Berkeley Sensor & Actuator Center

The Berkeley Sensor & Actuator Center (BSAC) is the Graduated National Science Foundation Industry/University Cooperative Research Center for Microsensors and Microactuators. We conduct industry-relevant, interdisciplinary research on micro- and nano-scale sensors, moving mechanical elements, microfluidics, materials, processes & systems that take advantage of progress made in integrated-circuit, bio, and polymer technologies.

Number of records: 83

POSTER	RESEARCH THRUST	ABSTRACT click link to view abstract	PROJECT MATERIALS WEBSITE, Login Required	PROJECT TITLE	ADVISOR
1	Wireless, RF & Smart Dust	BPN864	BPN864 Website	Micromechanical Resonator Waveform Synthesizer New Project	Clark T.-C. Nguyen
2	Wireless, RF & Smart Dust	BPN859	BPN859 Website	UHF Channel-Selecting Bandpass Filter New Project	Clark T.-C. Nguyen
3	Wireless, RF & Smart Dust	BPN861	BPN861 Website	Fully Integrated MEMS-Based Super-Regenerative Transceiver New Project	Clark T.-C. Nguyen
4	NanoTechnology: Materials, Processes & Devices	BPN867	BPN867 Website	Fully Integrated CMOS-metal MEMS Systems New Project	Clark T.-C. Nguyen
5	Wireless, RF & Smart Dust	BPN865	BPN865 Website	CMOS-Assisted Resoswitch Receivers New Project	Clark T.-C. Nguyen
6	Wireless, RF & Smart Dust	BPN866	BPN866 Website	Wide-Bandwidth UHF Bandpass Filters New Project	Clark T.-C. Nguyen
7	Wireless, RF & Smart Dust	BPN828	BPN828 Website	Zero Quiescent Power Micromechanical Receiver	Clark T.-C. Nguyen
8	Wireless, RF & Smart Dust	BPN540	BPN540 Website	Temperature-Stable Micromechanical Resonators and Filters	Clark T.-C. Nguyen
9	Wireless, RF & Smart Dust	BPN814	BPN814 Website	UHF Capacitive-Gap Transduced Resonators With High Cx/Co	Clark T.-C. Nguyen
10	Wireless, RF & Smart Dust	BPN701	BPN701 Website	Bridged Micromechanical Filters	Clark T.-C. Nguyen
11	Physical Sensors & Devices	BPN857	BPN857 Website	Miniature Autonomous Rockets New Project	Kristofer S.J. Pister
12	Wireless, RF & Smart Dust	BPN858	BPN858 Website	Zero Insertion Force MEMS Socket for Microrobotics Assembly New Project	Kristofer S.J. Pister
13	Physical Sensors & Devices	BPN826	BPN826 Website	Autonomous Flying Microrobots	Kristofer S.J. Pister
14	Wireless, RF & Smart Dust	BPN735	BPN735 Website	Walking Silicon Microrobots	Kristofer S.J. Pister
15	Wireless, RF & Smart Dust	BPN803	BPN803 Website	Single Chip Mote	Kristofer S.J. Pister, Ali M. Niknejad
16	Wireless, RF & Smart Dust	BPN744	BPN744 Website	Self-Destructing Silicon	Kristofer S.J. Pister, Michel M. Maharbiz
17	NanoPlasmonics, Microphotonics & Imaging	BPN836	BPN836 Website	Nanocrescent Antenna for Nanofocusing of Excitation Radiation and Concentrate Upconversion Emission	Luke P. Lee
18	BioMEMS	BPN829	BPN829 Website	Integrated Multiplexed Optical Microfluidic System (iMOMs) for Dengue Diagnosis	Luke P. Lee
19	Microfluidics	BPN824	BPN824 Website	Investigation of Dengue Infection’s Neurological Complications via a Comprehensive In Vitro Brain Model	Luke P. Lee
20	BioMEMS	BPN804	BPN804 Website	A Rapid, Integrated Molecular Diagnostic for Gram-Negative Pathogen Detection and Identification Based on Antibody-Based Capture and Photonic PCR	Luke P. Lee
21	Microfluidics	BPN730	BPN730 Website	Microfluidic Blood Plasma Separation for Point-of-Care Diagnostics	Luke P. Lee
22	NanoPlasmonics, Microphotonics & Imaging	BPN809	BPN809 Website	Photonic Cavity Bioreactor for High-throughput Screening of Microalgae	Luke P. Lee
23	NanoTechnology: Materials, Processes & Devices	BPN834	BPN834 Website	Direct Formation of Pore-Controllable Mesoporous SnO2 for Gas Sensing Applications	Roya Maboudian, Carlo Carraro
24	NanoTechnology: Materials, Processes & Devices	BPN843	BPN843 Website	Non-Enzymatic Electrochemical Sensors Based on Wearable Carbon Textile	Roya Maboudian, Carlo Carraro
25	NanoTechnology: Materials, Processes & Devices	BPN835	BPN835 Website	Silicon Carbide Passivated Electrode for Thermionic Energy Conversion	Roya Maboudian, Carlo Carraro
26	NanoTechnology: Materials, Processes & Devices	BPN790	BPN790 Website	Low Power Microheater-Based Platform for Gas Sensing	Roya Maboudian, Carlo Carraro
27	NanoTechnology: Materials, Processes & Devices	BPN813	BPN813 Website	Novel Hierarchical Metal Oxide Nanostructures for Conductometric Gas Sensing	Roya Maboudian, Carlo Carraro
28	Package, Process & Microassembly	BPN354	BPN354 Website	The Nanoshift Concept: Innovation through Design, Development, Prototyping and Fabrication of MEMS, Microfluidics, Nano- and Clean Technologies	Michael D. Cable
29	Micropower	BPN855	BPN855 Website	Flexible Sensors and Energy Harvesters New Project	Liwei Lin
30	NanoTechnology: Materials, Processes & Devices	BPN860	BPN860 Website	FOLDABLE PAPER ELECTRONICS BY DIRECT-WRITE LASER PATTERNING New Project	Liwei Lin
31	Wireless, RF & Smart Dust	BPN840	BPN840 Website	W-Band Additive Vacuum Electronics	Liwei Lin
32	Microfluidics	BPN846	BPN846 Website	3D Printed Biomedical and Diagnostic Systems	Liwei Lin
33	Microfluidics	BPN774	BPN774 Website	3D Printed Integrated Microfluidics: Circuitry, Finger-Powered Pumps and Mixers	Liwei Lin
34	Micropower	BPN742	BPN742 Website	Novel Methods to Synthesis Transition Metal Dichalcogenide and Transition Metal Carbide for Energy Storage Applications	Liwei Lin
35	Micropower	BPN782	BPN782 Website	Flexible load-bearing energy storage fabrics	Liwei Lin
36	NanoTechnology: Materials, Processes & Devices	BPN672	BPN672 Website	Solar Hydrogen Production by Photocatalytic Water Splitting	Liwei Lin
37	NanoTechnology: Materials, Processes & Devices	BPN800	BPN800 Website	Solution Processed Oxide Materials	Liwei Lin
38	Physical Sensors & Devices	BPN799	BPN799 Website	3D Printed Microsensors	Liwei Lin
39	Physical Sensors & Devices	BPN772	BPN772 Website	Graphene for Room Temperature Gas Sensors	Liwei Lin
40	Physical Sensors & Devices	BPN743	BPN743 Website	Highly Responsive pMUTs	Liwei Lin
41	NanoTechnology: Materials, Processes & Devices	BPN856	BPN856 Website	Broadly-tunable laser with self-imaging three-branch multi-mode interferometer New Project	Ming C. Wu
42	NanoPlasmonics, Microphotonics & Imaging	BPN751	BPN751 Website	Large-Scale Silicon Photonic MEMS Switch with Sub-Microsecond Response Time	Ming C. Wu
43	NanoPlasmonics, Microphotonics & Imaging	BPN721	BPN721 Website	Electronic-Photonic Heterogeneous Integration (EPHI) for High Resolution FMCW LIDAR	Ming C. Wu
44	NanoTechnology: Materials, Processes & Devices	BPN825	BPN825 Website	Direct On-Chip Optical Synthesizer (DODOS)	Ming C. Wu
45	NanoPlasmonics, Microphotonics & Imaging	BPN788	BPN788 Website	MEMS-Actuated Grating-based Optical Phased Array for LIDAR	Ming C. Wu
46	NanoPlasmonics, Microphotonics & Imaging	BPN703	BPN703 Website	Directly Modulated High-Speed nanoLED Utilizing Optical Antenna Enhanced Light Emission	Ming C. Wu
47	Microfluidics	BPN552	BPN552 Website	Light-Actuated Digital Microfluidics (Optoelectrowetting)	Ming C. Wu
48	NanoPlasmonics, Microphotonics & Imaging	BPN458	BPN458 Website	Optical Antenna-Based nanoLED	Ming C. Wu, Ali Javey
49	Microfluidics	BPN863	BPN863 Website	In Situ Gold Plating of Microfluidic Devices New Project	Dorian Liepmann
50	Microfluidics	BPN839	BPN839 Website	Flow Control in Plastic Microfluidic Devices using Thermosensitive Gels	Dorian Liepmann
51	Microfluidics	BPN711	BPN711 Website	Point-of-Care System for Quantitative Measurements of Blood Analytes Using Graphene-Based Sensors	Dorian Liepmann
52	BioMEMS	BPN729	BPN729 Website	Development of Microfluidic Devices with Embedded Microelectrodes using Electrodeposition and Hot Embossing	Dorian Liepmann
53	Wireless, RF & Smart Dust	BPN854	BPN854 Website	Wearable Ultrasound System for Chronic Neural Recording New Project	Bernhard E. Boser, Michel M. Maharbiz
54	Physical Sensors & Devices	BPN852	BPN852 Website	Frequency to Digital Converter for FM Gyroscopes New Project	Bernhard E. Boser
55	Physical Sensors & Devices	BPN608	BPN608 Website	FM Gyroscope	Bernhard E. Boser
56	BioMEMS	BPN685	BPN685 Website	Real-Time Intraoperative Fluorescence Imager for Microscopic Residual Tumor in Breast Cancer	Bernhard E. Boser, Mekhail Anwar
57	Physical Sensors & Devices	BPN868	BPN868 Website	Self-Cleaning Mass Sensor for Particulate Matter Monitors New Project	Richard M. White, Paul K. Wright
58	Physical Sensors & Devices	BPN801	BPN801 Website	Power Line Energy Harvesters	Richard M. White, Paul K. Wright
59	Physical Sensors & Devices	BPN851	BPN851 Website	High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers on Transparent Substrates New Project	David A. Horsley
60	Physical Sensors & Devices	BPN849	BPN849 Website	Large-Amplitude PZT PMUTs	David A. Horsley
61	Physical Sensors & Devices	BPN628	BPN628 Website	Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)	David A. Horsley
62	Physical Sensors & Devices	BPN785	BPN785 Website	Scandium AlN (ScAlN) for MEMS	David A. Horsley
63	Physical Sensors & Devices	BPN599	BPN599 Website	MEMS Electronic Compass: Three-Axis Magnetometer	David A. Horsley
64	Physical Sensors & Devices	BPN817	BPN817 Website	Ultra-Low Power AlN MEMS-CMOS Microphones and Accelerometers	David A. Horsley, Rajeevan Amirtharajah
65	Physical Sensors & Devices	BPN603	BPN603 Website	Micro Rate-Integrating Gyroscope	David A. Horsley
66	NanoTechnology: Materials, Processes & Devices	BPN862	BPN862 Website	MoS2 transistors with 1-nanometer gate lengths New Project	Ali Javey
67	Physical Sensors & Devices	BPN818	BPN818 Website	Fully-Integrated Wearable Sensor Arrays for Multiplexed In Situ Perspiration Analysis	Ali Javey
68	NanoTechnology: Materials, Processes & Devices	BPN822	BPN822 Website	Monolayer Semiconductor Optoelectronics	Ali Javey
69	NanoTechnology: Materials, Processes & Devices	BPN777	BPN777 Website	Nonepitaxial Growth of Single Crystalline III-V Semiconductors onto Insulating Substrates	Ali Javey
70	NanoTechnology: Materials, Processes & Devices	BPN704	BPN704 Website	Vapor-Liquid-Solid Growth of Polycrystalline Indium Phosphide Thin Films on Metal	Ali Javey
71	Physical Sensors & Devices	BPN770	BPN770 Website	Chemical Sensitive Field Effect Transistor (CS-FET)	Ali Javey
72	BioMEMS	BPN853	BPN853 Website	Tethered Bacteria-Based Biosensing New Project	Michel M. Maharbiz
73	Wireless, RF & Smart Dust	BPN844	BPN844 Website	Wireless Sub-Millimeter Temperature Sensor for Continuous Temperature Monitoring in Tissue	Michel M. Maharbiz
74	BioMEMS	BPN816	BPN816 Website	Cytokine Fast Detection	Michel M. Maharbiz
76	BioMEMS	BPN795	BPN795 Website	An Implantable Micro-Sensor for Cancer Surveillance	Michel M. Maharbiz
77	BioMEMS	BPN718	BPN718 Website	Direct Electron-Mediated Control of Hybrid Multi-Cellular Robots	Michel M. Maharbiz
78	BioMEMS	BPN716	BPN716 Website	Ultrasonic Wireless Implants for Neuro-Modulation	Michel M. Maharbiz
79	Physical Sensors & Devices	BPN765	BPN765 Website	Full-Field Strain Sensor for Hernia Mesh Repairs	Michel M. Maharbiz
80	Physical Sensors & Devices	BPN714	BPN714 Website	Impedance Sensing Device to Monitor Pressure Ulcers	Michel M. Maharbiz
81	Physical Sensors & Devices	BPN780	BPN780 Website	Impedance Spectroscopy to Monitor Fracture Healing	Michel M. Maharbiz
82	BioMEMS	BPN573	BPN573 Website	Carbon Fiber Microelectrode Array for Chronic Stimulation and Recording	Michel M. Maharbiz, Kristofer S.J. Pister
83	Wireless, RF & Smart Dust	BPN848	BPN848 Website	Highly Integrated, Compact Wearable Ultrasound System for Chronic Biosensing	Michel M. Maharbiz, Bernhard E. Boser
84	Physical Sensors & Devices	BPN838	BPN838 Website	Dosimetry Dust: An Implantable Dosimeter for Proton Beam Therapy Treatment of Ocular Melanomas	Michel M. Maharbiz, Mekhail Anwar

Project Abstracts

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN859 New Project
Project Title	UHF Channel-Selecting Bandpass Filter
Status	New
Funding Source	Fellowship
Keywords	Filter, resonator, 20nm, gaps, bandpass, frequency, ultra, high, UHF, banks
Researchers	Alain Anton
Abstract	This project aims to use micromechanical resonators with sub-20nm capacitive-transducer electrode- to-resonator gaps to realize banks of channel-selecting bandpass filters at UHF frequencies.
