Berkeley Sensor & Actuator Center

The Berkeley Sensor & Actuator Center (BSAC) is the Graduated National Science Foundation Industry/University Cooperative Research Center for Microsensors and Microactuators. We conduct industry-relevant, interdisciplinary research on micro- and nano-scale sensors, moving mechanical elements, microfluidics, materials, processes & systems that take advantage of progress made in integrated-circuit, bio, and polymer technologies.

Number of records: 83

POSTER	RESEARCH THRUST	ABSTRACT click link to view abstract	PROJECT MATERIALS WEBSITE, Login Required	PROJECT TITLE	ADVISOR
1	NanoTechnology: Materials, Processes & Devices	BPN856	BPN856 Website	Broadly-Tunable Laser with Self-Imaging Three-Branch Multi-Mode Interferometer	Ming C. Wu
2	NanoTechnology: Materials, Processes & Devices	BPN825	BPN825 Website	Direct On-Chip Optical Synthesizer (DODOS)	Ming C. Wu
4	NanoPlasmonics, Microphotonics & Imaging	BPN751	BPN751 Website	Large-Scale Silicon Photonic MEMS Switch with Sub-Microsecond Response Time	Ming C. Wu
5	NanoPlasmonics, Microphotonics & Imaging	BPN721	BPN721 Website	Non-Linear FMCW Lidar Using Resampling Methods for Long Range and High Resolution	Ming C. Wu
6	NanoPlasmonics, Microphotonics & Imaging	BPN703	BPN703 Website	Directly Modulated High-Speed nanoLED Utilizing Optical Antenna Enhanced Light Emission	Ming C. Wu
7	NanoPlasmonics, Microphotonics & Imaging	BPN869	BPN869 Website	Efficient Waveguide-Coupling of Electrically Injected Optical Antenna Based nanoLED New Project	Ming C. Wu
8	NanoPlasmonics, Microphotonics & Imaging	BPN458	BPN458 Website	Optical Antenna-Based nanoLED	Ming C. Wu, Ali Javey
9	NanoPlasmonics, Microphotonics & Imaging	BPN788	BPN788 Website	MEMS-Actuated Grating-based Optical Phased Array for LIDAR	Ming C. Wu
10	Physical Sensors & Devices	BPN872	BPN872 Website	COMPACT VOLTAGE SENSOR FOR POWER-LINES New Project	Richard M. White
11	Physical Sensors & Devices	BPN868	BPN868 Website	Self-Cleaning Mass Sensor for Particulate Matter Monitors	Richard M. White, Paul K. Wright
12	Physical Sensors & Devices	BPN801	BPN801 Website	ELECTROMAGNETIC ENERGY HARVESTER FOR ATMOSPHERIC SENSORS ON OVERHEAD POWER DISTRIBUTION LINES	Richard M. White, Paul K. Wright
13	Physical Sensors & Devices	BPN826	BPN826 Website	Autonomous Flying Microrobots	Kristofer S.J. Pister
14	Physical Sensors & Devices	BPN873	BPN873 Website	MEMS Filament Motors New Project	Kristofer S.J. Pister
15	Physical Sensors & Devices	BPN857	BPN857 Website	Miniature Autonomous Rockets	Kristofer S.J. Pister
16	Wireless, RF & Smart Dust	BPN735	BPN735 Website	Walking Silicon Microrobots	Kristofer S.J. Pister
17	Wireless, RF & Smart Dust	BPN858	BPN858 Website	Zero Insertion Force MEMS Socket for Microrobotics Assembly	Kristofer S.J. Pister
18	Wireless, RF & Smart Dust	BPN744	BPN744 Website	Self-Destructing Silicon	Kristofer S.J. Pister, Michel M. Maharbiz
19	Wireless, RF & Smart Dust	BPN803	BPN803 Website	Single Chip Mote	Kristofer S.J. Pister, Ali M. Niknejad
20	Wireless, RF & Smart Dust	BPN859	BPN859 Website	UHF Channel-Selecting Bandpass Filter	Clark T.-C. Nguyen
21	Wireless, RF & Smart Dust	BPN828	BPN828 Website	Zero Quiescent Power Micromechanical Receiver	Clark T.-C. Nguyen
22	Wireless, RF & Smart Dust	BPN814	BPN814 Website	UHF Capacitive-Gap Transduced Resonators With High Cx/Co	Clark T.-C. Nguyen
23	Wireless, RF & Smart Dust	BPN861	BPN861 Website	Fully Integrated MEMS-Based Super-Regenerative Transceiver	Clark T.-C. Nguyen
24	Wireless, RF & Smart Dust	BPN701	BPN701 Website	Bridged Micromechanical Filters	Clark T.-C. Nguyen
25	NanoTechnology: Materials, Processes & Devices	BPN867	BPN867 Website	Fully Integrated CMOS-Metal MEMS Systems	Clark T.-C. Nguyen
26	Wireless, RF & Smart Dust	BPN865	BPN865 Website	CMOS-Assisted Resoswitch Receivers	Clark T.-C. Nguyen
27	Wireless, RF & Smart Dust	BPN866	BPN866 Website	Wide-Bandwidth UHF Bandpass Filters	Clark T.-C. Nguyen
28	Wireless, RF & Smart Dust	BPN864	BPN864 Website	Micromechanical Resonator Waveform Synthesizer	Clark T.-C. Nguyen
29	Package, Process & Microassembly	BPN354	BPN354 Website	The Nanoshift Concept: Innovation through Design, Development, Prototyping and Fabrication of MEMS, Microfluidics, Nano- and Clean Technologies	Michael D. Cable
30	Micropower	BPN874	BPN874 Website	Charge Pumping with Finger Capacitance for Body Energy Harvesting New Project	Michel M. Maharbiz
31	BioMEMS	BPN718	BPN718 Website	Direct Electron-Mediated Control of Hybrid Multi-Cellular Robots	Michel M. Maharbiz
32	BioMEMS	BPN853	BPN853 Website	Tethered Bacteria-Based Biosensing	Michel M. Maharbiz
33	Physical Sensors & Devices	BPN765	BPN765 Website	Full-Field Strain Sensor for Hernia Mesh Repairs	Michel M. Maharbiz
34	Physical Sensors & Devices	BPN714	BPN714 Website	Impedance Sensing Device to Monitor Pressure Ulcers	Michel M. Maharbiz
35	Physical Sensors & Devices	BPN780	BPN780 Website	Impedance Spectroscopy to Monitor Fracture Healing	Michel M. Maharbiz
36	Wireless, RF & Smart Dust	BPN844	BPN844 Website	Wireless Sub-Millimeter Temperature Sensor for Continuous Temperature Monitoring in Tissue	Michel M. Maharbiz
37	BioMEMS	BPN816	BPN816 Website	Cytokine Fast Detection	Michel M. Maharbiz
38	BioMEMS	BPN716	BPN716 Website	Ultrasonic Wireless Implants for Neuro-Modulation	Michel M. Maharbiz
39	BioMEMS	BPN795	BPN795 Website	An Implantable Micro-Sensor for Cancer Surveillance	Michel M. Maharbiz
41	Wireless, RF & Smart Dust	BPN848	BPN848 Website	Highly Integrated, Compact Wearable Ultrasound System for Chronic Biosensing	Michel M. Maharbiz, Bernhard E. Boser
42	BioMEMS	BPN573	BPN573 Website	Fabrication and Microassembly of a High-Density Carbon Fiber Neural Recording Array	Michel M. Maharbiz, Kristofer S.J. Pister
43	Wireless, RF & Smart Dust	BPN871	BPN871 Website	An Ultrasonic Implantable for Continuous In Vivo Monitoring of Tissue Oxygenation New Project	Michel M. Maharbiz, Mekhail Anwar
44	BioMEMS	BPN884	BPN884 Website	Anisotropic Proton Transport in Artificially Aligned Collagen Fiber New Project	Luke P. Lee
45	BioMEMS	BPN829	BPN829 Website	Integrated Multiplexed Optical Microfluidic System (iMOMs) for Dengue Diagnosis	Luke P. Lee
46	NanoPlasmonics, Microphotonics & Imaging	BPN809	BPN809 Website	Photonic Cavity Bioreactor for High-throughput Screening of Microalgae	Luke P. Lee
47	NanoTechnology: Materials, Processes & Devices	BPN881	BPN881 Website	Strain-engineered growth of two-dimensional materials New Project	Ali Javey
48	Physical Sensors & Devices	BPN818	BPN818 Website	Fully-Integrated Wearable Sensor Arrays for Multiplexed In Situ Perspiration Analysis	Ali Javey
49	Physical Sensors & Devices	BPN770	BPN770 Website	Chemical Sensitive Field Effect Transistor (CS-FET)	Ali Javey
50	Physical Sensors & Devices	BPN883	BPN883 Website	Microchannel contacting of crystalline silicon solar cells New Project	Ali Javey
51	NanoTechnology: Materials, Processes & Devices	BPN704	BPN704 Website	Vapor-Liquid-Solid Growth of Polycrystalline Indium Phosphide Thin Films on Metal	Ali Javey
52	Physical Sensors & Devices	BPN879	BPN879 Website	A wearable impedance-based microfluidic sensor for sweat rate monitoring New Project	Ali Javey
53	NanoTechnology: Materials, Processes & Devices	BPN822	BPN822 Website	Monolayer Semiconductor Optoelectronics	Ali Javey
54	NanoTechnology: Materials, Processes & Devices	BPN862	BPN862 Website	MoS2 Transistors with 1-Nanometer Gate Lengths	Ali Javey
55	Physical Sensors & Devices	BPN608	BPN608 Website	FM Gyroscope	Bernhard E. Boser
56	Physical Sensors & Devices	BPN852	BPN852 Website	Frequency to Digital Converter for FM Gyroscopes	Bernhard E. Boser
57	BioMEMS	BPN685	BPN685 Website	Real-Time Intraoperative Fluorescence Imager for Microscopic Residual Tumor in Breast Cancer	Bernhard E. Boser, Mekhail Anwar
58	BioMEMS	BPN882	BPN882 Website	An Ultra-Thin Molecular Imaging Skin for Intraoperative Cancer Detection Using Time-Resolved CMOS Sensors New Project	Bernhard E. Boser, Mekhail Anwar
59	NanoTechnology: Materials, Processes & Devices	BPN875	BPN875 Website	Transfer-Free Synthesis of Graphene on Insulating Substrates New Project	Roya Maboudian
60	NanoPlasmonics, Microphotonics & Imaging	BPN878	BPN878 Website	Super-resolution synthesis of nontrivial heterogeneous nanoparticles assisted by surface plasmons New Project	Roya Maboudian, Carlo Carraro
61	NanoTechnology: Materials, Processes & Devices	BPN843	BPN843 Website	Non-Enzymatic Electrochemical Sensors Based on Wearable Carbon Textile	Roya Maboudian, Carlo Carraro
62	NanoTechnology: Materials, Processes & Devices	BPN835	BPN835 Website	Silicon Carbide Passivated Electrode for Thermionic Energy Conversion	Roya Maboudian, Carlo Carraro
63	Physical Sensors & Devices	BPN876	BPN876 Website	Metal-organic frameworks: A highly tunable class of materials for chemical sensing with high selectivity New Project	Roya Maboudian, Carlo Carraro, Ali Javey
64	Physical Sensors & Devices	BPN743	BPN743 Website	Highly Responsive pMUTs	Liwei Lin
65	Micropower	BPN782	BPN782 Website	Flexible load-bearing energy storage fabrics	Liwei Lin
66	Physical Sensors & Devices	BPN799	BPN799 Website	3D Printed Microsensors	Liwei Lin
67	NanoTechnology: Materials, Processes & Devices	BPN672	BPN672 Website	Solar Hydrogen Production by Photocatalytic Water Splitting	Liwei Lin
68	Microfluidics	BPN774	BPN774 Website	Applications of 3D Printed Integrated Microfluidic Circuitry, Finger-Powered Pumps, and Mixers	Liwei Lin
69	Microfluidics	BPN846	BPN846 Website	3D Printed Biomedical and Diagnostic Systems	Liwei Lin
70	Wireless, RF & Smart Dust	BPN840	BPN840 Website	W-Band Additive Vacuum Electronics	Liwei Lin
71	Micropower	BPN855	BPN855 Website	Flexible Sensors and Energy Harvesters	Liwei Lin
72	Physical Sensors & Devices	BPN877	BPN877 Website	Pulse Acquisition and Diagnosis for Health Monitoring New Project	Liwei Lin
73	Micropower	BPN742	BPN742 Website	Novel Methods to Synthesis Transition Metal Dichalcogenide and Transition Metal Carbide for Energy Storage Applications	Liwei Lin
74	NanoTechnology: Materials, Processes & Devices	BPN860	BPN860 Website	Foldable Paper Electronics by Direct-Write Laser Patterning	Liwei Lin
75	Physical Sensors & Devices	BPN772	BPN772 Website	Graphene for Room Temperature Gas Sensors	Liwei Lin
76	BioMEMS	BPN870	BPN870 Website	Hot Embossed Thermoplastic Bubble-Actuated Micropump New Project	Dorian Liepmann
77	Microfluidics	BPN863	BPN863 Website	In Situ Gold Plating of Microfluidic Devices	Dorian Liepmann
78	Microfluidics	BPN839	BPN839 Website	Flow Control in Plastic Microfluidic Devices Using Thermosensitive Gels	Dorian Liepmann
79	BioMEMS	BPN729	BPN729 Website	Development of Microfluidic Devices with Embedded Microelectrodes using Electrodeposition and Hot Embossing	Dorian Liepmann
80	Physical Sensors & Devices	BPN851	BPN851 Website	High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers on Transparent Substrates	David A. Horsley
81	Physical Sensors & Devices	BPN880	BPN880 Website	Synchronization in a Micromachined Resonators New Project	David A. Horsley
82	Physical Sensors & Devices	BPN785	BPN785 Website	Scandium AlN (ScAlN) for MEMS	David A. Horsley
83	Physical Sensors & Devices	BPN628	BPN628 Website	Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)	David A. Horsley
84	Physical Sensors & Devices	BPN849	BPN849 Website	Large-Amplitude PZT PMUTs	David A. Horsley
85	Physical Sensors & Devices	BPN817	BPN817 Website	Ultra-Low Power AlN MEMS-CMOS Microphones and Accelerometers	David A. Horsley

