CONFERENCE PRESENTATIONS (reviewed or invited)


  1. Richard S. Muller, "Big Advantages of Thinking Small," (invited) American Institute of Chemical Engineers (AIChE), AES Electrophoresis Society Award Session, 2013 Annual Meeting, Hilton Hotel, San Francisco, CA, November 6, 2013

  2. R. Kant (Stanford University), D. Garmire, H. Choo, R.S. Muller, "Characterization of an Improved, Real-Time, MEMS-Based, Phase-Shifting Interferometer," IEEE LEOS Optical MEMS and Nanophotonics 2007, Paper TuP2, Hualien, Taiwan, August 12-16, 2007.

  3. Richard S. Muller, "Plenty of Opportunity as well as 'Room at the Bottom' - Some Examples in Optical MEMS," (invited) Fourth International conference on Networked Sensing Systems, INSS 2007, Braunschweig, Germany, Transducer Research Foundation and IEEE Sensors Council, June 6-8, 2007.

  4. D. Garmire, H. Choo, R. Kant, S. Govindjee, C. Séquin, R. S. Muller, and J. Demmel, "Diamagnetically Levitated MEMS Accelerometers," Poster Paper 2EM9.P, Transducers 2007, Lyon, France, June 10-14, 2007.

  5. Hyuck Choo, Rishi Kant, David Garmire, James Demmel, and Richard S. Muller, "Fast, MEMS-Based, Phase-Shifting Interferometer," 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Technical Digest pp.94-95, Transducers Research Foundation, Hilton Head Island, SC, June 4-8, 2006.

  6. D. Garmire, H. Choo, R.S. Muller, S. Govindjee, and J. Demmel, "MEMS Process Characterization with an on-Chip Device," Nano Science and Technology Institute -- Nanotech 2006, Boston, MA, Vol. 3, pp. 550-553, 1:30pm, Tuesday May 9, 2006.

  7. D.Garmire, H. Choo, R. S. Muller, S. Govindjee and J. Demmel, "Device for in-situ Electronic Characterization of MEMS Applicable to Conducting Structural Materials," Material Research Symposium Spring Meeting 2006, San Francisco, CA, (Moscone West), 3:45 PM, Thursday Afternoon, April 20, 2006.

  8. Blake C.-Y. Lin, Tsu-Jae King, and Richard S. Muller, "Poly-SiGe MEMS actuators for adaptive optics," Photonics WEST, sponsored by SPIE, The International Society for Optical Engineering, Conference 6113, Paper 6113-28, San Jose, CA, January 25, 2006.

  9. H. Choo, D. Garmire, J. Demmel, and R.S. Muller, "A Simple Process to Fabricate Self-Aligned High-Performance, Torsional Microscanners: Demonstrated Use in a Two-Dimensional Scanner," 2005 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Technical Digest pp.21-2, Oulu, Finland, Aug. 1-4, 2005.

  10. D. Garmire, R. S. Muller, J. Demmel, "Vision-based Teleoperation of a Stroboscopic Microscopic Interferometric System for Remote Dynamic MEMS Testing" IEEE/LEOS International Conference on Optical MEMS 2005, Oulu, Finland, August 2005, Technical Digest pp. 163-164, Oulu Finland, Aug. 1-4, 2005.

  11. Hyuck Choo and Richard S. Muller, "Addressible Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors," 2004 Solid-State Sensor and Actuator Workshop, Technical Digest pp.79-82, Transducers Research Foundation, Hilton Head Island, SC, June 6-10, 2004.

  12. Kishan Gupta, Hyuck Choo, Hanjun Kim, and Richard S. Muller, "Micromachined Polarization Beam Splitters for the Visible Spectrum," 2003 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Technical Digest pp. 171-2, Waikoloa Beach, Kona, Hawaii, 18-21 August 2003.

  13. Hyuck Choo and Richard S. Muller, "Microlenses Fabricated Using Hydrophobic Effects and Polymer-Jet-Printing Technology," 2003 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Technical Digest pp. 169-70, Waikoloa Beach, Kona, Hawaii, 18-21 August 2003.

  14. Jongbaeg Kim, Hyuck Choo, Liwei Lin, Richard Muller, "Microfabricated Torsional Actuators by Self-Aligned Plastic Deformation," TRANSDUCERS '03: IEEE 12th Intern. Conf. on Solid-State Sensors and Actuators, Tech. Digest, Vol. 2, 1015-18, Catalog No. 03TH8664, IEEE, 445 Hoes Lane, Piscataway, NJ, Boston, MA, June 9-12, 2003.

  15. Peter Krulevitch,...,Richard Muller et al, "MOEMS spatial light modulator development at the Center for Adaptive Optics," SPIE Photonics West, Micromachining and Microfabrication Conference, MOEMS and Miniaturized Systems III, San Jose, CA, SPIE Vol. 4983, pp. 227-34, January, 2003.

  16. Richard S. Muller, "MEMS Now and MEMS Future," (invited) Workshop on Microelectromechanical Systems, Tsing Hua University, Hsinchu, Taiwan, July 24, 2002.

  17. Christian Rembe, Rishi Kant, Michael P. Young, Richard S. Muller, "Network-connected MEMS-measuring system for high-speed data transfer to CAD and simulation tools," Conference on Vibration Measurements by Laser Techniques," Italian Assn. for Laser Velocimetry, Ancona, Italy, 18-21 June 2002.

  18. Patrick S. Riehl, Karen L. Scott, Richard S. Muller, and Roger T. Howe, "High-resolution Electrometer with Micromechanical Variable Capacitor," 2002 Solid-State Sensor and Actuator Workshop, Transducers Research Foundation, Hilton Head Island, South Carolina, June 2-6, 2002.

  19. Carl W. Chang, Thomas Budde, Hans H. Gatzen, Richard S. Muller, "A Magnetically Actuated Scanner for Intravascular Ultrasound Imaging," IMCE: ASME Winter Meeting 2001, Tech. Digest: MEMS-Vol. 2001, New York, NY, 11-16 November 2001.

  20. Christian Rembe, Pamela Caton, Richard M. White, Richard S. Muller, "Stroboscopic Interferometry for Characterization and Improvement of Flexural Plate-Wave Transducers," SPIE Reliability, Testing, and Characterization of MEMS/MOEMS, Vol. 4558, pp. 108-16, Millbrae, CA, 23 October 2001.

