC diodes and vertical channel JFETs will be designed, fabricated and tested in my research project to develop harsh environment sensing system.
Contact Information	shao@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN499
Project Title	HEaTS: Aluminum Nitride Inertial Sensors for Harsh Environments
Status	Continuing
Funding Source	Other
Keywords	Aluminum Nitride, Piezoelectric Inertial Sensors, Harsh Environment, Gyroscope, Accelerometer
Researchers	Fabian T. Goericke
Abstract	Aluminum nitride (AlN) is a promising candidate for an emerging field of sensors that is inaccessible for electrostatic devices. Harsh environment conditions, such as temperatures above 500 deg C, high pressures, or reactive media are detrimental to today's MEMS sensors. Devices based on the inert, high melting point material AlN however can withstand these and even harsher conditions. The piezoelectric properties of the material are preserved to very high temperatures (up to 1000 deg C) and can be used for sensing in accelerometers and both sensing and actuating in gyroscopes. Cutting out the comb fingers of electrostatic devices and replacing them with patterned electrodes directly placed on the structural AlN layer has three distinct advantages. The devices have much lower damping and can easily be operated at atmospheric pressure, the resonance frequencies can be chosen more freely and adjusted for maximal noise rejection, and the shock sensitivity is reduced. In this project, AlN accelerometers and gyroscopes are fabricated and tested at extreme environmental conditions to explore the potential and limitations of AlN technology for harsh environment inertial sensors.
Contact Information	fabian@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN369
Project Title	HEaTS: AlN Narrowband RF Filters
Status	Continuing
Funding Source	DARPA
Keywords	HEaTS: AlN Narrowband RF Filters
Researchers	Ernest Ting-Ta Yen
Abstract	The long-term objective of this project is to realize self-temperature compensating narrow band filter bank for wireless communication systems. In this work, post-CMOS compatible aluminum nitride (AlN) RF Lamb wave resonators (LWR) are used as building blocks. LWR have the advantages of permitting multi-frequency devices with high Q (~3000) and low motional resistance (~100ohm). Different approaches including overhang adjustment are used to finely select the resonance frequency of LWR. Successful testing in high temperature up to 600C opens the potential applications of AlN resonator technology in harsh environments.
Contact Information	ttyen@eecs.berkeley.edu
Advisor	Albert P. Pisano, Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN441
Project Title	HEaTS: Temperature-Compensated & High-Q Aluminum Nitride Lamb Wave Resonators
Status	Continuing
Funding Source	DARPA
Keywords	Piezoelectric, AlN, Lamb Wave Resonator, Temperature Compensation, High-Q
Researchers	Chih-Ming Lin
Abstract	The long-range goal of this project is to develop aluminum nitride (AlN) Lamb wave resonators with high Q, small frequency-temperature drifts, multi-frequencies, and CMOS compatibility on one single chip.
Contact Information	gimmylin@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN534
Project Title	Fully Integrated Micromechanical Clock Oscillator
Status	Continuing
Funding Source	DARPA
Keywords	Oscillator, 32kHz, RTC, Real Time Clock, Fully Integrated MEMS
Researchers	Henry G. Barrow
Abstract	This project aims to develop a fully integrated micromechanical clock oscillator which outperforms current quartz-based clock oscillators in terms of both size and cost. A 32-kHz micromechanical resonator with a temperature coefficient better than 10 ppm over the commercial temperature range will act as the oscillator's reference. In addition, this oscillator will utilize an integrated fabrication process above modern transistor circuits in order to minimize device footprint and production expense.
Contact Information	hbarrow@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN435
Project Title	A Micromechanical Power Amplifier
Status	Continuing
Funding Source	DARPA
Keywords	MEMS switch, switching mode power amplifier, MEMS resonator
Researchers	Wei-Chang Li
Abstract	This overall project aims to demonstrate methods for amplifying signals with higher efficiency compared to transistor circuitry using strictly mechanical means for ultra-low-power signal processing applications.
Contact Information	wcli@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN433
Project Title	A Micromechanical Power Converter
Status	Continuing
Funding Source	DARPA
Keywords	Power Converter, MEMS Switch
Researchers	Yang Lin, Tommi Riekkinen
Abstract	The overall goal of this project is to demonstrate a switched-mode power converter (e.g., a charge pump) using micromechanical switching elements that allow substantially higher voltages and potentially higher conversion efficiencies than transistor-switch based counterparts.
Contact Information	linyang@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN388
Project Title	Micro Autonomous Air Vehicles
Status	Continuing
Funding Source	Other
Keywords	micro air vehicles, helicopters, inertial control, autonomy
Researchers	Ankur Mehta
Abstract	This project considers the design and implementation of a guidance and control system for small scale autonomous air vehicles, in particular helicopters. A two gram inertial navigation unit has been designed and built for this purpose, using a three axis angular rate sensor and three axis accelerometer for trajectory measurements, along with a microprocessor and 2.4 GHz 802.15.4 radio. A smart IR camera is used to determine localization information. This extremely low mass wireless enabled sensor mote can be used as a platform for two-fist sized autonomous vehicles, and this system has been used as a controller for a small off-the-shelf model helicopter with the goal of developing an autonomous micro air vehicle (MAV).
Contact Information	mehtank@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	BioMEMS
Project ID	BPN538
Project Title	Lipid Membrane Biosensors
Status	Continuing
Funding Source	Federal
Keywords	biosensor, nano, bio, microfluidics, membrane, protein, ion, channel
Researchers	Christopher E. Korman, Mischa Megens
Abstract	The lipid bilayer membrane is crucial to the proper functioning of biological processes. It not only secludes a cell's contents from the surrounding environment, but the membrane itself also serves as a dynamic scaffold for membrane proteins. The lipid membrane's thickness is of nanoscale dimension, thus making it an ideal structure for nano and micro bioengineering applications. Lipid membranes facilitate highly selective control and transport of molecules and ions entering and leaving a cell. As a result, they have great potential for use in applications such as drug screening and biological and chemical sensors (e.g. artificial tongues). Realizing practical sensors based on lipid bilayer membranes will require methods to reliably integrate membranes with microfluidic structures and will require maintaining membrane stability over hours, days, even weeks of use.
Contact Information	cekorman@ucdavis.edu, megens@eecs.berkeley.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	BioMEMS
Project ID	BPN649
Project Title	Magnetic Particle Flow Cytometer
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	magnetic particle, magnetic bead, flow cytometry
Researchers	Igor I. Izyumin
Abstract	Flow cytometry is a technique used to measure the individual properties of cells or other small biological particles in a large sample. Conventional flow cytometers use fluorescent markers and sensitive optical detectors to measure multiple cell parameters as cells flow past the detector at high speed. While these instruments allow rapid measurement of a large number of parameters, they are expensive, complex, and difficult to operate. By eliminating optical background signals and simplifying sample preparation, magnetic particle-based flow cytometers can potentially greatly expand the range of flow cytometry applications, and bring flow cytometry to the point of care.
Contact Information	izyumin@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	BioMEMS
Project ID	BPN475
Project Title	A CMOS Magnetic Sensor Chip for Biomedical Assay
Status	Completed
Funding Source	Federal
Keywords
Researchers	Karl Skucha
Abstract	This project aims to develop a compact CMOS biosensor for robust detection of micron-sized paramagnetic beads which are used as labels for target analyte in biomedical applications.No external magnet, reference sensors or calibration is required. A 4.5-um bead is detected in 16 ms with probability of detection error < 0.1%. The ultimate goal of this project is to integrate the CMOS sensor chip with micro-fluidic system and demonstrate a lab-on-a-chip platform.
Contact Information	kskucha@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	BioMEMS
Project ID	BPN612
Project Title	High-Throughput CMOS Detector for Magnetic Immunoassays
Status	Continuing
Funding Source	Federal
Keywords	magnetic Relaxation, Immunosensor, Hall sensor
Researchers	Simone Gambini
Abstract	The goal of this project is to design an electronic system capable of detecting the presence of < 2.8um magnetic beads over a biologically relevant number of sensing sites in less than 10 seconds, giving an over 10X improvement in measurement time over prior art. We use a combination of signal processing and low-noise circuit design techniques to obtain this goal.
Contact Information	sssimone@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	BioMEMS
Project ID	BPN664 New Project
Project Title	Blocks in Cells' Clothing: Mechanical Design of Tissues
Status	New
Funding Source	Fellowship
Keywords	Tissue engineering, microfabrication, modeling
Researchers	Daniel J. Cohen
Abstract	One of the most enduring paradigms in tissue engineering (the growth of artificial organs, graft tissues, etc.) is that the materials we use should be made to look more like the environment that cells normally experience. By contrast, I am working on a new type of structure designed to appear, to a cell, to be another cell. By using microfabrication methods and kidney cells, I am producing a library of different shapes, all of which are identified as 'cell' by actual cells. While esoteric, the ability to appear as a cell would encourage a number of new approaches to tissue engineering that would offer much better control than the current paradigm.
Contact Information	daniel.cohen@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN622
Project Title	Design of an Ex-vivo Prototype of a Bioartificial Kidney for Small Animals
Status	Continuing
Funding Source	Fellowship
Keywords	Microfluidics, BioMEMS, Artificial Kidney, Medical Devices
Researchers	Peter Soler
Abstract	The goal of this project is to design, fabricate, and study an bioartificial rat kidney. The motivation behind the project is to further the development toward an implantable bioartificial human kidney that will improve quality of life and reduce cost for end stage renal disease (ESRD) patients. My proposed device contains two units: i) a hemofilter based upon nanoporous silicon membranes, and ii) a bioreactor composed of kidney proximal tubule (PT) cells. The focus of my study is to develop a device design that is optimized for adequate mass transport so as to mimic natural kidney function. The Roy group has pioneered work in membranes that have been engineered with the use of silicon-based microfabrication techniques to attain pore slits with a height of 8-11 nm. The fabricated nanoporous membranes allow for a device with tight pore size distribution, complete immunoisolation, and durability. These are critical membrane specifications that make them well suited for this application.
Contact Information	soler@berkeley.edu
Advisor	Dorian Liepmann, Shuvo Roy

 