Project Abstracts

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN825
Project Title	Direct On-Chip Optical Synthesizer (DODOS)
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Jean-Etienne Tremblay, Guan-Lin Su, Kyungmok Kwon
Abstract	The advent of precise microwave frequency synthesis in the 1940’s enabled a disruptive revolution in the capabilities enabled by microwave technology, including wireless and wireline communications, RADAR, electronic warfare, and atomic sensors and timing technology. It is envisioned that the DODOS program will advance a similar transformative revolution based on ubiquitous optical frequency synthesis technology. Laboratory-scale optical frequency synthesis was successfully realized in 1999 with the invention of self-referenced optical frequency combs based on femto-second pulse-length mode-locked laser sources. This has led to optical synthesizers with frequency accuracy better than 10e-19 and demonstration of optical clocks with stability floor below 2x10e-18. However, such systems are large, costly, and thereby confined to laboratory use. Recent development of Kerr combs generated in microresonators, as well as chip-scale mode-locked lasers, enable the development of a microscale self-referenced optical frequency comb with performance rivaling that of laboratory-scale systems. Combined with recent progress in on-chip photonic waveguides and photonic crystals, widely-tunable laser sources, and optical modulators, along with advances in on-chip optical-CMOS heterogeneous integration, it is now possible to develop a robust and deployable single-chip integrated optical frequency synthesizer. It is expected that the DODOS program will enable low-cost and high performance optical frequency control with the ubiquity of microwave synthesis.
Contact Information	jetremblay@berkeley.edu, gsu2@berkeley.edu, kwon0512@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN751
Project Title	Large-Scale Silicon Photonic MEMS Switch with Sub-Microsecond Response Time
Status	Continuing
Funding Source	NSF
Keywords	optical switch, silicon photonics, large scale, fast, small footprint
Researchers	Johannes Henriksson, Jianheng Luo, Kyungmok Kwon
Abstract	We developed a new architecture suitable for building a large-scale optical switch with fast response time. We have demonstrated switches with a scale of 64x64 and speed of sub- microsecond using our new architecture. The switch architecture consists of an optical crossbar network with MEMS-actuated couplers and is implemented on a silicon photonics platform. Thanks to high integration density of the silicon photonics platform, we could integrate 64x64 switch on an area less than 1cm x 1cm. To our knowledge this is the largest monolithic switch, and the largest silicon photonic integrated circuit, reported to date. The passive matrix architecture of our switch is fundamentally more scalable than that of multistage switches. We believe that our switch architecture can be scaled-up to larger than 200x200.
Contact Information	jhenriksson@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN721
Project Title	Non-Linear FMCW Lidar Using Resampling Methods for Long Range and High Resolution
Status	Continuing
Funding Source	DARPA
Keywords	lidar, VCSEL, FMCW, metrology, 3D imaging
Researchers	Phillip A.M. Sandborn
Abstract	Range-finding sensors have applications that span several industries and markets, from metrology to robotic control. Frequency-modulated continuous-wave lidar has been proven effective in providing high depth resolution, but suffers from limited range due to the limited coherence length of tunable laser sources. Implementations typically require expensive lasers with large coherence length or complex feedback to linearize tunable laser sweeps and extend coherence length. Instead, we use resampling methods to linearize laser sweeps and reduce laser phase noise, all in post-processing, thus reducing the need for precision feedback control or expensive tunable laser hardware. We have demonstrated sub-millimeter resolution at free-space distances >20-meters with 1-inch receiving aperture. In addition, we present a demonstration of this technology which approaches reasonable 3D image acquisition speeds with sub-mm depth precision. Use of RAID and FPGA systems can help approach real- time frame-rates for 3D imaging.
Contact Information	sandborn@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN703
Project Title	Directly Modulated High-Speed nanoLED Utilizing Optical Antenna Enhanced Light Emission
Status	Continuing
Funding Source	Federal
Keywords	nano-photonics, optical antenna, photonics, optical interconnect, nanotechnology, optoelectronics, plasmonics
Researchers	Seth A. Fortuna, Kevin Han, Nicolas Andrade
Abstract	Traditional semiconductor light emitting diodes (LEDs) have low modulation speed because of long spontaneous emission lifetime. Spontaneous emission in semiconductors (and indeed most light emitters) is an inherently slow process owing to the size mismatch between the dipole length of the optical dipole oscillators responsible for light emission and the wavelength of the emitted light. More simply stated: semiconductors behave as a poor antenna for its own light emission. By coupling a semiconductor at the nanoscale to an external antenna, the spontaneous emission rate can be dramatically increased alluding to the exciting possibility of an LED that can be directly modulated faster than the laser. In this project, we plan to demonstrate an antenna- enhanced nanoscale semiconductor light emitting diode (nanoLED) with direct modulation rate >50 GHz, exceeding the bandwidth of the semiconductor laser. Such an nanoLED is well-suited as a light source for on-chip optical communication where small size, fast speed, and high efficiency are needed to achieve the promised benefit of reduced power consumption of on-chip optical interconnect links compared with less efficient electrical interconnect links.
Contact Information	fortuna@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN869 New Project
Project Title	Efficient Waveguide-Coupling of Electrically Injected Optical Antenna Based nanoLED
Status	New
Funding Source	Federal
Keywords	light emitting diode, waveguide coupling, optical antenna
Researchers	Nicolas M. Andrade, Seth A. Fortuna, Kevin Han
Abstract	Optical interconnects require fast and efficient electrically-injected nanoscale light sources that can be coupled efficiently to a low-loss photonic waveguide. The spontaneous emission rate can be increased by coupling the active region of a nanoscale emitter to an optical antenna, which would allow for modulation rates > 50 GHz. The aim of this project is to demonstrate efficient waveguide coupling of an optical antenna to a single mode waveguide.
Contact Information	nicolas_andrade@berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN458
Project Title	Optical Antenna-Based nanoLED
Status	Continuing
Funding Source	Federal
Keywords	Plasmonics, Laser, Light Emitting Diode, Nanophotonics, Nanocavity, Optical Interconnects, Transition Metal Dichalcogenides
Researchers	Kevin Han, Seth Fortuna, Sujay Desai, Matin Amani
Abstract	Spontaneous emission has been considered slower and weaker than stimulated emission. As a result, light-emitting diodes (LEDs) have only been used in applications with bandwidth < 1 GHz. Spontaneous emission is inefficient because the radiating dipole is much smaller than the wavelength and such short dipoles are poor radiators. By attaching an optical antenna to the radiating dipole at the nanoscale, the emission rate can be significantly increased enabling high modulation bandwidths theoretically >100 GHz. This project focuses on the physical demonstration of this new type of nanophotonic device. Current fabrication and experimental results of devices using transition metal dichalcogenides (TMDs) as an emitter material will be presented. Fundamental limits of rate enhancement will also be discussed.
Contact Information	kyh@eecs.berkeley.edu
Advisor	Ming C. Wu, Ali Javey

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN788
Project Title	MEMS-Actuated Grating-based Optical Phased Array for LIDAR
Status	Continuing
Funding Source	Industry
Keywords	Lidar, Optical MEMS, Beamsteering
Researchers	Youmin Wang
Abstract	We aim to integrate the OPA MEMS system into the application of automobile navigation, which is currently primarily dominated by opto-mechanical scanning based systems. Opto-mechanical scanning devices are usually bulky and relatively slow, and cannot provide the steering speeds and versatility necessary for many applications. In drawing from phased array concepts that revolutionized RADAR technology by providing a compact, agile alternative to mechanically steered technology, the OPA based LIDAR program seeks to integrate thousands of closely packed optical emitting facets, precise relative electronic phase control of these facets, and all within a very small form factor. Comparing with other competing LIDAR system, the OPA based LIDAR system will have multiple degrees of freedom for phase control which enables not only agile beam steering but also beam forming and multiple beam generation, greatly expanding the diversity of applications. Traditional optical phased arrays (OPA) are made of liquid crystal phase shifters, piston mirrors, and optical waveguide arrays. The liquid crystal OPA has slow response time. MEMS OPA with piston mirrors has fast response time. However, realization of OPA with large field of view is challenging because it requires small pitch in the phased array. Recently, it was reported that optical phase shift is controlled by moving a grating element in the lateral direction. However, the widths of the phase shifters are limited by the size of the actuators. In this project, the actuators are integrated underneath the diffractive elements so OPA with high fill factor and small pitch can be realized. Such OPA will have large field of view and high optical efficiency.
Contact Information	youmin.wang@berkeley.edu, wu@eecs.berkeley.edu
Advisor	Ming C. Wu

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN872 New Project
Project Title	COMPACT VOLTAGE SENSOR FOR POWER-LINES
Status	New
Funding Source	BSAC Member Fees
Keywords	Power line voltage sensors
Researchers	Duy-Son Nguyen
Abstract	This project is enable to measure of the line-to-line voltages of distribution and transmission power-lines by using very compact and inexpensive sensors that operate at low voltages. On a two-wire power-line the measurement devices are mounted on only one of the lines. The devices can also be applied in open-air power substations and in buildings where high-voltage power-lines, e.g. 12,400 AC Volts, are used.
Contact Information	nguyen.duyson@berkeley.edu, rwhite@berkeley.edu
Advisor	Richard M. White

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN868
Project Title	Self-Cleaning Mass Sensor for Particulate Matter Monitors
Status	New
Funding Source	BSAC Member Fees
Keywords	aerosol, particulate matter, deposition, aerosol resuspension, aerosol speciation, PM2.5, PM10, carbon, dust, pollen, FTIR, IR, soot, spore, bacteria, diesel, FBAR
Researchers	Zhiwei Wu
Abstract	When people inhale small particles, such as soot, they may develop pulmonary, cardiac and neural problems, and millions may die prematurely. Therefore, there is need for widely accessible particulate-matter monitors to enable individuals to avoid areas of high particulate concentration. We propose to test means conceived for cleaning the surfaces of the particle mass-measuring sensors after each particulate deposition, as well as recently reported spectroscopic means for determining the chemical compositions of deposited particles.
Contact Information	zway@berkeley.edu, rwhite@eecs.berkeley.edu, paulwright@ berkeley.edu
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN801
Project Title	ELECTROMAGNETIC ENERGY HARVESTER FOR ATMOSPHERIC SENSORS ON OVERHEAD POWER DISTRIBUTION LINES
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Energy harvester, power system sensors, atmospheric and environmental sensors, overhead power distribution lines
Researchers	Zhiwei Wu
Abstract	The purposes of this project are to develop inexpensive, easily-installed energy harvesters for mounting on overhead or underground power distribution lines in order (1) to power sensors that evaluate and report on the functioning of the power system, and (2) to power co-located environmental sensors, such as particulate-matter monitors and gas sensors, that can transmit their measurements to nearby personal cellphones.
Contact Information	zway@berkeley.edu, rwhite@eecs.berkeley.edu, paulwright@berkeley.edu
Advisor	Richard M. White, Paul K. Wright