Contact Information	aanto021@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN861 New Project
Project Title	Fully Integrated MEMS-Based Super-Regenerative Transceiver
Status	New
Funding Source	DARPA
Keywords
Researchers	Gleb Melnikov
Abstract	This project aims to integrate our previously demonstrated MEMS-Based Super-Regenerative Transceiver in a fully integrated CMOS- MEMS fabrication process.
Contact Information	gmelnikov@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN867 New Project
Project Title	Fully Integrated CMOS-metal MEMS Systems
Status	New
Funding Source	DARPA
Keywords
Researchers	Kieran A. Peleaux
Abstract	This project aims to integrate metal MEMS resonators directly over CMOS to achieve fully integrated MEMS systems.
Contact Information	kpeleaux@powercastco.com, ctnguyen@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN865 New Project
Project Title	CMOS-Assisted Resoswitch Receivers
Status	New
Funding Source	DARPA
Keywords
Researchers	Kyle K. Tanghe
Abstract	This project aims to harness extremely low power CMOS integrated circuits to boost the Q’s of micromechanical resoswitches towards much higher sensitivity resoswitch receivers.
Contact Information	tanghek@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN866 New Project
Project Title	Wide-Bandwidth UHF Bandpass Filters
Status	New
Funding Source	DARPA
Keywords	UHF, Wideband, Filter
Researchers	Qianyi Xie
Abstract	This project aims to use micromechanical resonators with sub-20nm capacitive-transducer electrode-to- resonator gaps to realize wide-bandwidth bandpass filters at UHF frequencies.
Contact Information	qianyi_xie@berkeley.edu, ctnguyen@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN828
Project Title	Zero Quiescent Power Micromechanical Receiver
Status	New
Funding Source	DARPA
Keywords
Researchers	Ruonan Liu
Abstract	This project aims to explore and demonstrate a mostly mechanical receiver capable of listening without consuming any power, consuming power only when receiving valid bits.
Contact Information	liur@eecs.berkeley.edu, ctnguyen@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN540
Project Title	Temperature-Stable Micromechanical Resonators and Filters
Status	Continuing
Funding Source	Industry
Keywords	µmechanical resonator, electrical stiffness, compensation, frequency drift
Researchers	Alper Ozgurluk
Abstract	This project aims to suppress temperature-induced frequency shift in high frequency micromechanical resonators targeted for channel-select filter and oscillator applications. A novel electrical stiffness design technique is utilized to compensate for thermal drift, in which a temperature-dependent electrical stiffness counteracts the resonator’s intrinsic dependence on temperature caused mainly by Young’s modulus temperature dependence.
Contact Information	ozgurluk@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN814
Project Title	UHF Capacitive-Gap Transduced Resonators With High Cx/Co
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Alper Ozgurluk, Yafei Li
Abstract	The project explores methods by which the Cx/Co of UHF capacitive-gap transduced resonators might be increased to above 5% while maintaining Q's >10,000.
Contact Information	ozgurluk@eecs.berkeley.edu, yafeili@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN701
Project Title	Bridged Micromechanical Filters
Status	Continuing
Funding Source	DARPA
Keywords	Micromechanical Filters, High-order Filters,
Researchers	Jalal Naghsh Nilchi
Abstract	The overall project aims to explore the use of bridging between non-adjacent resonators to generate loss poles in the filter response toward better filter shape factor, sharper passband- to-stopband roll-off and better stopband rejection.
Contact Information	jalal.naghsh.nilchi@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN857 New Project
Project Title	Miniature Autonomous Rockets
Status	New
Funding Source	BSAC Member Fees
Keywords	MEMS, Inchworm Motors, MAVs
Researchers	Brian G. Kilberg, Daniel Contreras
Abstract	While effective miniature scale rocket motors have been developed, viable control surfaces at that scale do not exist. The goal of this project is to develop the necessary control system and actuators to enable autonomous millimeter to centimeter scale rockets. The proposed rocket control surfaces consist of electrostatic inchworm motors and planar linkages that are fabricated on a silicon-on-insulator wafer. These actuators will be driven by high voltage buffers and will be controlled by an electronic system consisting of a CMOS SOC, an inertial measurement unit, and a CMOS camera. We have developed preliminary simulations for the mechanics and control of the rocket, and we have fabricated the control surface actuators. Currently, we are testing these control surfaces and plan to integrate them into a small model rocket to demonstrate their functionality.
Contact Information	bkilberg@berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN858 New Project
Project Title	Zero Insertion Force MEMS Socket for Microrobotics Assembly
Status	New
Funding Source	Fellowship
Keywords	mems, zif, microassembly, microrobot
Researchers	Hani Gomez, Daniel Contreras
Abstract	To help resolve the control and power challenges present in developing micro robots, the research focus of this project is the design and development of a ZIF (zero insertion force) MEMS (micro electro mechanical systems) socket. A two-mask SOI (silicon- on- insulator) fabrication process is used to build the ZIF socket. The current goal is to make electrical connections between a 65nm single-chip mote and a multi-legged SOI micro robot. The ZIF socket will provide a smooth and simple approach to the integration of CMOS chips with MEMS structures. It will allow MEMS structures to easily probe the pads of CMOS chips, strongly connecting the two technologies both electrically and mechanically (the connection is designed to withstand 1000s of g’s of vibration).
Contact Information	gomezhc@berkeley.edu, dscontreras@berkeley.edu, ksjp@berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN826
Project Title	Autonomous Flying Microrobots
Status	New
Funding Source	BSAC Member Fees
Keywords	electrohydrodynamics, microrobotics, ionocraft, ion thrust, MAV
Researchers	Daniel S. Drew, Craig Schindler, Brian Kilberg
Abstract	Even as autonomous flying drones enter the mainstream, there has been no strong push for miniaturization by industry. This project looks to develop a new microfabricated transduction mechanism for flying microrobots with the goal of opening up the application space beyond that allowed by standard quadcoptors. The proposed mechanism, atmospheric ion thrusters, offer some advantages over traditional drone flight (e.g. with rotors) and also the opportunity to bring together multiple MEMS technology areas into one integrated system. Microfabricated silicon electrodes are currently being used to create devices with thrust to weight ratios in excess of 15. Robots with four individually addressable thrusters have been assembled that are around 15mg and less than 2cm on a side. We hope to demonstrate repeatable tethered takeoff and constrained attitude control in the near future.Ultimately, integration with a low power control and communications platform will yield a truly autonomous flying microrobot with ion thrusters – the ionocraft.
Contact Information	ddrew73@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN735
Project Title	Walking Silicon Microrobots
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Microrobotics, electrostatics, actuators, MEMS, autonomous sensors
Researchers	Daniel Contreras, Hani Gomez
Abstract	This project focuses on developing a new generation of sub-centimeter MEMS based walking robots. These robots are based on electrostatic actuators driving planar silicon linkages, all fabricated in the device layer of a silicon-on- insulator (SOI) wafer. By using electrostatic actuation, these legs have the advantage of being low power compared to other microrobot leg designs. This is key to granting the robot autonomy through low-power energy harvesting. The ultimate goal will be to join these silicon legs with a CMOS brain, battery power, a high voltage solar cell array, and high voltage buffers to achieve a fully autonomous walking microrobot. Initial work focused on the development of a planar silicon linkage with a travel range of 450um x 450um and a vertical force output above 200uN. Using this linkage, we have demonstrated successful externally-powered locomotion of a single legged wind-up toy inspired robot. Current work focuses on developing a hexapod robot based on similar silicon linkages with a 1mm x 2mm travel range. This design will be achieved using wafer bonding and multichip assembly.
Contact Information	dscontreras@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN803
Project Title	Single Chip Mote
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Osama Khan, David Burnett, Filip Maksimovic, Brad Wheeler
Abstract	To exploit the true potential of ubiquitous connectivity at scale, wireless nodes in a sensor network need to have a long lifetime and low cost. To reduce the cost of a sensor node, complete system integration is needed, including communication, computation, sensing, and power management on a single integrated circuit with zero external components. Therefore, a Single Chip Mote sensor node is being developed that is intended to operate from harvested energy stored in an integrated printed battery. Low-power wireless communication plays a key role in extending the lifetime of a wireless sensor due to high active power consumption of the radio in comparison to the rest of the node. Traditional transceiver architectures also require off-chip components such as crystal oscillators and passives, which must be eliminated in order to enable a completely monolithic solution. The elimination of external components, combined with reduction in transceiver power consumption, will truly enable perpetual operation of wireless nodes at low-cost and hence realize the vision of ubiquitous connectivity at scale.
Contact Information	oukhan@berkeley.edu, ksjp@berkeley.edu, brad.wheeler@berkeley.edu, db@eecs.berkeley.edu, fil@eecs.be
Advisor	Kristofer S.J. Pister, Ali M. Niknejad

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN744
Project Title	Self-Destructing Silicon
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Joseph Greenspun, Osama Khan, Travis Massey, Brad Wheeler, Ryan Shih
Abstract	Funded under the DARPA Vanishing Programmable Resources (VaPR) program, this project explores the fundamental issues associated with making wireless sensor nodes disappear after achieving an objective. The MEMS Hammer is a micromachined device capable of storing mechanical energy and delivering that energy to a target. It has been used to fracture other microfabricated structures made of silicon and silicon dioxide. The MEMS Hammer is capable of storing a wide range of energies with the upper limit exceeding 10uJ. These devices have been characterized to determine the tradeoffs among energy stored, total stroke, and layout area. The MEMS Hammer is being developed for a variety of applications ranging from creating a self- destructing mote to extending the effective lifetime of air-sensitive and moisture-sensitive sensors.