  21. Christian Rembe, Rishi Kant, Richard S. Muller, "Optical Measurements to Study Dynamic Behavior in MEMS," SPIE Microsystem Engineering Metrology and Inspection Conference, Vol. 4400, 127-37, Intl. Conf. Center, Munich, Germany, 18-22 June 2001.

  22. Michael A. Helmbrecht, Uthara Srinivasan, Christian Rembe, Roger T. Howe, and Richard S. Muller, "Micromirrors for Adaptive-Optics Arrays," TRANSDUCERS '01: 11th Intern. Conf. on Solid-State Sensors and Actuators, Tech. Digest, 1290-3, CSM, Munich, Germany, Industriestrasse 35, D-82194 Gröbenzell, Munich, June 10-14, 2001.

  23. Richard S. Muller, "MEMS, The View Back... and the Vistas Ahead," (invited) TRANSDUCERS '01: 11th Intern. Conf. on Solid-State Sensors and Actuators, Tech. Digest, 20-23, CSM, Munich, Germany, Industriestrasse 35, D-82194 Gröbenzell, Munich, June 10-14, 2001.

  24. Richard S. Muller, "MEMS, Now and Future," (invited), Intern. Symposia on Materials Science for the 21st Century (ISMS-21), The Society of Materials Science, Japan, Tech. Digest pp.107-11, Osaka, Japan, 21-26 May 2001.

  25. C. Rembe, L. Muller, R.S. Muller, A. P. Pisano, R. T. Howe, "Full Three-Dimensional Motion Characterization of a Gimballed Electrostatic Microactuator," 2001 Intern. Reliability Physics Symposium, Lake Buena Vista, FL, April 30-May 3, 2001.

  26. Carl W. Chang, Paul Lum, Richard S. Muller, "Magnetically Actuated Microplatform Scanners for Intravascular Imaging," ASME Winter Meeting 2000, Technical Digest: MEMS-Vol. 2, 2000, pp. 673-8, Orlando, FL, 5-10 November 2000.

  27. Satinderpall Pannu, Carl Chang, Richard S. Muller, and Albert P. Pisano, "Closed-Loop Feedback-Control System for Improved Tracking in Magnetically Actuated Micromirrors," Optical MEMS 2000, IEEE/LEOS Intern. Conf. on Optical MEMS, Tech. Digest, 107-8, Kauai, HI, 20-24 August 2000.

  28. Uthara Srinivasan, Michael A. Helmbrecht, Christian Rembe, Richard S. Muller, Roger T. Howe, "Fluidic Self-Assembly of Micromirrors onto Surface Micromachined Actuators," Optical MEMS 2000, IEEE/LEOS Intern. Conf. on Optical MEMS, Tech. Digest, 59-60, Kauai, HI, 20-24 August 2000.

  29. Christian Rembe, Matthew Hart, Michael A. Helmbrecht, Uthara Srinivasan, Richard S. Muller, Kam Y. Lau, Roger T. Howe, "Stroboscopic Interferometer with Variable Magnification to Measure Dynamics in an Adaptive-Optics Micromirror," Optical MEMS 2000, IEEE/LEOS Intern. Conf. on Optical MEMS, Tech. Digest, 73-4, Kauai, HI, 20-24 August 2000.

  30. Jocelyn T. Nee, Robert A. Conant, Richard S. Muller, and Kam Y. Lau, "Lightweight, Optically Flat Micromirrors for Fast Beam Steering," Optical MEMS 2000, IEEE/LEOS Intern. Conf. on Optical MEMS, Tech. Digest, 9-10, Kauai, HI, 20-24 August 2000.

  31. Robert A. Conant, Jocelyn T. Nee, Kam Y. Lau, Richard S. Muller, "Dynamic Deformation of Scanning Mirrors," Optical MEMS 2000, IEEE/LEOS Intern. Conf. on Optical MEMS, Tech. Digest, 49-50, Kauai, HI, 20-24 August 2000.

  32. R. A. Conant, J. Nee, K. Lau, R. Muller, "A Fast Flat Scanning Micromirror," Solid-State Sensor and Actuator Workshop, Transducers Research Foundation, Tech. Digest, 6-9, Hilton Head Island, South Carolina, June 4-8, 2000.

  33. Richard S. Muller, "Microphotonics: The Optical Bench on a Silicon Chip," (invited), 2000 AAAS Annual Mtg and Science Innovation Exposition, American Assn for the Advancement of Science, Washington, DC, 17-22 Feb. 2000.

  34. Jocelyn T. Nee, Robert A. Conant, Matthew R. Hart, Richard S. Muller, and Kam Y. Lau, "Stretched-Film Micromirrors for Improved Optical Flatness," IEEE MEMS 2000 Conference, Tech. Digest, 704-9, Miyazaki, Japan, January 2000.

  35. Richard S. Muller, "MEMS, Quo Vadis in Century XXI?" (invited) International Micro and Nano Engineering Conference, p. 61, Rome, Italy, September 21-23, 1999.

  36. Robert A. Conant, Jocelyn T. Nee, Matthew R. Hart, Kam Y. Lau, and Richard S. Muller, "Robustness and Reliability of Micromachined Scanning Mirrors," MOEMS '99: IEEE/LEOS, IEEJ/SAMS Intern. Conf. on Optical MEMS and Their Applications, Mainz, Germany, Aug. 30-Sept 1, 1999.

  37. P. M. Hagelin, U. Krishnamoorthy, R. Conant, R. S. Muller, K. Lau, O. Solgaard, "Integrated Micromachined Scanning Display Systems," 18th Congress Intern. Commission for Optics, San Francisco, CA, August 1999.

  38. M. R. Hart, R. Conant, K. Y. Lau, R. S. Muller, "Stroboscopic phase-shifting interferometry for dynamic characterization of optical MEMS," 18th Congress Intern. Commission for Optics, San Francisco, CA, August 1999.

  39. Matthew Hart, Robert A. Conant, Kam Y. Lau, and Richard S. Muller, "Time-resolved Measurement of Optical MEMS Using Stroboscopic Interferometry," TRANSDUCERS '99, 10th International Conference on Solid-State Sensors & Actuators, Tech. Digest 470-3, Sendai, Japan, 6-11 June 1999.

  40. Robert A. Conant, Kam Y. Lau, Richard S. Muller, Uma Krishnamoorthy, Olav Solgaard, "A Full-motion Video Display Using Micromachined Scanning Micromirrors," TRANSDUCERS '99, 10th International Conference on Solid-State Sensors & Actuators, Tech. Digest 376-9, Sendai, Japan, 6-11 June 1999.