Document Top Table of Projects	BioMEMS
Project ID	BPN675 New Project
Project Title	Implantable Micro Drug Delivery System
Status	New
Funding Source	Other
Keywords	Drug delivery, implantable, nano membrane, external control
Researchers	Nazly Pirmoradi, Casey C. Glick
Abstract	Implantable drug delivery devices that allow for remote, repeatable, and reliable drug delivery are expected to greatly improve the efficiency of medical treatments in the near future. To date, few delivery systems met the necessary requirements - sufficient drug storage, precision control over drug delivery, and noninvasive activation - to be broadly useful. In this project, we develop an implantable drug delivery device that can be passively and remotely controlled for several years without replacement. The project has proposed uses in biomedical applications, such as in the treatment of Alzheimer�s, diabetes, and cancer. We investigate two different pumping mechanisms (i) an electricity-free osmotic pump for passive operation, and (ii) an electrolytic pump powered by an external RF source. Both pumps will contain magnetically functionalized nano membranes, which will allow for precision control over the rate of drug delivery.
Contact Information	cglick@berkeley.edu, nazly_p@yahoo.com, lwlin@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Microfluidics
Project ID	BPN586
Project Title	Finger-Powered Microfluidic System for Point-of-Care Diagnostics
Status	Continuing
Funding Source	Other
Keywords	Micropump, Microfluidics, Point-of-care Diagnostics, Lab-on-a-chip
Researchers	Kosuke Iwai, Ryan D. Sochol, Adrienne T. Higa
Abstract	This project aims for developing a new 'human-powered' microfluidic system for point-of-care diagnostics applications. Chip-based microfluidics offers a promising platform for biological studies; however, bulky and expensive equipments such as syringe pumps limit the application. To minimize the total setup, we propose an alternative 'human-powered' fluid pumping device. Pressure generated by human finger works as a major power source to pump fluids into microfluidic devices without any electricity. As we use common softlithography fabrication process, our system can be easily integrated with existing microfluidic systems such as microdroplet generator or cell encapsulating system. In addition, it is possible, in the future, to apply injection molding to significantly reduce the cost for industrial applications. Our portable, easy-to-operate system offers an effective method for pumping fluid into microfluidic devices for expanding biological applications such as drug screening or point-of-care diagnostics.
Contact Information	k.iwai@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Microfluidics
Project ID	BPN645
Project Title	Highly-Parallel Magnetically-Actuated Microvalves
Status	Continuing
Funding Source	Other
Keywords	microfluidics, microvalves, magnetics, bioMEMS
Researchers	Pauline J. Chang, Mei-Lin Chan, Mischa Megens
Abstract	This project aims to develop highly-parallel, magnetically-actuated microvalves using CMOS-compatible technology. Current state-of-the-art microvalve technologies require extensive supporting experimental apparatus and do not yield true lab-on-a-chip functionality. Here, the focus is placed on true chip-scale valve arrays based on low-power, on- chip magnetic coils which are used to actuate 150 micron diameter magnetic spheres that serve as the valve sealing surface. Prior studies of magnetic bead manipulation by planar coils, spin-valve arrays, and rotating magnetic fields have focused on the transport of small 1~50 micron diameter microbeads. In this work, the superparamagnetic beads are magnetized using an external permanent magnet, allowing milliampere- level currents to generate large bipolar actuation force for valve opening/closure. The magnetically-actuated valves are self-assembled over each coil in a large chip-scale array by dispersing beads onto the chip and magnetically trapping a bead on top of each valve seat. Successful development of this technology will have various applications in parallel chemical synthesis and bioanalysis devices.
Contact Information	pjch@ucdavis.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Microfluidics
Project ID	BPN621
Project Title	Microfluidic Separation of Blood for SIMBAS Biosensor
Status	Continuing
Funding Source	Other
Keywords
Researchers	Kathryn Fink
Abstract	The goal of this research is to characterize and optimize a continuous-flow, sedimentation-based blood fractionation platform. The microfluidic system will separate from a blood sample a platelet-enriched plasma containing pathogens and pathogenic biomarkers. It will also provide a stream of concentrated blood cells including pathogenic plasmodial cells. The project supports the development of a Universal Sample Preparation and Pre-Concentration (USB) module for the SIMBAS project.
Contact Information	kdfink@berkeley.edu, kdfink@gmail.com
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Microfluidics
Project ID	BPN620
Project Title	Surface Topology Optimization for Directing Fluid Flow
Status	Continuing
Funding Source	Other
Keywords	Microfluidics, BioMEMS, biosensor, capillary flows, sample preparation, sample capture
Researchers	Sho Takatori, Kathryn Fink
Abstract	Sample capture transport of biological fluids, like blood flow in diabetes glucose monitors, often requires microfluidic actuation. Current commercial methods used in diabetes glucose monitors usually involve porous materials or hydrogels, but these strategies are limited in fluid control. Surface wettability gradient actuation is an approach widely used in various other microfluidic or lab-on-a-chip systems. Here we design and fabricate a droplet-actuation device that relies purely on capillary pressure gradients induced by surface topologies. We discuss the theoretical capabilities of directing such fluid flows using no thermal gradients or external power sources. Current work focuses on pillar capillary designs on a polydimethylsiloxane (PDMS) substrate and water droplets (0.25 ~ 5 μL) in low Bond number. The work is extending to more complex biological fluids including blood.
Contact Information	sho_takatori@berkeley.edu, kdfink@berkeley.edu
Advisor	Dorian Liepmann, Paul Lum

 

Document Top Table of Projects	Microfluidics
Project ID	BPN495
Project Title	QES: Continuous Flow Cell Lysometer
Status	Continuing
Funding Source	Other
Keywords	Lab on a chip, microfluidics, assays, BioMEMS
Researchers	Timothy P. Brackbill, Won Chul Lee
Abstract	Single cell analysis is an increasingly important area of consideration. Rather than obtaining a bulk average assay result from a large number of cells, it is possible to do a statistical study on each individual cell in a population. Flow cytometry allows this methodology, but is incapable of testing for compounds inside the cells themselves. It instead relies on using surface markers. Some limited markers (calcium probes) capable of penetrating the cell wall are also available, but are limited to a few very specific tests. Our device will enable the assay of cytosolic (internal) components in individual cells in a rapid, continuous manner.
Contact Information	timb@me.berkeley.edu, lee.wonchul@gmail.com
Advisor	Albert P. Pisano, Frans Kuypers

 

Document Top Table of Projects	Microfluidics
Project ID	BPN679 New Project
Project Title	A Diagnostic Chip Using Isothermal Amplification for Emerging Pandemic Diseases
Status	New
Funding Source	Other
Keywords	point-of-care, diagnostics, microfluidics, rapid test, Malaria, isothermal, amplification
Researchers	Erh-Chia Yeh
Abstract	Currently most point-of-care diagnostics are based on immunodetection (i.e. lateral flow assays) that can only detect protein targets. During outbreaks of emerging pandemics, immunodetection based diagnostic devices cannot be rapidly deployed since antibodies need approximately two months to be developed. In contrast, nucleic acid for pathogenic DNA can be sequenced, and primers can be prepared within a single day, enabling rapid response to emerging pandemics. Herein we propose a diagnostic device using isothermal nucleic acid detection by Recombinase Polymerase Amplification (RPA). RPA has higher sensitivity than immunoassays and a short reaction time (<20min). For on-site operation, sample extraction, purification, and detection are integrated in one chip. We will use Malaria to demonstrate the capability of this integrated diagnostic chip; and expand that further to emerging pandemics where rapid deployment is crucial.
Contact Information	erh-chia-yeh@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN627
Project Title	Stencil Patterning Method Improves Uniformity of Human Pluripotent Stem Cell Colonies
Status	Continuing
Funding Source	State
Keywords	stem cell, cell culture
Researchers	Frank B. Myers
Abstract	Stem cells hold the promise of producing functional tissues which can replace those lost due to disease or injury. New organ tissues, such as those found in the heart, liver, or nervous system, can be created from pluripotent stem cells through the process of “differentiation”. Additionally, pluripotent stem cells can produce an unlimited supply of new stem cells in a process called "self-renewal". In culture, pluripotent stem cells form isolated colonies, and the geometry of these colonies can have a profound impact on their capacity for differentiation. Current culture techniques provide no control over colony geometry. We are developing a simple technique for controlling the size, shape, density, and distribution of stem cell colonies which is compatible with conventional tissue culture plates. We show that this method substantially improves stem cell uniformity, and we are evaluating its ability to improve differentiation yield.
Contact Information	fbm@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN632
Project Title	Advanced Lateral Flow Assay (ALFA) to Monitor Tuberculosis Patient Response
Status	Continuing
Funding Source	Other
Keywords	Point-of-care diagnostics, Tuberculosis, Lateral flow assay, Blood separation
Researchers	John R. Waldeisen, Debkishore Mitra, Jessie Tung, Seung-min Park
Abstract	Our technology simplifies typical sample preparation and enhances detection sensitivity for blood-based lateral flow assays.
Contact Information	waldeisen@berkeley.edu, debkishore_mitra@berkeley.edu, jessie.tung@berkeley.edu, sp293@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN669 New Project
Project Title	Universal Blood Sample Preparation
Status	New
Funding Source	Non-BSAC
Keywords	Blood diagnostics, HIV, Malaria, TB, Degas-driven flow, Plasma separation
Researchers	John R. Waldeisen, Debkishore Mitra, Ivan Dimov, Erh-Chia Yeh, Jun Ho Son, Jin-Woo Choi
Abstract	The Universal Blood Sample Preparation module is part of a molecular diagnostic platform being developed to detect three of the most deadly and burdensome diseases in the world: HIV, Tuberculosis, and Malaria. In order to decrease the time to detection, optimal blood separation techniques are being investigated to speed plasma extraction.
Contact Information	waldeisen@berkeley.edu, debkishore_mitra@berkeley.edu, ivan.dimov@berkeley.edu, erh-chia-yeh@berkele
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN668 New Project
Project Title	Microfluidic Chemo-sensitivity Assay Platform (�CAP) for Personalized Breast Cancer Therapy and Research
Status	New
Funding Source	Other
Keywords	Microfluidic Cell Assay, Tumor Chemo-sensitivity Assay, Drug susceptibility
Researchers	Debkishore Mitra
Abstract	Tumor chemo-sensitivity assays (TCA) involve the in vitro exposure of cultured cancerous cells to different drugs at varying concentrations. These analyses are traditionally used to determine drug susceptibilities, of cancerous cells in vitro, and can help discern whether a certain drug regimen will work against a tumor of a certain individual. This paradigm of personalized medicine has been explored in breast cancer, where a correlation has been shown between TCA guided therapy and clinical outcome. Microfluidic platforms can provide clinicians the ability to perform such assays with minimal amount of patient sample and also assay a variety of different therapeutic regimens. However, current microfluidic assay platforms are limited by the lack of the ability to independently lyse or collect cells exposed to different conditions and either the absence of on- chip sample pre-concentration or the use of abrasive cell traps. In this project, we propose a Microfluidic Chemo-sensitivity Assay Platform (�CAP) with non-abrasive on-chip cell pre- concentration and individually addressable assay regions. The designed chip has more than 120 cell trap and analysis areas, can expose cells to two different drugs or drug combinations (with 8 different dilutions) with 8 replicates for each drug condition. The device will be adapted to fit a 96 well plate so that it can be streamline into existing process flow. The flow will be driven by pneumatic and gravitational forces and both cell viability and apoptosis analysis will be done. �CAP will enable high throughput drug sensitivity assays on patient tumor samples and help in the determination of personalized treatment regimens and therapy.
Contact Information	debkishore_mitra@berkeley.edu, lplee@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN633
Project Title	Numerical Simulation of Degas-driven Flow in Microfluidic Devices
Status	Continuing
Funding Source	Other
Keywords	Point-of-care diagnostics, Power-free fluid flow, Blood
Researchers	John R. Waldeisen, Debkishore Mitra
Abstract	This project develops a MATLAB model to aid systematic design and investigation of the numerous parameters that govern flow velocity and device loading time in degas-driven fluid flow.
Contact Information	waldeisen@berkeley.edu, debkishore_mitra@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN650
Project Title	Nanopores Generated by Photothermal Plasmic Antennas for Patterable In Situ Transfection in Tissue-scale
Status	Continuing
Funding Source	Other
Keywords	laser, cell membrane, transfection, poration
Researchers	Chi-cheng Fu, Sahba Talebi Fard, Kyuwan Lee, SoonGweon Hong
Abstract	In the recent breakthrough of stem cell researches, somatic cells can be reprogrammed to pluripotent states or be converted to other cell lineages by delivery of transcription factors, RNA or small molecules. The first challenge to overcome is to deliver molecules cross cell membrane. Several delivery methods, such as viral infections, lipid-mediated transfections and electroporations, are widely applied due to their robustness and large-scale operation. However, the spatial and temporal controls are hard to achieve due to stochastic nature of bulk processes. Here we developed a method, called nano-plasmonic poration, which allows large scale light-patterned molecular delivery at single-cell level resolution. Plasmonic gold nanorods (GNRs) have high efficiency of light harvesting and photothermal conversion, which makes them an ideal vector for melting cell membranes locally. The energy required to generate nanopores is extremely low, and therefore can be provided by a low magnification air objective with large field of excitation. Nanopores have long lifetime and exhibit two distributions in their diameter. Time dependent multi-molecules delivery and RNA induced gene silencing are demonstrated. By simply extending the expose area, light-patterned delivery can be scaled up to tissue-level. The flexible light-patterning, together with the capability of in situ and multi-delivery, makes nanoplasmonic poration a promising approach for studying cellular interactions during nuclear programming.
Contact Information	chichengfu@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN611
Project Title	Integrated Amplification and Readout for Multiplexed Biomarker Detection in a Rapid, Simple, and Inexpensive Microfluidic System
Status	Continuing
Funding Source	Federal
Keywords	microfluidics, signal amplification, diagnostics, point of care
Researchers	Richard H. Henrikson, Frank B. Myers, Liyi Xu, Ivan K. Dimov
Abstract	Current methods for biomolecular quantification are prohibitively slow and expensive for many interesting field applications. We are developing an integrated microfluidic system for simple and robust biomolecular amplification coupled with an inexpensive reader for a range of point-of-need diagnostic solutions.
Contact Information	rhenrikson@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN543
Project Title	Modular Biomolecular Signal Amplification for Colorimetric Point-of-Care Diagnostics
Status	Continuing
Funding Source	Federal
Keywords	Colorimetric, Biosensor, Aptamer, Chemical Amplification
Researchers	Richard H. Henrikson, John R. Waldeisen
Abstract	Predictive and preventive diagnostics promise to dramatically improve targeted patient healthcare while vastly reducing systemic costs. However, patients in remote and resource-poor settings have significantly reduced access to valuable diagnostics. We are integrating nucleic acid based molecular recognition elements into microfluidic devices to achieve quantitative measures of a range of biomarkers without the need for external equipment. We have further designed an opto- biochemical signal amplification component for downstream readout. We aim to reduce assay cost, time- to-answer, and sensitivity to environmental limitations, leading to effective diagnostics for resource-poor settings.
Contact Information	rhenrikson@berkeley.edu, waldeisen@berkeley.edu, lplee@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN674 New Project
Project Title	Integrated Microfluidic Array Plate (iMAP) for Cellular and Molecular Analysis
Status	Continuing
Funding Source	Other
Keywords	Microfluidics, cell based assays
Researchers	Ivan K. Dimov, Younggeun Park
Abstract	We present a novel cellular and molecular analysis platform, which allows access to gene expression, protein immunoassay, and cytotoxicity information in parallel.
Contact Information	ivan.dimov@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN598
Project Title	Toward Silk-based Biomedical Devices
Status	Continuing
Funding Source	Other
Keywords	Micromolding, Silk, Microneedles, Drug Delivery
Researchers	Brendan W. Turner, Frank B. Myers
Abstract	Although silk is commonly known as a fiber, dissolved silk protein has recently received significant attention for its use in creating biocompatible, biodegradable, and mechanically tough materials. We have discovered that reconstituted silk fibroin (RSF) is an excellent material for molding of nano- and micro-scale patterned features. RSF alleviates several problems seen with current polymers used for micromolding (e.g. PDMS), such as device collapse and feature rounding. We have fabricated stable silk nano- and microstructures with aspect ratios of ~10 (height to diameter) where PDMS collapses at ~3, and have measured feature replication down to 25 nm (PDMS is limited to 100 nm). We have furthermore shown that the RSF films are in an alpha-helical/random coil water-soluble state, but can also be crystallized into a beta-sheet and water insoluble conformation, giving them a broad range of bioresorbability. Silk�s toughness, flexibility, strength, and biodegradability make it an ideal candidate for silk-based tissue repair, drug delivery systems, and medical devices.
Contact Information	turner.bwt@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN552
Project Title	Light-Actuated Digital Microfluidics (Optoelectrowetting)
Status	Continuing
Funding Source	Other
Keywords	Digital Microfluidics, Droplet Microfluidics, Electrowetting, Optoelectrowetting, EWOD, Optofluidics
Researchers	Shao Ning Pei
Abstract	The ability to quickly perform large numbers of chemical and biological reactions in parallel using low reagent volumes is a field well addressed by droplet-based digital microfluidics. Compared to continuous flow-based techniques, digital microfluidics offers the added advantages such as individual sample addressing and reagent isolation. We are developing a Light-Actuated Digital Microfluidics device (also known as optoelectrowetting) that optically manipulates nano- to micro-liter scale aqueous droplets on the device surface. The device possesses many advantages including ease of fabrication (no lithography required) and the ability for real-time, reconfigurable, large-scale droplets control (simply by altering the low-intensity projected light pattern). We hope to develop Light-Actuated Digital Microfluidics into a powerful platform for lab-on-a-chip (LOC) applications.
Contact Information	shaoning@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN651
Project Title	Cavity Optomechanics Experimentation
Status	Continuing
Funding Source	DARPA
Keywords	Optomechanics, Radiation Pressure
Researchers	Alejandro J. Grine, Karen Grutter, Niels Quack, Myung-Ki Kim, Tristan Rocheleau
Abstract	Cavity optomechanics is a new and rapidly advancing field in which light is used to alter the properties of a mechanical element. Our project specifically aims to confine both optical waves and mechanical waves in a high quality microcavity. When enough light is built up in such a cavity, the radiation pressure �pushes� on the walls of the cavity causing mechanical deformation and thus a coupling to the cavity mechanical modes. Under the right conditions, both the light mode and mechanical mode reach a resonance condition resulting in modulation of the light intensity exiting the cavity. Though there may be numerous applications for cavity optomechanics, we seek to apply the precisely modulated light as a replacement for bulky microwave oscillators in chip scale atomic clocks. This work focuses on the RF photonic experimentation necessary to characterize and improve microfabricated optomechanical devices. To probe the light in the cavity, we employ a tapered optical microfiber constructed by simultaneously heating and stretching a fiberoptic cable. The tapered microfiber provides a flexible method to extract relevant physical parameters.
Contact Information	grine@eecs.berkeley.edu
Advisor	Ming C. Wu, Clark Nguyen