Contact Information	ksjp@berkeley.edu, brad.wheeler@berkeley.edu, greenspun@eecs.berkeley.edu, oukhan@berkeley.edu, maha
Advisor	Kristofer S.J. Pister, Michel M. Maharbiz

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN836
Project Title	Nanocrescent Antenna for Nanofocusing of Excitation Radiation and Concentrate Upconversion Emission
Status	Continuing
Funding Source	Foundation
Keywords	upconversion, plasmonics, Lanthanide, nanocrescent, antenna
Researchers	Doyeon Bang
Abstract	Frequency upconversion activated with Lanthanide has attracted attention in various real-world applications, because it is far simpler and more effective than traditional nonlinear susceptibility-based frequency upconversion, such as second harmonic generation. However, the quantum yield of frequency upconversion of Lanthanide-based upconversion nanoparticles remains inefficient for practical applications, and spatial control of upconverted emission is not yet developed. To overcome this limitation, we developed asymmetric hetero-plasmonic nanoparticles (AHPNs) consisting of plasmonic antennae in nanocrescent shapes on the Lanthanide-based upconversion nanoparticle (UC) for efficiently delivering excitation light to the UC core by nanofocusing of light and generating asymmetric frequency upconverted emission concentrated toward the tip region. AHPNs were fabricated by high-angle deposition of gold (Au) on the isolated upconversion nanoparticles supported by nanopillars then moved to refractive-index matched substrate for orientation- dependent upconversion luminescence analysis in single-nanoparticle scale. We studied shape-dependent nanofocusing efficiency of nanocrescent antennae as a function of the tip-to-tip distance by modulating the deposition angle. Generation of asymmetric frequency upconverted emission toward the tip region was simulated by the asymmetric far-field radiation pattern of dipoles in the nanocrescent antenna and experimentally demonstrated by the orientation-dependent photon intensity of frequency upconverted emission of an AHPN. This finding provides a new way to improve frequency upconversion using an antenna, which locally increases the excitation light and generate the radiation power to certain directions for various applications.
Contact Information	doyeonbang@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	BioMEMS
Project ID	BPN829
Project Title	Integrated Multiplexed Optical Microfluidic System (iMOMs) for Dengue Diagnosis
Status	Continuing
Funding Source	Fellowship
Keywords	Diagnostics, Dengue, qPCR, immunoassay, multiplexed detection
Researchers	Jong-Hwan Lee, Jun Ho Son
Abstract	Dengue is an endemic viral disease that affects tropical and subtropical areas. It is estimated that more than 50 million infections occur worldwide per year. Due to its lack of pathognomonic clinical features, dengue is often mistakenly diagnosed as other febrile diseases, which thus leads to ineffective and costly overtreatment. Previously developed diagnostic tests for dengue can only detect a single biomarker (or two to three kinds of targets) at a time and they also lack comprehensive and syntagmatic analysis between various dengue-specific biomarkers. For an effective and precision diagnostics of dengue infection, a diagnostic test should not only be highly sensitive and specific, but also determine dengue virus serotype and distinguish between primary and secondary infection. This can only be accomplished by developing a multiplexed test that covers multiple targets. Here we present an integrated multiplexed optical microfluidic system (iMOMs) with the detection capability of four different nucleic acids biomarkers and five different protein biomarkers (i.e. NS-1, IgM, IgG, IgA, and IgE) on chip. We design, simulate, and fabricate the iMOMs using polymer microfluidic substrates. We integrate biological printing technology with the microfluidic device technology. We demonstrate multiplexed dengue specific- nucleic acid amplifications and immunoassays. The iMOMs will be an ideal dengue diagnostic platform for both developed and developing countries and can be applied to give accurate and ultra-sensitive point-of- care diagnoses for other intractable diseases as well.
Contact Information	jonghwanlee@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN824
Project Title	Investigation of Dengue Infection’s Neurological Complications via a Comprehensive In Vitro Brain Model
Status	Continuing
Funding Source	PCARI
Keywords	Dengue fever, Neurological Complications, microfluidics
Researchers	SoonGweon Hong, Minsun Song
Abstract	Dengue fever is one of global health concerns as two fifth of world population are considered to expose to the infection risk and 20K patients results in death per year. Even after successful recovery from the febrile disease, it often causes secondary neurological complications including encephalopathy, residual brain damage and seizures. However, unclear etiological details of neurological disorders still inhibit to uncover suitable treatments of the complications. Herein, we develop an in-vitro brain model for the comprehensive systematic analysis of neurological complications due to of the Dengue infections. Our new minibrains-on- a-chip concept will allow to mature brain tissue mimicking in-vivo tissue complex in an interstitial fluidic dynamics and to monitor electrophysiological phenotypes in an in-situ manner. By administrating various etiological factors found in dengue virus (DENV) infection along with the dynamic flow, we will be able to address phenotypic connections of individual etiological factors. Our integrated in- vitro brain model analysis platform for Dengue infections will potentially provide a diagnostic and therapeutic frame for various levels of neurological disease associated with DENV infection.
Contact Information	gweon1@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	BioMEMS
Project ID	BPN804
Project Title	A Rapid, Integrated Molecular Diagnostic for Gram-Negative Pathogen Detection and Identification Based on Antibody-Based Capture and Photonic PCR
Status	Continuing
Funding Source	NIH
Keywords
Researchers	Byungrae Cho, Jun Ho Son, Sang Hun Lee
Abstract	The fast and precise detection and identification of pathogens has become significantly important in medicine, food safety, public health, and security. However, the conventional testing (bacteria cultures with several antibiotics for susceptibility test) needs one to four days to acquire the result. Here, we develop an integrated molecular diagnostic system that combines sample preparation, pathogen lysis, and genetic detection to identify pathogens within one hour. Bacteria in relatively large-volume sample (3-5 mL) continuously passing through a fluidic channel are captured and identified by antibodies on the gold-coated nanopore membranes within 30 min. Gold - coated membranes can easily raise the temperature beyond 70 degrees Centigrade under LED light emission enabling rapid pathogen lysis. Combining with temperature control and photonic system, PCR can be executed for genetic detection of pathogen within 5 min. We expect that this integrated molecular diagnostic system will provide rapid diagnosis of pathogen infection and contribute to precision medicine.
Contact Information	brcho@berkeley.edu, jhson78@berkeley.edu, sanghun.lee@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	Microfluidics
Project ID	BPN730
Project Title	Microfluidic Blood Plasma Separation for Point-of-Care Diagnostics
Status	Continuing
Funding Source	PCARI
Keywords	Microfluidic, Blood plasma separation, Point-of-care, PCR
Researchers	Jun Ho Son, ByungRae Cho
Abstract	Microfluidic lab-on-a-chip (LOC) device for point-of-care (POC) diagnostics have been widely developed for the rapid detection of infectious diseases such as HIV, TB and Malaria. Blood plasma separation is an initial step for most blood-based diagnostics. Although, centrifuge method is the classical bench-top technique, it is time and labor intensive, and therefore, automation and integration of blood plasma separation in the LOC device is ideal for POC diagnostics. Here, we propose a novel microfluidic blood plasma separation device for POC diagnostics. A membrane filter for filtration was positioned on top of a vertical up-flow channel (filter-in-top configuration) to reduce clogging of red blood cells (RBCs) by gravity-assisted cells sedimentation to prevent hemolysis of RBCs. As a result, separated plasma volume was increased about 4-fold (2.4 µL plasma after 20 min with human blood) and hemoglobin concentration in separated plasma was decreased about 90 % due to the prevention of RBCs hemolysis in comparison to a filter-in-bottom configuration. On-chip plasma contains ~90 % of protein and ~100 % of nucleic acids compared to off-chip centrifuged plasma, showing comparable target molecules recovery. This investigation will lead to a simple and reliable blood plasma separation device that can be utilized by individuals with minimal training in resource-limited environments for POC diagnostics.
Contact Information	jhson78@berkeley.edu, sanghun.lee@berkeley.edu, brcho@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN809
Project Title	Photonic Cavity Bioreactor for High-throughput Screening of Microalgae
Status	Continuing
Funding Source	Foundation
Keywords	biofuel, microalgae, bioenergy, bioreactor, high-throughput screening, photonic cavity
Researchers	Minsun Song, SoonGweon Hong
Abstract	Algal photosynthesis is considered to be a sustainable, alternative and renewable solution to generating green energy. For high-productivity algaculture in diverse local environments, a high-throughput screening method is needed in selecting algal strains from naturally available or genetically engineered strains. Herein, we present an integrated plasmonic photobioreactor for rapid, high-throughput screening of microalgae. Our 3D nanoplasmonic optical cavity-based photobioreactor permits the amplification of selective wavelength favorable to photosynthesis in the cavity. The hemispheric plasmonic cavity allows to promote intercellular interaction in the optically favorable milieu and also permits effective visual examination of algal growth. Using Chlamydomonas reinhardtii, we demonstrated 2 times of enhanced growth rate and 1.5 times of lipid production rate with no distinctive lag phase. By facilitating growth and biomass conversion rates, the integrated microalga analysis platform (iMAP) will serve as rapid microalgae screening platforms for biofuel applications.
Contact Information	sms1115@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN834
Project Title	Direct Formation of Pore-Controllable Mesoporous SnO2 for Gas Sensing Applications
Status	New
Funding Source	Industry
Keywords	amphiphilic graft copolymer, mesoporous SnO2, sol-gel, microheater, gas sensor
Researchers	Won Seok Chi, Hu Long
Abstract	Amphiphilic graft copolymer self-assembly provides an effective method to create mesoporous structures that can act as templates for the synthesis of inorganic materials with controlled morphology. In this project, we are using PVC-g-POEM graft copolymer as a template for mesoporous SnO2 fabrication directly onto a microheater platform for gas sensing applications. The sol-gel solutions are composed of PVC-g-POEM and SnO2 precursor with tunable composition allowing the formation of various structures with controllable pore size, and surface area. The mesoporous SnO2 structure is fabricated from the drop casted polymer solution onto microheater-based sensor, and the removal of the sacrificial polymer template by proper control of the temperature profile. This approach allows us to investigate and optimize the effects of different mesoporous SnO2 structures towards sensing various gaseous species of interest.
Contact Information	lucas38c@berkeley.edu, longhu@berkeley.edu
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN843
Project Title	Non-Enzymatic Electrochemical Sensors Based on Wearable Carbon Textile
Status	Continuing
Funding Source	NSF
Keywords	electrochemical sensor, carbon fiber textile
Researchers	Sinem Ortaboy
Abstract	Nowadays, electrochemical sensors play an important role in wide range of potential applications, especially in point-of-care applications for real-time human physiology monitoring. Considerable efforts have been devoted not only to improve their sensitivity, response time, stability and biocompatibility but also to develop new materials which enable the researchers to create smarter multifunctional devices. In this regard, flexible textiles such as carbon fiber sheet integrated electrodes are the promising materials due to their good conductivity, low-cost, biocompatibility and stability even in the harsh environment conditions. In this study, flexible carbon-based textile incorporating electroactive species will be used as the electrode for electrochemical sensor and biosensor applications.
Contact Information	sinemortaboy@berkeley.edu
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN835
Project Title	Silicon Carbide Passivated Electrode for Thermionic Energy Conversion
Status	Continuing
Funding Source	Federal
Keywords	Silicon Carbide, Tungsten, Thermionic Emission, LPCVD, High-Temperature
Researchers	Steven R. DelaCruz, Ping Cheng, Dungsheng Tsai, Zhongtao Wang
Abstract	Thermionic energy converters (TECs) are based on the emission of electrons from a hot electrode (cathode) into a vacuum gap and their collection by a cooler electrode (anode), creating an electric current through the load. In this process, they convert heat directly into electricity and have the potential to achieve high efficiencies comparable to those of conventional heat engines. We have initiated a highly collaborative project to develop a microfabricated, close-gap thermionic energy converter for directly converting heat from a combustion source into electricity. One of the key challenges is associated with the cathode which needs to be highly conductive and survive temperatures as hot as 2000 °C in an oxidizing environment. While tungsten is an attractive choice for the cathode, it readily oxidizes under the envisioned conditions. Owing to its chemical inertness and mechanical strength at high temperatures, silicon carbide is an effective option for electrode passivation. In this work, we are developing processes for fabricating a SiC-protected tungsten electrode, exploring the necessity and effectiveness of interdiffusion barriers, and investigating its long-term stability under harsh environments.
Contact Information	sdelacruz@berkeley.edu, maboudia@berkeley.edu, carraro@berkeley.edu, pingcheng@berkeley.edu, dungshe
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN790
Project Title	Low Power Microheater-Based Platform for Gas Sensing
Status	Continuing
Funding Source	Industry
Keywords
Researchers	Wenjun Yan, Leslie Chan, David Gardner
Abstract	Detection of toxic air pollutants such as carbon monoxide (CO), nitrogen dioxide (NO2), and formaldehyde is of critical importance to public health, industry, and the environment. Since these toxic gases are commonly generated from combustion or automotive emissions, there is a need for high-performance sensors that are capable of detecting low concentrations of toxic gases in air rapidly, accurately, and reliably. This work reports the integration of nanostructured materials on a microheater-based sensing platform to achieve fast, sensitive, selective, and stable gas sensing. We have developed a sensitive CO sensor by in situ synthesis of porous SnO2 films on a low power microheater. The sensor can detect 10 ppm CO with fast response and recovery times at low temperature. By integrating 3D plasma-treated MoS2 aerogels on the low power microheater, the sensor exhibits a detection limit of 50 ppb NO2 at both room temperature (0.1 mW power consumption) and 200 °C (~4 mW power consumption) while showing negligible response to CO and H2. Using hierarchical ZnCo2O4 microstructures on the low power microheater, the sensor can detect 3 ppb formaldehyde with good selectivity. Current work is focused on better understanding the sensing behavior of these sensors.