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN826
Project Title	Autonomous Flying Microrobots
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	electrohydrodynamics, microrobotics, ionocraft, ion thrust, MAV
Researchers	Daniel S. Drew, Craig Schindler
Abstract	Even as autonomous flying drones enter the mainstream, there has been no strong push for miniaturization by industry. Among the state of the art academic research on pico air vehicles, the majority has focused on biomimetic flight mechanisms (e.g. flapping wings). This project looks to develop a new microfabricated transduction mechanism for flying microrobots with the goal of opening up the application space beyond that allowed by the industry-standard quadcoptor. The proposed mechanism, electrohydrodynamic (EHD) force, functions silently and with no moving parts, directly converting ion current to induced air flow. Microfabricated silicon electrodes are currently being used to create devices with thrust to weight ratios in excess of 15. Microrobots with four individually addressable thrusters have been assembled that mass about 10mg and measure less than 2cm on a side, with the capability of takeoff while tethered to a power supply. Rudimentary attitude control has been shown by selective actuation of two of the four thrusters. Current work is exploring methods to decrease the operating voltage of the robot, improve fabrication and assembly repeatability, and add on-board sensing. Ultimately, integration with a low power control and communications platform will yield a truly autonomous flying microrobot powered by ion thrusters – the ionocraft.
Contact Information	ddrew73@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN873 New Project
Project Title	MEMS Filament Motors
Status	New
Funding Source	BSAC Member Fees
Keywords
Researchers	Craig B. Schindler, Daniel S. Contreras, Joseph T. Greenspun
Abstract	Pushup, walking, jumping, and flying microrobots have been demonstrated. Other previous work has demonstrated microelectromechanical systems (MEMS) capable of creating silicon silk, as well as microrobots capable of assembling millimeter scale carbon fibers. However, microrobots capable of manipulating very small diameter filaments, fibers, and wires initially external to themselves is still an area of open research. We have successfully demonstrated a silicon-on-insulator (SOI) MEMS device pushing a 7 um diameter carbon filament through an adjustable width channel at a speed of 0.2 mm/s. Future applications include a microrobotic spider, an array of individually controllable neural probe implanters, a wound or fabric stitching microrobot, plug-and-play linear servos for paper robots, etc.
Contact Information	craig.schindler@berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN857
Project Title	Miniature Autonomous Rockets
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	MEMS, Inchworm Motors, MAVs
Researchers	Brian G. Kilberg, Daniel Contreras
Abstract	While effective miniature scale rocket motors have been developed, viable control surfaces at that scale do not exist. The goal of this project is to develop the necessary control system and actuators to enable autonomous millimeter to centimeter scale rockets. The proposed rocket control surfaces consist of electrostatic inchworm motors and planar linkages that are fabricated on a silicon-on-insulator wafer. These actuators will be driven by high voltage buffers and will be controlled by an electronic system consisting of a CMOS SOC, an inertial measurement unit, and a CMOS camera. We have developed preliminary simulations for the mechanics and control of the rocket, and we have fabricated the control surface actuators. These actuators were able to produce 1.575 uNm of torque, which corresponds to an equivalent aerodynamic force of 1.4 mN. Currently, we are characterizing the aerodynamic performance of these control surfaces using an integrated silicon strain gauge. We plan to integrate the control surfaces into a small model rocket to demonstrate their functionality.
Contact Information	bkilberg@berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN735
Project Title	Walking Silicon Microrobots
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Microrobotics, electrostatics, actuators, MEMS
Researchers	Daniel Contreras
Abstract	This project focuses on developing a new generation of sub-centimeter MEMS based walking robots. These robots are based on electrostatic actuators driving planar silicon linkages, all fabricated in the device layer of a silicon-on- insulator (SOI) wafer. By using electrostatic actuation, these legs have the advantage of being low power compared to other microrobot leg designs. This is key to granting the robot autonomy through low-power energy harvesting. The ultimate goal will be to join these silicon legs with a CMOS brain, battery power, a high voltage power source, and high voltage buffers to achieve a fully autonomous walking microrobot. Now that we have demonstrated locomotion of a single-legged walking robot through tethered external power, we are shifting our focus to developing a hexapod using a similar actuation scheme. The first generation silicon hexapod will be based on multi- chip assembly using silicon wafer throughole vias and demonstrate a basic dual tripod gait. We have also demonstrated electrostatic inchworm motors capable of actuating a shuttle at 35mm/s. We are also working on a new generation of motors with force generation over 2mN at 65V.
Contact Information	dscontreras@eecs.berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN858
Project Title	Zero Insertion Force MEMS Socket for Microrobotics Assembly
Status	Continuing
Funding Source	Fellowship
Keywords	mems, zif, microassembly, microrobot
Researchers	Hani Gomez, Daniel Contreras, Joseph Greenspun
Abstract	To help resolve the control and power challenges present in developing micro robots, the research focus of this project is the design and development of a ZIF (zero insertion force) MEMS (micro electro mechanical systems) socket. The ultimate goal is to achieve electrical connections between a 65nm single-chip mote and a multi-legged SOI micro robot. As proof of concept, the most recent socket prototype uses previous work on energy storage in springs to grip a MEMS motor chiplet. Both chiplets were fabricated using a two-mask SOI (silicon- on- insulator) process. The socket uses electrical probes to connect to pads on the motor chiplet, providing parallel electrical connection between the two chips. This design demonstrates mechanical connection, and the work also presents first results for the electrical contact resistances. Future work will allow MEMS structures to easily probe the pads of CMOS chips, strongly connecting the two technologies both electrically and mechanically (the connection is designed to withstand 1000s of g’s of vibration). The ZIF socket will provide a smooth and simple approach to the integration of CMOS chips with MEMS structures.
Contact Information	gomezhc@berkeley.edu, dscontreras@berkeley.edu, greenspun@berkeley.edu, ksjp@berkeley.edu
Advisor	Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN744
Project Title	Self-Destructing Silicon
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Joseph Greenspun, Osama Khan, Travis Massey, Brad Wheeler, Ryan Shih
Abstract	Funded under the DARPA Vanishing Programmable Resources (VaPR) program, this project explores the fundamental issues associated with making wireless sensor nodes disappear after achieving an objective. The MEMS Hammer is a micromachined device capable of storing mechanical energy and delivering that energy to a target. It has been used to fracture other microfabricated structures made of silicon and silicon dioxide. The MEMS Hammer is capable of storing a wide range of energies with the upper limit exceeding 10uJ. These devices have been characterized to determine the tradeoffs among energy stored, total stroke, and layout area. The MEMS Hammer is being developed for a variety of applications ranging from creating a self- destructing mote to creating jumping microrobots. A ratcheting system is being developed using electrostatic motors to create a fully automatic self-destruction system.
Contact Information	ksjp@berkeley.edu, brad.wheeler@berkeley.edu, greenspun@eecs.berkeley.edu, oukhan@berkeley.edu, maha
Advisor	Kristofer S.J. Pister, Michel M. Maharbiz

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN803
Project Title	Single Chip Mote
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Osama Khan, David Burnett, Filip Maksimovic, Brad Wheeler
Abstract	The Internet of Things (IoT) is a natural evolution of computing. CMOS technology enabled the network of computers that provided a platform for creating social networks. We are just seeing the early stages of another transition point in technology and entering into a new era where computing, sensing, and communication is essentially becoming disposable. The microsystem serves as a platform that allows us to embed wireless connectivity into everyday objects or serves as a brain for walking and flying microrobots. The lifetime, robustness, profile, and cost of these microsystems play a critical role to enable these emerging applications. Therefore, a single chip mote hardware platform is developed to address these unmet needs from the current existing hardware platforms. The system-on-chip (SoC) is architected from the bottom-up to meet the new use case and performance requirements of energy constrained environments with limited energy capacity e.g. batteryless operation from harvested energy or operation from printed batteries. The project seeks to reduce the active radio power by a factor of 10, reduce the overall system cost and profile of a microsystem by eliminating external components (e.g. crystal frequency reference) that are typically needed for a fully functioning wireless sensor node.
Contact Information	oukhan@berkeley.edu, ksjp@berkeley.edu, brad.wheeler@berkeley.edu, db@eecs.berkeley.edu, fil@eecs.be
Advisor	Kristofer S.J. Pister, Ali M. Niknejad

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN859
Project Title	UHF Channel-Selecting Bandpass Filter
Status	Continuing
Funding Source	Fellowship
Keywords	Filter, resonator, 20nm, gaps, bandpass, frequency, ultra, high, UHF, banks
Researchers	Alain Anton
Abstract	This project aims to use micromechanical resonators with sub-20nm capacitive-transducer electrode- to-resonator gaps to realize banks of channel-selecting bandpass filters at UHF frequencies.
Contact Information	aanto021@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN828
Project Title	Zero Quiescent Power Micromechanical Receiver
Status	New
Funding Source	DARPA
Keywords
Researchers	Alper Ozgurluk, Ruonan Liu
Abstract	This project aims to explore and demonstrate a mostly mechanical receiver capable of listening without consuming any power, consuming power only when receiving valid bits.
Contact Information	ozgurluk@eecs.berkeley.edu, liur@eecs.berkeley.edu, ctnguyen@eecs.berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN814
Project Title	UHF Capacitive-Gap Transduced Resonators With High Cx/Co
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Alper Ozgurluk, Yafei Li
Abstract	The project explores methods by which the Cx/Co of UHF capacitive-gap transduced resonators might be increased to above 5% while maintaining Q's >10,000.
Contact Information	yafeili@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN861
Project Title	Fully Integrated MEMS-Based Super-Regenerative Transceiver
Status	New
Funding Source	DARPA
Keywords
Researchers	Gleb Melnikov
Abstract	This project aims to integrate our previously demonstrated MEMS-Based Super-Regenerative Transceiver in a fully integrated CMOS- MEMS fabrication process.
Contact Information	gmelnikov@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN701
Project Title	Bridged Micromechanical Filters
Status	Continuing
Funding Source	DARPA
Keywords	Micromechanical Filters, High-order Filters,
Researchers	Jalal Naghsh Nilchi
Abstract	The overall project aims to explore the use of bridging between non-adjacent resonators to generate loss poles in the filter response toward better filter shape factor, sharper passband- to-stopband roll-off and better stopband rejection.
Contact Information	jalal.naghsh.nilchi@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN867
Project Title	Fully Integrated CMOS-Metal MEMS Systems
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Kieran A. Peleaux
Abstract	This project aims to integrate metal MEMS resonators directly over CMOS to achieve fully integrated MEMS systems.
Contact Information	kpeleaux@berkeley.edu, ctnguyen@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN865
Project Title	CMOS-Assisted Resoswitch Receivers
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Kyle K. Tanghe
Abstract	This project aims to harness extremely low power CMOS integrated circuits to boost the Q’s of micromechanical resoswitches towards much higher sensitivity resoswitch receivers.
Contact Information	tanghek@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN866
Project Title	Wide-Bandwidth UHF Bandpass Filters
Status	New
Funding Source	DARPA
Keywords	UHF, Wideband, Filter
Researchers	Qianyi Xie
Abstract	This project aims to use micromechanical resonators with sub-20nm capacitive-transducer electrode-to- resonator gaps to realize wide-bandwidth bandpass filters at UHF frequencies.
Contact Information	qianyi_xie@berkeley.edu, ctnguyen@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN864
Project Title	Micromechanical Resonator Waveform Synthesizer
Status	New
Funding Source	DARPA
Keywords
Researchers	Thanh-Phong Nguyen
Abstract	This project aims to demonstrate a waveform synthesizer using multiple micromechanical resonator oscillators with outputs combined.
Contact Information	thanhphong_nguyen@berkeley.edu
Advisor	Clark T.-C. Nguyen

 

Document Top Table of Projects	Package, Process & Microassembly
Project ID	BPN354
Project Title	The Nanoshift Concept: Innovation through Design, Development, Prototyping and Fabrication of MEMS, Microfluidics, Nano- and Clean Technologies
Status	Continuing
Funding Source	Industry
Keywords	Nanoshift, nanolab, microlab, process, recharge, commercial
Researchers	Ning Chen, Salah Uddin
Abstract	Nanoshift LLC is a privately held research and development company specializing in MEMS, microfluidics, and nanotechnologies. Nanoshift provides high quality, customizable services for device and process design, research and development, rapid prototyping, low-volume fabrication, and technology transfer into high volume. Projects are typically from industry, government, and academia. Nanoshift is the solution for your device concept-to- commercialization needs. Nanoshift collaborates with BSAC to make industry-leading development resources available for all BSAC Industrial Members, while improving BSAC's visibility and funding.
Contact Information	reception@bsac.eecs.berkeley.edu
Advisor	Michael D. Cable

 