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN609
Project Title	Optical Antenna-Based Photodetectors
Status	Continuing
Funding Source	Industry
Keywords
Researchers	Ryan Going, Amit Lakhani, Myung-Ki Kim
Abstract	As CMOS devices shrink in physical size, electrical interconnects between the devices will consume an ever-greater proportion of total chip power. A promising solution is to use optical links for intra- and inter-chip communications. To be cost effective, both the optical transmitter and receiver must be made small and highly efficient. In addition, chip scale integration is important, meaning CMOS compatible materials and processes are required. As photodiodes shrink in physical size, their sensitivity increases and energy consumption decreases. To take advantage of these gains, we are pursuing arrays of nanophotodiodes as an optical receiver.
Contact Information	rwgoing@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN595
Project Title	Fast Optical Phased Array for 10MHz Beamforming
Status	Continuing
Funding Source	DARPA
Keywords	beam steering, beam focusing, MEMS, HCG, APF
Researchers	Byung-Wook Yoo
Abstract	We developed an optical phased array incorporating a single-layer high-index-contrast subwavelength grating (HCG) for 2D beamsteering. There are a number of other approaches for optical phased arrays such as liquid-crystal-based phased arrays and microelectromechanical system (MEMS) phased array. Switching of liquid-crystal based phased arrays typically takes on the order of milliseconds. Arrays of MEMS mirrors moving perpendicular to the substrate are usually made of silicon so that a metal-coated layer is required on top, resulting in thermal induced stress when very high optical power application (~10 W) is applied. Our approach needs only a thin single-layer HCG made of silicon, widening its application in terms of high optical power, thanks to the highly reflective HCG across a wide bandwidth, and considerably improving its speed due to the low mass of the thin HCG. The measured resonant frequency of MEMS mirrors was 370 kHz and 1π phase shift was realized at 18 V. The 2D beamsteering angle was from -9 degress to +9 degress in both directions.
Contact Information	yoo@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN642
Project Title	10 MHz Optical Phased Array Metrology and Control
Status	Continuing
Funding Source	DARPA
Keywords	optical beam steering, phased array, interferometry, high contrast gratings, MEMS, near-infrared
Researchers	Trevor K. Chan, Mischa Megens
Abstract	Very fast optical beam steering and wave front correction can be achieved by employing phased arrays of lightweight High Contrast Grating (HCG) MEMS mirror etalons. The etalons provide a large phase shift for a small displacement, 100x more than traditional reflective mirror elements. Operating such etalon arrays requires exquisite control of the MEMS mirror displacements. Our aim is to use in-situ stroboscopic interferometric imaging of the etalons to ensure phase accuracy and combat long term-drift, while employing feed-forward electrical input shaping to achieve fast settling time and precise phase tracking in a power-efficient way.
Contact Information	tkchan@eecs.berkeley.edu, megens@eecs.berkeley.edu, dahorsley@ucdavis.edu
Advisor	Dave A. Horsley, Ming C. Wu

 

Document Top Table of Projects	Micropower
Project ID	BPN394
Project Title	QES: �cLHP Chip Cooling System
Status	Continuing
Funding Source	DARPA
Keywords	thermal management, cooling, thermal ground plane, electronic power density
Researchers	Jim C. Cheng
Abstract	Thermal management of high power density electronics is an essential, enabling technology for next generation electronic systems. Phase change is the preferred choice for heat transport solutions because of the ability to absorb large heat fluxes through latent heat. Current technology uses macro-scale capillary driven systems such as Loop Heat Pipes (LHP) and thermosyphons, which are passive devices that have proved to be efficient and reliable. However, these devices do not allow for chip-level integration and do not scale well for future (and even current cutting-edge high-performance) electronic requirements. The goal of the microColumnated Loop Heat Pipe (�cLHP) project is to develop a "thermal ground plane" (analogous to an electronic ground plane) which is a uniform, isothermal substrate for transporting heat away from high power density electronic devices.
Contact Information	chengjcm@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Micropower
Project ID	BPN662 New Project
Project Title	QES: Micro LHP Cooler - An In-Situ Hermetic Seal for High Heat Flux Microfluidic Devices
Status	Continuing
Funding Source	DARPA
Keywords	microfluidics, heat transfer, packaging, hermetic sealing
Researchers	Gordon D. Hoople
Abstract	The ultimate project goal for the micro Loop Heat Pipe Chip Cooling System is to design and fabricate a substrate with high thermal conductivity that can be interfaced directly with high heat flux electronic chips. This new technology will be capable of satisfying the constantly increasing cooling requirements of today's electronic devices. A prototype has already been developed that utilizes phase change technology to absorb large heat fluxes through latent heat. In order to perform functional testing, however, a reliable hermetic sealing method must be developed. The major challenge in developing this sealing method is that it must seal the device in-situ to prevent non-condensable gasses from entering the system. This research is focused on identifying the most viable method for in-situ microfluidic device sealing.
Contact Information	ghoople@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Micropower
Project ID	BPN670 New Project
Project Title	QES: Micro LHP Cooler - Coherent Porous Silicon Wick for High Heat Flux and Capillary Pumping
Status	New
Funding Source	DARPA
Keywords	capillary pressure, CPS (Coherent Porous Silicon) wick, electronic cooling, LHP (Loop Heat Pipe), thermal ground plane
Researchers	Hongyun So
Abstract	The main goal of this project is to develop a new technique to fabricate the coherent porous silicon (CPS) wick by using permeable polycrystalline silicon thin films and integrate it into the micro-LHP. Another goal is to optimize the pore size, pitch, porosity and wick thickness to maximize the heat flux and capillary pressure. Through control of pore size, the flow resistance of the micro-LHP will be defined. Finally, the novel design of the CPS wick will significantly increase the efficiency of micro-LHP while preventing the severe problems such as bubble formation, liquid-vapor interface oscillation, and wick dry out. The micro loop heat pipe (micro-LHP) is a two phase thermal ground plane device for chip-level, integrated cooling. This system draws significant heat flux from electronics when the operating fluid changes to the vapor phase. The porous wick, a key component of the micro-LHP, is located between evaporator and reservoir and it serves as the engine which achieves continuous fluid circulation. It feeds coolant to the evaporator surface, determines the capillary pumping capability of the overall micro-LHP system and serves as thermal barrier between the coolant channels and evaporator chamber. The traditional sponge-like porous wicks have a randomly distributed pore size and irregular flow path. On the contrary, three-dimensional porous structures made via ion-track etching, photolithography, and replica molding have complex fabrication process and restrictions on the device design.
Contact Information	hyso@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Micropower
Project ID	BPN660 New Project
Project Title	QES: Micro LHP Chip Cooling System - Evaporator Design and Testing
Status	New
Funding Source	DARPA
Keywords	MEMS, electronics cooling, microfluidics, heat pipe
Researchers	Lilla M. Smith
Abstract	The micro scale loop heat pipe (Micro-LHP) is an ongoing research project dedicated to the design and testing of a new cooling system for thermal management of high-power electronics. One of the key technological innovations of the overall Micro-LHP project is the use of a columnated vapor chamber (CVC) leading to a micro-patterned surface intended to maximize evaporation. The micro- patterning, commonly used in micro heat pipes, is the main focus of this initial evaporator study. The purpose of this research is to translate previous work, on surface roughness, into a new method of spreading liquid along the evaporator. The optimal design will create a large interline evaporation region, which is expected to increase the thermal conductivity of the device. The future results will detail both the function of the evaporator and the effect of different roughness patterning on the thermal conductivity of the evaporator region. Detailed here are initial evaporator designs, fabrication processes, and future plans.
Contact Information	saffordl@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN480
Project Title	AM Fitzgerald: MEMS Design, Prototyping, Modeling, Failure Prediction and Technology Strategy
Status	Continuing
Funding Source	Other
Keywords
Researchers	Carolyn D. White
Abstract	A.M. Fitzgerald & Associates provides product development and technical consulting services to clients ranging from start-ups to companies in the Fortune 500. Our capabilities include MEMS/Microsystems design and fabrication, multiphysics finite element analysis, failure prediction, and technology strategy. We are experts at developing MEMS devices, and can design and build a finished device from sketched concepts. Our clients benefit from rapid prototype fabrication, thus reducing their time, cost, and risk of product development, and speeding time to market.
Contact Information	cdw@amfitzgerald.com
Advisor	John M. Huggins