Contact Information	wenjunyan@berkeley.edu, leslie.chan@berkeley.edu, dwg@berkeley.edu
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN813
Project Title	Novel Hierarchical Metal Oxide Nanostructures for Conductometric Gas Sensing
Status	Continuing
Funding Source	Industry
Keywords
Researchers	Ameya Rao
Abstract	Semiconducting metal oxides have been extensively studied as sensing materials for conductometric gas sensors. Nanostructured metal oxides integrated with miniaturized heating elements have been shown to exhibit particularly high sensitivity while maintaining low power consumption. However, the incorporation of nanostructured metal oxide films onto miniaturized heater-based sensing platforms commonly suffers from uncontrollability in film thickness and microstructure, which reduces sensor performance and fabrication reproducibility. We have developed a controllable and flexible method for the localized in situ growth of an ordered metal oxide hollow sphere 2D array directly on a microfabricated heater platform, which allows much improved controllability in the sensing material morphology and coverage. A resulting SnO2 hollow sphere-based microsensor shows high sensitivity and selectivity toward formaldehyde and extremely fast response and recovery. Furthermore, this method can be used to fabricate microsensors using a variety of metal oxides, including combinations of different metal oxides in multi-shelled hollow sphere arrays, for enhanced sensitivity and tunable selectivity.
Contact Information	ameyarao@berkeley.edu
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN354
Project Title	The Nanoshift Concept: Innovation through Design, Development, Prototyping and Fabrication of MEMS, Microfluidics, Nano- and Clean Technologies
Status	Continuing
Funding Source	Industry
Keywords	Nanoshift, nanolab, microlab, process, recharge, commercial
Researchers	Ning Chen, Salah Uddin
Abstract	Nanoshift LLC is a privately held research and development company specializing in MEMS, microfluidics, and nanotechnologies. Nanoshift provides high quality, customizable services for device and process design, research and development, rapid prototyping, low-volume fabrication, and technology transfer into high volume. Projects are typically from industry, government, and academia. Nanoshift is the solution for your device concept-to- commercialization needs. Nanoshift collaborates with BSAC to make industry-leading development resources available for all BSAC Industrial Members, while improving BSAC's visibility and funding.
Contact Information	reception@bsac.eecs.berkeley.edu
Advisor	Michael D. Cable

 

Document Top Table of Projects	Micropower
Project ID	BPN855 New Project
Project Title	Flexible Sensors and Energy Harvesters
Status	New
Funding Source	BSAC Member Fees
Keywords	Energy harvesting, flexible, stretchable, sensor
Researchers	Junwen Zhong, Levent Beker, Ilbey Karakurt, Yichuan Wu
Abstract	Wearable and implantable devices are expected to become more abundant because of the developments in the materials and microfabrication technologies. However, battery replacement is one of the major problems for these systems. Shrinking the size of sensors and actuators also reduced their power requirements and it makes energy harvesting a viable solution as renewable power sources. In this project we work with various sets of flexible materials to develop 1) energy harvester to generate electrical power to either extend the battery lifespan or eliminate the battery; 2) sensors to detect biological signals from different parts of the body.
Contact Information	lbeker@berkeley.edu, junwenzhong@berkeley.edu, ilbeykarakurt@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN860 New Project
Project Title	FOLDABLE PAPER ELECTRONICS BY DIRECT-WRITE LASER PATTERNING
Status	New
Funding Source	BSAC Member Fees
Keywords
Researchers	Xining Zang, Yao Chu, Renxiao Xu, Minsong Wei, Junwen Zhong
Abstract	Paper electronics has been a popular subject in recent years with various works concentrating on the printing of additive materials on papers. Here, we show a drastically different approach by a direct- write laser patterning process on paper. Innovative clams are: (1) direct conversion of non- conductive paper to conductor by laser; (2) a variety of foldable architectures and devices using the as-fabricated paper electronics; and (3) among various possible basic device applications, we a show foldable triboelectricity generator and a folded supercapacitor as the potential paper-based power source for paper electronics, a wireless humidity sensor and a heavy metal ion detector as working components.
Contact Information	xining.zang.me@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN840
Project Title	W-Band Additive Vacuum Electronics
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Ilbey Karakurt
Abstract	Radio frequency (RF) devices for high frequency applications such as satellite communication and mobile and ground uplinks have brought about the demand for higher power handling capabilities and increased efficiency in these devices. Technologies for creating low cost, advanced millimeter wave electronics devices without sacrificing quality or performance has thus grown. Direct metal additive manufacturing techniques, such as electron beam melting, has been projected to be capable of fabricating such devices. Key concerns regarding these techniques are the requirements for high purity materials (99.6%), small feature sizes (~2um) and low surface roughness (less than 200 nm for 95 GHz devices and above) for high frequency applications. This project will demonstrate that direct metal additive manufacturing combined with electro-chemical and micro-fluidic polishing techniques can be used to provide a rapid manufacturing process for fully enclosed and cooled complex interaction structures to be used in high frequency applications.
Contact Information	ilbeykarakurt@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Microfluidics
Project ID	BPN846
Project Title	3D Printed Biomedical and Diagnostic Systems
Status	Continuing
Funding Source	BSAC Member Fees
Keywords
Researchers	Eric C. Sweet, Joshua Chen, Ilbey Karakurt, Jacqueline Elwood
Abstract	Every year, more than twenty thousand people in the United States die from antibiotic-resistant bacterial infections. Despite increasing rates of antibiotic resistance, little clinical research is being performed into the discovery of new drugs; instead, a commonly used method to combat antibiotic resistance is combination therapy, where various antibiotics are combined into a “drug cocktail” to be simultaneously administered to the patient. However, biomedical research into the interactions of three or more antibiotics is fairly limited, a result of the critical functional-limitation of standard BioMEMS analytical devices (e.g., two-dimensional PDMS microfluidic chips fabricated via soft lithography) that such monolithic structures can only produce gradients of two fluidic inputs at a time. Furthermore, the biomedical community lacks a simple and accessible method of determining the minimum inhibitory concentration (MIC) of a single antibiotic where the gold standard is still manual labor-intensive pipetting, dilutions, and agar plates. For this project, we present a novel micro-scale 3D printed microfluidic concentration gradient generator (CGG) that produces a symmetric concentration gradient between three fluidic inputs, which we used to determine the interactions of various combinations of three commonly clinically administered antibiotics (Nitrofurantoin, Tetracycline and Trimethoprim), as well as the MIC value for each individual antibiotic, on ampicillin- resistant E. Coli. Bacteria. Our singular device could be used in a clinical setting, when attempting to treat a known or unknown antibiotic-resistant strain, to decrease the analysis time and required volume of antibiotics to perform a determination of the interactions of multiple antibiotics simultaneously, as well as to analyze the MIC value of each antibiotic, which could set a significant clinical precedent resulting in faster and more effective treatment of new infections and potentially a greater number of patient lives saved. Furthermore, our three-flow CGG could increase the efficacy and speed of experiments in other areas in biomedical research where concentration gradients of reagents are relevant, such as stem cell research.
Contact Information	ericsweet@berkeley.edu, ilbeykarakurt@berkeley.edu, josh.cl.chen@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Microfluidics
Project ID	BPN774
Project Title	3D Printed Integrated Microfluidics: Circuitry, Finger-Powered Pumps and Mixers
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Lab-on-a-Chip, 3D Printing, Microfluidics, Low-power, Passive, Mixing
Researchers	Eric Sweet, Ilbey Karakurt, Rudra Mehta, Ryan Jew, Jacqueline Elwood
Abstract	Low-powered microfluidic systems have been demonstrated in a variety of point-of-care biomedical diagnostic applications; however, the potential for the widespread commercial applicability of this technology, the requirement for being portable, disposable and inexpensive, is greatly hindered by the nearly-ubiquitous need for bulky and expensive externally-powered pressure sources needed to pump fluids through such devices. Furthermore, as advanced additive manufacturing techniques such as micro/nano- scale 3D printing are becoming more widely used in BioMEMS manufacturing, conventional soft-lithography fabrication approaches are becoming comparatively more costly, time consuming and labor intensive. To overcome these critical limitations of conventional microfluidics, for this project we propose a low-cost microfluidic one-way pumping and mixing system powered solely by the operator’s finger fabricated via micro-scale 3D printing. The three-dimensional geometric complexity permitted only by additive manufacturing processes allows for the construction of fully-integrated three-dimensional micro-scale fluidic control and actuation elements (i.e. fluidic diodes and thin membrane-enclosed interconnected balloon cavities and capacitor- like fluidic actuation source). We demonstrate a 3D printed one-way microfluidic pump, allowing the user to pump fluid at upwards of 150 micro-Liters/minute, with flow rate correlating to the pumping frequency. Furthermore, we will demonstrate the application of two integrated one-way pumps as a 3D printed microfluidic mixer capable of rapid pulsatile mixing of two fluids, powered by a singular shared finger-powered pump. Our finger-powered 3D printed microfluidic devices have established an alternative to conventional externally- powered microfluidics, and upon further development, such designs could prove critical tools in resolving the foremost commercial limitations of conventional microfluidic point-of-care diagnostic devices.
Contact Information	ericsweet2@gmail.com, ilbeykarakurt@berkeley.edu, Rudra.Mehta@berkeley.edu, rjew@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Micropower
Project ID	BPN742
Project Title	Novel Methods to Synthesis Transition Metal Dichalcogenide and Transition Metal Carbide for Energy Storage Applications
Status	Continuing
Funding Source	BSAC Member Fees
Keywords
Researchers	Xining Zang, Minsong Wei
Abstract	The field of 2D materials have witnessed tremendous efforts of research in past several years, transition metal dichalcogenide (TMDC) and transition metal carbides are the most famous two families 2D material besides graphene. The vision of this project is developing "tolerant" and sustainable method to synthesis those kinds of materials with high quality/yield and design applications compatible with the fabrication approaches. Till now, we have been developing atomic layer deposition, self-assembly coupled CVD, and laser ablation methods to synthesis a series of 2D materials including TiS2, Mo3C2, Mo2C and etc. We specify their application in energy storage and conversion including supercapacitors and catalyst for hydrogen evolution and oxygen evolution reactions.
Contact Information	xining.zang.me@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Micropower
Project ID	BPN782
Project Title	Flexible load-bearing energy storage fabrics
Status	Continuing
Funding Source	Army/ARL
Keywords	Flexible supercapacitor, Wearable electronics, Structural energy storage, Carbon fiber
Researchers	Caiwei Shen, Weihua Cai
Abstract	The power source is a bottleneck for the successful development of flexible electronics. Instead of using rigid and bulky batteries, flexible multifunctional devices that store energy and bear loads at the same time provide better solutions by working as powering structural components. Here we demonstrate the woven supercapacitor fabrics featuring high flexibility comparable to that of wearable textiles, high tensile strength of over 1GPa, high failure pressure of 500MPa, and fast charging within seconds. The supercapacitor fabrics can power all kinds of wearable electronics, or be used in other applications that desire load-bearing ability and arbitrary form-factor design for the power systems.
Contact Information	shencw10@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN672
Project Title	Solar Hydrogen Production by Photocatalytic Water Splitting
Status	Continuing
Funding Source	KAUST
Keywords	Solar energy, photocatalysis, nano materials
Researchers	Emmeline Kao
Abstract	Hydrogen is a promising, environmentally-friendly fuel source for replacing fossil fuels in transportation and stationarypower applications. Currently, most hydrogen is produced from non-renewable sources including natural gas, oil, and coal. Photoelectrochemical (PEC) water splitting is a new renewable energy technology that aims to generate hydrogen from water using solar energy. When light is absorbed by the photocatalyst, an electron-hole pair is generated that interacts with water molecules in a surface reduction-oxidation reaction to decompose the water into hydrogen and oxygen. The current challenge in PEC water splitting is finding low-cost, stable materials with good visible light absorption and high efficiency for water splitting. Polymers such as thiophene have demonstrated promising capabilities as photocatalysts due to its favorable band structure for both solar absorption and photocatalysis by electropolymerizing films for vertical transfer of electrons. This project aims to improve the performance of PEC devices for water splitting by developing new high surface area photoelectrodes surrounded by a thin layer of electroplated polymers.