Document Top Table of Projects	Micropower
Project ID	BPN874 New Project
Project Title	Charge Pumping with Finger Capacitance for Body Energy Harvesting
Status	New
Funding Source	Foundation
Keywords	energy harvesting, charge pumping, electrostatic, body capacitance
Researchers	Alyssa Y. Zhou
Abstract	We propose a touch interrogation powered energy harvesting system which transforms the kinetic energy of a human finger to electric energy. As is well known for touch display devices, the proximity of a finger can alter the effective value of small capacitances. We utilize these capacitance changes through a harvesting circuit to charge a capacitor with each finger tap. This technology illustrates the ability to communicate with and operate low-power sensors with motions already used for interfacing to devices.
Contact Information	alyssa.zhou@berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN718
Project Title	Direct Electron-Mediated Control of Hybrid Multi-Cellular Robots
Status	Continuing
Funding Source	Office of Naval Research (ONR)
Keywords	microbiorobotics, synthetic biology, biosensors, hybrid biological systems, bacterial electrophysiology
Researchers	Alyssa Y. Zhou, Tom J. Zajdel
Abstract	We propose a millimeter-scale, programmable cellular-synthetic hybrid sensor node capable of sensing and response in aqueous environments. This will be the first demonstration of a millimeter-scale synthetic autonomous multi-cellular hybrid with organic and man-made components. We have successfully developed a miniaturized bioelectronic sensing system (BESSY) including a centimeter-scale, two-channel, three-electrode potentiostat and a custom-fabricated, submersible, self-contained miniaturized reactor (m-reactor). The BESSY is capable of in-situ sensing of specific chemicals among environmental perturbations using differential current measurement.
Contact Information	alyssa.zhou@berkeley.edu, zajdel@eecs.berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN853
Project Title	Tethered Bacteria-Based Biosensing
Status	Continuing
Funding Source	Office of Naval Research (ONR)
Keywords	biosensing, bacterial chemotaxis, bacterial flagellar motor, microbiorobotics
Researchers	Tom J. Zajdel
Abstract	Though the chemotaxis sensing system of emph{Escherichia coli} is known to approach fundamental physical limits for biosensing, few attempts have been made to co-opt the system as the front end for a biohybrid sensor. We propose a biohybrid sensor that monitors chemotactic bacterial flagellar motor (BFM) rotation speed and direction to infer analyte concentration for a low-power, fast, and sensitive response. We present the design and fabrication of a four point impedimetric array that uses current injection electrodes to circumvent electrode polarization screening, enabling solution resistance monitoring within a four-micron by four-micron region. We also demonstrate the first lithographically patterned silica shaft encoders for the BFM, which utilize localized biotin-avidin chemistry to selectively bind to the BFM and encode rotation. When these two components are integrated by bringing the rotating shaft encoders in proximity to the microelectrode array, they will enable an electrochemical method for observing the BFM. Such an impedance-based biohybrid sensor obviates the need for a microscope and in principle may be multiplexed and scaled to large arrays of BFMs, enabling the development of deployable low-power and fast sensing systems that directly observe the BFM to infer analyte concentration.
Contact Information	zajdel@eecs.berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN765
Project Title	Full-Field Strain Sensor for Hernia Mesh Repairs
Status	Continuing
Funding Source	NSF
Keywords	strain
Researchers	Amy Liao
Abstract	Each year, more than 400,000 ventral hernia repairs are performed in the United States. A hernia is the protrusion of an organ through a weak spot in the surrounding muscle or connective tissue that normal contains it. Large ventral hernias (hernias that occur in the abdominal wall) are typically treated by suturing in a surgical mesh to cover and overlap the hernia defect. The surgical mesh provides additional support to the damaged tissue surrounding the hernia. However, in 25-40% of patients, the hernia repair fails, resulting in recurrence of the hernia, along with other complications including infection and intestinal obstruction. We hypothesize that a major cause of hernia recurrence is the unequal distribution of stress across the mesh resulting in high stress concentrations at the tissue-mesh interface, particularly at the site of mesh fixation to the abdominal wall muscles. Over time the mesh is pulled away from the abdominal wall at the high stress concentrations and the hernia defect recurs. We propose to design a biocompatible, instrumented patch, capable of mapping the 2D strain topography placed on the mesh. The sensor will enable surgeons to actively identify and address areas of high stress during the surgery by modifying the surgical procedure to redistribute stress more evenly, thus decreasing the rate of hernia recurrence. Furthermore, our long term goal is to design a hernia mesh that contains strain sensors that once implanted in the body the prosthetic can noninvasively alert patients when they are engaging in activities that place high stress on the implant. Such a dynamic, interactive hernia mesh would empower patients to actively participate in their post-operative care in a way that is personalized and unprecedented in surgery.
Contact Information	amy.liao@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN714
Project Title	Impedance Sensing Device to Monitor Pressure Ulcers
Status	Continuing
Funding Source	NSF
Keywords	Wound Healing, Impedance Spectroscopy
Researchers	Amy Liao, Monica C. Lin
Abstract	Chronic cutaneous wounds affect millions of people each year and take billions of dollars to treat. Formation of pressure ulcers is considered a "never event" - an inexcusable, adverse event that occurs in a healthcare setting. Current monitoring solutions (pressure-distributing beds, repositioning patients every few hours, etc) are very expensive and labor intensive. In response to this challenge, we are developing a novel, flexible monitoring device that utilizes impedance spectroscopy to measure and characterize tissue health, thus allowing physicians to objectively monitor progression of wound healing as well as to identify high-risk areas of skin to prevent formation of pressure ulcers. Previous studies that examined the dielectric response of cell suspensions and tissues have identified several distinct dispersions associated with particular molecular-level processes that can be used to distinguish between tissue types. We are utilizing impedance spectroscopy to detect subtle changes in tissue, enabling objective assessment and providing a unique insight into the condition of a wound. Wireless capability can be implemented to allow for continuous, remote monitoring.
Contact Information	amy.liao@berkeley.edu, monica.lin@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN780
Project Title	Impedance Spectroscopy to Monitor Fracture Healing
Status	Continuing
Funding Source	NSF
Keywords
Researchers	Monica C. Lin
Abstract	An estimated 15 million fracture injuries occur each year in the United States. Of these, 10% of fractures result in delayed or non-union, with this number rising to 46% when they occur in conjunction with vascular injury. Current methods of monitoring include taking X-rays and making clinical observations. However, radiographic techniques lag and physician examination of injury is fraught with subjectivity. No standardized methods exist to assess the extent of healing that has taken place in a fracture, revealing the need for a diagnostic device that can reliably detect non-union in its early pathologic phases. Electrical impedance spectroscopy has been used to characterize different tissues, and we hypothesize that this technique can be applied to fractures to distinguish between the various types of tissue present in the clearly defined stages of healing. We are developing an objective measurement tool that utilizes impedance spectroscopy to monitor fracture healing, with the goal of providing physicians with more information that can resolve the initial stages of fracture healing. This would enable early intervention to prevent problem fractures from progressing to non-union.
Contact Information	monica.lin@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN844
Project Title	Wireless Sub-Millimeter Temperature Sensor for Continuous Temperature Monitoring in Tissue
Status	Continuing
Funding Source	DARPA
Keywords	Sensor, wireless, monitoring, biomedical, chronic, implant, temperature, thermometer, ultrasound, backscatter
Researchers	B. Arda Ozilgen
Abstract	We demonstrate a tetherless, sub-millimeter implantable temperature sensing system employing ultrasonic powering and ultrasonic backscatter modulation assembled using commercially available components. We have demonstrated two sizes of sensors based on available components with volumes of 1.45 mm3 and 0.118 mm3. Individual sensors are able to resolve ±0.5 °C changes in temperature, suitable for medical diagnostic and monitoring purposes. We have demonstrated less than 0.3 °C drift in temperature readings over 14 days in physiological temperature conditions. Our goal is to solve a long-standing issue: chronically and tetherlessly monitoring deep tissue temperature.
Contact Information	arda.ozilgen@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN816
Project Title	Cytokine Fast Detection
Status	Continuing
Funding Source	DARPA
Keywords	Ion concentration polarization, ultrafast enrichment
Researchers	Bochao Lu
Abstract	Sepsis is a life-threatening condition both in civilian and military medical scenarios. Patients with sepsis usually exhibit a vigorous systemic release of cytokines such as interleukin-1 (IL-1), interleukin-6 (IL-6) and tumor necrosis factor (TNF) into serum. The ability to monitor relative cytokine levels continuously at fast time scales (tens of minutes) could open the door to closed-loop, patient-specific sepsis management therapies. The current methods of cytokine detection take hours and cost thousands of dollars because the physiological concentration is so low around femtomolar. At such low concentrations, the limiting factor becomes mass transport instead of binding kinetics, due to increased diffusion length from bulk solution to sensor surface. We present a method, based on nanofabrication and ion concentration polarization (ICP) which enriches analytes using only a DC power supply.
Contact Information	steven_lu@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN716
Project Title	Ultrasonic Wireless Implants for Neuro-Modulation
Status	Continuing
Funding Source	DARPA
Keywords	brain-machine interfaces, ultrasonic energy transfer and harvesting, backscatter communication
Researchers	Konlin Shen, David Piech, B. Arda Ozilgen
Abstract	A major hurdle in brain-machine interfaces (BMI) is the lack of an implantable neural interface system that remains viable for a substantial fraction of a primate lifetime. Recently, sub-mm implantable, wireless electromagnetic (EM) neural interfaces have been demonstrated in an effort to extend system longevity. However, EM systems do not scale down in size well due to the severe inefficiency of coupling radio waves at mm and sub-mm scales. We propose an alternative wireless power and data telemetry scheme using distributed, ultrasonic backscattering systems to record high frequency (~kHz) neural activity. Such systems will require two fundamental technology innovations: 1) thousands of 10 – 100 um scale, free- floating, independent sensor nodes, or neural dust, that detect and report local extracellular electrophysiological data via ultrasonic backscattering, and 2) a sub-cranial ultrasonic interrogator that establishes power and communication links with the neural dust. To test the feasibility of this approach, we performed the first in-vivo experiments in the rat model, where we were able to recover mV-level action potential signals from the peripheral nerves. Further miniaturization of implantable interface based on ultrasound would pave the way for both truly chronic BMI and massive scaling in the number of neural recordings from the nervous system.
Contact Information	konlin@berkeley.edu, piech@berkeley.edu, arda.ozilgen@berkeley.edu, maharbiz@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	BioMEMS
Project ID	BPN795
Project Title	An Implantable Micro-Sensor for Cancer Surveillance
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	prostate cancer, beta radiation, Solid-state detectors, Low noise, CMOS, Imaging
Researchers	Stefanie V. Garcia, Kyoungtae Lee
Abstract	We aim to develop a micro surveillance device for early identification of cancerous cell growth in collaboration with radiation oncology research from UCSF. UCSF will develop a molecular probe that specifically targets prostate specific membrane antigen (PSMA), which is over-expressed on prostate cancer cells. By radiolabelling these probes, cancer sites may be monitored in conjunction with an implantable array. We will design a 100x100 um semiconductor radiation sensor that can feasibly detect and localize cancer recurrence from 10^4 – 10^5 cells when placed near a cancer site. The sensors will use ultrasonic methods for power and signal transmission, as demonstrated in Dongjin et al, arXiv preprint arXiV:1307.2196 (2013). Initial sensor design will enhance CMOS device sensitivity to time dependent signal variation and will also explore signal recovery in the limited biological window where the radiolabelled probe is detectable.
Contact Information	stefanievgarcia@berkeley.edu
Advisor	Michel M. Maharbiz

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN848
Project Title	Highly Integrated, Compact Wearable Ultrasound System for Chronic Biosensing
Status	Continuing
Funding Source	DARPA
Keywords	ultrasound, low-power, wearable, biosensing, neural dust
Researchers	David Piech, Josh Kay
Abstract	Recent advances in low-power ultrasonics have enabled highly integrated, compact ultrasound systems. In addition, new ultrasonic biosensing modalities for chronic sensing native of tissue or communicating with implanted sensor nodes motivate the need for a wearable ultrasound system. Here, we integrate a low-power, high-voltage transducer driver (Tang, 2015), into a highly compact wearable device designed to unobtrusively provide continuous ultrasound monitoring of subject biometrics. We demonstrate its capability by interfacing with one type of ultrasonic backscatter dust mote, the Neural Dust mote (Seo, 2016).
Contact Information	piech@berkeley.edu, j_kay@berkeley.edu
Advisor	Michel M. Maharbiz, Bernhard E. Boser

 