 

Document Top Table of Projects	BioMEMS
Project ID	BPN584
Project Title	Design, Fabrication and Testing of a High Density, Large Area uECoG Array
Status	Continuing
Funding Source	Other
Keywords	ECoG, EEG, neuro prosthetics, neural interface, neural probe
Researchers	Peter Ledochowitsch
Abstract	Electrocorticography (ECoG) strives to bridge the gap between traditional electroencephalography (EEG) and microneedle array recordings. While requiring a craniectomy, ECoG does not damage cortical tissue and is thus less invasive than microneedles. ECoG can achieve significantly higher spatiotemporal resolution than EEG because ECoG-electrodes are placed much closer to the signal sources in the brain. Commercially available ECoG arrays feature a small number of channels (<64) and a large electrode pitch (> 4 mm). Such coarse arrays likely undersample the signals available on the cortex surface. There is currently no agreement on the optimal inter-electrode pitch in the community and surprisingly little research has been published on the topic of optimal inter-electrode spacing for ECoG. I am designing, fabricating, packaging and testing a flexible, large-scale (>256 electrodes) high-density (pitch < 0.5 mm) ECoG array. Scaling-down an ECoG array and increasing the number of recording sites poses many engineering challenges in terms of SNR, interconnects complexity and device lifetime. Addressing these challenges lies at the heart of my project. Data collected from the array in vivo will allow conclusions about optimal electrode spacing and size. All devices will be optimized for decreased impedance resulting in better SNR.
Contact Information	ledochowitsch@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN403
Project Title	Functional and Organized Cellular Substrates
Status	Continuing
Funding Source	Other
Keywords	collective cell behavior, micropost arrays
Researchers	Adrienne T. Higa
Abstract	While single cell studies have historically been the driving force for cell biology, collective, or group, behavior is actually the true working mechanism of numerous growth and pathological phenomenon in the body including morphogenesis, wound healing, and cancer metastases. Mechanical micro-environment cues have been demonstrated as important regulators of single cell behavior, and this project focuses on investigating mechanical regulation of collective cell behavior via microtopographic substrates.
Contact Information	adrienne@me.berkeley.edu
Advisor	Liwei Lin, Song Li

 

Document Top Table of Projects	BioMEMS
Project ID	BPN438
Project Title	Controlling Cellular Functions via Unidirectional Biophysical Stimuli
Status	Continuing
Funding Source	Other
Keywords	cell migration, cell motility, cell locomotion, BAECs, microtopography, Durotaxis, Anisotropy, Elliptical, Mechanotaxis, Spatiotaxis
Researchers	Ryan D. Sochol, Adrienne T. Higa
Abstract	Mechanical engineering methods and microfabrication techniques offer powerful means for meeting biological challenges. In particular, microfabrication processes enable researchers to develop technologies at scales that are biologically relevant and advantageous for controlling cellular functions. Here, unidirectional microtopographic biophysical stimuli are employed to investigate and regulate cellular motility.
Contact Information	rsochol@me.berkeley.edu, adrienne@me.berkeley.edu
Advisor	Liwei Lin, Song Li

 

Document Top Table of Projects	BioMEMS
Project ID	BPN473
Project Title	Autonomous Particulate-Based Microfluidic Systems
Status	Continuing
Funding Source	Other
Keywords	Microparticles, Lab-on-a-chip, Microbeads, Dynamic Microarrays, Cells,
Researchers	Ryan D. Sochol
Abstract	Mechanical engineering methods and microfabrication techniques offer powerful means for meeting biological challenges. In particular, microfabrication processes enable researchers to develop technologies at scales that are biologically relevant and advantageous for biochemical reactions. Here, microfluidic methodologies are employed to develop autonomous particulate-based microfluidic systems for chemical and biological applications.
Contact Information	rsochol@me.berkeley.edu,
Advisor	Liwei Lin, Luke P. Lee

 

Document Top Table of Projects	BioMEMS
Project ID	BPN512
Project Title	Electrophysiological Cell Sorting
Status	Continuing
Funding Source	Other
Keywords
Researchers	Frank B. Myers
Abstract	We are developing a high-throughput microsystem which sorts cells based on their response to electrical stimulation. Electrophysiological measurements are commonly used to identify subpopulations of electrically-excitable cells such as myocytes and neurons and to determine the degree to which stem cells have differentiated into these cell types. However, there currently exist no technologies capable of rapidly sorting cells based on electrophysiological parameters. There is a clinical need for label-free sorting of stem cell-derived cells for tissue replacement therapies because labeling molecules and antibodies may be toxic to the patient or interfere with the integration of the graft tissue. Furthermore, for certain cell types, such as cardiomyocytes, there are currently no reliable molecular markers available. Our system will provide rapid, label-free sorting of electrically-excitable cells with accuracy equivalent to more traditional label-based sorting methods.
Contact Information	fbm@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	BioMEMS
Project ID	BPN484
Project Title	Effects of Cell Contact in Differentiation of Adult Neural Progenitor Cells
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Sisi Chen
Abstract	Cell-to-cell contact plays an important but poorly understood role in stem cell differentiation. Many proteins, such as notch, hedgehog, cadherins, and gap junctions rely on cell contact for signal transduction. The goal of this project is to probe the effects of cell contact in the differentiation of adult neural progenitor cells by high efficiency micropatterning techniques for monitoring dynamic activity or for downstream expression profiling. The adaptation of a microfluidic platform for the delivery of chemical gradients will also enable us to probe the ability of cells to laterally transmit signals via contact'mediated pathways. By understanding the role of cell-cell contact in mediating differentiation decisions, we can better understand how to maintain stem cells effectively in vitro or how best to deliver them in vivo for maximum therapeutic effect.
Contact Information	sisichen@berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN643
Project Title	Characterization of Growth and Osteogenic Differentiation of Human Bone Marrow Stromal Cells on Precisely Defined Surface Microtopographies
Status	Continuing
Funding Source	Other
Keywords	Bone tissue engineering, BioMEMS, Human bone marrow stromal cells, Osteogenesis
Researchers	Eun Jung Kim
Abstract	A novel approach to enhance bone regeneration provided by transplantation of bone marrow derived cells involves rapid concentration and selection of the osteoblastic progenitor population in the graft using selective attachment to the matrix surface. MEMS (microelectromechanical systems) technology and related microfabrication techniques can be used to create precisely defined surface microscale topographies that can selectively stimulate cells on the surface of scaffolds to enhance osteoprogenitor cell growth and subsequent bone formation. The goal of this project is to investigate the influence of precise defined surface topographies on osteogenesis in vitro and in vivo by examining the proliferation and differentiation characteristics of a class of adult stem cells and their progeny, collectively known as bone marrow stromal cells (BMSC). BMSCs, discovered by Dr. Darwin Prockop of the Texas A&M College of Medicine Institute for Regenerative Medicine, retain the potential to differentiate into multiple tissue types and have been found to play a major role in ameliorating tissue inflammation and injury.
Contact Information	eunjung.kim@ucsf.edu
Advisor	Shuvo Roy

 

Document Top Table of Projects	BioMEMS
Project ID	BPN666 New Project
Project Title	Dynamic Fetal Airway Occlusion for Treatment of Congenital Pulmonary Hypoplasia
Status	New
Funding Source	Federal
Keywords
Researchers	Mozziyar Etemadi
Abstract	Congenital lung hypoplasia--lungs that are small and underdeveloped at birth--claims the lives of over 4000 children annually in the United States. This is close to a sixth of all infant deaths. Causes of pulmonary hypoplasia share one commonality: they all interrupt normal chest anatomy, limiting the space that the lungs have to grow. For the last three decades, clinicians have been giving the lungs a way to "push back" and expand this limited space. Fetal lungs are constantly secreting fluid, and by "trapping" this fluid in the lungs using in utero therapies, clinicians have enabled the lungs to grow more quickly. Unfortunately, current therapies do not regulate this growth rate and often result in lungs that are too large and overstretched to have normal function. Using implantable pressure monitors developed in the Roy Lab, we are determining the optimal parameters for a fetal pressure regulation device. Such a device, which we have also demonstrated, can create the necessary pressure to induce lung growth but not too much as to cause damage. Such technology is paving the way for other, non-fetal uses such as lung regeneration after lung resection in cancer patients.
Contact Information	mozzi@berkeley.edu, shuvo.roy@ucsf.edu
Advisor	Shuvo Roy, Douglas Miniati

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN667 New Project
Project Title	Optical Absorption Study of 2-Dimensional III-Vs
Status	New
Funding Source	Federal
Keywords
Researchers	Hui Fang, Kuniharu Takei
Abstract	Recently, a new type of 2-D material, free standing InAs nanomembranes (thickness of 3 - 19 nm), as a representative of III-V semiconductors, was realized by layer transfer and this enables optical studies of 2-D InAs which were previously inaccessible, by decoupling those ultra-thin layers from original growth substrates to any optically transparent substrates. By using Fourier Transform Infrared (FTIR) spectroscopy, we directly observe the optical transitions from 2-D subbands, with energy spacing in line with the particle in the box model. Furthermore, it is found that the individual absorption steps from interband transitions plateau at ~1.6% for all samples, despite that the thickness is being changed by ~6x. The electron-photon interaction is also studied through Fermi’s Golden rule, we found that all the materials parameters such as carrier effective masses and bandgap cancel out, leading to a nearly material-independent absorptance of A_Q ≈ 8πα/(3nr) for each optical transition step, where nr is between 3 and 4 for most semiconductors in the wavelength range of interest. The work here presents a universal law of absorption for 2-D semiconductors. Besides its significance in the basic understanding of electron-photon interactions in quantum confined semiconductors, this result provides a new insight toward the use of 2-D semiconductors for novel photonic and optoelectronic devices.
Contact Information	fangh05@gmail.com
Advisor	Ali Javey