  41. Richard S. Muller, "MEMS: the Promise for the 3rd Millennium," (invited), ISTM/99, 3rd International Symposium on Test & Measurement, Xian, China, June 2, 1999.

  42. Robert A. Conant and Richard S. Muller, "Cyclic Fatigue Testing of Surface-Micromachined Thermal Actuators," ASME Intern. Mechanical Engineering Congress & Exposition, DSC-2: MEMS Tribology and Material Issues, Vol. DSC 5A "MEMS Sensors Processing and Tools," 273-277, Anaheim, CA, 18 November 1998.

  43. J. T. Nee, K. Y. Lau, and R. S. Muller, "Scanning Blazed Gratings for High-Resolution Spectroscopy," Solid-State Sensor and Actuator Workshop, late-news paper, Transducer Research Foundation, Hilton Head Island, SC, 8-11 June 1998.

  44. Behrang Behin, Kam Y. Lau, and Richard S. Muller, "Magnetically Actuated Micromirrors for Fiber-Optic Switching," Solid-State Sensor and Actuator Workshop, 273-6, Transducer Research Foundation, Hilton Head Island, SC, 8-11 June 1998.

  45. Richard S. Muller, "Surface Micromachining for Microphotonics," (invited), IEEE/LEOS, IEEJ/SAMS Intern. Conf. on Optical MEMS and Their Applications, MOEMS97, Tech. Digest, 109-14, Nara, Japan, 18-21 Nov. 1997.

  46. Richard S. Muller, "Surface Micromachining at BSAC," (invited), Institute of Electrical Engineers of Japan: Meeting on Sensors and Micromechines, Tech. Digest, 2-6, Waseda Univ., Tokyo, Japan, 18-19 Nov. 1997.

  47. Roger L. Hipwell, Richard S. Muller, and Albert P. Pisano, "Characterization of Thin-Film Impact Microactuators," ASME Intern. Mech. Eng. Conf. and Expo., DSC-Vol. 62, HTD-Vol. 354, pp. 87-92, Dallas, TX, 16-21 Nov. 1997.

  48. Richard S. Muller, "BSAC Research on MEMS," (invited), XII Conference of the Brazilian Microelectronics Society, Hotel Gloria, Caxambu, Brazil, 28 July- 1 August 1997.

  49. Kirt R. Williams and Richard S. Muller, "Micromachined Hot-Filament Ionization Pressure Sensor and Magnetometer," TRANSDUCERS '97: 9th Intern. Conf. on Sensors and Actuators, IEEE and Transducers Research Foundation, Chicago, IL, 1249-52, 16-19 June 1997.

  50. Meng-Hsiung Kiang, Dan A. Francis, Connie J. Chang-Hasnain, Olav Solgaard, Kam Y. Lau, and Richard S. Muller, "Actuated Polysilicon Micromirrors for Raster-Scanning Displays," TRANSDUCERS '97: 9th Intern. Conf. on Sensors and Actuators, IEEE and Transducers Research Foundation, Chicago, IL, 323-26, 16-19 June 1997.

  51. Meng-Hsiung Kiang, Jocelyn T. Nee, Kam Y. Lau, and Richard S. Muller, "Surface-Micromachined Diffraction Gratings for Scanning Spectroscopic Applications," TRANSDUCERS '97: 9th Intern. Conf. on Sensors and Actuators, IEEE and Transducers Research Foundation, Chicago, IL, 343-345, 16-19 June 1997.

  52. Meng-Hsiung Kiang, Olav Solgaard, R. S. Muller, and K. Y. Lau, "Micromachined Microscanners for Optical Scanning," (late news), Photonics West: SPIE Conference in Miniaturized Systems with Micro-optics and Micromechanics, Proc. Vol 3008, 82-90, San Jose, CA, 8-14 Feb., 1997.

  53. D. A. Francis, M.-H. Kiang, K. Y. Lau, R. S. Muller, and C. J. Chang-Hasnain, "2D Beam-Scanning Using a Fan Laser Array and Silicon Micromachined Microscanner," IEEE Lasers and Electro-Optics Society Annual Meeting,(late news), Boston, MA, 18-21 Nov. 1996.

  54. Meng-Hsiung Kiang, Olav Solgaard, R. S. Muller, and K. Y. Lau, "High-Precision Silicon Micromachined Micromirrors for Laser Beam Scanning and Positioning," Solid-State Sensor and Actuator Workshop, (late news), Transducer Research Foundation, Hilton Head Island, SC, 2-6 June 1996.

  55. Jack W. Judy and Richard S. Muller, "Batch-Fabricated, Addressable, Magnetically Actuated Microstructures," Solid-State Sensor and Actuator Workshop, 187-90, Transducer Research Foundation, Hilton Head Island, SC, 2-6 June 1996.

  56. M. J. Daneman, N. C. Tien, O. Solgaard, K. Y. Lau, R. S. Muller, "Linear Vibromotor-Actuated Micromachined Microreflector for Integrated Optical Systems," Solid-State Sensor and Actuator Workshop, 109-12, Transducer Research Foundation, Hilton Head Island, SC, 2-6 June 1996.

  57. M. J. Daneman, N. C. Tien, O. Solgaard, K. Y. Lau, R. S. Muller, "Actuated Micromachined Microreflector with Two Degrees of Freedom for Integrated Optical Systems," Integrated Photonics Research Conference, 6, 541-4, Boston MA, 29 April-2 May 1996.

  58. M.-H. Kiang, O. Solgaard, R. S. Muller, and K. Y. Lau, "Design and Fabrication of High-Performance Silicon Micromachined Resonant Microscanners for Optical Scanning Applications," Integrated Photonics Research Conference, 6, 545-8, Boston MA, 29 April-2 May 1996.

  59. Meng-Hsiung Kiang, Olav Solgaard, Richard S. Muller and Kam Y. Lau, "Surface-Micromachined Electrostatic-Comb Driven Scanning Micromirrors for Barcode Scanners," IEEE MEMS '96 Workshop, 192-7, San Diego, CA, 11-15 February 1996.

  60. N. C. Tien, M.-H. Kiang, M. J. Daneman, O. Solgaard, K. Y. Lau, and R. S. Muller, "Actuation of Polysilicon Surface-Micromachined Mirrors," SPIE Conference, Proceedings, Vol. 2687, San Jose, CA, 27 Jan.-2 Feb. 1996.

  61. Jack W. Judy and Richard S. Muller, "Fabrication Processes for Magnetic Microactuators with Polysilicon Flexures," Fall Meeting of the Electrochemical Soc., Chicago, IL, 9-13 October, 1995.