Document Top Table of Projects	BioMEMS
Project ID	BPN573
Project Title	Fabrication and Microassembly of a High-Density Carbon Fiber Neural Recording Array
Status	Continuing
Funding Source	DARPA
Keywords	carbon fiber microelectrode electrode array electrophysiology chronic stimulation recording high density
Researchers	Travis L. Massey, Jason F. Hou
Abstract	We present a 32-channel carbon fiber monofilament-based intracortical neural recording array fabricated through a combination of bulk silicon microfabrication processing and microassembly. This device represents the first truly two-dimensional carbon fiber neural recording array. The five-micron diameter fibers are spaced at a pitch of 38 microns, four times denser than the state of the art one-dimensional arrays. The fine diameter of the carbon fiber microwires affords both minimal cross-section and nearly three orders of magnitude greater lateral compliance than standard tungsten microwires. Both of these serve to minimize the adverse biological response to implanted devices, particularly compared to conventional implantable microelectrodes. The electrode pitch, in turn, has the potential to enable localization of individual units by detection at multiple adjacent sites, something traditionally the domain of polytrodes. The density, channel count, and size scale of this array are enabled by a microfabricated silicon substrate and a out-of-plane microassembly technique in which individual fibers are inserted through metallized and isotropically conductive adhesive-filled holes in the oxide-passivated silicon substrate. Insertion is eased and the fibers aligned to within five milliradians using an array of microfabricated funnels. The device is insulated in parylene for biocompatibility and electrical isolation, and the recording sites are electroplated with PEDOT:PSS to an impedance on the order of tens of kiloohms at 1 kHz. Further, this fabrication technique is scalable to a larger number of electrodes and allows for the potential future integration of microelectronics.
Contact Information	tlmassey@eecs.berkeley.edu
Advisor	Michel M. Maharbiz, Kristofer S.J. Pister

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN871 New Project
Project Title	An Ultrasonic Implantable for Continuous In Vivo Monitoring of Tissue Oxygenation
Status	New
Funding Source	Foundation
Keywords
Researchers	Soner Sonmezoglu
Abstract	Our group previously demonstrated a “neural dust” system for neural recording which includes an implantable device and external ultrasonic transducers to power and communicate with the implantable. In this work, we extend that paradigm, demonstrating an implantable that can measure and report tissue oxygenation. Oxygenation state is a key parameter when assessing the metabolic state of cells and tissues, tissue and organ viability, tumor state, among many examples in both basic science and clinical care. Various types of methods for the detection of oxygen have appeared in recent years, including the Clark electrode, Winkler titration, and optical sensing. Among these, there is a growing interest in optical sensors for use in consumer electronic devices because they possess advantages of (a) fast response, (b) high sensitivity, (c) good precision and accuracy, (d) lack of oxygen consumption during measurements, (e) ease of miniaturization, (f) low cost, and (g) enabling in vivo, non-invasive and real- time measurements. In this project, we aim to develop a miniaturized oxygen sensor system consisting of a micro-light emitting diodes (LEDs) for optical excitation, bio- compatible thin-film for encapsulation of an oxygen-sensitive fluorophore, ultrasonic transducer for wireless communication and wireless powering of the implantable device, and single-chip CMOS integrated circuit for optical detection and signal processing. The sensor system determines oxygen level utilizing the fluorescence lifetime of a fluorophore, which is a function of the oxygen concentration of the thin film that is influenced by the surrounding environment.
Contact Information	ssonmezoglu@berkeley.edu
Advisor	Michel M. Maharbiz, Mekhail Anwar

 

Document Top Table of Projects	BioMEMS
Project ID	BPN884 New Project
Project Title	Anisotropic Proton Transport in Artificially Aligned Collagen Fiber
Status	New
Funding Source	Foundation
Keywords	anisotropic proton transport, nematic
Researchers	Doyeon Bang
Abstract	Proton transportation is ubiquitous in biological signaling as well as enabled a broad range of modern device components. However, proton conductor using tunable, controllable and mass producible biological material is not yet developed for in vivo application to interface biological system. Here, we demonstrate anisotropic proton transport in the artificially aligned collagen fiber network, which is mimicking the nematic structure of the muscle fiber to show that aligned collagen can assist biological signaling as a protonic highway. Artificially aligned nematic collagen fiber network is synthesized by “grow-and-snap” method, which produces >94.2% of collagen fiber is aligned along the fluid streamline (± 10ş), and >82.3% of collagen fibril is aligned along the direction of the fiber (± 10ş). We demonstrate that proton conduction in nematic collagen network is Grotthuss hopping along the backbone of tropocollagen chain according to the measurement of the activation energy of the proton transportation (~ 0.19 eV) and proton conduction along the tropocollagen chain result in the surface-charge mediated two-dimensional transport, which is generally observed in the nanofluidic channels. According to the fiber orientation dependent proton conduction measurement, anisotropic proton transportation is found due to the structural anisotropy and horizontally aligned collagen fiber network exhibited higher conductance over vertically aligned collagen fiber. The understanding of the mechanism of collagen assistance to proton transport may build up a theoretical basis for further development of therapy method to cure wound-induced proton-transfer disability.
Contact Information	doyeonbang@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	BioMEMS
Project ID	BPN829
Project Title	Integrated Multiplexed Optical Microfluidic System (iMOMs) for Dengue Diagnosis
Status	Continuing
Funding Source	Fellowship
Keywords	Diagnostics, Dengue, qPCR, immunoassay, multiplexed detection
Researchers	Jong-Hwan Lee, Jun Ho Son
Abstract	Dengue is an endemic viral disease that affects tropical and subtropical areas. It is estimated that more than 50 million infections occur worldwide per year. Due to its lack of pathognomonic clinical features, dengue is often mistakenly diagnosed as other febrile diseases, which thus leads to ineffective and costly overtreatment. Previously developed diagnostic tests for dengue can only detect a single biomarker (or two to three kinds of targets) at a time and they also lack comprehensive and syntagmatic analysis between various dengue-specific biomarkers. For an effective and precision diagnostics of dengue infection, a diagnostic test should not only be highly sensitive and specific, but also determine dengue virus serotype and distinguish between primary and secondary infection. This can only be accomplished by developing a multiplexed test that covers multiple targets. Here we present an integrated multiplexed optical microfluidic system (iMOMs) with the detection capability of four different nucleic acids biomarkers and five different protein biomarkers (i.e. NS-1, IgM, IgG, IgA, and IgE) on chip. We design, simulate, and fabricate the iMOMs using polymer microfluidic substrates. We integrate biological printing technology with the microfluidic device technology. We demonstrate multiplexed dengue specific- nucleic acid amplifications and immunoassays. The iMOMs will be an ideal dengue diagnostic platform for both developed and developing countries and can be applied to give accurate and ultra-sensitive point-of- care diagnoses for other intractable diseases as well.
Contact Information	jonghwanlee@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN809
Project Title	Photonic Cavity Bioreactor for High-throughput Screening of Microalgae
Status	Continuing
Funding Source	Foundation
Keywords	biofuel, microalgae, bioenergy, bioreactor, high-throughput screening, photonic cavity
Researchers	Minsun Song, SoonGweon Hong
Abstract	Algal photosynthesis is considered to be a sustainable, alternative and renewable solution to generating green energy. For high-productivity algaculture in diverse local environments, a high-throughput screening method is needed in selecting algal strains from naturally available or genetically engineered strains. Herein, we present an integrated plasmonic photobioreactor for rapid, high-throughput screening of microalgae. Our 3D nanoplasmonic optical cavity-based photobioreactor permits the amplification of selective wavelength favorable to photosynthesis in the cavity. The hemispheric plasmonic cavity allows to promote intercellular interaction in the optically favorable milieu and also permits effective visual examination of algal growth. Using Chlamydomonas reinhardtii, we demonstrated 2 times of enhanced growth rate and 1.5 times of lipid production rate with no distinctive lag phase. By facilitating growth and biomass conversion rates, the integrated microalga analysis platform (iMAP) will serve as rapid microalgae screening platforms for biofuel applications.
Contact Information	sms1115@berkeley.edu
Advisor	Luke P. Lee

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN881 New Project
Project Title	Strain-engineered growth of two-dimensional materials
Status	New
Funding Source	Federal
Keywords
Researchers	Geun Ho Ahn, Matin Amani
Abstract	The application of strain to semiconductors allows for controlled modification of their band- structure. This principle is employed for the manufacturing of devices ranging from high-performance transistors to solid-state lasers. Traditionally, strain is typically achieved via growth on lattice- mismatched substrates. For two-dimensional (2D) semiconductors, this is not feasible as they typically do not interact epitaxially with the substrate. Here, we demonstrate controlled strain engineering of 2D semiconductors during synthesis by utilizing the thermal coefficient of expansion (TCE) mismatch between the substrate and semiconductor. Using WSe2 as a model system, we demonstrate stable built-in strains ranging from 1% tensile to 0.2% compressive on substrates with different TCE. Consequently, we observe dramatic modulation of the band-structure, manifested by a strain-driven indirect-to-direct bandgap transition and brightening of the dark exciton in bilayer and monolayer WSe2, respectively. The growth method developed here should enable flexibility in design of more sophisticated devices based on 2D materials.
Contact Information	gnoahn.int@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN818
Project Title	Fully-Integrated Wearable Sensor Arrays for Multiplexed In Situ Perspiration Analysis
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Sweat, biosensors, system integration, wearable devices, flexible electronics
Researchers	Hnin Y.Y. Nyein, Wei Gao, Mallika Bariya
Abstract	A flexible and wearable microsensor array is described for simultaneous multiplexed monitoring of heavy metals in human body fluids. Zn, Cd, Pb, Cu, and Hg ions are chosen as target analytes for detection via electrochemical square wave anodic stripping voltammetry (SWASV) on Au and Bi microelectrodes. The oxidation peaks of these metals are calibrated and compensated by incorporating a skin temperature sensor. High selectivity, repeatability, and flexibility of the sensor arrays are presented. Human sweat and urine samples are collected for heavy metal analysis, and measured results from the microsensors are validated through inductively coupled plasma mass spectrometry (ICP-MS). Real-time on-body evaluation of heavy metal (e.g., zinc and copper) levels in sweat of human subjects by cycling is performed to examine the change in concentrations with time. This platform is anticipated to provide insightful information about an individual’s health state such as heavy metal exposure and aid the related clinical investigations.
Contact Information	hnyein@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN770
Project Title	Chemical Sensitive Field Effect Transistor (CS-FET)
Status	Continuing
Funding Source	NSF
Keywords	CS-FET, Gas Sensor, microfabrication, TMO
Researchers	Hossain M. Fahad
Abstract	Silicon IC-based fabrication processing will be used to develop novel compact gas sensors that, unlike current sensors, will operate at room temperature, consume minimal power, exhibit superior sensitivity, provide chemical selectivity and multi-gas detection capabilities, and offer the prospect of very low-cost replication for broad-area deployment. We name this device structure “Chemical Sensitive FET” or “CS-FET.” The operation of the CS-FET involves transistor parametric differentiation under influence of differentiated gas exposures.
Contact Information	hossain.fahad@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN883 New Project
Project Title	Microchannel contacting of crystalline silicon solar cells
Status	New
Funding Source	Federal
Keywords	Solar cells, Microchannels
Researchers	James Bullock, Mark Hettick
Abstract	There is tremendous interest in reducing losses caused by the metal contacts in silicon photovoltaics, particularly the optical and resistive losses of the front metal grid. One commonly sought after goal is the creation of high aspect-ratio metal fingers which provide an optically narrow and low resistance pathway to the external circuit. Currently, the most widely used metal contact deposition techniques are limited to widths and aspect-ratios of ~40 μm and ~0.5, respectively. In this study, we introduce the use of a micropatterned polydimethylsiloxane encapsulation layer to form narrow (~20 μm) microchannels, with aspect-ratios up to 8, on the surface of solar cells. We demonstrate that low temperature metal pastes, electroless plating and atomic layer deposition can all be used within the microchannels. Further, we fabricate proof-of- concept structures including simple planar silicon heterojunction and homojunction solar cells. While preliminary in both design and efficiency, these results demonstrate the potential of this approach and its compatibility with current solar cell architectures.
Contact Information	james.bullock@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN704
Project Title	Vapor-Liquid-Solid Growth of Polycrystalline Indium Phosphide Thin Films on Metal
Status	Continuing
Funding Source	Federal
Keywords	Solar Cells, Photovoltaics, Indium Phosphide, InP, VLS, Thin Film
Researchers	Mark Hettick
Abstract	Here, we develop a technique that enables direct growth of III-V materials on non- epitaxial substrates. Here, by utilizing a planar liquid phase template, we extend the VLS growth mode to enable polycrystalline indium phosphide (InP) thin film growth on Mo foils.
Contact Information	mark.hettick@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN879 New Project
Project Title	A wearable impedance-based microfluidic sensor for sweat rate monitoring
Status	New
Funding Source	BSAC Member Fees
Keywords
Researchers	Li-Chia Tai
Abstract	A flexible and wearable sensor is presented for real-time monitoring of localized perspiration rate of human subjects. These sweat rate measurements are validated through controlled syringe pumping and a commercial sweat collector. Real- time on-body perspiration rate evaluation of human subjects is performed through cycling experiments to examine the change in sweat rate with different power output. Since it has been shown that the concentrations of a large number of sweat biomarkers are strongly related to the variation of a subject’s perspiration rate, this platform is anticipated to facilitate an accurate analysis of sweat biomarkers and provide insightful information regarding an individual’s health state.
Contact Information	j.tai@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN822
Project Title	Monolayer Semiconductor Optoelectronics
Status	Continuing
Funding Source	Federal
Keywords
Researchers	Matin Amani, Der-Hsien Lien
Abstract	While two dimensional (2D) semiconductors show great promise for optoelectronic applications, due to a myriad of highly attractive properties which cannot be readily achieved in traditional III-V systems, to date they have shown tremendously poor photoluminescence quantum yield (QY). High QY is a requirement for materials used in key optoelectronic devices such as LEDs, lasers, and solar cells, since it determines the efficiency of light emission. Traditional three-dimensional materials like GaAs require lattice matched cladding layers to obtain high QY, on the other hand 2D materials which have naturally terminated surfaces should be able to exhibit near-unity QY provided that there are no defects in the crystal. To this end, we have recently demonstrated that through chemical treatments with an organic superacid the defect sites on the surface of MoS2, the prototypical 2D material, can be passivated. Solution based treatment of defects is especially effective in monolayer semiconductors since the entire "bulk" of the semiconductor is also the surface. As a result, the QY can be enhanced from less than 1% to over 95% in micromechanically exfoliated MoS2. In this project we seek to expand this treatment to other 2D material systems and 2D materials grown by chemical vapor deposition, as well as realize light emitting devices based on perfect optoelectronic monolayers.
Contact Information	mamani@berkeley.edu, ajavey@berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN862
Project Title	MoS2 Transistors with 1-Nanometer Gate Lengths
Status	Continuing
Funding Source	Federal
Keywords	MoS2, 1-nanometer gate, TMDC, scaling
Researchers	Sujay B. Desai
Abstract	MoS2 transistors with a 1-nm physical gate length using a single-walled carbon nanotube as the gate electrode are demonstrated. These ultrashort devices exhibit excellent switching characteristics with near ideal subthreshold swing ~65 millivolts per decade and an On/Off current ratio ~10^6. Simulations show an effective channel length of ~3.9 nm in the Off-state and ~1 nm in the On-state. The work here provides new insight into the ultimate scaling of gate lengths for a FET by surpassing the 5 nm limit often associated with Si technology. Future work involves improving the performance of these transistors and investigating the properties of other materials like Si at short gate-lengths.
Contact Information	sujaydesai@eecs.berkeley.edu
Advisor	Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN608
Project Title	FM Gyroscope
Status	Continuing
Funding Source	DARPA
Keywords	gyroscope, fm gyroscope, scale factor, bias stability, calibration
Researchers	Burak Eminoglu, Kaveh Gharehbaghi
Abstract	MEMS gyroscopes for consumer devices, such as smartphones and tablets, suffer from high power consumption and drift which precludes their use in inertial navigation applications. Conventional MEMS gyroscopes detect Coriolis force through measurement of very small displacements on a sense axis, which requires low-noise, and consequently high-power, electronics. The sensitivity of the gyroscope is improved through mode-matching, but this introduces many other problems, such as low bandwidth and unreliable scale factor. Additionally, the conventional Coriolis force detection method is very sensitive to asymmetries in the mechanical transducer because the rate signal is derived from only the sense axis. Parasitic coupling between the drive and sense axis introduces unwanted bias errors which could be rejected by a perfectly symmetric readout scheme. This project develops frequency modulated (FM) gyroscopes that overcome the above limitations. FM gyroscopes also promise to improve the power dissipation and drift of MEMS gyroscopes. We present results from a prototype FM gyroscope with integrated CMOS readout electronics demonstrating the principle.
Contact Information	eminoglu@eecs.berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN852
Project Title	Frequency to Digital Converter for FM Gyroscopes
Status	Continuing
Funding Source	DARPA
Keywords	Frequency to Digital Converters, FM Gyroscope
Researchers	Kaveh Gharehbaghi, Burak Eminoglu
Abstract	Frequency modulated (FM) gyroscopes are a new class of inertial sensors which measure the angular rotation rate. They offer several advantages including accurate scale factor, large dynamic range, and robust performance over temperature variation. The frequency of the output signal should be detected precisely to extract the slight frequency variations in modulated signal. This research focuses on the design of high-resolution frequency to digital converters (FDC) as an interface for FM gyroscopes. The key specifications which should be optimized are noise, dynamic range, and power consumption. The design procedure can be outlined as circuit level verification and system level optimization.
Contact Information	kaveh@berkeley.edu
Advisor	Bernhard E. Boser