Contact Information	kao@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN800
Project Title	Solution Processed Oxide Materials
Status	Continuing
Funding Source	BSAC Member Fees
Keywords
Researchers	Hyun Sung Park
Abstract	Recently there has been growing interest in transparent conductive oxides(TCOs) and oxide semiconductors, they are key components for future transparent electronics devices. But there are needs for finding new TCOs and oxide semiconductors because the Indium and Galium are expensive rare earth material and the price is still increasing. Also, conventional vacuum based process is a problem for large scale and complicated geometry devices. In this project, I introduced new TCO material(ATO) and oxide semiconductor for the future transparent electronics devices by using solution process.
Contact Information	hs23.park@gmail.com
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN799
Project Title	3D Printed Microsensors
Status	Continuing
Funding Source	DARPA
Keywords	Microsensor, 3D printing, matallization
Researchers	Hyung-Seok Jang, Dongwoo Shin, Huiliang Liu
Abstract	Electro-Hydrodynamic (EHD) Printing based direct write method has been demonstrated that the efficient fabrication process for the fast-response and super-thin silver (Ag) passive temperature sensor. For the direct write Ag passive temperature sensor, biological polymer was applied for efficient Ag nanostructure formation, and the EHD Printer directly eject and deposit this Ag precursor ink on the substrate. During annealing process this Ag passive sensor rapidly produce the 2D nanoparticles from the air/water interface and directly growth to single-crystalline 2D Ag sensor. This direct write single-crystalline 2D Ag passive temperature sensor was also have excellent transparency and mechanical properties.
Contact Information	hyungseok1024@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN772
Project Title	Graphene for Room Temperature Gas Sensors
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Chemical Sensor, Gas Sensor, Graphene FET, Selectivity
Researchers	Yumeng Liu, Takeshi Hayasaka
Abstract	As air pollution from industrial and automobile emission becomes more and more severe, the personalized, integrated gas sensor is desirable for everyone to monitor everyday's air quality as well as their personal health condition non-invasively. Such sensor should have the desirable features like energy efficient, miniature size, accurate response (down to ppm level), and selectivity. Traditional bulk MOX based gas sensor works in the temperature range of 300 to 400 oC, which requires large amount of energy to power the heater. We here propose using graphene based field effect transistor as label-free sensor platform, to detect gas selectively by measuring its electrical properties at room temperature.
Contact Information	yumengliu@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN743
Project Title	Highly Responsive pMUTs
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Piezoelectric Micromachined Ultrasonic Transducers (pMUTs), curved pMUTS, spherical piezoelectric elastic shells, bimorph pMUTs, dual electrode bimorph pMUT
Researchers	Benjamin Eovino, Yue Liang
Abstract	Ultrasonics has been realized as a nondestructive measurement method for a variety of applications, such as medical imaging, healthcare monitoring, structural testing, range finding, and motion sensing. Furthermore, high intensity ultrasound can be used in therapeutic treatments, such as lithotripsy for kidney stone comminution, hyperthermia for cancer therapy, high-intensity focused ultrasound (HIFU) for laparoscopic surgery, and transcranial sonothrombolysis for brain stroke treatment. MEMS ultrasonic transducers are known to have several pronounced advantages over the conventional ultrasound devices, namely higher resolution, higher bandwidth, and lower power consumption. The main purpose of this project is to develop new architectures of Piezoelectric Micromachined Ultrasonic Transducers (pMUT) with higher electro-mechano-acoustical energy efficiency and increased sensitivity while using CMOS-compatible fabrication technology, making them suitable for battery-powered handheld devices. The specific focus is on increasing the electromechanical coupling, bandwidth, and acoustic pressure output in aims of creating power-efficient hand-held medical devices for diagnosis/therapy.
Contact Information	beovino@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN856 New Project
Project Title	Broadly-tunable laser with self-imaging three-branch multi-mode interferometer
Status	New
Funding Source	Industry
Keywords	WDM, tunable lasers, single-mode lasers
Researchers	Guan-Lin Su
Abstract	Tunable lasers with high SMSRs are cost-effective solutions to replace multiple DFB lasers as the light source for WDM systems. Interferometer-based lasers, such as C3 and Y-lasers, have advantages over grating- and ring-resonator-based lasers in terms of cost and fabrication complexities; however, a large optical path difference between the two arms is required for high SMSRs but it defeats the Vernier effect and reduces the wavelength tuning range. In our proposed three-branch MMI laser, two tuning arms with similar lengths ensure a wide tuning range, and an additional long arm provides extra optical interferences and increases the SMSR. In this project, our designed laser can be optimized to be single-mode across the entire C-band, and the use of a self-imaging MMI avoids additional losses that would potentially increase the threshold. Based upon our simulation, the lasing wavelength of the device can be electrically tuned over 30 nm with a 100-GHz ITU channel spacing. It is expected that, upon the completion of the project, the developed tunable laser can serve as a low-cost solution for datacom and telecom applications.
Contact Information	gsu2@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN751
Project Title	Large-Scale Silicon Photonic MEMS Switch with Sub-Microsecond Response Time
Status	Continuing
Funding Source	NSF
Keywords	optical switch, silicon photonics, large scale, fast, small footprint
Researchers	Johannes Henriksson
Abstract	We developed a new architecture suitable for building a large-scale optical switch with fast response time. We have demonstrated switches with a scale of 64x64 and speed of sub- microsecond using our new architecture. The switch architecture consists of an optical crossbar network with MEMS-actuated couplers and is implemented on a silicon photonics platform. Thanks to high integration density of the silicon photonics platform, we could integrate 64x64 switch on an area less than 1cm x 1cm. To our knowledge this is the largest monolithic switch, and the largest silicon photonic integrated circuit, reported to date. The passive matrix architecture of our switch is fundamentally more scalable than that of multistage switches. We believe that our switch architecture can be scaled-up to larger than 200x200.
Contact Information	jhenriksson@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN721
Project Title	Electronic-Photonic Heterogeneous Integration (EPHI) for High Resolution FMCW LIDAR
Status	Continuing
Funding Source	DARPA
Keywords	optical phase-locked loop, silicon photonics, 3D integration, MEMS, CMOS, VCSEL, HCG, PIC, FMCW LIDAR,
Researchers	Phillip A.M. Sandborn
Abstract	Range-finding sensors have applications that span several industries and markets, from metrology to robotic control. In order to penetrate large consumer markets such as 3D imaging for smart-phones or automotive 3D vision, the size and cost of laser detection and ranging (LIDAR) sensors must be reduced by an order of magnitude. By leveraging emerging electronic- photonic integration technology, compact LIDAR sensors with reduction in size/cost can be constructed. We demonstrate the integration of passive Si photonic circuits and CMOS electronic circuits to create a frequency-modulated continuous-wave laser detection and ranging (FMCW LIDAR) source using this technology. Results have shown that electronic-photonic 3D integration of optoelectronic components can greatly improve the performance of FMCW LADAR sources. We demonstrate an FMCW LADAR with 4-micron ranging precision. We also demonstrate several architectural improvements to maximize the capability of coherent systems in long-range imaging applications.
Contact Information	sandborn@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN825
Project Title	Direct On-Chip Optical Synthesizer (DODOS)
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Jean-Etienne Tremblay, Po-Kai Hsu, Guan-Lin Su, Kyungmok Kwon
Abstract	The advent of precise microwave frequency synthesis in the 1940’s enabled a disruptive revolution in the capabilities enabled by microwave technology, including wireless and wireline communications, RADAR, electronic warfare, and atomic sensors and timing technology. It is envisioned that the DODOS program will advance a similar transformative revolution based on ubiquitous optical frequency synthesis technology. Laboratory-scale optical frequency synthesis was successfully realized in 1999 with the invention of self-referenced optical frequency combs based on femto-second pulse-length mode-locked laser sources. This has led to optical synthesizers with frequency accuracy better than 10e-19 and demonstration of optical clocks with stability floor below 2x10e-18. However, such systems are large, costly, and thereby confined to laboratory use. Recent development of Kerr combs generated in microresonators, as well as chip-scale mode-locked lasers, enable the development of a microscale self-referenced optical frequency comb with performance rivaling that of laboratory-scale systems. Combined with recent progress in on-chip photonic waveguides and photonic crystals, widely-tunable laser sources, and optical modulators, along with advances in on-chip optical-CMOS heterogeneous integration, it is now possible to develop a robust and deployable single-chip integrated optical frequency synthesizer. It is expected that the DODOS program will enable low-cost and high performance optical frequency control with the ubiquity of microwave synthesis.
Contact Information	jetremblay@berkeley.edu, pkhsu@berkeley.edu, gsu2@berkeley.edu, kwon0512@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN788
Project Title	MEMS-Actuated Grating-based Optical Phased Array for LIDAR
Status	Continuing
Funding Source	Industry
Keywords	Lidar, Optical MEMS, Beamsteering
Researchers	Youmin Wang
Abstract	We aim to integrate the OPA MEMS system into the application of automobile navigation, which is currently primarily dominated by opto-mechanical scanning based systems. Opto-mechanical scanning devices are usually bulky and relatively slow, and cannot provide the steering speeds and versatility necessary for many applications. In drawing from phased array concepts that revolutionized RADAR technology by providing a compact, agile alternative to mechanically steered technology, the OPA based LIDAR program seeks to integrate thousands of closely packed optical emitting facets, precise relative electronic phase control of these facets, and all within a very small form factor. Comparing with other competing LIDAR system, the OPA based LIDAR system will have multiple degrees of freedom for phase control which enables not only agile beam steering but also beam forming and multiple beam generation, greatly expanding the diversity of applications. Traditional optical phased arrays (OPA) are made of liquid crystal phase shifters, piston mirrors, and optical waveguide arrays. The liquid crystal OPA has slow response time. MEMS OPA with piston mirrors has fast response time. However, realization of OPA with large field of view is challenging because it requires small pitch in the phased array. Recently, it was reported that optical phase shift is controlled by moving a grating element in the lateral direction. However, the widths of the phase shifters are limited by the size of the actuators. In this project, the actuators are integrated underneath the diffractive elements so OPA with high fill factor and small pitch can be realized. Such OPA will have large field of view and high optical efficiency.
Contact Information	youmin.wang@berkeley.edu, wu@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN703
Project Title	Directly Modulated High-Speed nanoLED Utilizing Optical Antenna Enhanced Light Emission
Status	Continuing
Funding Source	Federal
Keywords	nano-photonics, optical antenna, photonics, optical interconnect, nanotechnology, optoelectronics, plasmonics
Researchers	Seth A. Fortuna, Kevin Han, Nicolas Andrade
Abstract	Coupling an optical antenna to a nanoscale light emitter has been shown to increase the spontaneous emission rate by compensating for the large size mismatch between the emitter and emission wavelength. This spontaneous emission rate enhancement has been predicted to be as large as several orders of magnitude, easily surpassing the stimulated emission rate and enabling high direct modulation bandwidth. The aim of this project is to utilize this concept to demonstrate a directly modulated nanoscale semiconductor light emitting diode (nanoLED) with direct modulation speeds >50 GHz, exceeding the bandwidth of semiconductor lasers. Unlike lasers, such nanoLEDs are also inherently low-power and do not require minimum threshold current density for operation and are therefore a promising light generating source for use in on-chip communication.
Contact Information	fortuna@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	Microfluidics
Project ID	BPN552
Project Title	Light-Actuated Digital Microfluidics (Optoelectrowetting)
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Digital Microfluidics, Droplet Microfluidics, Electrowetting, Optoelectrowetting, EWOD, Optofluidics
Researchers	Jodi Loo
Abstract	The ability to quickly perform large numbers of chemical and biological reactions in parallel using low reagent volumes is a field well addressed by droplet-based digital microfluidics. Compared to continuous flow-based techniques, digital microfluidics offers the added advantages such as individual sample addressing and reagent isolation. We are developing a Light- Actuated Digital Microfluidics device (also known as optoelectrowetting) that optically manipulates nano- to micro-liter scale aqueous droplets on the device surface. The device possesses many advantages including ease of fabrication and the ability for real-time, reconfigurable, large-scale droplets control (simply by altering the low-intensity projected light pattern). We hope to develop Light-Actuated Digital Microfluidics into a powerful platform for lab-on-a-chip (LOC) applications.