  62. N. C. Tien, O. Solgaard, M.-H. Kiang, M. Daneman, K. Y. Lau and R. S. Muller, "Surface-micromachined mirrors for laser-beam positioning," TRANSDUCERS '95: IEEE Intern. Conf. on Solid-State Sensors and Actuators, Tech. Digest 352-5, Stockholm, Sweden, 25-29 June, 1995.

  63. Jack W. Judy and Richard S. Muller, "Magnetic microactuation of torsional polysilicon structures," TRANSDUCERS '95: IEEE Intern. Conf. on Solid-State Sensors and Actuators, Tech. Digest 332-5, Stockholm, Sweden, 25-29 June, 1995.

  64. M.-H. Kiang, O. Solgaard, M. Daneman, N. C. Tien, R. S. Muller and K. Y. Lau, "High-precision silicon-micromachined micromirrors with on-chip actuation for external-cavity semiconductor lasers," Conf. on Lasers and Electro-optics (CLEO), Vol. 15 Tech. Digest 248-9, Baltimore, MD, May, 1995.

  65. M. Daneman, O. Solgaard, N. C. Tien, R. S. Muller, K. Y. Lau, "Integrated Laser to Fiber Coupling Module using a Micromachined Alignment Mirror," Conf. on Lasers and Electro-optics (CLEO), Baltimore, MD, May, 1995.

  66. Solgaard, M. Daneman, N. C. Tien, A. Friedberger, R. S. Muller, and K. Y. Lau, "Precision and performance of polysilicon micromirrors for hybrid integrated optics," SPIE International Symposium on Optoelectronic, Microphotonics and Laser Technologies, Conference 2383A, San Jose, CA, 4-10 February 1995.

  67. M. J. Daneman, N. C. Tien, O. Solgaard, A. P. Pisano, K. Y. Lau, and R. S. Muller, "Linear Microvibromotor for Positioning Optical Components," MEMS '95, 1995 Intern. Conference on Microelectromechanical Systems, Amsterdam, the Netherlands, January 1995.

  68. N. C. Tien, M. Daneman, O. Solgaard, K. Y. Lau, and R. S. Muller, "Impact-actuated linear microvibromotor for micro-optical systems on silicon," IEEE Intern. Electr. Dev. Mtg., San Francisco, CA, Tech Digest 924-926, 12-14 December, 1994.

  69. Yao-Joe Yang, Chang-Jin Kim, Hirotsugo Matoba, and Richard S. Muller, "Thermal Analysis of a Bistable Microactuator," ASME Winter Annual Mtg., DSC-Vol. 55-2, 687-93, Chicago, IL, 6-11 Nov. 1994.

  70. Hirotsugu Matoba, Chang-Jin Kim, and Richard S. Muller, "Fabrication of a Bistable Snapping Microactuator," MICRO SYSTEM Technologies 94, 4th Intern. Conf. on Micro-Electro-Opto Mechanical Systems and Components, Tech. Dig. 1005-13, Berlin, Germany, 19-21 October 1994.

  71. Richard S. Muller, "MEMS Research at Berkeley-- Polysilicon Devices and Systems," (invited), MICRO SYSTEM Technologies 94, 4th Intern. Conf. on Micro-EElectro-Opto Mechanical Systems and Components, Tech. Dig. 319-22, Berlin, Germany, 19-21 October 1994.

  72. N. C. Tien, O. Solgaard, M. Daneman, A. Friedberger, K. Lau, and R. S. Muller, "Movable, High-Aspect Ratio Micromirror for Optoelectronic Applications," Solid-State Sensor and Actuator Workshop, Late News Poster Paper, Transducer Research Foundation, Hilton Head Island, SC, 13-16 June 1994.

  73. Jack W. Judy, R. S. Muller, and H. H. Zappe, "Magnetic Microactuation of Polysilicon Flexure Structures," Solid-State Sensor and Actuator Workshop, Tech. Dig. 43-8, Transducer Research Foundation, Hilton Head Island, SC, 13-16 June 1994.

  74. Peter Y. Chen and R. S. Muller, "Microchopper-Modulated IR Microlamp," Solid-State Sensor and Actuator Workshop, Tech. Dig. 239-42, Transducer Research Foundation, Hilton Head Island, SC, 13-16 June 1994.

  75. Solgaard, M. Daneman, N. C. Tien, A. Friedberger, R. S. Muller, and K. Y. Lau, "Micromachined alignment mirrors for active optoelectronic packaging," late-news paper CPD6-1/15, Conference on Lasers and Electro-Optics (CLEO), Anaheim, CA, 9-13 May 1994.

  76. Richard S. Muller, "Microelectronics, Micromechanics, Microdynamics, and MEMS," (invited),IEEE CANDE, Mandalay Beach Resort, Oxnard, CA, 18 April 1994.

  77. Hirotsugu Matoba, Toshio Ishikawa, Chang-Jin Kim, and Richard S. Muller, "A Bistable Snapping Microactuator," MEMS: IEEE 7th Intern. Workshop, Tech. Digest, 45-50, Kanagawa, Japan, January 1994.

  78. Robert P. Ried, David M. Hong, and Richard S. Muller, "Modulation of Micromachined-Microphone Frequency Response Using an On-diaphragm Heater," ASME Winter Annual Meeting, Tech. Digest DSC Vol. 46, 7-12, New Orleans, LA, 28 Nov.- 3 Dec. 1993.

  79. Richard S. Muller, "Micromachining Today," (invited), IEEE Intern. Vacuum Microcircuits Conference, Newport, RI, 12-15 June 1993.

  80. Liwei Lin, Albert P. Pisano, and Richard S. Muller, "Silicon Processed Microneedles," TRANSDUCERS '93, 7th Intern. Conference on Sensors and Actuators, sponsored by IEE Japan and the Japan Science Foundation, Tech. Digest 237-40, Yokohama, Japan, June 7-10, 1993.

  81. David P. Loconto and Richard S. Muller, "Sensitive, High-Impedance Micromechanical Electrostatic Voltmeter," TRANSDUCERS '93, 7th Intern. Conference on Sensors and Actuators, sponsored by IEE Japan and the Japan Science Foundation, Tech. Digest 878-81, Yokohama, Japan, June 7-10, 1993.

  82. Kirt R. Williams and Richard S. Muller, "IC-Processed Hot-Filament Vacuum Microdevices," IEEE Intern. Electr. Devices Meeting, Tech. Digest, 387-390, San Francisco, CA, December 13-16, 1992.