 

Document Top Table of Projects	BioMEMS
Project ID	BPN685
Project Title	Real-Time Intraoperative Fluorescence Imager for Microscopic Residual Tumor in Breast Cancer
Status	Continuing
Funding Source	ASCO, DoD, and Mary Kay Foundation
Keywords	cancer, fluorescence imaging, radiation, surgery, breast cancer, oncology
Researchers	Efthymios P. Papageorgiou
Abstract	Successful treatment of early stage cancer depends on the ability to resect both gross and microscopic disease, yet no method exists to identify residual cancer cells intraoperatively. This is particularly problematic in breast cancer, where microscopic residual disease can double the rate of cancer returning, from 15% to 30% over 15 years, affecting a striking 37,500 women annually. Currently, residual disease can only be identified by examining excised tumor under a microscope, visualizing tumor cells stained with specific tumor markers. This microscopic evaluation restricts identification of tumor cells to the post-operative setting. Unfortunately, traditional optics cannot be scaled to the sub-centimeter size necessary to fit into the cavity and be readily manipulated over the entire surface area. To solve this problem, we have developed an imaging strategy that forgoes external optical elements for focusing light and instead uses angle-selective gratings patterned in the metal interconnect of a standard CMOS process.
Contact Information	epp@berkeley.edu
Advisor	Bernhard E. Boser, Mekhail Anwar

 

Document Top Table of Projects	BioMEMS
Project ID	BPN882 New Project
Project Title	An Ultra-Thin Molecular Imaging Skin for Intraoperative Cancer Detection Using Time-Resolved CMOS Sensors
Status	New
Funding Source	ASCO, DoD, and Mary Kay Foundation
Keywords
Researchers	Hossein Najafiaghdam
Abstract	Successful treatment of cancer requires targeted and individualized treatment, and subsequently an assessment of the state of the tumor being examined, both gross and microscopic, however oncologists have no method of identifying microscopic tumor in the patient.  This results in tumor cells being left behind in patients undergoing surgery. Currently, the only way to determine the presence of any microscopic residual is to examine the excised tumor, stained with a proper marker, under a microscope, which only adds to the complexity and length of the surgery and treatment. The two current alternatives in these cases  are either to do a more expanded resection, causing more healthy cells to be removed as well in the process, or to simply estimate the residual disease to be negligible and risk a recurrence of the cancer. The modern biomarkers and staining of the cancer cells are sufficiently reliable to be detectable, nevertheless, they still need bulky focusing optics and high performance optical filters and as a result incompatible with the minimally invasive oncologic procedures of imaging small tumor cavities in surgical operations. Our solution brings the tools of pathology into the operation room (OR) and the tumor itself allowing to visualize and examine the tumor bed in real-time and alleviating the need for further operations in the future. This work takes advantage of the unique feature of the biomarker being used, enabling them to be excited at near- infrared (NIR) wavelengths and thanks to Silicon’s optical features, we can leverage its optical properties in the NIR range with a time-gated approach, to eliminate the need for optical equipment during the imaging process. As a result, we can almost effortlessly provide real-time information on the presence of potential residual disease in the patient during surgery and provide a direct visualization of microscopic tumor residuals in the patient to allow for a guided resection and a targeted treatment.
Contact Information	hossein_najafi@berkeley.edu
Advisor	Bernhard E. Boser, Mekhail Anwar

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN875 New Project
Project Title	Transfer-Free Synthesis of Graphene on Insulating Substrates
Status	New
Funding Source	Industry
Keywords	graphene, synthesis, CVD
Researchers	Leslie L. Chan, Dung-Sheng Tsai
Abstract	Graphene has become one of the pinnacles of nanomaterials research, touted for its manifold applications and potential as “the next silicon” in electronics. At this time, integrated production of graphene-based devices remains a barrier, requiring a process that is reliable, large-scale, and compatible with conventional fabrication approaches. One common method for graphene synthesis is chemical vapor deposition (CVD) on metal substrates, which requires a transfer step to target materials (e.g., insulating substrates for device applications). However, this extra transfer step often leads to wrinkles, contamination, and breakage that can lead to poor device performance. This project seeks to devise a robust method for growing high-quality, wafer-scale, mono/bi-layer graphene directly on insulating substrates such as SiO2, enabling efficient and coherent incorporation of graphene for next-generation devices.
Contact Information	leslie.chan@berkeley.edu
Advisor	Roya Maboudian

 

Document Top Table of Projects	NanoPlasmonics, Microphotonics & Imaging
Project ID	BPN878 New Project
Project Title	Super-resolution synthesis of nontrivial heterogeneous nanoparticles assisted by surface plasmons
Status	New
Funding Source	Fellowship
Keywords	plasmonic, superresolution, colloidal chemistry
Researchers	Arthur O. Montazeri
Abstract	Project title: Super-resolution synthesis of nontrivial heterogeneous nanoparticles assisted by surface plasmons Abstract: Colloidally produced nanoparticles are emerging as a solution for a variety of applications such as quantum dots, sensing, and functionalized targeted cell therapy. However, the thermodynamically driven process of their fabrication poses several constraints on their size and geometry, the most prominent being the high degree of symmetry in their shape. However, if energy (or matter) could be channeled with super-resolution, more complex architectures would become possible, such as partial cladding of complex nanoparticles with nontrivial shapes. This project explores alternative means of channeling energy into the nanoscale while the colloidal processing chemistry is taking place. We exploit the plasmonic activity of the particle itself to help channel light into a nonuniform heatmap over the particle with sub-particle resolution. We show that surface plasmons which result from the coupling of light with the free electrons in a metal, can be harnessed to achieve a variety of pre-programmed designer core-vest nanostructures. By localizing the energy carried by far-field radiation onto nanometer-sized regions, SPs effectively create hot blueprints that drive self-assembly of composite structures. Here, nano-vests made of titania formed around gold nanostars are computer designed, synthesized, and characterized to illustrate the concept.
Contact Information	arthur.montazeri@berkeley.edu
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN843
Project Title	Non-Enzymatic Electrochemical Sensors Based on Wearable Carbon Textile
Status	Continuing
Funding Source	NSF
Keywords	electrochemical sensor, carbon fiber textile
Researchers	Hu Long, Sinem Ortaboy
Abstract	Nowadays, electrochemical sensors play an important role in wide range of potential applications, especially in point-of-care applications for real-time human physiology monitoring. Considerable efforts have been devoted not only to improve their sensitivity, response time, stability and biocompatibility but also to develop new materials which enable the researchers to create smarter multifunctional devices. In this regard, flexible textiles such as carbon fiber sheet-integrated electrodes are promising materials due to their good conductivity, low-cost, biocompatibility and stability even under harsh environmental conditions. In this study, flexible carbon-based textile incorporating electroactive species are being developed as the electrode for electrochemical sensor and biosensor applications.
Contact Information	longhu@berkeley.edu
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN835
Project Title	Silicon Carbide Passivated Electrode for Thermionic Energy Conversion
Status	Continuing
Funding Source	Federal
Keywords	Silicon Carbide, Tungsten, Thermionic Emission, LPCVD, High-Temperature
Researchers	Steven R. DelaCruz, Ping Cheng, Dungsheng Tsai, Zhongtao Wang
Abstract	Thermionic energy converters (TECs) are based on the emission of electrons from a hot electrode (cathode) into a vacuum gap and their collection by a cooler electrode (anode), delivering an electric current through the load. In this process, they convert heat directly into electricity and have the potential to achieve high efficiencies comparable to those of conventional heat engines. We have initiated a highly collaborative project to develop a microfabricated, close-gap thermionic energy converter for directly converting heat from a combustion source into electricity. One of the key challenges is associated with the cathode which needs to be highly conductive and survive temperatures as hot as 2000 °C in an oxidizing environment. While tungsten is an attractive choice for the cathode, it readily oxidizes under the envisioned conditions. Owing to its chemical inertness and mechanical strength at high temperatures, silicon carbide is an effective option for electrode passivation. In this work, we are developing processes for fabricating a SiC-protected tungsten electrode, exploring the necessity and effectiveness of interdiffusion barriers, and investigating its long-term stability under harsh environments.
Contact Information	sdelacruz@berkeley.edu, maboudia@berkeley.edu, carraro@berkeley.edu, pingcheng@berkeley.edu, dungshe
Advisor	Roya Maboudian, Carlo Carraro