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN673 New Project
Project Title	Gold Virus Nanoparticle for Molecular Imaging
Status	New
Funding Source	Other
Keywords	Plasmonics, Nanoparticle, Biosensor, Optical Antenna, Molecular imaging, Virus
Researchers	SoonGweon Hong
Abstract	An ideal nanoscopic method via optical antenna can accomplish remarkable features in molecular detection such as single-molecule sensitivity and molecular fingerprint mining as non-invasive optical mechanism. However, ideal nanoscopic probes achieving these properties are still beyond current nanotechnology capability, being a bottleneck to practical applications. Herein, we are investigating potential of virus nanoparticles for sensitive molecular imaging probes by being integrated with optical antennae. Looking to the detail of viral capsids finds an ideal morphology of optical antenna which can generate highly amplified optical field. The high geometric resolution of virus structure exceeds current nanotechnology capacities; moreover, viral precise replication in nature extremely surpasses human��s production throughput. In this study, we focus on a successful realization of optical antenna based on natural plant viruses (gold viruses) for molecular imaging as a short term goal; and will further advance gold virus usages as multi-functional nanoparticles executing cell targeting, molecular imaging and extrinsic drug delivery in a cellular system.
Contact Information	gweon1@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN460
Project Title	Optical Antenna for Ultra-High Efficiency Surface-Enhanced Raman Spectroscopy
Status	Continuing
Funding Source	DARPA
Keywords	SERS, Surface-Enhanced Raman Spectroscopy, Optical Transformer, Integrated Coupler, Optical Antenna
Researchers	Tae Joon Seok
Abstract	The goal of this project is to develop ultra-sensitive SERS (surface-enhanced Raman spectroscopy) probes with reproducible enhancement factors using top-down nanofabrication techniques. Optical antennas are suggested as a solution for this goal due to their ability of focusing light energy in high-field region below diffraction limit. Optical antenna arrays are fabricated using spacer lithography for large area, uniform sub-5nm gap definition.
Contact Information	tjseok@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN498
Project Title	Optomechanical Oscillators and Silica-Based Bandwidth Tunable Filters
Status	Continuing
Funding Source	Federal
Keywords	actuator, waveguide, microdisk, resonator, silica
Researchers	Karen E. Grutter, Alejandro Grine, Niels Quack, Tristan Rocheleau
Abstract	Optical microring/disk resonators are the central component in many micro-optical applications, including optomechanical devices and tunable-bandwidth filters. Optomechanical devices, which use light to stimulate mechanical resonance, could potentially be applied to chip-scale atomic clocks. Tunable-bandwidth filters are a key enabling component for optical access networks. For example, they can be used to control wavelength channels or allocate bandwidth dynamically. High optical Q is necessary for both of these applications, so we are exploring the use of silica, which has low optical loss. So far, we have achieved an optical Q of one million and have observed self-excited optomechanical oscillations.
Contact Information	kgrutter@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN458
Project Title	Optical Antenna-Based nanoLED
Status	Continuing
Funding Source	Federal
Keywords	Plasmonics, Laser, Light Emitting Diode, Nanophotonics, Nanocavity, Optical Interconnects
Researchers	Michael Eggleston
Abstract	Spontaneous emission has been considered slower and weaker than stimulated emission. As a result, light-emitting diodes (LEDs) have only been used in applications with bandwidth < 1 GHz. Spontaneous emission is inefficient because the radiating dipole is much smaller than wavelength and such short dipoles are poor radiators. By attaching an optical antenna to the radiating dipole at the nanoscale, the emission rate can be significantly increased enabling high modulation bandwidths theoretically >100 GHz. This project focuses on the physical demonstration of this new type of nanophotonic device. Current fabrication and experimental results will be presented.
Contact Information	eggles@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN457
Project Title	Nanopatch Lasers
Status	New
Funding Source	Federal
Keywords	Plasmonics, Nanophotonics, Optics
Researchers	Amit Lakhani
Abstract	The physical size and effective modal volume of conventional lasers with visible and near-infrared emission wavelengths are usually in the micrometer range due to the diffraction limit. The length scale of electronic transistors, however, is currently sub-100 nm thanks to the advance of fabrication technologies. For future integration of electronic and photonic devices on a chip-scale platform, we need novel laser sources that are not only compact but also capable of steering light in any direction necessary and potentially electrically injectable. In this project, a nanopatch laser based on direct-gap semiconductor integrated with a plasmonic metal is used to create a small footprint laser.
Contact Information	amlakhan@EECS.Berkeley.EDU
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN510
Project Title	High Linearity RF Photonic Links
Status	Continuing
Funding Source	DARPA
Keywords	Microwave-photonic link, optical link, radio over fiber
Researchers	John M. Wyrwas
Abstract	Analog RF photonic links with low distortion and low noise are critical for high-dynamic range sensing and communications applications. This project seeks to develop optical modulators and receivers for high linearity, wideband 100 MHz to 4 GHz links.
Contact Information	jwyrwas@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN671 New Project
Project Title	Photonic Integrated Circuits for Scalable Wavelength-Selective Switching
Status	New
Funding Source	NSF
Keywords	photonics, optical, switching, networking
Researchers	Anthony M. Yeh, Sangyoon Han
Abstract	High-throughput optical networks like those in modern Internet datacenters are pushing the scaling limits of current optical switching technology. Although current MEMS-based switches can provide port counts in the hundreds with moderate switching times, future datacenter designs will require port counts in the thousands and even faster switching times to keep up with the growth in data traffic within the center. We are developing an integrated photonics platform that ultimately will be used to enable on-chip wavelength-selective switching that scales to high port counts with very fast switching times. Our approach uses silicon photonics for passive structures and heterogeneous integration of III-V semiconductor optical amplifiers to form the active regions.
Contact Information	yeh@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN678 New Project
Project Title	MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)
Status	New
Funding Source	DARPA
Keywords	MEMS, CMOS, VCSEL, HCG, PIC, FMCW LADAR, photonics
Researchers	Jeffrey B. Chou, James Ferrara, Simone Gambini, Sangyoon Han, Christopher L. Keraly, Niels Quack, Frank Rao, John Wyrwas, Byung-Wook Yoo, Li Zhu
Abstract	Active III-V photonic components and passive Si photonic circuits are integrated with CMOS electronic circuits in this project. The modular MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) platform will make use of the high performance of the individual components and integrate (1) MEMS tunable VCSEL with high-index-contrast grating (HCG) mirrors, (2) photodetectors, (3) Si photonic waveguides, couplers, and interferometers, (4) high-efficiency vertical optical coupler between III-V and Si waveguides, and (5) CMOS circuits for frequency control and temperature compensation. In order to demonstrate the capabilities of the proposed MEPHI platform, a frequency-modulated continuous-wave laser detection and ranging (FMCW LADAR) source will be developed.
Contact Information	quack@eecs.berkeley.edu
Advisor	Ming C. Wu, Bernhard Boser, Connie Chang-Hasnain, Shun Lien Chuang, , Eli Yablanovitch

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN665 New Project
Project Title	Electronic Photonic Heterogeneous Integration (EPHI) System Demonstrator: High Bandwidth LADAR Source
Status	New
Funding Source	DARPA
Keywords	Photonics
Researchers	Simone Gambini, Jeffrey Chou, Frank Rao
Abstract	The tight heterogenous integration of optical sources, silicon waveguides and control electronics can enable low-cost, miniaturized range finders and high-bandwidth communication systems. We will demonstrate the advantages of this paradigm realizing an electronically linearized LADAR source which can generate a predictable linear frequency sweep over a range >10nm, enabling ranging with sub-mm accuracy.
Contact Information	sssimone@eecs.berkeley.edu,boser@eecs.berkeley.edu
Advisor	Bernhard E. Boser, Ming C. Wu, Connie Chang-Hasnain

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN672 New Project
Project Title	Solar Hydrogen Production by Photocatalytic Water Splitting
Status	New
Funding Source	Non-BSAC
Keywords	Solar energy, photocatalysis, titanium dioxide, nanostructures
Researchers	Roseanne H. Warren, Heather C. Chiamori
Abstract	Photocatalytic water splitting is the process of converting water into hydrogen and oxygen with solar energy using a photocatalytic material. When light is absorbed by the photocatalyst, an electron- hole pair is generated that interacts with water molecules in a surface reduction-oxidation reaction to decompose the water into hydrogen and oxygen. One of the greatest challenges in photocatalysis is engineering the photocatalytic material for high conversion efficiency and wide absorption spectrum in the visible light range. Crystalline nano-structures have demonstrated promising capabilities as photocatalysts due to their high surface area-to-volume ratios and ability to be densely grown at large scales. This project aims to improve the performance of photocatalytic nano-structures using innovative growth processes, co-catalytic materials, and band-gap manipulation.
Contact Information	warrenr@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN317
Project Title	Direct-Write Piezoelectric PVDF Nanogenerator via Near-Field Electrospinning
Status	Continuing
Funding Source	Federal
Keywords	Electrospinning, nanofibers, nanogenerators, energy harvesting/scavenging, NEMS
Researchers	Jiyoung Chang, Michael Dommer
Abstract	This project aims to study energy conversion and actuation properties of a new architecture electrospun piezoelectric nanofibers. It presents interesting potentials in various applications including power scavenge, sensing and actuation. Conceptually, we propose an in-situ stretching and poling process for the production of piezoelectric PVDF nanofibers using the "continuous near-field-electrospinning" process. Preliminary results conclude that location and pattern deposition control of continuous NFES are achievable for large area depositions of nanofibers. In this project, we will investigate the process protocols of electrospun piezoelectric PVDF nanofibers, including studies on the viscosity, conductivity and surface tension of the polymer solution, applied electrical field, tip diameter of the spinneret, the size of the droplet, and ambient parameters including temperature, humidity and air velocity to have controllable deposition of PVDF, optimal piezoelectric energy conversion efficiency, and a large area energy harvester demonstration. Initial actuation behaviors of the PVDF nanofiber are also demonstrated.
Contact Information	changjy@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Micropower
Project ID	BPN519
Project Title	Harvesting Energy from Evaporation
Status	Continuing
Funding Source	Other
Keywords	Synthetic leaf, Rotor, Charge pump, Energy scavenging
Researchers	Vedavalli G. Krishnan, Frederick Dopfel
Abstract	Mimicking the transport of water in plants, the goal of this project is to harvest energy from evaporation-driven flows. This will be achieved by microfabricating a synthetic leaf that mimics the transport and transpiration of water in plants, and an efficient micro-hydro power generator that is driven by the creeping flow of evaporation.
Contact Information	vedavalli@berkeley.edu, fcdopfel@berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Micropower
Project ID	BPN562
Project Title	AC Energy Scavenging for Smart Grid Sensing
Status	Continuing
Funding Source	Industry
Keywords
Researchers	Igor Paprotny, Yiping Zhu, Richard Xu, Duy Son Nguyen
Abstract	The goal of this project is to devise small inexpensive modules for indoor or outdoor deployment, that sense electrical variables on and scavenge energy from energized conductors, such as appliance cords and the conductors on high-voltage power transmission lines and equipment. In addition to an energy scavenging element, the modules will contain sensors, their associated signal conditioning circuitry, power conditioning and storage elements, and a wireless radio chip and antenna. We have recently demonstrated the ability to scavenge 2 mW from a nearby conductor carrying 20 A_rms, which is 10-100x more than can be extracted using comparable coil- based approaches.
Contact Information	igorpapa@eecs.berkeley.edu, zhuyp@berkeley.edu, qlxu@berkeley.edu, rwhite@eecs.berkeley.edu, Duy.S.N
Advisor	Richard M. White

 