  83. Robert P. Ried, Eun-Sok Kim, David M. Hong, and Richard S. Muller, "Residual-Stress Compensation in Clamped-Clamped Micromachined Plates," ASME Winter Annual Meeting: Micromechanical Systems, DSC vol. 40, 23-32, Anaheim, CA, 10-13 November, 1992.

  84. Richard S. Muller, "Materials for Microelectromechanical Systems,"(invited), Intern. Electr. Dev. and Materials Symposium, sponsored by the ROC Ministry of Education in cooperation with IEEE Electr. Dev. Society, Taipei, Taiwan, 1-4 November, 1992.

  85. Richard S. Muller, "Microelectronics, Micromechanics, Microdynamics, and MEMs," (invited), JPL, NASA, NRL Tunnel-Sensors Workshop, Caltech Jet Propulsion Laboratory, Pasadena, CA, 29 July, 1992.

  86. Richard S. Muller, "From Microcircuits to Microsystems," (invited),38th National Symposium American Vacuum Society, Seattle, WA, November 11-15, 1991.

  87. Richard S. Muller, "Formidable Partners: Microelectronics and Micromechanics," (invited), VDE MICRO-SYSTEM Technologies 91, Berlin, Germany, 29 October-1 November, 1991.

  88. Rolfe C. Anderson, Richard S. Muller, and Charles W. Tobias, "Laterally Grown Porous Polycrystalline Silicon: a New Material for Transducer Applications," TRANSDUCERS '91, IEEE Intern. Conference on Sensors and Actuators, Tech. Digest 747-50, San Francisco, CA, June 24-28, 1991.

  89. C. H. Hsu and R. S. Muller, "Micromechanical Electrostatic Voltmeter," TRANSDUCERS '91, IEEE Intern. Conference on Sensors and Actuators, Tech. Digest 659-62, San Francisco, CA, June 24-28, 1991.

  90. Chang-Jin Kim, Albert P. Pisano, and Richard S. Muller, "Overhanging Electrostatic Microgripper," TRANSDUCERS '91, IEEE Intern. Conference on Sensors and Actuators, Tech. Digest 610-13, San Francisco, CA, June 24-28, 1991.

  91. Carlos H. Mastrangelo and Richard S. Muller, "Design and Performance of Constant-Temperature Circuits for Microbridge-Sensor Applications," TRANSDUCERS '91, IEEE Intern. Conference on Sensors and Actuators, Tech. Digest 471-4, San Francisco, CA, June 24-28, 1991.

  92. E. S. Kim, J. R. Kim, and R. S. Muller, "Improved IC-Compatible Piezoelectric Microphone and CMOS Process," TRANSDUCERS '91, IEEE Intern. Conference on Sensors and Actuators, Tech. Digest 270-3, San Francisco, CA, June 24-28, 1991.

  93. Carlos H. Mastrangelo and Richard S. Muller, "Fabrication and Performance of a Fully Integrated Micro-Pirani Pressure Gauge with Digital Readout," TRANSDUCERS '91, IEEE Intern. Conference on Sensors and Actuators, Tech. Digest 245-8, San Francisco, CA, June 24-28, 1991.

  94. C. H. Mastrangelo and R. S. Muller, "Thermal Absolute-Pressure Sensor with On-Chip Digital Front-End Processor," IEEE Intern. Solid-State Circuits Conference, Paper TPM 11.5, 188-9, San Francisco, CA, February 14, 1991.

  95. Chang-Jin Kim, Albert P. Pisano, Richard S. Muller, and Martin G. Lim, "Design, Fabrication and Testing of a Polysilicon Microgripper," ASME Winter Annual Meeting, Tech. Digest, 99-109, Dallas, TX, Nov. 25-30, 1990.

  96. Rolfe C. Anderson, Richard S. Muller, and Charles W. Tobias, "Investigations of the Electrical Properties of Porous Silicon," 178th Fall Meeting of the Electrochemical Society, Extended Abstracts, Vol. 90-2, 1081, Seattle, WA, October 14-19, 1990.

  97. Chang-Jin Kim, Albert P. Pisano, Richard S. Muller, and Martin G. Lim, "Polysilicon Microgripper," IEEE Solid-State Sensor and Actuator Workshop, Tech. Digest, 48-51, Hilton Head Island, SC, June 4-7, 1990.

  98. R.S. Muller, "Polycrystalline Silicon as a Mechanical Material," (invited) Spring Annual Meeting Materials Research Society, San Francisco, CA, 16-20 April, 1990.

  99. R.S. Muller, "Micromechanics and Microdynamics," (invited), March Annual Meeting American Physical Society, Anaheim, CA, 12-16 March, 1990.

  100. Y. -C. Tai and R. S. Muller, "Measurement of Young's Modulus on Microfabricated Structures Using a Surface Profiler," MEMS: 3rd IEEE Workshop on Micro Electromechanical Systems, Napa Valley, CA, 12-14 February, 1990.

  101. L. -S. Fan, R. S. Muller, W. Yun, R. T. Howe, and J. Huang, "Spiral Microstructures for the Measurement of Average Strain Gradients in Thin Films," MEMS: 3rd IEEE Workshop on Micro Electromechanical Systems, Napa Valley, CA, 12-14 February, 1990.

  102. R. S. Muller, "Materials and Technologies for Surface Micromechanics," (invited) Winter Annual Meeting, American Society of Mechanical Engineers, San Francisco, CA,(December 13, 1989).

  103. E. S. Kim, R. S. Muller, and P. R. Gray, "Integrated Microphone with CMOS Circuits on a Single Chip," IEEE Intern. Electr. Devices Meeting, 880-3, Washington, DC, (December 4-6, 1989).

  104. C. H. Mastrangelo and R. S. Muller, "Vacuum-sealed Silicon Micromachined Incandescent Light Source," IEEE Intern. Electr. Devices Meeting, 503-6, Washington, DC, (December 4-6, 1989).

  105. R. S. Muller, "Microdynamics," (invited), Third Toyota Conference on Integrated Micro-motion Systems, Nissin, Aichi, Japan,(22-25 October, 1989).

  106. R. S. Muller, "Microdynamic Structures on Silicon," European Scientific Symposium, Hewlett-Packard Laboratories, Paris, France, Tech. Digest, 15-24 (September 20-21, 1989).