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN876 New Project
Project Title	Metal-organic frameworks: A highly tunable class of materials for chemical sensing with high selectivity
Status	New
Funding Source	State
Keywords	Sensing, Metal-organic frameworks, tunability, chemistry, ChemFET, CS-FET
Researchers	David Gardner
Abstract	A classic challenge in gas sensing is tunability of sensing material to suit the specific application. A new class of materials, metal-organic frameworks (MOFs), can take on thousands of forms, each with unique properties. Metal-organic frameworks are comprised of metal-cluster nodes connected by organic linkers. Changing the metal cluster or the organic linker can modulate the sensing response by at least two mechanisms: one, the metal cluster determines what gasses can bind to the material, and second, the length and functional groups of the organic linker control which gasses can enter the MOF. Guest molecules diffuse through the material and modulate the MOF’s surface potential, which can be sensed by a device, such as CS- FET (developed by Dr. Hossain Fahad and Prof. Ali Javey). Recent progress shows that the MOF sensing layer is sensitive to acidic gases, e.g. NO2, and has an ultra-low power requirement. Future work will focus on growing a library of synthesis techniques and gas sensing responses to target different applications.
Contact Information	dwg@berkeley.edu
Advisor	Roya Maboudian, Carlo Carraro, Ali Javey

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN743
Project Title	Highly Responsive pMUTs
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Piezoelectric Micromachined Ultrasonic Transducers (pMUTs), curved pMUTS, spherical piezoelectric elastic shells, bimorph pMUTs, dual electrode bimorph pMUT
Researchers	Benjamin Eovino, Yue Liang
Abstract	Ultrasonics has been realized as a nondestructive measurement method for a variety of applications, such as medical imaging, healthcare monitoring, structural testing, range finding, and motion sensing. Furthermore, high intensity ultrasound can be used in therapeutic treatments, such as lithotripsy for kidney stone comminution, hyperthermia for cancer therapy, high-intensity focused ultrasound (HIFU) for laparoscopic surgery, and transcranial sonothrombolysis for brain stroke treatment. MEMS ultrasonic transducers are known to have several pronounced advantages over the conventional ultrasound devices, namely higher resolution, higher bandwidth, and lower power consumption. The main purpose of this project is to develop new architectures of Piezoelectric Micromachined Ultrasonic Transducers (pMUT) with higher electro-mechano-acoustical energy efficiency and increased sensitivity while using CMOS-compatible fabrication technology, making them suitable for battery-powered handheld devices. The specific focus is on increasing the electromechanical coupling, bandwidth, and acoustic pressure output in aims of creating power- efficient hand-held medical devices for diagnosis/therapy.
Contact Information	beovino@berkeley.edu, lunaliang93@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Micropower
Project ID	BPN782
Project Title	Flexible load-bearing energy storage fabrics
Status	Continuing
Funding Source	Army/ARL
Keywords	Flexible supercapacitor, Wearable electronics, Structural energy storage, Carbon fiber
Researchers	Caiwei Shen, Weihua Cai
Abstract	The power source is a bottleneck for the successful development of flexible electronics. Instead of using rigid and bulky batteries, flexible multifunctional devices that store energy and bear loads at the same time provide better solutions by working as powering structural components. Here we demonstrate the woven supercapacitor fabrics featuring high flexibility comparable to that of wearable textiles, high tensile strength of over 1GPa, high failure pressure of 500MPa, and fast charging within seconds. The supercapacitor fabrics can power all kinds of wearable electronics, or be used in other applications that desire load- bearing ability and arbitrary form-factor design for the power systems.
Contact Information	shencw10@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN799
Project Title	3D Printed Microsensors
Status	Continuing
Funding Source	DARPA
Keywords	Microsensor, 3D printing, Metallization
Researchers	Dongwoo Shin, Huiliang Liu, Renxiao Xu
Abstract	Our goal is to develop high-throughput 3D printing methods for building microsensors for various applications. This project will involve formulating new inks/solutions and investigating optimal printing conditions for 3D printing methods such as inkjet and electrohydrodynamic (EHD) printing.
Contact Information	dongwooshin@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN672
Project Title	Solar Hydrogen Production by Photocatalytic Water Splitting
Status	Continuing
Funding Source	KAUST
Keywords	Solar energy, photocatalysis, nano materials
Researchers	Emmeline Kao
Abstract	Hydrogen is a promising, environmentally-friendly fuel source for replacing fossil fuels in transportation and stationarypower applications. Currently, most hydrogen is produced from non-renewable sources including natural gas, oil, and coal. Photoelectrochemical (PEC) water splitting is a new renewable energy technology that aims to generate hydrogen from water using solar energy. When light is absorbed by the photocatalyst, an electron-hole pair is generated that interacts with water molecules in a surface reduction-oxidation reaction to decompose the water into hydrogen and oxygen. The current challenge in PEC water splitting is finding low-cost, stable materials with good visible light absorption and high efficiency for water splitting. Polymers such as thiophene have demonstrated promising capabilities as photocatalysts due to its favorable band structure for both solar absorption and photocatalysis by electropolymerizing films for vertical transfer of electrons. This project aims to improve the performance of PEC devices for water splitting by developing new high surface area photoelectrodes surrounded by a thin layer of electroplated polymers.
Contact Information	kao@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Microfluidics
Project ID	BPN774
Project Title	Applications of 3D Printed Integrated Microfluidic Circuitry, Finger-Powered Pumps, and Mixers
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Lab-on-a-Chip, 3D Printing, Microfluidics, Low-power, Passive, Mixing, biosensing
Researchers	Eric Sweet, Jacqueline Elwood, Ryan Jew, Rudra Mehta
Abstract	In this ongoing project we have previously developed a new class of three-dimensional modular fluidic operators (i.e. fluidic diodes, capacitors and transistors); passive 3D internally-rifled mixers; and have previously demonstrated low- cost one-way pumping and mixing systems powered solely by the operator’s finger. Currently, we aim to develop our easy-to-fabricate 3D microfluidic systems into functional biosensors via straight-forward integration with conductive polymer electrodes. Here, we present our preliminary investigations into the development of entirely 3D printed microfluidic salivary point-of-care diagnostic tools, specifically for the determination of salivary alcohol content (SAC) and salivary lactate content (SLC). In law enforcement, blood alcohol content (BAC) is routinely determined indirectly by measurement of breath alcohol content (BrAC) using commercialized breathalyzer technology. However, measurement of SAC has a nearly 1:1 correlation with BAC, much closer than BAC:BrAC, over 2,000:1. Therefore, SAC could prove to be a more reliable metric of sobriety than BrAC. In addition, for diabetic patients, continuous home monitoring blood glucose levels necessitates repeated finger pricking and blood testing. However, researchers have previously established measurable correlations between salivary lactic acid levels and blood glucose levels, opening the possibility for non-invasive, point-of-care salivary-based blood sugar monitoring. In this project, we aim to demonstrate proof-of-concept salivary diagnostic prototypes comprised of our previously-demonstrated 3D microfluidic technology and composite conductive polymer electrodes. SAC will be determined via pH-sensitive PEDOT:PSS/PANI polymer electrodes, and SLC will be determined via hydrogen peroxide-sensitive PEDOT:PSS/PAA polymer electrodes. Upon further development, such designs could prove critical tools in resolving the foremost commercial limitations of conventional microfluidic point-of-care diagnostic devices, specifically for salivary diagnostics.
Contact Information	ericsweet@berkeley.edu, jacqueline_elwood@berkeley.edu, rjew@berkeley.edu, Rudra.Mehta@berkeley.edu,
Advisor	Liwei Lin

 

Document Top Table of Projects	Microfluidics
Project ID	BPN846
Project Title	3D Printed Biomedical and Diagnostic Systems
Status	Continuing
Funding Source	BSAC Member Fees
Keywords
Researchers	Jacqueline Elwood, Eric C. Sweet, Ryan Jew
Abstract	Enzyme-linked immunosorbent assay (ELISA) kits have wide applications in medical diagnostics, quality-control of produce, and toxicology. These kits, however, are expensive, highly complex, and require large sample volumes in order to process data. To overcome these drawbacks, microfluidic lab-on-chip platforms have been developed to quantify antibody-antigen binding interactions using microlitre volumes of analyte. These devices rely on standard soft-lithography or MEMS-based manufacturing methods, which are becoming increasingly more time consuming, labor intensive, and costly in the face of additive manufacturing processes. Additionally, current methods rely on immunofluorescence or chromogenic detection to measure antibody-antigen binding success, but these methods are time consuming, expensive, or subject to cross-reactivity or biofouling. We aim to develop a novel fully 3D printed thermoelectric biosensor for antibody-antigen binding quantification as an alternative micro-ELISA diagnostic tool. In this project, we will demonstrate that our 3D printed thermoelectric device can detect the streptavidin-biotin binding interaction as an initial proof-of-concept. Previous thermoelectric sensors for detection of bioreactions utilize non- biocompatible materials, which require the thermopile to be placed away from the channel, resulting in lower sensitivity systems. Utilizing a biocompatible PEDOT:PSS-based composite as our thermoelectric material, we aim to integrate the thermopile into the microchannel itself. Additionally, 3D printing will enable us to design 3D thermopile geometries that cannot be otherwise achieved with traditional soft-lithography. By eliminating the need for optics or external energy sources coupled with the use of low-cost additive manufacturing, we aim to develop a simple lab-on- chip alternative to traditional ELISA kits.
Contact Information	jacqueline_elwood@berkeley.edu, ericsweet@berkeley.edu, rjew@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Wireless, RF & Smart Dust
Project ID	BPN840
Project Title	W-Band Additive Vacuum Electronics
Status	Continuing
Funding Source	DARPA
Keywords
Researchers	Ilbey Karakurt
Abstract	Radio frequency (RF) devices for high frequency applications such as satellite communication and mobile and ground uplinks have brought about the demand for higher power handling capabilities and increased efficiency in these devices. Technologies for creating low cost, advanced millimeter wave electronics devices without sacrificing quality or performance has thus grown. Direct metal additive manufacturing techniques, such as electron beam melting, has been projected to be capable of fabricating such devices. Key concerns regarding these techniques are the requirements for high purity materials (99.6%), small feature sizes (~2um) and low surface roughness (less than 200 nm for 95 GHz devices and above) for high frequency applications. This project will demonstrate that direct metal additive manufacturing combined with magnetic field assisted abrasive polishing techniques can be used to provide a rapid manufacturing process for fully enclosed and cooled complex interaction structures to be used in high frequency applications.
Contact Information	ilbeykarakurt@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Micropower
Project ID	BPN855
Project Title	Flexible Sensors and Energy Harvesters
Status	New
Funding Source	BSAC Member Fees
Keywords	Energy harvesting, flexible, stretchable, sensor
Researchers	Junwen Zhong, Ilbey Karakurt, Yichuan Wu, Nathaniel Liu, Mingjing Qi
Abstract	Wearable and implantable devices are expected to become more abundant due to developments in materials and microfabrication technologies. However, battery replacement is a major problem for these systems. Shrinking the size of sensors and actuators also reduces their power requirements, and it makes energy harvesting a viable solution as a renewable power source. In this project, we work with various sets of flexible materials to develop 1) an energy harvester to generate electrical power to either extend battery life or eliminate the battery; 2) sensors to detect biological signals from different parts of the body.
Contact Information	lbeker@berkeley.edu, junwenzhong@berkeley.edu, ilbeykarakurt@berkeley.edu, yichuanwu@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN877 New Project
Project Title	Pulse Acquisition and Diagnosis for Health Monitoring
Status	New
Funding Source	Fellowship
Keywords	Wearable Devices, Piezo Electret Sensor, Pulse Wave Acquisition, Traditional Chinese Medicine
Researchers	Yao Chu, Junwen Zhong, Yu Song, Huiliang Liu
Abstract	Traditional Chinese medicine has been existing for more than two thousand years and one of the important diagnostic methods is the pulse diagnosis. It generally takes decades of trainings for a practitioner to master this skill as pulse acquisition and diagnosis require long-term experiences and are very subjective. This project aims to use the combination of pulse acquisition and big data analytics to realize the traditional Chinese medicine practices. The hardware part will be based on MEMS-type wearable sensors to be embedded in a smartwatch or wristband to mimic Chinese doctor’s three fingers to acquire the detail wave-forms of the pulse on the wrist. The learning and practicing will be achieved by the training process on the multi-dimensional pulse-wave data. We have developed a flexible and self-powered pressure sensor based on a sandwich-structured piezo-electret, which exhibits high sensitivity and excellent stability for human pulse acquisitions.
Contact Information	chuyao@berkeley.edu, junwenzhong@berkeley.edu, songyu_elaine@hotmail.com, liuhl@berkeley.edu, lwlin@
Advisor	Liwei Lin

 