Document Top Table of Projects	Micropower
Project ID	BPN654
Project Title	Electret-Based Voltage Sensing and Energy Harvesting from Energized Conductors
Status	Continuing
Funding Source	State
Keywords	Electret, voltage sensor, energy harvester, energized conductors, Smart Grid, Demand Response
Researchers	Richard Xu, Igor Paprotny
Abstract	The goal of this project is to design and fabricate electret-based voltage sensors and energy harvesters for Smart Grid and Demand Response applications. The functions of the proposed devices are to sense the voltage variation and harvest energy from energized conductors, such as appliance cords and high-voltage power transmission lines and equipment.
Contact Information	qlxu@berkeley.edu, igorpapa@eecs.berkeley.edu, rwhite@eecs.berkeley.edu, pwright@me.berkeley.edu
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN505
Project Title	Deployment of Wireless Stick-On Circuit Breaker PEM AC Sensors for the Smart Grid
Status	Continuing
Funding Source	State
Keywords	Power; Passive Proximity Electric Sensors; MEMS; Wireless; Energy Scavenging
Researchers	Richard Xu, Igor Paprotny, Yiping Zhu
Abstract	The electric power consumption of the entire Berkeley campus ranges from 18 to 30 MW, of which the Electrical Engineering building (Cory Hall) load comprises from 3% to 5%. Presently, the power entering the building is metered monthly at the primary terminals of its 12.4 kilovolt distribution step-down transformer. In order to increase energy efficiency and to experiment with, and further develop, our miniature electrical sensors, we are in the process of installing proximity sub-metering of loads accessed through a standard circuit breaker panel to which miniature proximity-based current sensors have been attached. We have also made a two-minute video, available from the BSAC web site, demonstrating the sensors in action.
Contact Information	qlxu@berkeley.edu, igorpapa@eecs.berkeley.edu, zhuyp@berkeley.edu
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN448
Project Title	Integrity Assessment of Underground Power Distribution Cables
Status	Continuing
Funding Source	State
Keywords	MEMS, Power, Passive,proximity, Sensor, Wireless, Water Tree
Researchers	Giovanni Gonzalez, Igor Paprotny, Michael Seidel
Abstract	A serious worldwide infrastructure problem is the sudden, often dramatic failure of underground high-voltage AC power distribution cables. This research is aimed at finding economical ways of measuring the health of in-service cables operating at tens of kilovolts, to permit their selective replacement.
Contact Information	giova@cal.berkeley.edu, igorpapa@eecs.berkeley.edu, rwhite@eecs.berkeley.edu, mjseidel@berkeley.edu
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Micropower
Project ID	BPN555
Project Title	Power Transfer Over a Capacitive Interface
Status	Continuing
Funding Source	Federal
Keywords	power transfer, contactless, capacitive
Researchers	Mitchell H. Kline, Igor I. Izyumin
Abstract	The simplicity and low cost of capacitive interfaces makes them very attractive for wireless charging stations. Major benefits include low electromagnetic radiation and the amenability of combined power and data transfer over the same interface. We present a capacitive power transfer circuit using series resonance that enables efficient high frequency, moderate voltage operation through soft-switching. An included analysis predicts fundamental limitations on the maximum achievable efficiency for a given amount of coupling capacitance and is used to find the optimum circuit component values and operating point. Automatic tuning loops ensure the circuit operates at the optimum frequency and maximum efficiency over a wide range of coupling capacitance and load conditions. An example interface achieves near 80% efficiency at 3.7W with only 63 pF of coupling capacitance. An automatic tuning loop adjusts the frequency from 2 to 8 MHz to allow for a wide range of alignment conditions. On- off modulation is used to maintain efficiency at light loads.
Contact Information	mitchellk@berkeley.edu, izyumin@eecs.berkeley.edu
Advisor	Bernhard E. Boser, Seth Sanders

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN608
Project Title	Microscale Rate Integrating Gyroscope
Status	Continuing
Funding Source	Federal
Keywords	gyroscope, calibration, rate-integrating, whole-angle
Researchers	Mitchell H. Kline, Yu-Ching Yeh
Abstract	A microscale rate-integrating gyroscope (MRIG) produces a signal directly proportional to the angle through which the device has been rotated. This is in contrast to a rate-gyro, which is sensitive to the angular velocity, with the rotation angle obtained through subsequent integration. With the MRIG, the integration is pushed to the mechanical domain by allowing the vibration pattern to assume any orientation in the structure. Highly symmetric structures are preferred, as any variation in effective stiffness, mass, or damping with angle will result in systematic drift. In this project, we will be investigating two structures as MRIGs, the ring and hemisphere. We will design electronics that (1) measure the angle directly through synchronous demodulation of the displacement signals and (2) sustain oscillation in any arbitrary direction through parametric excitation. This project also investigates online calibration methods aimed at reducing rate scale factor and offset deviation. One such approach is to periodically swap the drive and sense axes, which causes errors associated with the mismatch between the axes to be averaged out.
Contact Information	mitchellk@berkeley.edu, ycyeh@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN485
Project Title	Ultrasonic 3D Imaging Using Piezoelectric Micromachined Ultrasound Transducers
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, ultrasound, ultrasonic transducer, pMUT, piezoelectric, CMOS, rangefinder, distance sensor
Researchers	Richard J. Przybyla
Abstract	Optical 3D imagers for gesture recognition, such as Microsoft Kinect, suffer from large size and high power consumption. Their performance depends on ambient illumination and they generally cannot operate in sunlight. 3D range measurement using sound is an attractive alternative because of the potential for low power consumption and ambient light insensitivity. Present ultrasonic free-space ranging cameras are based on bulky piezoceramic transducer arrays. Our research focuses on building a 3D ultrasonic imager using batch-fabricated micromachined aluminum nitride (AlN) ultrasonic transducer arrays. We have made significant progress towards this goal by demonstrating an ultrasonic rangefinder, an ultrasonic distance sensor, and most recently a 2D rangefinder, which measures distance and angle to objects up to 750mm away. In the next 18 months, we will build a system that can take a 3D image of the environment using ultrasound. Each element in an array of ultrasound transducers will transmit a pulse and then receive an echo from the environment. From the relative arrival time of each echo across the array, the 3D location of the target is determined. Power consumption of the CMOS analog front-end will be optimized based on the desired goals of millimeter accuracy and meter range. The sensor system will enable gesture-based control of computers, smartphones, and televisions at a fraction of the power and volume required for optical-based solutions.
Contact Information	rjp@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN466
Project Title	Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers
Status	Continuing
Funding Source	DARPA
Keywords	Aluminum Nitride, Piezoelectric, Ultrasound Transducers, MEMS
Researchers	Stefon Shelton, Andre Guedes
Abstract	The objective of the current research is to fabricate and characterize aluminum nitride piezoelectric micromachined ultrasound transducers (pMUTs) for use in the velocity detection module of a personal navigation unit. A new MEMS Aluminum Nitride (AlN) piezoelectric sensor technology has been chosen to integrate the MEMS AlN pMUTs above CMOS on a silicon substrate. The ultimate goal of this research is to integrate MEMS AlN pMUTs with supporting electronics on one chip to minimize chip size, energy usage, and cost. Guided by both analytic and finite element models the optimum design parameters are chosen to obtain the desired resonant frequency, maximum output sound pressure for transmitter, and maximum sensitivity for receiver. We are currently exploring both fully clamped and partially released circular membrane designs for single element and 2-D transducer arrays.
Contact Information	seshelton@ucdavis.edu, aguedes@eecs.berkeley.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN628
Project Title	High Frequency Piezoelectric Micromachined Ultrasound Transducers
Status	Continuing
Funding Source	Federal
Keywords	piezoelectric, ultrasound transducers, Aluminum Nitride, medical imaging, biometrics
Researchers	Stefon Shelton, Andre Guedes, Christine Dempster
Abstract	The goal of the current research is to fabricate high frequency Aluminum Nitride (AlN) piezoelectric micromachined ultrasound transducers (pMUTs) to be used in pulse echo imaging, such as biometric fingerprint authentication and real time three dimensional medical imaging. Piezoelectric membranes are to be fabricated and tested in both linear and 2D arrays with single and dual electrode designs. These will then be integrated above CMOS on a silicon substrate. Element diaphragm diameter determines resonant frequency and thus the size of object it can most accurately image. Initial FEM and analytical results predict a 4-28 MHz range for the current designs with diameters ranging from 30-80 microns.
Contact Information	cedempster@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN603
Project Title	Hemispherical Resonator Gyro
Status	Continuing
Funding Source	Federal
Keywords	MEMS, Gyroscope, micro-EDM, Diamond
Researchers	Hadi Najar, Mei-Lin Chan, Jin Xie
Abstract	The goal of this project is to realize a micro rate-integrating gyroscope that produces an output signal proportional to rotation angle rather than rotation rate. Realizing this goal will require the fabrication of hemispherical resonating shells with extremely close frequency matching (delta-f < 10 Hz) and very high quality factor (Q > 1 Million). The fabrication method uses traditional silicon micro-fabrication techniques along with micro-electrical discharge machining (micro-EDM) and chemical polishing to create a highly symmetric hemispherical shell resonator. Preliminary results show that this method, applied to silicon wafers, effectively achieves higher levels of symmetry and surface quality than those of conventional etching or other polishing methods. Hemispherical shell resonator molds will be formed on a standard SOI wafer. CVD diamond will later be deposited to make the final resonating shell. Diamond material was chosen for its very low thermoelastic damping (TED) and surface losses. Analytical modeling was performed prior to fabrication to extract parameters such as resonant frequency. To ensure that the desired mode is obtained, finite element analysis was further performed and compared with analytical model results.
Contact Information	dahorsley@ucdavis.edu, hnajar@ucdavis.edu, cmlchan@ucdavis.edu,jinxie@berkeley.edu,
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN655 New Project
Project Title	Materials for High Quality-Factor Resonating Gyroscopes
Status	New
Funding Source	DARPA
Keywords	gyroscopes, inertial sensors, surface micromachining, materials, diamond
Researchers	Hadi Najar, Mei-Lin Chan, Jin Xie
Abstract	This project will investigate new materials suitable for achieving Q-factors in excess of 1 million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and surface losses will be performed using resonator test structures.
Contact Information	dahorsley@ucdavis.edu, hnajar@ucdavis.edu, jinxie@berkeley.edu, cmlchan@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN539
Project Title	Micromechanically-Enhanced Magnetoresistive Sensors
Status	New
Funding Source	Federal
Keywords
Researchers	Gerardo Jaramillo, Andre Guedes
Abstract	Magnetoresistive (MR) sensors are highly sensitive magnetic field sensors but suffer from large 1/f noise. We have developed a new approach for reducing the 1/f noise in MR sensors by using a MEMS resonator to mechanically modulate the magnetic field signal to a high frequency, where the 1/f noise vanishes. This mechanism improves the MR element sensitivity by 2-3 orders of magnitude in the low frequency sensing range. A fully integrated fabrication process was developed, where the MR sensor is fabricated first on the surface of a SOI wafer and the MEMS actuators are fabricated last. Our first generation device, reported at previous IAB meetings, integrated electrostatic MEMS and magnetic tunnel junction (MTJs) MR sensors. A second generation device is under development, consisting of a highly sensitive spin valve (SV) MR sensor and two AlN piezoelectric cantilevers with integrated magnetic flux concentrators. This new approach should bring the SV sensitivity down to the picoTesla range, making this hybrid device suitable for use in medical imaging, bionics, and any other application where ultra low magnetic sensing may be required.
Contact Information	dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN599
Project Title	MEMS Electronic Compass: Three-axis Magnetometer
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Vashwar T. Rouf, Mo Li
Abstract	The goal of this is project is to develop a low-power three axis MEMS magnetic sensor suitable for use as an electronic compass in smart phones and portable electronics. Our objective is to achieve a resolution of 200 nT/rt Hz and power consumption of 5mW/axis with DC power supply of 3.3V. To enable co-integration with a 3-axis accelerometer, we seek to optimize sensor performance without the need for a vacuum seal. Although past devices designed by our group have demonstrated that our resolution goal is reachable, these devices suffered from dc offset larger than Earth�s field and required an external programmable oscillator for operation. Here, we aim to reduce offset by two orders of magnitude and develop self-oscillation loops to excite the sensor at its natural frequency.
Contact Information	vtrouf@ucdavis.edu,dahorsley@ucdavis.edu,moxli@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN634
Project Title	Low Voltage and Fast Response Actuators
Status	Continuing
Funding Source	NSF
Keywords	electrostatic actuator, low power, fast response
Researchers	Xiaobo Zhang, Zhibin Yu
Abstract	The conventional electrostatic actuators are operated at very high voltage relative slow response which prevents them from useful applications in providing mobility for making microrobots. There has been a lot of study on making electrostatic actuators based on polymers such as acrylic elastomers, HS3 silicone and silicon NuSil. All these materials need over one thousands volts to operate. We are going to make low operation voltage and fast response actuators using nanowire polymer composites. We are going to deposit polymer thin films on vertically aligned nanotube (nanowire) forest grown on a Si substrate. Peeling off the polymer films results in nanotube (nanowire)-polymer composites with all the nanowires and nanotubes fully incorporated into the polymer matrix. By using this method we are going to explore several material systems such as CNT/silicone rubber, CNT/PVDF etc. The motivation for making nano material-polymer composites based actuators is that nano structured materials have potential advantage to enhance the local electric field and therefore lower the operation voltage for the actuators. Meanwhile, the mechanical property of the composite can be greatly improved for high force actuation.
Contact Information	zhangxb@berkeley.edu, zhbin.yu@gmail.com
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN636
Project Title	Extremely Elastic Strain Gauges via Nanotube Percolation Poisson Capacitors
Status	Continuing
Funding Source	Federal
Keywords	nanotube, strain gauge, percolation, sensor
Researchers	Daniel J. Cohen
Abstract	There is a growing need for stretchable electronics and sensors, and so we have developed a best-in-class stretchable strain gauge designed to meet this challenge. Our device works by measuring capacitive changes in parallel networks of carbon nanotubes separated by an elastomer. The device supports strains up to 100% with less than 3% variability over 3000 cycles, and does so at a materials cost of under 50 cents/sensor. The sensitivity is 0.99, while the theoretical maximum for a stretchable gauge is 1. By contrast, metal-foil gauges (the current standard) can only sustain strains of 5% before failure. Given these specifications, our sensor is uniquely poised to contribute to robotics, medical implants, and high-tech clothing. As an example of these applications, we have tested our sensor as an integrated component in a new class of ultra-light, foldable, legged robots inspired by insect locomotion. By incorporating it into a position where it both acts as an energy storage device and a displacement sensor, we can accurately transduce parameters such as joint angles and relative foot displacement. To date, these measurements have not been possible due to the limitations of metal-foil gauges and the high weight of alternate sensors.
Contact Information	daniel.cohen@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN496
Project Title	Chemomechanical Nanomachine for Artificial Biomolecular Signal Transduction and Drug Delivery
Status	Continuing
Funding Source	Other
Keywords	nanomachine, artificial cell signaling, nanotransducer, drug delivery, lavella, glavella, gabriel lavella
Researchers	Gabriel J. Lavella
Abstract	We have developed a class of nanomachine that can rationally designed to chemomechanicaly respond to user specified antigenic biomolecules. Our long term goal is to demonstrate that these devices can be employed to achieve highly localized controlled of the cell signaling network.
Contact Information	glavella@eecs.berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN518
Project Title	Synthetic Turing Patterns
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Daniel C. Huang, William J. Holtz, Justin Hsia
Abstract	Symmetry breaking is at the heart of developmental biology. Symmetry breaking answers the age-old questions regarding the origins of polarity, cellular differentiation and how the leopard got its spots. Alan Turing purposed a simple mathematical model which explains the mechanism of how an initially uniform concentration can become non-uniform and form papers. Synthetic biologist have attempted to engineer synthetic gene networks that spontaneously produce patterns (Turing patterns) in ensembles of cells. These systems have been proven to be extremely difficult to engineer due to tight parameter constraints and to date no true synthetic Turing have been created using gene networks. The main engine driving Turing pattern formation is a robust nonlinear circuit, such as a bistable or oscillatory network. Creating robust, well-characterized, and predictable genetic bistable and oscillatory networks becomes a major step in eventually creating a Turing pattern. This project focuses on both the analytical/theoretical and experimental/wetlab aspects of creating synthetic genetic Turing patterns. Theoretical methods include stability analysis, FEM simulations and stochastic simulations. The theoretical methods gives insight in experimental design and tuning of synthetic Turing patterns. Much work has also been devoted on creating robust genetic bistable switches and oscillator which can both be used in synthetic biology as modular circuits and also for incorporation into Turing pattern generators.allows for a further understanding of symmetry breaking in nature, as well as explores cellular communication in synthetic multi-cellular systems.
Contact Information	huangdc@eecs.berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor	Michel M. Maharbiz, Murat Arcak