  107. R. S. Muller, "Microdynamic Structures on Silicon," (invited), VLSI 89, Intern. Conf. of IFIP, the Intern. Federation for Information Processing, Munich, Germany, Tech. Digest 487-93, (16-18 August, 1989).

  108. R. S. Muller, “Microdynamics," (invited) SPIE Conference on Precision Engineering and Optomechanics, San Diego, CA, (August 10-11, 1989).

  109. Leslie A. Field and Richard S. Muller, "Fusing Silicon Wafers with Low-melting-temperature Glass," TRANSDUCERS '89, 5th International Conference on Sensors and Actuators, Montreux, Switzerland, (25-30 June, 1989), Sensors and Actuators, A21-A23, 935-38 (1990).

  110. Long-Sheng Fan, Roger T. Howe, and Richard S. Muller, "Fracture-toughness Characterization of Brittle Thin Films," TRANSDUCERS '89, 5th International Conference on Sensors and Actuators, Montreux, Switzerland, (25-30 June, 1989), Sensors and Actuators, A21-A23, 872-74 (1990).

  111. Carlos H. Mastrangelo, Yu-Chong Tai, and Richard S. Muller, "Thermophysical Properties of Low-Residual Stress Silicon-Rich LPCVD Silicon Nitride Films," TRANSDUCERS '89, 5th International Conference on Sensors and Actuators, Montreux, Switzerland, (25-30 June, 1989), Sensors and Actuators, A21-A23, 856-60 (1990).

  112. Rolfe C. Anderson, Richard S. Muller, and Charles W. Tobias, "Investigations of Porous Silicon for Vapor Sensing," TRANSDUCERS '89, 5th International Conference on Sensors and Actuators, Montreux, Switzerland, (25-30 June, 1989), Sensors and Actuators, A21-A23, 835-39 (1990).

  113. Yu-Chong Tai and Richard S. Muller, "Integrated Stylus Force Gauges," TRANSDUCERS '89, 5th International Conference on Sensors and Actuators, Montreux, Switzerland, (25-30 June, 1989), Sensors and Actuators, A21-A23, 410-13 (1990).

  114. Yu-Chong Tai and Richard S. Muller, "Frictional Study of IC-Processed Micromotors," TRANSDUCERS '89, 5th International Conference on Sensors and Actuators, Montreux, Switzerland, (25-30 June, 1989), Sensors and Actuators, A21-A23, 180-3(1990).

  115. R. S. Muller, "Microdynamics," (invited), TRANSDUCERS '89, 5th International Conference on Sensors and Actuators, Montreux, Switzerland, (25-30 June, 1989), Sensors and Actuators, A21-A23, 1-8 (1990).

  116. Raif S. Hijab and Richard S. Muller, "Residual Strain Effects on Large Aspect Ratio Micro-Diaphragms," IEEE Micro Electromechanical Workshop, 133-8, Salt Lake City, UT, (February 20-22, 1989).

  117. L. -S. Fan, R. T. Howe, and R. S. Muller, "Microstructures for Fracture Toughness Characterization of Brittle Thin Films," IEEE Micro Electromechanical Workshop, 40-1, Salt Lake City, UT, (February 20-22, 1989).

  118. Y. -C. Tai, L. -S. Fan, and R. S. Muller, "IC-Processed Micromotors Design, Technology, and Testing," IEEE Micro Electromechanical Workshop, 1-6, Salt Lake City, UT, (February 20-22, 1989).

  119. L. -S. Fan, Y. -C. Tai, and R. S. Muller, "IC-Processed Electrostatic Micromotors," IEEE Intern. Electr. Devices Meeting,666-9, San Francisco, CA, (awarded "Outstanding Student Paper Award”) (December 11-14, 1988).

  120. R. S. Muller, Panelist for "Silicon Sensors - Pathways to Commercialization," IEEE Intern. Electr. Devices Meeting, San Francisco, CA, (December 11-14, 1988).

  121. R. S. Muller, "IC-Compatible Micromechanics," (invited), Amer. Inst. of Chemical Eng. 80th Annual Meeting, Washington, DC, (Nov. 27- Dec. 2, 1988).

  122. R. S. Muller, "Integrated Circuits and Micromechanisms," (invited), Power-Control and Integration Conference, Dearborn, MI, (October 3-7, 1988).

  123. R. S. Muller, "Microstructures on Silicon-- A New Dimension for Mechanisms," (invited), 196th American Chemical Society Meeting, Los Angeles, CA, (Sept 27, 1988).

  124. K. S. Udell, A. P. Pisano, R. T. Howe, R. M. White, and R. S. Muller, "Microsensors for Heat Transfer and Fluid-Flow Measurements," (invited), 1st World Conference on Experimental Heat Transfer, Fluid Mechanics, and Thermodynamics, Dubrovnik, Yugoslavia, (Sept. 4-9, 1988).

  125. C. H. Mastrangelo and R. S. Muller, "A Constant-Temperature Gas Flowmeter with a Silicon Micromachined Package," IEEE Solid-State Sensor and Actuator Workshop, Tech. Digest 43-6, Hilton Head Island, SC, (June 6-9, 1988).

  126. L. -S. Fan and R. S. Muller, "As-Deposited Low-Strain LPCVD Polysilicon," IEEE Solid-State Sensor and Actuator Workshop, Tech. Digest 55-8, Hilton Head Island, SC, (June 6-9, 1988).

  127. Y. -C. Tai and R. S. Muller, "Fracture Strain of LPCVD Polysilicon," IEEE Solid-State Sensor and Actuator Workshop, Tech. Digest 88-92, Hilton Head Island, SC, (June 6-9, 1988).

  128. Richard S. Muller, "Technologies and Materials for Microsensors and Actuators," (invited), 7th Japanese Sensor Symposium, Tech. Digest 7-11, Tokyo, Japan, (May 30-31, 1988).

  129. L. -S. Fan, Y. -C. Tai, and R. S. Muller, "Movable Silicon Microstructures," SPIE-Intern. Soc. for Opt. Eng. 1988 O.E. Lase Symposium, Los Angeles, CA, (Jan 10-15, 1988).

  130. Y. -C. Tai, C. Mastrangelo, and R. S. Muller, "Thermal Conductivity of Heavily Doped LPCVD Polysilicon," IEEE Intern. Electr. Dev. Mtg., Tech. Digest, 278-281, Washington, DC (Dec. 6-9, 1987).

  131. J. Chung and R. S. Muller, "The Development and Applications of a Si-SiO2 Interface-State Measurement System based on a Staircase Charge-Pumping Technique," IEEE Semiconductor Interface Specialist's Conference, Fort Lauderdale, FL (Dec. 3-5, 1987).