Contact Information	jodiloo@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN458
Project Title	Optical Antenna-Based nanoLED
Status	Continuing
Funding Source	Federal
Keywords	Plasmonics, Laser, Light Emitting Diode, Nanophotonics, Nanocavity, Optical Interconnects, Transition Metal Dichalcogenides
Researchers	Kevin Han, Sujay Desai, Matin Amani, Seth Fortuna
Abstract	Spontaneous emission has been considered slower and weaker than stimulated emission. As a result, light-emitting diodes (LEDs) have only been used in applications with bandwidth < 1 GHz. Spontaneous emission is inefficient because the radiating dipole is much smaller than the wavelength and such short dipoles are poor radiators. By attaching an optical antenna to the radiating dipole at the nanoscale, the emission rate can be significantly increased enabling high modulation bandwidths theoretically >100 GHz. This project focuses on the physical demonstration of this new type of nanophotonic device. Current fabrication and experimental results of devices using transition metal dichalcogenides (TMDs) as an emitter material will be presented. Fundamental limits of rate enhancement will also be discussed.
Contact Information	kyh@eecs.berkeley.edu
Advisor	Ming C. Wu, Ali Javey

 

Document Top Table of Projects	Microfluidics
Project ID	BPN863 New Project
Project Title	In Situ Gold Plating of Microfluidic Devices
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Electrodeposition, Gold, Microfluidic
Researchers	Nick Engel, Marc Chooljian
Abstract	Microfluidic devices are currently limited in their application potential by the lack of appropriate sensors or integrated electrodes. Building on the work of Dr. Dorian Liepmann's lab in electrodeposited electrodes and hot embossing, where deposited electrodes in contact with fluid channels are composed primarily of nickel, we endeavor to develop a novel process for gold-electroplating those nickel surfaces, within the channel, after the chip has been constructed (in situ). By using this process the metallic surfaces in contact with the electrolyte in the channel can be chemically passivated with a thin gold layer, thus limiting the participation of the device's materials in its operation. This process may also have the added benefit of sealing the nickel-plastic edges where bonding is sub optimal and leaking can occur. This process will contribute to further advances in both the mass-production and prototyping of plastic-based BioMEMS.
Contact Information	nickengel@berkeley.edu, mschooljian@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Microfluidics
Project ID	BPN839
Project Title	Flow Control in Plastic Microfluidic Devices using Thermosensitive Gels
Status	Continuing
Funding Source	BSAC Member Fees
Keywords
Researchers	Karthik Prasad, Marc Chooljian
Abstract	Our new microfabrication process can integrate electronics into plastic devices, simplifying on chip sensing and actuation. Traditional microfluidic prototyping (PDMS soft-lithography) requires large off chip components for active flow control. These components impose scalability limitations. Leveraging thermo-gelling polymers and integrated resistive heaters we can implement on chip active flow control. These polymers, poloxamers, are nonionic triblock copolymers known for their temperature dependent self- assembling and thermo-gelling behavior. Poloxamers can quickly (<30ms) undergo a phase transition into a gel-like substance over a temperature change of two degree Celsius. The viscosity rapidly increases by a 1000-fold, effectively stopping flow. Furthermore, the transition temperature can be easily adjusted by varying poloxamer concentration, allowing for precise thermal control. Using targeted heating with our integrated resistive heaters, we can leverage the phase transition temperature to create rapid reversible valves. These devices expand microfluidic prototyping capabilities in fields such as mixers, fluidic logic, cell culturing, and imaging.
Contact Information	mschooljian@gmail.com
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Microfluidics
Project ID	BPN711
Project Title	Point-of-Care System for Quantitative Measurements of Blood Analytes Using Graphene-Based Sensors
Status	Continuing
Funding Source	NSF
Keywords	Biosensor, healthcare, graphene, microfluidics
Researchers	Marc Chooljian, Phoebe So
Abstract	Serum glucose, cholesterol, triglyceride and HbA1C monitoring are all valuable tools in the health management of the aging population, especially given the increase in diabetes and cardiovascular diseases. Even for glucose monitoring, the challenges obtaining sufficiently accurate and reliable measurements are so significant that the FDA is contemplating more stringent standards. Guido Freckmann, et al., J. Diabetes Sci. Tech. 6, 1060-1075, 2012, have compared 43 blood glucose self- monitoring systems. Out of this, 34 systems were completely assessed and 27 (79.4%) systems fulfilled the minimal accuracy requirements and only 18 (52.9%) of 34 systems fulfilled the requirements of the proposed tighter criteria in the current standards draft. None of them meet the even more stringent requirement of ISO 2012 and FDA. Because inaccurate systems bear the risk of false therapeutic decisions and rising health care costs, there is an urgent need for significantly enhanced BG monitoring systems for PC applications. POC tests for other biomedically important analytes are generally even less accurate. The overall goal of the proposed research is to develop new sensor platforms that will provide increased sensitivity and accuracy in point-of-care situations. This is a joint project with Harvard Medical School and Vanderbilt University.
Contact Information	mschooljian@berkeley.edu, phoebeso@berkeley.edu, liepmann@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	BioMEMS
Project ID	BPN729
Project Title	Development of Microfluidic Devices with Embedded Microelectrodes using Electrodeposition and Hot Embossing
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Packaging, Microfluidics, Electrodes, Hot Embossing
Researchers	Marc Chooljian
Abstract	The use of microfluidic devices has experienced a tremendous increase over the last years, especially valuable for healthcare applications. In this context plastic materials are increasingly relevant especially for large scale fabrication and commercialization. However plastics are still not widely used at the research level due to the lack of available inexpensive industrial–like fabrication equipment. In this work we describe a rapid and highly cost-effective approach for fabricating plastic microfluidic devices with embedded microelectrodes allowing 2D and 3D configurations. We present an interdigitated microelectrode configuration applied to impedance cytometry and cellular electroporation/lysis on chip devices as an example of the great potential of this technology. Our long-term goals are to further explore the potential of hot-embossed microscale devices as platforms for complete BioMEMS devices. This includes the integration of functionalized elements and silicon-based biosensors. A variety of functional coatings will be developed to apply integrated electrodes to many different sensing applications.
Contact Information	mschooljian@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN854 New Project
Project Title	Wearable Ultrasound System for Chronic Neural Recording
Status	New
Funding Source	DARPA
Keywords
Researchers	Joshua E. Kay
Abstract	Chronic monitoring of nerve activity with minimally invasive medical devices creates broad opportunities from therapeutic treatments to human augmentation. These closed-looped neural recording and modulation systems require small, low power wearable devices to enable freely moving subjects while still allowing real-time processing of recorded data. An ultrasonic backscatter system called Neural Dust (ND) demonstrated ultrasound's increased power efficiency over electromagnetic (EM) energy for sub-mm scale implantable devices used for wireless electrophysiological neural recording. Although wireless neural recording reduces invasiveness, the technique’s inherent energy losses compared to wired solutions constrain the power and size of the device interacting with the implant. Additionally, ultrasound’s increased power efficiency for sub-mm scale implantable devices over EM energy coupling allows for smaller implantable devices but shifts the burden to the system’s ultrasound transceiver, as conventional ultrasound systems consume more power than RF transceivers. A custom, single 1.8V supply ultrasonic interface ASIC with high power efficiency is used to overcome these limitations. In this work, integrating the ultrasonic interface ASIC with off-the-shelf components produced a wearable ultrasound system that enables untethered, chronic neural recording and real-time processing.
Contact Information	j_kay@berkeley.edu
Advisor	Bernhard E. Boser, Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN852 New Project
Project Title	Frequency to Digital Converter for FM Gyroscopes
Status	New
Funding Source	DARPA
Keywords	Frequency to Digital Converters, FM Gyroscope
Researchers	Kaveh Gharehbaghi, Burak Eminoglu
Abstract	Frequency modulated (FM) gyroscopes are new class of inertial sensors which measure the angular rotation rate. They offer several advantages including accurate scale factor, large dynamic range and robust performance over temperature variation. The frequency of the output signal should be detected precisely to extract the slight frequency variations in modulated signal. This research focuses on the design of high-resolution frequency to digital converters (FDC) as interface for FM gyroscopes. The key specifications which should be optimized are noise, frequency resolution, and power consumption. The design procedure can be outlined as circuit level verification and system level optimization.
Contact Information	kaveh@berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN608
Project Title	FM Gyroscope
Status	Continuing
Funding Source	DARPA
Keywords	gyroscope, fm gyroscope, scale factor, bias stability, calibration
Researchers	Burak Eminoglu, Kaveh Gharehbaghi
Abstract	MEMS gyroscopes for consumer devices, such as smartphones and tablets, suffer from high power consumption and drift which precludes their use in inertial navigation applications.  Conventional MEMS gyroscopes detect Coriolis force through measurement of very small displacements on a sense axis, which requires low-noise, and consequently high-power, electronics. The sensitivity of the gyroscope is improved through mode-matching, but this introduces many other problems, such as low bandwidth and unreliable scale factor. Additionally, the conventional Coriolis force detection method is very sensitive to asymmetries in the mechanical transducer because the rate signal is derived from only the sense axis. Parasitic coupling between the drive and sense axis introduces unwanted bias errors which could be rejected by a perfectly symmetric readout scheme. This project develops frequency modulated (FM) gyroscopes that overcome the above limitations. FM gyroscopes also promise to improve the power dissipation and drift of MEMS gyroscopes. We present results from a prototype FM gyroscope with integrated CMOS readout electronics demonstrating the principle.
Contact Information	eminoglu@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	BioMEMS
Project ID	BPN685
Project Title	Real-Time Intraoperative Fluorescence Imager for Microscopic Residual Tumor in Breast Cancer
Status	Continuing
Funding Source	ASCO, DoD, and Mary Kay Foundation
Keywords	cancer, fluorescence imaging, radiation, surgery, breast cancer, oncology
Researchers	Efthymios P. Papageorgiou
Abstract	Successful treatment of early stage cancer depends on the ability to resect both gross and microscopic disease, yet no method exists to identify residual cancer cells intraoperatively. This is particularly problematic in breast cancer, where microscopic residual disease can double the rate of cancer returning, from 15% to 30% over 15 years, affecting a striking 37,500 women annually. Currently, residual disease can only be identified by examining excised tumor under a microscope, visualizing tumor cells stained with specific tumor markers. This microscopic evaluation restricts identification of tumor cells to the post-operative setting. Unfortunately, traditional optics cannot be scaled to the sub-centimeter size necessary to fit into the cavity and be readily manipulated over the entire surface area. To solve this problem, we have developed an imaging strategy that forgoes external optical elements for focusing light and instead uses angle-selective gratings patterned in the metal interconnect of a standard CMOS process.
Contact Information	epp@berkeley.edu, anwarme@radonc.ucsf.edu
Advisor	Bernhard E. Boser, Mekhail Anwar

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN868 New Project
Project Title	Self-Cleaning Mass Sensor for Particulate Matter Monitors
Status	New
Funding Source	BSAC Member Fees
Keywords	aerosol, particulate matter, deposition, aerosol resuspension, aerosol speciation, PM2.5, PM10, carbon, dust, pollen, FTIR, IR, soot, spore, bacteria, diesel, FBAR
Researchers	Zhiwei Wu
Abstract	When people inhale small particles, such as soot, they may develop pulmonary, cardiac and neural problems, and millions may die prematurely. Therefore, there is need for widely accessible particulate-matter monitors to enable individuals to avoid areas of high particulate concentration. We propose to test means conceived for cleaning the surfaces of the particle mass-measuring sensors after each particulate deposition, as well as recently reported spectroscopic means for determining the chemical compositions of deposited particles.
Contact Information	zway@berkeley.edu, rwhite@eecs.berkeley.edu, paulwright@ berkeley.edu
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN801
Project Title	Power Line Energy Harvesters
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Energy harvester, power system sensors, atmospheric sensors, overhead power distribution, underground power distribution
Researchers	Zhiwei Wu
Abstract	The purposes of this project are to develop inexpensive, easily-installed energy harvesters for mounting on overhead or underground power distribution lines in order (1) to power sensors that evaluate and report on the functioning of the power system, and (2) to power co-located environmental sensors, such as particulate-matter monitors and gas sensors, that can transmit their measurements to nearby personal cellphones.
Contact Information	zway@berkeley.edu, rwhite@eecs.berkeley.edu, paulwright@berkeley.edu
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN851 New Project
Project Title	High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers on Transparent Substrates
Status	New
Funding Source	Industry
Keywords
Researchers	Guo-Lun Luo
Abstract	This paper presents a high fill-factor array of aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducers (PMUTs) fabricated on a glass substrate.