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN469
Project Title	Ultra-Short Channel 1D-2D Compound Semiconductor on Insulator (XOI) FETs
Status	Continuing
Funding Source	Industry
Keywords
Researchers	Steven Chuang, Kuniharu Takei
Abstract	Recently, compound semiconductor on insulator(XOI)has risen as a promising platform for next generation high performance electronics, as it inherits advantages from both SOI and high mobility III-V materials. In order to test the performance limit of this platform, we plan on fabricating ultra-short channel XOI FETs. This project will involve various controlled experiments to better understand the underlying physics of XOI FETs, thus allowing us to progress towards the ultimate XOI FET.
Contact Information	s_chuang@eecs.berkeley.edu, ktakei@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN533
Project Title	Nanomaterial-Based Artificial Skin Sensor
Status	Continuing
Funding Source	NSF
Keywords	Nanomaterial patterning, Large-scale flexible electronics
Researchers	Kuniharu Takei, Toshitake Takahashi
Abstract	Flexible large-scale devices are of interest for wearable human interface applications. We have developed a technique of "uniform nanomaterial patterning" for the integration of high- performance inorganic nanomaterials on any substrates. This project is to realize large scale flexible multi-functional electronics by utilizing nanomaterials such as nanowires and nanotubes. As one of applications, we here demonstrate mechanically flexible large scale artificial skin sensor and propose different types of sensors such as a pressure sensitive rubber, temperature sensor etc. Notably, the device can provide impressive mechanical robustness and electrical properties while the integration of nanomaterials and macrodevices represents an important milestone toward the realization of future portable electronic applications.
Contact Information	ktakei@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN567
Project Title	Compound Semiconductor on Insulator (XOI) FETs
Status	Continuing
Funding Source	Federal
Keywords	Compound Semiconductor, MOSFETs, Transistors, III-V
Researchers	Rehan R. Kapadia, Kuniharu Takei, Hui Fang, Steven Chuang
Abstract	Due to their high mobility, the integration of compound semiconductors on Si has been actively studied over the past several years. This integration, however, presents significant challenges. The conventional method of addressing this problem consists of growth of multiple epilayers of materials to address the lattice mismatch between Si and the desired semiconductor, leading to highly complex fabrication techniques. Here we demonstrate high performance compound semiconductor on insulator (XOI) field effect transistors (FET) consisting of ultra-thin InAs nanoribbons (NR) on insulator that exhibit performance on par with the state of the art quantum well FETs. We have performed a detailed study on the transport properties of these InAs ribbons, showing that quantum confinement plays a significant role in the electron transport properties. In detail, the contact resistance and mobility are heavily affected by the number of sub-bands populated.
Contact Information	kapadia.rehan@gmail.com, r.kapadia@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN625 New Project
Project Title	Direct Growth of High Quality III-V Semiconductors on Metal Foils for Low-cost, High-efficiency PVs
Status	New
Funding Source	Federal
Keywords	III-Vs, solar cells, photovoltaics
Researchers	Maxwell S. Zheng, Zhibin Yu, Rehan Kapadia
Abstract	The intrinsic advantages of III-V semiconductors for solar cells have been hobbled by the lack of low-cost substrates and processes, which has thus far limited market success of III-V solar cells. Here at Berkeley we are exploring a non-traditional approach which addresses these drawbacks. High optical quality polycrystalline InP films have been grown on non-epitaxial molybdenum substrates. Remarkably, these films with micron-sized grains have similar photoluminescence qualities as single- crystalline InP, and show great promise for high-efficiency, low-cost solar cells.
Contact Information	mzheng27@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN629
Project Title	Large-Scale Carbon Nanotube Network Active Matrix Circuitry for Flexible and Stretchable Electronics
Status	Continuing
Funding Source	Other
Keywords	Flexible Electronics, Carbon Nanotube Network
Researchers	Toshitake Takahashi, Kuniharu Takei, Chuan Wang
Abstract	In this project, we will explore a promising approach for large-scale flexible and stretchable electronics using semiconductor-enriched carbon nanotube (CNTs) solution. In conventional flexible devices, organic materials or amorphous silicon have been intensively explored, but its inherently low electrical performance limits the range of potential applications. Here, we use solution-based approach in which semiconductor-enriched CNTs (99 %) are deposited uniformly on wafer-scale flexible polyimide (PI) substrate or Polydimethylsiloxane (PDMS) substrate at room temperature, and obtain mobility of ~ 20 cm2V-1s-1, an order of magnitude larger than conventional materials, without sacrificing current on/off ratio (ION/IOFF of ~ 104). The PI substrate readily turns into a stretchable substrate by cutting the PI into open mesh geometry, showing a stretchability of 11.5 % without noticeable device degradation. The concept of CNT network-based flexible and stretchable active matrix circuitry can be potentially expanded to achieve multifunctional sensors by adding various components on top of this backplane.
Contact Information	toshi1113@gmail.com
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN659 New Project
Project Title	High Performance Flexible Integrated Circuits Using Carbon Nanotube Networks
Status	New
Funding Source	Federal
Keywords	Flexible electronics, thin-film transistors, semiconducting nanotube networks, integrated circuits, radio-frequency applications
Researchers	Chuan Wang, Kuniharu Takei, Toshitake Takahashi
Abstract	Solution-processed thin-films of semiconducting carbon nanotubes as the channel material for flexible electronics simultaneously offers high performance, low cost, and ambient stability, which significantly outruns the organic semiconductor materials. In this Project, we report the use of semiconductor-enriched carbon nanotubes for high-performance integrated circuits on mechanically flexible substrates for digital, analog and radio-frequency applications. The as-obtained thin-film transistors (TFTs) exhibit highly uniform device performance with on-current and transconductance up to 15 uA/um and 4 uS/um. By performing capacitance-voltage measurements, the gate capacitance of the nanotube TFT is precisely extracted and the corresponding peak effective device mobility is evaluated to be around 50 cm2/Vs. Using such devices, digital logic gates including inverters, NAND and NOR gates with superior bending stability have been demonstrated. Moreover, radio-frequency measurements show that cutoff frequency of 170 MHz can be achieved in devices with a relatively long channel length of 4 um, which is sufficient for certain wireless communication applications. This proof-of-concept demonstration indicates that our platform can serve as a foundation for scalable, low-cost, high-performance flexible electronics, allowing signal processing and wireless tranceiver circuits to be integrated with various types of sensor arrays on flexible substrates.
Contact Information	chuanwang@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN434
Project Title	A Micromechanical RF Channelizer
Status	Continuing
Funding Source	DARPA
Keywords	micromechanical, RF, filter, mixer, channel selection, channelizer, ALD, capacitive gap scaling
Researchers	Mehmet Akgul
Abstract	Vibrating mechanical tank components, such as crystal and SAW resonators, are widely used for frequency selection in communication systems because of their high Q and exceptional stability. However, being off-chip components, these devices pose an important bottleneck against the ultimate miniaturization and performance of wireless transceivers. This project aims to explore the use of capacitively transduced micromechanical circuits to realize micromechanical mixer-filters with reconfigurable attributes. With their substantial size, cost and performance advantages, these devices can be used to realize a bank of tunable/switchable micromechanical filters for multi-band RF channel selection. By replacing all off-chip components with micromachined passive elements, micromechanical mixer-filters offer an alternative set of strategies for transceiver miniaturization and improvement. In the long term, this overall project aims to demonstrate an RF channelizer utilizing micromechanical elements in its signal path, exclusively, that presents one of the keys to eventually realizing a cognitive radio.
Contact Information	akgul@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN359
Project Title	Micromechanical Resonator Based Reference Oscillators
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, Oscillators
Researchers	Thura Lin Naing, Tristan Rocheleau
Abstract	This project aims to achieve a micromechanical based reference oscillator that meets or exceeds the requirements of the GSM standard and investigates short-term stability of the MEMS oscillators: particularly, phase noise and acceleration sensitivity of oscillators. En route to achieving low phase noise oscillators, one major part of the research is expected to focus on high Q (>10k) resonators, which enable to have outstanding phase noise performance. In addition to providing a highly accurate, on-chip frequency reference, a fully integrated oscillator can achieve greater stability (particularly acceleration sensitivity) and far less power consumption than any comparable off-chip oscillator. In the process of achieving a fully integrated oscillator, much of the research is expected to focus on low-temperature metal processes that allow MEMS-last integration with MOS devices while retaining the stability and Q performance already offered by polysilicon counterparts.
Contact Information	thura@eecs.berkeley.edu, tristan.rocheleau@gmail.com
Advisor	Elad Alon, Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN540
Project Title	Temperature Stable Micromechanical Resonators and Filters
Status	Continuing
Funding Source	Industry
Keywords	�mechanical resonator, electrical stiffness, compensation, frequency drift
Researchers	Lingqi Wu
Abstract	This project aims to suppress thermal drift in high frequency micromechanical resonators targeted for channel-select filter applications. Among the more promising methods to be explored is electrical stiffness compensation, in which a temperature-dependent electrode-to-resonator gap spacing is employed to generate a temperature-dependent electrical stiffness that then counteracts the resonator's intrinsic dependence on temperature.
Contact Information	wulingqi@berkeley.edu, ctnguyen@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN542
Project Title	New Materials for MEMS Resonators
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Robert Schneider
Abstract	New resonator structural materials will be explored to achieve GHz-frequency MEMS resonators having ultra-high quality factors (Q's) and antenna-amenable motional impedances. Materials having acoustic velocities greater than that of polysilicon, such as diamond and silicon carbide (SiC), will be used to fabricate devices having higher resonance frequencies and higher Q's than their polysilicon counterparts. Low-loss metals, including metal alloys, will also be investigated to achieve low deposition temperatures and high electrical conductivities while nonetheless maintaining high Q�s.
Contact Information	bschneid@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN676 New Project
Project Title	Q-boosted Optomechanical Resonators
Status	New
Funding Source	DARPA
Keywords
Researchers	Turker Beyazoglu
Abstract	This project aims to demonstrate optomechanical resonators with simultaneous high optical and mechanical quality factors for use as low noise microwave oscillators in chip scale atomic clocks (CSAC). Proposed research will make it possible to optimize both quality factors independently by mechanically coupling a high optical Qo resonator to a high mechanical Qm resonator array. This high mechanical Qm circuit will in turn realize a very stable microwave oscillator in a CSAC.
Contact Information	turker@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN630
Project Title	Capacitive-Gap Micromechanical Local Oscillator At GHz Frequencies
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Tristan O. Rocheleau
Abstract	This project aims to build a MEMS-based on-chip reference oscillator at GHz frequencies. By constructing an array of capacitive transduced micromechanical resonators with extremely small capacitive gaps and high mechanical Q, in conjunction with a low-power CMOS ASIC amplifier, it becomes possible to achieve self-sustained oscillation in a die-level system. The high mechanical Q of these devices, which can be in excess of 100,000 at frequencies exceeding 500MHz, allows the possibility for unprecedented phase noise performance. Many applications for such high-frequency, low phase noise oscillators exist, such as integrated oscillators for communications or microwave sources for use in chip-scale atomic clocks.
Contact Information	tristan@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN658 New Project
Project Title	QES: Nanoparticle/Polymer Composite Material Supercapacitor
Status	New
Funding Source	Other
Keywords	Supercapacitor, Nanoparticle, Nanocomposite, Composite Material
Researchers	Anju Toor
Abstract	The goal of this project is to design and develop an innovative nanoparticle/polymer composite material and then apply this nanocomposite to the development of a supercapacitor module with high energy and high power density. A new technique for creating films of core/shell nanoparticles in a polymer matrix could allow cost effective fabrication of capacitors with enhanced energy storage capacity as compared to conventional devices. The module can serve as efficient energy storage for back-up power in buildings and for hybrid/electric vehicles where lack of fast recharging time, limits their usage.
Contact Information	atoor@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN487
Project Title	QES: High-Resolution Direct Patterning of Nanoparticles and Polymers by a Template-Based Microfluidic Process
Status	Continuing
Funding Source	Federal
Keywords	Nanoimprint lithography, soft lithography, nanoparticles, polymers, metals, nanoparticle fluid
Researchers	Michael T. Demko
Abstract	High-resolution patterns of nanoparticles and polymers are created on a variety of substrates using a template-based microfluidic process. A rigid, vapor-permeable polymer mold is created by polymerizing 4-methyl-2-pentyne and solvent casting the resulting polymer. The mold is pre-filled with solvent by pressing into a coated substrate, and then filled with nanoparticle or polymer ink by permeation pumping. This allows high resolution patterning with good control over the three-dimensional geometry in a completely additive process with no residual layer or etching required. This process has been demonstrated by patterning low-temperature metal electrodes from gold nanoparticles and zinc oxide nanoparticles for use in a UV detector.
Contact Information	demko@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN490
Project Title	QES: Microfluidic Reactors for Controlled Synthesis of Monodisperse Nanoparticles
Status	Continuing
Funding Source	Federal
Keywords	nanoparticle, nanocrystal, monodispersed, microreactor, droplet-based
Researchers	E. Yegan Erdem
Abstract	The goal of this project is to design a microfluidic system to synthesize monodispersed nanoparticles. Two microreactors are designed for controlled synthesis of monodisperse nanoparticles. Our first microreactor works by mixing two reagents inside a droplet to synthesize nanoparticles whereas the second microreactor is designed to achieve monodispersity by having thermally isolated zones for nucleation and growth processes and incorporating a two phase flow system to assure uniform reaction conditions. This reactor is fabricated in silicon and it is capable of handling high temperature and high pressure reactions.
Contact Information	yeganerdem@berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN594
Project Title	QES: Fast, High-Throughput Micro, Nanoparticle Printing with Tunable Resolution & Size
Status	Continuing
Funding Source	Industry
Keywords	Printing, Surface-tension, High-throughput, Microparticle, Nanoparticle, Nanomanufacturing
Researchers	Sun Choi
Abstract	We report a novel technique to print micro, nanoparticle assembly with tunable resolution (from several micron to hundreds micron) by using porous silicon membrane-based printing head. Creating regular, repetitive and well-defined three-dimensional patterns of particle assembly in targeted area is a major bottleneck in various applications such as the fabrication of three-dimensional photonic crystals, printed electronics on flexible substrates, colloidal quantum-dot based devices for display, plasmonics and etc. In this presented work, micro, nanoparticles are printed via porous silicon membrane of a newly designed printing head. The printing head is fabricated by applying conventional micro-fabrication technology to SOI (Silicon-On-Insulator) substrates. It is anticipated this technique will be applied to large-scale manufacturing of pre-patterned substrates for SERS (Surface Enhanced Raman Spectroscopy), nanoparticle-based conductometric bio-chem sensors and the circuitry of printed electronics.
Contact Information	sunchoi@eecs.berkeley.edu
Advisor	Albert P. Pisano