  132. R. S. Muller, "From ICs to Microstructures Materials and Technologies," (invited) IEEE Conf. on Microrobots and Teleoperators, IEEE Catalog No. 87TH0204-8, Hyannis, MA, (this workshop began the MEMS Intern. Conference Series) (Nov. 9-11, 1987).

  133. R. S. Muller, "Transducing Films and Micromechanics for Integrated Sensors," (invited), Electrochemical Soc. Fall Meeting, Extended Abstracts 87-2, 750, Honolulu, HI (Oct. 18-23, 1987).

  134. E. S. Kim and R. S. Muller, "Piezoelectric Readout Miniature Microphone," International Hybrid Materials Symposium, ISHM '87, Proceedings, 290-5, Minneapolis, MN (Sept. 28-30, 1987).

  135. L. -S. Fan, Y. -C. Tai, and R. S. Muller, "Pin Joints, Gears, Springs, Cranks, and Other Novel Micromechanical Structures," TRANSDUCERS '87, 4th Intern. IEEE & Electrochemical Society Conf. on Solid-State Sensors and Actuators, Tech. Digest 849-52, Tokyo, Japan (June 2-5, 1987).

  136. Y. -C. Tai and R. S. Muller, "Lightly doped Polysilicon Bridge as an Anemometer," TRANSDUCERS '87, 4th Intern. IEEE & Electrochemical Society Conf. on Solid-State Sensors and Actuators, Tech. Digest 360-3, Tokyo, Japan (June 2-5, 1987).

  137. R. S. Muller, "Strategies for Sensor Research," (invited), TRANSDUCERS '87, 4th Intern. IEEE & Electrochemical Society Conf. on Solid-State Sensors and Actuators, Tech. Digest 107-11, Tokyo, Japan (June 2-5, 1987).

  138. L. A. Field and R. S. Muller, "Low-Temperature Silicon-Silicon Bonding With Oxides," Electrochemical Society Spring Meeting, Tech. Digest 333-4, Philadelphia, PA, (May 10-15, 1987).

  139. R. S. Muller, "Advances in Piezoelectric Films and Microstructures," (invited), Electrochemical Society Symposium on Sensor Science and Technology, Cleveland, OH, (April 6-8, 1987).

  140. E. S. Kim and R. S. Muller, "Micromachined ZnO on Silicon Nitride Pressure Sensor," IEEE Intern. Conf. on Electr. Devices, Los Angeles, CA, (Dec 8-10, 1986).

  141. R. S. Muller, "New Opportunities with Integrated Sensors" (invited), BIOTECH International Conference and Exhibition,Volume 2 Part 5, 47-53, San Francisco, CA (Nov 18-20, 1986).

  142. A. K. Oki and R. S. Muller, "Integrated Polysilicon Tactile Sensor," IEEE Solid-State Sensors Workshop, Hilton Head Island, SC (June 2-5, 1986).

  143. D. L. Polla and R. S. Muller, "Zinc-Oxide Thin Films for Integrated-Sensor Applications," IEEE Solid-State Sensors Workshop, Hilton Head Island, SC (June 2-5, 1986).

  144. R. S. Muller, "Smart Sensors," (invited) AIME Annual Meeting, New Orleans, LA (March 3, 1986).

  145. J. I. Goicolea and R. S. Muller, "A Silicon Magneto-Coupler Using A Carrier-Domain Magnetometer," IEEE Intern. Conf. on Electr. Devices, Tech. Digest 276-9, Washington DC (December 2-4, 1985).

  146. D. L. Polla, W. T. Chang, R. S. Muller, and R. M. White, "Integrated Zinc Oxide-on-Silicon Tactile-Sensor Array," IEEE Intern. Conf. on Electr. Devices, Washington DC (December 2-4, 1985).

  147. R. S. Muller, "New Industry/University Center for the Study of Integrated Sensors," IEEE WESCON Conference and Convention, San Francisco, CA, (November 20-22, 1985).

  148. K. Uozumi, R. M. White, and R. S. Muller, "IDT-generated Ultrasonic Lamb Waves in a Very Thin Membrane," IEEE Intern. Ultrasonics Symposium, San Francisco, CA (October 16-18, 1985).

  149. D. L. Polla, R. S. Muller, and R. M. White, "Pyroelectric Properties and Applications of Sputtered Zinc Oxide Thin Films," IEEE Intern. Ultrasonics Symposium, San Francisco, CA (October 16-18, 1985).

  150. D. L. Polla, R. M. White, and R. S. Muller, "Integrated Chemical-Reaction Sensor," TRANSDUCERS '85, IEEE 3rd International Conference on Solid-State Sensors and Actuators, 33-6, Philadelphia, PA, (June 11-14, 1985).

  151. Y. -C. Tai, R. S. Muller, and R. T. Howe, "Polysilicon Bridges for Anemometer Applications," TRANSDUCERS '85, IEEE 3rd International Conference on Solid-State Sensors and Actuators, 354-6, Philadelphia, PA, (June 11-14, 1985).

  152. R. S. Hijab and R. S. Muller, "Micromechanical Thin-Film Cavity Structures for Low Pressure and Acoustic Transducer Applications," TRANSDUCERS '85, IEEE 3rd International Conference on Solid-State Sensors and Actuators, 178-81, Philadelphia, PA, (June 11-14, 1985).

  153. J. I. Goicolea, R. S. Muller, and J. E. Smith, "An Integrable Silicon Carrier-Domain Magnetometer with Temperature Compensation," TRANSDUCERS '85, IEEE 3rd International Conference on Solid-State Sensors and Actuators, 300-3, Philadelphia, PA, (June 11-14, 1985).

  154. R. T. Howe and R. S. Muller, "Frequency Response of Polycrystalline Silicon Microbridges," TRANSDUCERS '85, IEEE 3rd International Conference on Solid-State Sensors and Actuators, 101-4, Philadelphia, PA, (June 11-14, 1985).

  155. L. -S. Fan, R. M. White, and R. S. Muller, "Mutual Capacitive Normal- and Shear-Sensitive Tactile Sensor," IEEE Intern. Electr. Dev. Meeting, 220-2, San Francisco, California, (December 10-12, 1984).

  156. D. L. Polla, R. S. Muller, and R. M. White, "Fully Integrated Zinc Oxide on Silicon Pyroelectric Infrared Detector Array," IEEE Intern. Electr. Dev. Meeting, 382-4, San Francisco, California, (December 10-12, 1984).