Document Top Table of Projects	Micropower
Project ID	BPN742
Project Title	Novel Methods to Synthesis Transition Metal Dichalcogenide and Transition Metal Carbide for Energy Storage Applications
Status	Continuing
Funding Source	BSAC Member Fees
Keywords
Researchers	Xining Zang, Minsong Wei
Abstract	The field of 2D materials have witnessed tremendous efforts of research in past several years, transition metal dichalcogenide (TMDC) and transition metal carbides are the most famous two families 2D material besides graphene. The vision of this project is developing "tolerant" and sustainable method to synthesis those kinds of materials with high quality/yield and design applications compatible with the fabrication approaches. Till now, we have been developing atomic layer deposition, self-assembly coupled CVD, and laser ablation methods to synthesis a series of 2D materials including TiS2, Mo3C2, Mo2C and etc. We specify their application in energy storage and conversion including supercapacitors and catalyst for hydrogen evolution and oxygen evolution reactions.
Contact Information	xining.zang.me@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	NanoTechnology: Materials, Processes & Devices
Project ID	BPN860
Project Title	Foldable Paper Electronics by Direct-Write Laser Patterning
Status	New
Funding Source	BSAC Member Fees
Keywords
Researchers	Xining Zang, Yao Chu, Renxiao Xu, Minsong Wei, Junwen Zhong
Abstract	Paper electronics have been a popular subject in recent years, with various works concentrating on the printing of additive materials on papers. Here, we show a drastically different approach by a direct-write laser patterning process on paper. Innovative claims are: (1) direct conversion of non-conductive paper to conductor by laser; (2) a variety of foldable architectures and devices using the as-fabricated paper electronics; and (3) among various possible basic device applications, we show a foldable triboelectricity generator and a folded supercapacitor as the potential paper-based power source for paper electronics, a wireless humidity sensor, and a heavy metal ion detector as working components.
Contact Information	xining.zang.me@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN772
Project Title	Graphene for Room Temperature Gas Sensors
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Chemical Sensor, Gas Sensor, Graphene FET, Selectivity
Researchers	Yumeng Liu, Takeshi Hayasaka
Abstract	As air pollution from industrial and automobile emission becomes more and more severe, the personalized, integrated gas sensor is desirable for everyone to monitor everyday's air quality as well as their personal health condition non-invasive. Such sensor should have the desirable features like energy efficient, miniature size, accurate response (down to ppm level), and selectivity. Traditional bulk MOX based gas sensor works in the temperature range of 300 to 400 oC, which requires large amount of energy to power the heater. We here propose using graphene based field effect transistor as label-free sensor platform, to detect gas selectively by measuring its electrical properties at room temperature.
Contact Information	yumengliu@berkeley.edu
Advisor	Liwei Lin

 

Document Top Table of Projects	BioMEMS
Project ID	BPN870 New Project
Project Title	Hot Embossed Thermoplastic Bubble-Actuated Micropump
Status	New
Funding Source	BSAC Member Fees
Keywords	Hot embossed microdevice, bubble micro pump, electrolysis pump, plastic bubble pump
Researchers	Jackelin Amorin Cotrina, Marc S. Chooljian
Abstract	Advances in technology have allowed for development of health diagnostics microdevices, but implementation of microdevices for drug delivery is relatively new. Continuous drug delivery often requires large and complex pumps, making development of micropumps desirable. Similarly, commonly used materials such as silicon are too expensive for mass production of disposable devices, and polydimethylsiloxane (PDMS) is not compatible with some pharmaceutical drugs due to partitioning effects into the PDMS matrix. Thermoplastic incorporation into microdevices production is more cost efficient compared to silicon, and can be tuned to have a variety of chemical, optical, and mechanical properties, in contrast to PDMS. In this research we will be testing the efficiency of new bio-safe drug dispensing microdevice which works with an incorporated micro bubble pump system. The bubble pump system uses electrolysis of water, in which water is broken down into hydrogen and oxygen gas to create a pressure change that displaces a volume of liquid equal to the volume of gas formed. Bubble pumps, unlike mechanical pumps, have no moving parts and are therefore more easily miniaturized. The devices are fabricated using a modified hot embossing method developed by our lab, which allows microelectrodes integration into thermoplastic fluidic channels to create electrolysis chambers. Development of a functional microbubble pump that uses the advantages of thermoplastics will lead to improved development of bio-safe drug dispensing microdevices.
Contact Information	jamorin@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Microfluidics
Project ID	BPN863
Project Title	In Situ Gold Plating of Microfluidic Devices
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Electrodeposition, Gold, Microfluidic
Researchers	Marc Chooljian
Abstract	Microfluidic devices are currently limited in their application potential by the lack of appropriate sensors or integrated electrodes. Building on the work of Dr. Dorian Liepmann's lab in electrodeposited electrodes and hot embossing, where deposited electrodes in contact with fluid channels are composed primarily of nickel, we endeavor to develop a novel process for gold-electroplating those nickel surfaces, within the channel, after the chip has been constructed (in situ). By using this process the metallic surfaces in contact with the electrolyte in the channel can be chemically passivated with a thin gold layer, thus limiting the participation of the device's materials in its operation. This process may also have the added benefit of sealing the nickel-plastic edges where bonding is sub optimal and leaking can occur. This process will contribute to further advances in both the mass-production and prototyping of plastic-based BioMEMS.
Contact Information	mschooljian@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Microfluidics
Project ID	BPN839
Project Title	Flow Control in Plastic Microfluidic Devices Using Thermosensitive Gels
Status	Continuing
Funding Source	BSAC Member Fees
Keywords
Researchers	Marc Chooljian
Abstract	Our new microfabrication process can integrate electronics into plastic devices, simplifying on chip sensing and actuation. Traditional microfluidic prototyping (PDMS soft-lithography) requires large off chip components for active flow control. These components impose scalability limitations. Leveraging thermo- gelling polymers and integrated resistive heaters we can implement on chip active flow control. These polymers, poloxamers, are nonionic triblock copolymers known for their temperature dependent self- assembling and thermo-gelling behavior. Poloxamers can quickly (<30ms) undergo a phase transition into a gel-like substance over a temperature change of two degree Celsius. The viscosity rapidly increases by a 1000-fold, effectively stopping flow. Furthermore, the transition temperature can be easily adjusted by varying poloxamer concentration, allowing for precise thermal control. Using targeted heating with our integrated resistive heaters, we can leverage the phase transition temperature to create rapid reversible valves. These devices expand microfluidic prototyping capabilities in fields such as mixers, fluidic logic, cell culturing, and imaging.
Contact Information	mschooljian@gmail.com
Advisor	Dorian Liepmann

 

Document Top Table of Projects	BioMEMS
Project ID	BPN729
Project Title	Development of Microfluidic Devices with Embedded Microelectrodes using Electrodeposition and Hot Embossing
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Packaging, Microfluidics, Electrodes, Hot Embossing
Researchers	Marc Chooljian
Abstract	The use of microfluidic devices has experienced a tremendous increase over the last years, especially valuable for healthcare applications. In this context plastic materials are increasingly relevant especially for large scale fabrication and commercialization. However plastics are still not widely used at the research level due to the lack of available inexpensive industrial–like fabrication equipment. In this work we describe a rapid and highly cost-effective approach for fabricating plastic microfluidic devices with embedded microelectrodes allowing 2D and 3D configurations. We present an interdigitated microelectrode configuration applied to impedance cytometry and cellular electroporation/lysis on chip devices as an example of the great potential of this technology. Our long-term goals are to further explore the potential of hot-embossed microscale devices as platforms for complete BioMEMS devices. This includes the integration of functionalized elements and silicon-based biosensors. A variety of functional coatings will be developed to apply integrated electrodes to many different sensing applications.
Contact Information	mschooljian@berkeley.edu
Advisor	Dorian Liepmann

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN851
Project Title	High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers on Transparent Substrates
Status	Continuing
Funding Source	Industry
Keywords	AlN, piezoelectric, ultrasonic, PMUT, glass
Researchers	Guo-Lun Luo
Abstract	This study presents a high fill-factor array of aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducers (PMUTs) fabricated on a transparent substrate. PMUTs with diameters ranging from 40 microns to 100 microns were fabricated, resulting in resonant frequencies from 3 MHz to 18 MHz in air. A high fill-factor of 62% was achieved. Immersed pulse-echo experiments were conducted at 2.5 MHz.
Contact Information	glluo@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN880 New Project
Project Title	Synchronization in a Micromachined Resonators
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Nonlinear Oscillation, Synchronization
Researchers	Parsa Taheri-Tehrani
Abstract	Synchronization is a well-known phenomenon in nonlinear dynamics that is used to lock the frequencies of two oscillators for frequency stabilization applications. The simplest evidence of such frequency entrainment occurs between a self-sustained oscillator and an external tone2, when the latter is swept around the resonance frequency of the oscillator. Synchronization between two oscillators with frequencies related by an integer ratio can occur but requires coupling between the two modes. We present an experimental study of synchronization between two resonance modes of a single resonator, where the second mode is nearly the third harmonic of the first mode. Due to intrinsic electro-mechanical coupling between the two modes, synchronization will occur for a specific frequency range known as synchronization range. We show by increasing the amplitude of the first mode in the nonlinear Duffing regime, the synchronization range will increase.
Contact Information	ptaheri@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN785
Project Title	Scandium AlN (ScAlN) for MEMS
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	Piezoelectric, MEMS, AlN, ScAlN, Thin films, PMUT
Researchers	Qi Wang
Abstract	The goal of this project is to design, fabricate and characterize novel MEMS devices based on scandium aluminum nitride (ScAlN) thin films. ScAlN thin film is a promising piezoelectric material due to its CMOS process compatibility, low relative permittivity and high piezoelectric coefficient and enables better performance of piezoelectric MEMS devices.
Contact Information	qixwang@ucdavis.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN628
Project Title	Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	piezoelectric, ultrasound transducers, medical imaging, fingerprint sensors
Researchers	Xiaoyue (Joy) Jiang, Qi Wang
Abstract	This project presents the first MEMS ultrasonic fingerprint sensor with the capability to image epidermis and dermis layer fingerprints. The sensor is based on a piezoelectric micromachined ultrasonic transducer (PMUT) array that is bonded at wafer- level to complementary metal oxide semiconductor (CMOS) signal processing electronics to produce a pulse-echo ultrasonic imager on a chip. To meet the 500 DPI standard for consumer fingerprint sensors, the PMUT pitch was reduced by approximately a factor of two relative to an earlier design. We conducted a systematic design study of the individual PMUT and array to achieve this scaling while maintaining a high fill-factor.
Contact Information	joy.jiang@berkeley.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN849
Project Title	Large-Amplitude PZT PMUTs
Status	Continuing
Funding Source	BSAC Member Fees
Keywords	PMUT, piezoelectric, PZT
Researchers	Yuri Kusano
Abstract	Ultrasonic transducers are widely used in various applications including medical imaging, nondestructive evaluation, object/gesture recognition, automotive, and range-finding. Compared to conventional capacitive micromachined ultrasonic transducers (CMUTs), piezoelectric micromachined ultrasonic transducers (PMUTs) have an advantage that they can be utilized without high bias voltages, resulting in simpler electronic interfaces. This project targets air-coupled PMUTs with wide bandwidth to achieve high axial resolution in pulse-echo imaging, where air-coupled transducers typically operate in the frequency range of 40 kHz to 800 kHz. Regarding the piezoelectric material, the thin-film PZT (lead-zirconate-titanate) is widely used for piezoelectric devices and well-known to have higher piezoelectric coefficient e31,f as well as higher transmitting efficiency than those of another major piezoelectric material AlN. In this project, we design, model, and characterize PZT PMUTs with a large displacement amplitude for in-air operation to improve the sensor performance in pulse-echo imaging system.
Contact Information	ykusano@ucdavis.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley

 

Document Top Table of Projects	Physical Sensors & Devices
Project ID	BPN817
Project Title	Ultra-Low Power AlN MEMS-CMOS Microphones and Accelerometers
Status	Continuing
Funding Source	DARPA
Keywords	AlN, MEMS-CMOS, microphone, accelerometer, subthreshold, low power
Researchers	Yuri Kusano
Abstract	State-of-the-art (SOA) physical sensors used to monitor changes in the environment require active electronics that continuously consume power (in the order of mW) limiting the sensor lifetime to months or less. This project targets the integration of low frequency sensors with wake-up electronics that operates below 10nW (50dB lower than the SOA) and achieve high probability of detection (POD) (>95%) and low false alarm rate (FAR) (<1h^-1). To improve the sensor performance at low frequencies we design piezoelectric AlN MEMS microphones and accelerometers with high voltage sensitivities, CMOS circuits with low bias current that operate in subthreshold, and lower the interconnect parasitics (<50fF) by directly bonding both MEMS and CMOS wafers. In particular, the sensor output voltage is boosted by 1) segmenting and stacking the electrodes in series, and 2) optimizing the size, number of electrodes and materials that form the multilayer structure. Regarding to the circuit, we exploit the multiple threshold voltages that are available in the process to reduce leakage on switches, increase input gain, and decrease overdrive voltage in current mirrors. Finally, we achieve the detection specs (POD and FAR) by implementing a programmable 4-stage comparator that allows us to adjust the circuit threshold according to the maximum level of input signal.
Contact Information	ykusano@ucdavis.edu, dahorsley@ucdavis.edu
Advisor	David A. Horsley