Contact Information	glluo@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN849
Project Title	Large-Amplitude PZT PMUTs
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	PMUT, piezoelectric, PZT
Researchers	Yuri Kusano
Abstract	Thin film lead zirconate titanate (PZT), which has high piezoelectric coefficient, has been widely used as a piezoelectric material in MEMS devices. We design and characterize PZT PMUTs with a large displacement amplitude for in air operation.
Contact Information	ykusano@ucdavis.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN628
Project Title	Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	piezoelectric, ultrasound transducers, medical imaging, fingerprint sensors
Researchers	Xiaoyue (Joy) Jiang, Qi Wang
Abstract	This project presents the first MEMS ultrasonic fingerprint sensor with the capability to image epidermis and dermis layer fingerprints. The sensor is based on a piezoelectric micromachined ultrasonic transducer (PMUT) array that is bonded at wafer- level to complementary metal oxide semiconductor (CMOS) signal processing electronics to produce a pulse-echo ultrasonic imager on a chip. To meet the 500 DPI standard for consumer fingerprint sensors, the PMUT pitch was reduced by approximately a factor of two relative to an earlier design. We conducted a systematic design study of the individual PMUT and array to achieve this scaling while maintaining a high fill-factor. The resulting 110X56 PMUT array, composed of 30um X 43um rectangular PMUTs achieved a 51.7% fill-factor, three times greater than that of the previous design. Together with the custom CMOS ASIC, the sensor chieves 75 um lateral resolution and 150 um axial resolution in a 4.6 mm X 3.2 mm image.
Contact Information	joy.jiang@berkeley.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN785
Project Title	Scandium AlN (ScAlN) for MEMS
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Piezoelectric, MEMS, AlN, ScAlN, Thin films, PMUT
Researchers	Qi Wang
Abstract	The goal of this project is to design, fabricate and characterize novel MEMS devices based on scandium aluminum nitride (ScAlN) thin films. ScAlN thin film is a promising piezoelectric material due to its CMOS process compatibility, low relative permittivity and high piezoelectric coefficient and enables better performance of piezoelectric MEMS devices.
Contact Information	qixwang@ucdavis.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN599
Project Title	MEMS Electronic Compass: Three-Axis Magnetometer
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Soner Sonmezoglu
Abstract	High sensitivity, low cost, low power, and direct integration with MEMS inertial sensors, such as accelerometers and gyroscopes, make the MEMS magnetic sensor a very attractive option in consumer electronic devices. The goal of this project is to develop a low-power three axis MEMS magnetic sensor suitable for use as an electronic compass in smart phones and portable electronics. Our objective is to achieve a resolution of 100 nT/rt-Hz and power consumption of 0.1 mW/axis with DC power supply of 1.8 V. Although past devices designed by our group have demonstrated that our resolution goal is reachable, these devices suffered from dc offset larger than Earth's field and required an external programmable oscillator for operation. Here, we aim to reduce offset by two orders of magnitude for improving the long-term stability of the magnetic sensor and to develop self-oscillation loops to excite the sensor either at resonance or off-resonance.
Contact Information	ssonmezoglu@ucdavis.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN817
Project Title	Ultra-Low Power AlN MEMS-CMOS Microphones and Accelerometers
Status	Continuing
Funding Source	DARPA
Keywords	AlN, MEMS-CMOS, microphone, accelerometer, subthreshold, low power
Researchers	Soner Sonmezoglu
Abstract	State-of-the-art (SOA) physical sensors used to monitor changes in the environment require active electronics that continuously consume power (in the order of mW) limiting the sensor lifetime to months or less. This project targets the integration of low frequency sensors with wake-up electronics that operates below 10nW (50dB lower than the SOA) and achieve high probability of detection (POD) (>95%) and low false alarm rate (FAR) (<1h^-1). To improve the sensor performance at low frequencies we design piezoelectric AlN MEMS microphones and accelerometers with high voltage sensitivities, CMOS circuits with low bias current that operate in subthreshold, and lower the interconnect parasitics (<50fF) by directly bonding both MEMS and CMOS wafers. In particular, the sensor output voltage is boosted by 1) segmenting and stacking the electrodes in series, and 2) optimizing the size, number of electrodes and materials that form the multilayer structure. Regarding to the circuit, we exploit the multiple threshold voltages that are available in the process to reduce leakage on switches, increase input gain, and decrease overdrive voltage in current mirrors. Finally, we achieve the detection specs (POD and FAR) by implementing a programmable 4-stage comparator that allows us to adjust the circuit threshold according to the maximum level of input signal.
Contact Information	ssonmezoglu@ucdavis.edu, dahorsley@ucdavis.edu, ramirtha@ucdavis.edu
Advisor	David A. Horsley, Rajeevan Amirtharajah

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN603
Project Title	Micro Rate-Integrating Gyroscope
Status	Continuing
Funding Source	DARPA
Keywords	MEMS, Rate Integrating Gyroscope, Controls
Researchers	Parsa Taheri-Tehrani
Abstract	The goal of this project is to realize a micro rate-integrating gyroscope that produces an output signal proportional to rotation angle rather than rotation rate. This device would eliminate the need of integrating the gyroscope's rate output to obtain the angle. Gyroscope resonators have at least two resonant modes that can be coupled by Coriolis force. Difference in damping coefficients and stiffness of the resonant modes of the MEMS resonator known as anisodamping and anisoelasticity are main sources of error in RIG. So realizing a micro rate-integrating gyroscope can be achieved by having highly symmetrical gyroscopes with extremely close frequency matching (delta f < 1 Hz) and high time constant (high quality factor). Control algorithms should be developed to eliminate the residual anisodamping and anisoelasticity errors.
Contact Information	dahorsley@ucdavis.edu, ptaheri@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN862 New Project
Project Title	MoS2 transistors with 1-nanometer gate lengths
Status	New
Funding Source	Federal
Keywords	MoS2, 1-nanometer gate, TMDC, scaling
Researchers	Sujay B. Desai
Abstract	MoS2 transistors with a 1-nm physical gate length using a single-walled carbon nanotube as the gate electrode are demonstrated. These ultrashort devices exhibit excellent switching characteristics with near ideal subthreshold swing ~ 65 millivolts per decade and an On/Off current ratio ~ 10^6. Simulations show an effective channel length of ~ 3.9 nm in the Off-state and ~ 1 nm in the On-state. The work here provides new insight into the ultimate scaling of gate lengths for a FET by surpassing the 5 nm limit often associated with Si technology. Future work involves improving the performance of these short-gate length transistors
Contact Information	sujaydesai@eecs.berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN818
Project Title	Fully-Integrated Wearable Sensor Arrays for Multiplexed In Situ Perspiration Analysis
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Sweat, biosensors, system integration, wearable devices, flexible electronics
Researchers	Hnin Y.Y. Nyein, Li-Chia Tai, Mallika Bariya, Wei Gao
Abstract	Wearable sensor technologies play a significant role in realizing personalized medicine by continuously monitoring an individual’s health state. In particular, human sweat is an excellent candidate for these technologies as it contains physiologically rich information and serves as a target for non-invasive monitoring. Given the complexity of sweat secretion, simultaneous and multiplexed screening of target biomarkers is critical, and full system integration to ensure the accuracy of measurements is necessary. A mechanically flexible and fully-integrated perspiration analysis system is developed to simultaneously and selectively measure sweat metabolites (e.g. glucose and lactate) and electrolytes (e.g. sodium, potassium, calcium and pH), as well as skin temperature to calibrate the sensors' response. On-body heavy metal analysis in perspiration is also presented. This work bridges the technological gap between signal transduction, conditioning, processing and wireless transmission in wearable biosensors by merging plastic-based sensors that interface with the skin, and silicon integrated circuits consolidated on a flexible circuit board for complex signal processing. This wearable system can be used to measure detailed sweat profiles of human subjects engaged in prolonged indoor and outdoor physical activities, and assess their physiological states in real-time. The platform enables wearable technologies to perform a wide range of personalized diagnostic and physiological monitoring applications.
Contact Information	hnyein@berkeley.edu, j.tai@berkeley.edu, m.bariya@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN822
Project Title	Monolayer Semiconductor Optoelectronics
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Matin Amani, Der-Hsien Lien
Abstract	While two dimensional (2D) semiconductors show great promise for optoelectronic applications, due to a myriad of highly attractive properties which cannot be readily achieved in traditional III-V systems, to date they have shown tremendously poor photoluminescence quantum yield (QY). High QY is a requirement for materials used in key optoelectronic devices such as LEDs, lasers, and solar cells, since it determines the efficiency of light emission. Traditional three dimensional materials like GaAs require lattice matched cladding layers to obtain high QY, on the other hand 2D materials which have naturally terminated surfaces should be able to exhibit near-unity QY provided that there are no defects in the crystal. To this end, we have recently demonstrated that through chemical treatments with an organic superacid the defect sites on the surface of MoS2, the prototypical 2D material, can be passivated. Solution based treatment of defects is especially effective in monolayer semiconductors since the entire "bulk" of the semiconductor is also the surface. As a result the QY can be enhanced from less than 1% to over 95% in micromechanically exfoliated MoS2. In this project we seek to expand this treatment to other 2D material systems and 2D materials grown by chemical vapor deposition, as well as realize active devices based on perfect optoelectronic monolayers.
Contact Information	mamani@berkeley.edu, ajavey@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN777
Project Title	Nonepitaxial Growth of Single Crystalline III-V Semiconductors onto Insulating Substrates
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Kevin Chen, Sujay Desai
Abstract	III-V semiconducting materials have many characteristics such as high electron mobilities and direct band. gaps that make them desirable for many electronic applications including high performance transistors and solar cells. However, these materials generally have a high cost of production which significantly limits their use in many commercial applications. We aim to explore new growth methods which can grow high quality crystalline III-V films, using InP as an example substrate, onto non-epitaxial substrates. In addition to excellent crystal quality, critical considerations include cost and scalability for commercially viable applications.
Contact Information	kqchen@eecs.berkeley.edu, sujaydesai@eecs.berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN704
Project Title	Vapor-Liquid-Solid Growth of Polycrystalline Indium Phosphide Thin Films on Metal
Status	Continuing
Funding Source	Federal
Keywords	Solar Cells, Photovoltaics, Indium Phosphide, InP, VLS, Thin Film
Researchers	Mark Hettick
Abstract	Here, we develop a technique that enables direct growth of III-V materials on non-epitaxial substrates. Here, by utilizing a planar liquid phase template, we extend the VLS growth mode to enable polycrystalline indium phosphide (InP) thin film growth on Mo foils.
Contact Information	mark.hettick@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN770
Project Title	Chemical Sensitive Field Effect Transistor (CS-FET)
Status	Continuing
Funding Source	NSF
Keywords	CS-FET, Gas Sensor, microfabrication, TMO
Researchers	Hossain M. Fahad, Thomas Rembert
Abstract	Silicon IC-based fabrication processing will be used to develop novel compact gas sensors that, unlike current sensors, will operate at room temperature, consume minimal power, exhibit superior sensitivity, provide chemical selectivity and multi-gas detection capabilities, and offer the prospect of very low-cost replication for broad-area deployment. We name this device structure “Chemical Sensitive FET” or “CS-FET.” The operation of the CS-FET involves transistor parametric differentiation under influence of differentiated gas exposures.
Contact Information	hossain.fahad@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	BioMEMS
Project ID	BPN853 New Project
Project Title	Tethered Bacteria-Based Biosensing
Status	New
Funding Source	Office of Naval Research (ONR)
Keywords	biosensing, bacterial chemotaxis, bacterial flagellar motor, microbiorobotics
Researchers	Tom J. Zajdel
Abstract	The objective of this work is to construct a low-power biosensor suitable for use in microrobotics applications. The target detection limit is 10 parts per billion and the target response time is on the order of 30 seconds or less. When sensing dissolved analytes, speed, sensitivity, and size are subject to fundamental physical constraints set by diffusion noise. The chemical receptors and pathways used by E. coli during chemotaxis - the cell’s motility response to chemicals in the medium - are known to approach the fundamental limits on response time and sensitivity for a cell of its volume, roughly 1 fL. Despite this natural capacity, no modern engineered biosensing system approaches these limits in the same deployable size as a bacterium. We propose to monitor chemotactic motor switching in an array of E. coli cells, each tethered by one flagellum, to estimate the concentration of bioanalytes in their surroundings. We have fabricated microelectrode arrays to monitor solution impedance perturbations as tethered bacterial cells rotate between electrodes, which will eventually allow for the monitoring of bacteria without being tethered to a microscope.