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN606 New Project
Project Title	Carbon Nanotube Films for Energy Storage Applications
Status	New
Funding Source	Federal
Keywords	Carbon Nanotube, Supercapacitor, Energy Storage, Flexible
Researchers	Alina Kozinda
Abstract	As energy demands continue to rise, it becomes imperative to have efficient energy storage devices with high energy and power rndensity. At the same time, the space inside devices also continues to shrink, making energy storage devices which possess not rnonly high energy/power density, but also an adjustable shape to fit into various form factors an ideal solution. Energy storage rndevices made from flexible electrodes could be attractive in a roll-up or surface-conformed format to minimize space usage. A rnmechanically flexible CNT supercapacitor electrode is demonstrated using a water solution-assisted film lift-off and densification rnprocess. The electrode exhibits the following three features: (1) each CNT has a natural contact to its as- fabricated current-rncollecting metal layer; (2) the CNTs and the bottom metal layer are intact during the water-assisted lift-off process; and (3) the in-rnsitu liquid evaporation and densification process naturally occurs to dramatically increase volumetric energy density. Because of rnthe ability of the film to be lifted off of its original growth substrate, the application for same-chip CMOS energy storage devices rnis feasible. In addition, this flexible CNT supercapacitor electrode has the potential to conform to various surfaces, as well as to rnbe implemented in devices which are required to bend with use, such as in roll-up electronics.
Contact Information	kozinda@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN517
Project Title	Facile Synthesis of Nanostructures for Renewable Energy Applications
Status	Continuing
Funding Source	Other
Keywords	nanostructures, renewable energy, copper oxide, carbon nanotubes
Researchers	Kevin Limkrailassiri
Abstract	This project explores the use of carbon nanotubes and copper oxide nanostructures in renewable energy applications. These particular nanostructures are attractive candidate materials owing to their facile synthesis.
Contact Information	kevinlim@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN554
Project Title	TiO2 Nanoswords for Clean Energy Applications
Status	Continuing
Funding Source	Other
Keywords	titanium dioxide, nanostructures, clean energy
Researchers	Heather C. Chiamori
Abstract	The uniquely shaped titanium dioxide nanoswords are studied for energy and environmental applications. These nanostructures are synthesized using both induction heating and furnace-based methods.
Contact Information	chiamori@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	BioMEMS
Project ID	BPN680 New Project
Project Title	Solar Optics-based Active Panels (SOAP) for Photocatalytic Greywater Treatment: Design and Kinetics
Status	New
Funding Source	Federal
Keywords
Researchers	Vivek Rao, Benjamin Ross
Abstract	Water scarcity is projected to affect 1.8 billion people in the world by 2025. Due to the dramatic population growth of urban areas, the imminent water crisis demands efficient greywater treatment in new housing solutions. To address this need, we are developing a prototype of Solar Optics-based Active Panels (SOAP), which allows us to test the photocatalytic treatment of greywater using sunlight and immobilized titanium dioxide nanoparticles. The expected outcome of this research will be a prototype SOAP reactor that demonstrates fast inactivation of representative contaminants of greywater (e.g., coliform bacteria and organic pollutants). The SOAP reactor's optical, thermal, and thin-film flow performance will be experimentally characterized across critical reactor design parameters. Those parameters producing optimal photocatalytic treatment kinetics in a variety of simulated solar conditions will be identified. The prototype SOAP reactor will present a promising platform for integration of nano- and micro-technologies into point-of-use water treatment in global urban environments.
Contact Information	vivek.rao@berkeley.edu, benross@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN653
Project Title	Biologically Inspired Self-Activated Building Envelope Regulation System (SABERS)
Status	Continuing
Funding Source	NSF
Keywords
Researchers	Younggeun Park
Abstract	The objective of this work is to establish self-active building envelope regulation systems (SABERS) by integrating optical and hygrothermal sensor and actuator networks on a thin membrane. The system is specifically designed for lightweight membrane applications such as deployable emergency housing in tropical climates with the aim to supplant the use of traditional air conditioning systems responsible for the most significant energy expenditure in built environments in these regions. The expected outcome of this research is the development of a membrane prototype that consists of a self-activated opto-mechanical sensor/actuator polymeric network that controls airflow due to the temperature, light and humidity changes. It is composed by activating air mechanics (ventilation and dehumidification) though microvalves controlled by integrated optomechanical and hygrothermal sensors and actuators associated to an internal desiccant membrane to block moisture. SABERs will provide a basis for the future development of newly integrated environmental sensor technologies for thin film building membranes applicable to building climatic regulation (light and hygrothermal).
Contact Information	ygpark@berkeley.edu, ygpark221@gmail.com
Advisor	Luke P. Lee, Maria-Paz Gutierrez

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN570
Project Title	Semi-Permeable Membranes with Carbon Nanotubes for Encapsulation
Status	Continuing
Funding Source	Other
Keywords	carbon nanotube, permeability, encapsulation, nanopore, polysilicon
Researchers	Armon Mahajerin
Abstract	The primary goal of this project is to develop a unique composite layer with carbon nanotubes to achieve both the release and encapsulation of devices fabricated on silicon wafers for large area applications. Previously, permeable polysilicon has been used for this purpose, but this process requires multiple, lengthy process steps in order to generate permeability. A composite membrane of carbon nanotubes and polysilicon may achieve desired permeability for sacrifical etching of underlying oxides, followed by low pressure chemical vapor deposition to seal the fabricated device in vacuum. This process provides an efficient, reliable alternative to wafer bonding packaging techniques and also enables larger areas to be sealed compared to other thin film processses.
Contact Information	armonmah@me.berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	LWL20 New Project
Project Title	CMOS-Compatible Synthesis of Carbon Nanotubes for Sensor Applications
Status	Continuing
Funding Source	Other
Keywords	carbon nanotubes, synthesis, nanomaterial, integrated, integration
Researchers	Bao Quoc Ta, Huy Quoc Nguyen, Heather Chiamori
Abstract	The goal of this project is to develop a microelectronics-compatible synthesis method and direct integration of carbon nanotubes into MEMS and CMOS for sensors applications. Electrical process control, compatible with automation and wafer-level production, has been implemented. The project is partially carried out within the collaboration program between Vestfold University College (Norway) and UC Berkeley which is funded by The Norwegian Centre for International Cooperation in Higher Education (SIU).
Contact Information	chiamori@me.berkeley.edu, bao.quoc.ta@gmail.com,Knut.Aasmundtveit@hive.no
Advisor	Liwei Lin, Knut E. Aasmundtveit