Contact Information	zajdel@eecs.berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN844
Project Title	Wireless Sub-Millimeter Temperature Sensor for Continuous Temperature Monitoring in Tissue
Status	Continuing
Funding Source	DARPA
Keywords	Sensor, wireless, monitoring, biomedical, chronic, implant, temperature, thermometer, ultrasound, backscatter
Researchers	B. Arda Ozilgen
Abstract	Several phenomena within the body have a unique temperature signature. These unique fluctuations in temperature accompanying physiology can be leveraged for the monitoring of disease states and to confirm normal organ function. The current gold standard for thermal imaging is a technique known as infrared (IR) thermography. However, current methods of thermography are limited in depth and rely heavily upon heat transfer models of the body that can be imprecise even with carefully calibrated equipment. Here, we develop and demonstrate the viability of a miniature temperature sensing modality employing ultrasonic backscatter modulation for wireless communication that is designed to transmit temperature data from deep tissue in vivo. We have demonstrated that sensor motes as small as nearly 500 um in their largest dimension can be assembled. Furthermore, we have found that our system is capable of resolving temperature changes of less than 0.5°C, which is significant in assessing tissue temperature changes in vivo for monitoring and diagnostic purposes. Due to the minimal attenuation of ultrasound in tissue compared to other modalities, our system is capable of deep tissue implantation; allowing for temperature data to be collected from locations in the body that were previously inaccessible using current thermography methods. We anticipate our sensor to be used as a tool that enables physicians to remotely monitor patients that are at risk of experiencing tissue ailments.
Contact Information	arda.ozilgen@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN816
Project Title	Cytokine Fast Detection
Status	Continuing
Funding Source	DARPA
Keywords	Ion concentration polarization, ultrafast enrichment
Researchers	Bochao Lu
Abstract	Sepsis is a life-threatening condition both in civilian and military medical scenarios. Patients with sepsis usually exhibit a vigorous systemic release of cytokines such as interleukin-1 (IL-1), interleukin-6 (IL-6) and tumor necrosis factor (TNF) into serum. The ability to monitor relative cytokine levels continuously at fast time scales (tens of minutes) could open the door to closed-loop, patient-specific sepsis management therapies. The current methods of cytokine detection take hours and cost thousands of dollars because the physiological concentration is so low around femtomolar. At such low concentrations, the limiting factor becomes mass transport instead of binding kinetics, due to increased diffusion length from bulk solution to sensor surface. We present a method, based on nanofabrication and ion concentration polarization (ICP) which enriches analytes using only a DC power supply.
Contact Information	steven_lu@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN795
Project Title	An Implantable Micro-Sensor for Cancer Surveillance
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	prostate cancer, beta radiation, Solid-state detectors, Low noise, CMOS, Imaging
Researchers	Stefanie V. Garcia
Abstract	We aim to develop a micro surveillance device for early identification of cancerous cell growth in collaboration with radiation oncology research from UCSF. UCSF will develop a molecular probe that specifically targets prostate specific membrane antigen (PSMA), which is over-expressed on prostate cancer cells. By radiolabelling these probes, cancer sites may be monitored in conjunction with an implantable array. We will design a 100x100 um semiconductor radiation sensor that can feasibly detect and localize cancer recurrence from 10^4 – 10^5 cells when placed near a cancer site. The sensors will use ultrasonic methods for power and signal transmission, as demonstrated in Dongjin et al, arXiv preprint arXiV:1307.2196 (2013). Initial sensor design will enhance CMOS device sensitivity to time dependent signal variation and will also explore signal recovery in the limited biological window where the radiolabelled probe is detectable.
Contact Information	stefanievgarcia@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN718
Project Title	Direct Electron-Mediated Control of Hybrid Multi-Cellular Robots
Status	Continuing
Funding Source	Office of Naval Research (ONR)
Keywords	microbiorobotics, synthetic biology, biosensors, stochastic control, hybrid biological systems, bacterial electrophysiology
Researchers	Alyssa Y. Zhou, Tom J. Zajdel
Abstract	We propose a millimeter-scale, programmable cellular-synthetic hybrid sensor node capable of sensing and response in aqueous environments. This will be the first demonstration of a millimeter-scale synthetic autonomous multi-cellular hybrid with organic and man-made components. A primary goal of this work is to enable abiotic/biotic two-way communication via electron transfer channels engineered into cells in contact with microelectrodes. We have successfully miniaturized an electrochemical sensing platform to the centimeter scale to measure current generated by engineered bacterial cells in response to their environmental arsenic.
Contact Information	alyssa.zhou@berkeley.edu, zajdel@eecs.berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN716
Project Title	Ultrasonic Wireless Implants for Neuro-Modulation
Status	Continuing
Funding Source	DARPA
Keywords	brain-machine interfaces, ultrasonic energy transfer and harvesting, backscatter communication
Researchers	Konlin Shen, David Piech, B. Arda Ozilgen
Abstract	A major hurdle in brain-machine interfaces (BMI) is the lack of an implantable neural interface system that remains viable for a substantial fraction of a primate lifetime. Recently, sub-mm implantable, wireless electromagnetic (EM) neural interfaces have been demonstrated in an effort to extend system longevity. However, EM systems do not scale down in size well due to the severe inefficiency of coupling radio waves at mm and sub-mm scales. We propose an alternative wireless power and data telemetry scheme using distributed, ultrasonic backscattering systems to record high frequency (~kHz) neural activity. Such systems will require two fundamental technology innovations: 1) thousands of 10 – 100 um scale, free- floating, independent sensor nodes, or neural dust, that detect and report local extracellular electrophysiological data via ultrasonic backscattering, and 2) a sub-cranial ultrasonic interrogator that establishes power and communication links with the neural dust. To test the feasibility of this approach, we performed the first in-vivo experiments in the rat model, where we were able to recover mV-level action potential signals from the peripheral nerves. Further miniaturization of implantable interface based on ultrasound would pave the way for both truly chronic BMI and massive scaling in the number of neural recordings from the nervous system.
Contact Information	konlin@berkeley.edu, piech@berkeley.edu, arda.ozilgen@berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN765
Project Title	Full-Field Strain Sensor for Hernia Mesh Repairs
Status	Continuing
Funding Source	NSF
Keywords	strain
Researchers	Amy Liao
Abstract	Each year, more than 400,000 ventral hernia repairs are performed in the United States. A hernia is the protrusion of an organ through a weak spot in the surrounding muscle or connective tissue that normal contains it. Large ventral hernias (hernias that occur in the abdominal wall) are typically treated by suturing in a surgical mesh to cover and overlap the hernia defect. The surgical mesh provides additional support to the damaged tissue surrounding the hernia. However, in 25-40% of patients, the hernia repair fails, resulting in recurrence of the hernia, along with other complications including infection and intestinal obstruction. We hypothesize that a major cause of hernia recurrence is the unequal distribution of stress across the mesh resulting in high stress concentrations at the tissue-mesh interface, particularly at the site of mesh fixation to the abdominal wall muscles. Over time the mesh is pulled away from the abdominal wall at the high stress concentrations and the hernia defect recurs. We propose to design a biocompatible, instrumented patch, capable of mapping the 2D strain topography placed on the mesh. The sensor will enable surgeons to actively identify and address areas of high stress during the surgery by modifying the surgical procedure to redistribute stress more evenly, thus decreasing the rate of hernia recurrence. Furthermore, our long term goal is to design a hernia mesh that contains strain sensors that once implanted in the body the prosthetic can noninvasively alert patients when they are engaging in activities that place high stress on the implant. Such a dynamic, interactive hernia mesh would empower patients to actively participate in their post-operative care in a way that is personalized and unprecedented in surgery.
Contact Information	amy.liao@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN714
Project Title	Impedance Sensing Device to Monitor Pressure Ulcers
Status	Continuing
Funding Source	NSF
Keywords	Wound Healing, Impedance Spectroscopy
Researchers	Amy Liao, Monica C. Lin
Abstract	Chronic cutaneous wounds affect millions of people each year and take billions of dollars to treat. Formation of pressure ulcers is considered a "never event" - an inexcusable, adverse event that occurs in a healthcare setting. Current monitoring solutions (pressure-distributing beds, repositioning patients every few hours, etc) are very expensive and labor intensive. In response to this challenge, we are developing a novel, flexible monitoring device that utilizes impedance spectroscopy to measure and characterize tissue health, thus allowing physicians to objectively monitor progression of wound healing as well as to identify high-risk areas of skin to prevent formation of pressure ulcers. Previous studies that examined the dielectric response of cell suspensions and tissues have identified several distinct dispersions associated with particular molecular-level processes that can be used to distinguish between tissue types. We are utilizing impedance spectroscopy to detect subtle changes in tissue, enabling objective assessment and providing a unique insight into the condition of a wound. Wireless capability can be implemented to allow for continuous, remote monitoring.
Contact Information	amy.liao@berkeley.edu, monica.lin@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN780
Project Title	Impedance Spectroscopy to Monitor Fracture Healing
Status	Continuing
Funding Source	NSF
Keywords
Researchers	Monica C. Lin
Abstract	An estimated 15 million fracture injuries occur each year in the United States. Of these, 10% of fractures result in delayed or non-union, with this number rising to 46% when they occur in conjunction with vascular injury. Current methods of monitoring include taking X-rays and making clinical observations. However, radiographic techniques lag and physician examination of injury is fraught with subjectivity. No standardized methods exist to assess the extent of healing that has taken place in a fracture, revealing the need for a diagnostic device that can reliably detect non-union in its early pathologic phases. Electrical impedance spectroscopy has been used to characterize different tissues, and we hypothesize that this technique can be applied to fractures to distinguish between the various types of tissue present in the clearly defined stages of healing. We are developing an objective measurement tool that utilizes impedance spectroscopy to monitor fracture healing, with the goal of providing physicians with more information that can resolve the initial stages of fracture healing. This would enable early intervention to prevent problem fractures from progressing to non-union.
Contact Information	monica.lin@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN573
Project Title	Carbon Fiber Microelectrode Array for Chronic Stimulation and Recording
Status	Continuing
Funding Source	DARPA
Keywords	carbon fiber microelectrode electrode array electrophysiology chronic stimulation recording high density
Researchers	Travis L. Massey
Abstract	This project aims to create an array of carbon fibers for neural recording and stimulation.
Contact Information	tlmassey@eecs.berkeley.edu
Advisor	Michel M. Maharbiz, Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN848
Project Title	Highly Integrated, Compact Wearable Ultrasound System for Chronic Biosensing
Status	Continuing
Funding Source	DARPA
Keywords	ultrasound, low-power, wearable, biosensing, neural dust
Researchers	David Piech, Josh Kay
Abstract	Recent advances in low-power ultrasonics have enabled highly integrated, compact ultrasound systems. In addition, new ultrasonic biosensing modalities for chronic sensing native of tissue or communicating with implanted sensor nodes motivate the need for a wearable ultrasound system. Here, we integrate a low-power, high-voltage transducer driver (Tang, 2015), into a highly compact wearable device designed to unobtrusively provide continuous ultrasound monitoring of subject biometrics. We demonstrate its capability by interfacing with one type of ultrasonic backscatter dust mote, the Neural Dust mote (Seo, 2016).
Contact Information	piech@berkeley.edu, j_kay@berkeley.edu
Advisor	Michel M. Maharbiz, Bernhard E. Boser

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN838
Project Title	Dosimetry Dust: An Implantable Dosimeter for Proton Beam Therapy Treatment of Ocular Melanomas
Status	New
Funding Source	BSAC Member Fees
Keywords	Implantable Dosimetry, proton beam therapy, ultrasound power harvesting, ultrasound communication, piezoelectric transducer
Researchers	Stefanie Garcia
Abstract	Proton beam therapy is a well-established medical procedure for treating certain kinds of cancer, and is uniquely suited for treatment of head, neck, and eye tumors. In order to effectively treat a patient’s tumor, medical physicists have developed various simulations to model proton interactions with tissue and create a patient specific treatment plan that determines optimal gaze angles, the depth of penetration, and width of the spread-out-Bragg Peak necessary to encompass the target tumor. Despite the continuous improvements in medical physics treatment plan simulations, improper tissue irradiation can easily occur if there is a physical shift in the tumor and/or critical organs during the irradiation process (ex. patient movement). Currently, there are no micro-implantable feedback methods to assure proper irradiation of a tumor, and inform a physician what the in vivo dose is. We propose the use of a MOSFET silicon based radiation detector that employs ultrasonic power harvesting and backscatter communication through the use of a piezoelectric transducer.
Contact Information	stefanievgarcia@berkeley.edu
Advisor	Michel M. Maharbiz, Mekhail Anwar