  157. R. T. Howe and R. S. Muller, "Integrated Resonant Microbridge Vapor Sensor," IEEE Intern. Electr. Dev. Meeting, 213-6, San Francisco, California, (December 10-12, 1984).

  158. Richard S. Muller, "Integrating Sensors and Electronics-- New Challenges for Silicon," (invited) IEEE Intern. Electr. Dev. Meeting, 206-9, San Francisco, California, (Decemmber 10-12, 1984).

  159. Richard S. Muller, "Technologies for Integrated Sensors," Government Microcircuit Applications Conference, 276-9, Las Vegas, Nevada, (November 6-8, 1984).

  160. Roger T. Howe and Richard S. Muller, "Resonant Polysilicon Microbridge with Integrated NMOS-Detection Circuitry," Electrochemical Society Fall Meeting, New Orleans, Louisiana, (October 7-12, 1984).

  161. Richard S. Muller, "Perspectives on Integrated Sensors," (invited) Electrochemical Society Fall Meeting, New Orleans, Louisiana, (October 7-12, 1984).

  162. Richard S. Muller, "New Dimensions for Integrated Sensors," (invited) IEEE Workshop on Solid-State Sensors and Actuators, Hilton Head Island, South Carolina, (June 6-9, 1984).

  163. D. L. Polla, R. S.Muller and R. M. White, "Monolithic Integrated Zinc Oxide on Silicon Pyroelectric Anemometer," IEEE Intern. Electr. Dev. Mtg., Tech. Digest 639-41, Washington, DC, (Dec. 5-7, 1983).

  164. Richard S. Muller, "Strain and Heat-Sensitive Thin-Film Transducers," (invited), TRANSDUCERS '83, 2nd Intern. Conf. on Solid-State Sensors and Actuators, Tech Digest 93, Tech. Univ. of Delft, Netherlands, (May 31-June 3, 1983).

  165. R. T. Howe and R. S. Muller, "Micro-Mechanical Properties of Polycrystalline and Amorphous Silicon Films," TRANSDUCERS '83, 2nd Intern. Conf. on Solid-State Sensors and Actuators, Tech Digest 61, Tech. Univ. of Delft, Netherlands, (May 31-June 3, 1983).

  166. C. Hu, S. Tam, F. -C. Hsu, R. S. Muller and P. K. Ko, "Correlating the Channel, Substrate, Gate, and Minority-Carrier Currents in MOSFETs," IEEE Intern. Solid-State Circuits Conf., Tech. Digest 88-9, New York, NY (Feb 23, 1983).

  167. F. -C. Hsu, R. S. Muller, and C. Hu, "Characteristics of Short-Channel MOSFETs in the Breakdown Regime," Intern. Electr. Dev. Meeting, Tech. Digest 282-5, San Francisco, CA (Dec. 1982).

  168. F. -C. Hsu, P. K. Ko, S. Tam, R. S. Muller, and C. Hu, "Avalanche-Induced Breakdown Mechanisms in Short-Channel MOSFETs," IEEE Solid-State Device Research Conf., Colorado State University, Fort Collins, CO, (June 21-23, 1982).

  169. S. Tam, P. K. Ko, F -C. Hsu, C. Hu, and R. S. Muller, "Hot-Electron Induced Excess Carriers in n-Channel MOSFETs," IEEE Solid-State Device Research Conf., Colorado State University, Fort Collins, CO, (June 21-23, 1982).

  170. R. T. Howe and R. S. Muller, "Polycrystalline Silicon Micromechanical Beams," Spring Meeting of the Electrochemical Society, Montreal, Canada, (May 9-14, 1982).

  171. M. E. Motamedi, A. P. Andrews, R. Colton, E. Staples, R. S. Muller, and P. -L. Chen, "Application of Electrochemical Etch-Stop in Processing a Silicon Accelerometer," Spring Meeting of the Electrochemical Society, Montreal, Canada, (May 9-14, 1982).

  172. P. K. Ko, R. S. Muller, and C. Hu, "A Unified Model for Hot-Electron Currents in MOSFETs," IEEE Intern. Electr. Dev. Meeting, Washington DC, (Dec. 7-9, 1981).

  173. A. E. Comer and R. S. Muller, "A Monolithic ZnO/Si PI-DMOS SAW Convolver," IEEE Ultrasonics Symposium, Chicago, IL, (Oct. 14-16, 1981).

  174. Richard S. Muller, "The New Wave of Sensors," European Solid-State Device Research Conf., (invited) Toulouse, France, (Sept. 14-17, 1981).

  175. J. I. Goicolea, R. S. Muller, and J. E. Smith, "Highly Sensitive Integrable Silicon Carrier-Domain Magnetometer," IEEE Intern. Solid-State Device Research Conf., University of California, Santa Barbara, (June 22-24, 1981).

  176. S. Tam, P. K. Ko, C. Hu, and R. S. Muller, "Correlation Between Substrate and Gate Currents in MOSFETs," IEEE Intern. Solid-State Device Research Conf., University of California, Santa Barbara, (June 22-24, 1981).

  177. P. -L. Chen, R. S. Muller, R. Jolly, G. Halac, R. M. White, A. P. Andrews, and M. E. Motamedi, "A Planar Processed PI-FET Accelerometer," IEEE Intern. Electr. Dev. Meeting, Washington, D.C., (Dec. 8-10, 1980).

  178. P. -L. Chen, R. S. Muller, R. M. White, and R. Jolly, "Thin-Film ZnO-MOS Transducer with Virtually DC Response," IEEE Ultrasonics Symposium, 945-948, Boston, MA, (Nov. 5-7, 1980).

  179. M. T. Fertsch, R. S. Muller, and R. M. White, "Surface-Acoustic-Wave Vapor-Sensing Device," IEEE Intern. Solid-State Device Research Conf, Cornell University, Ithaca, NY, (June 23-25, 1980).

  180. T. Shiosaki, T. Yamamoto, A. Kawabata, R. S. Muller, and R. M. White, "Fabrication and Characterization of ZnO Piezoelectric Films for Sensor Devices," IEEE Intern. Electr. Dev. Meeting, 151-154, Washington, DC,(Dec. 3-5, 1979).

  181. P. K. Ko and R. S. Muller, "Design and Performance of Resistive-Gated MOSFETs for Analog Integrated Circuits," IEEE Intern. Electr. Dev. Meeting, Washington, DC, (Dec. 3-5, 1979).

  182. C. T. Chuang, R. M. White, A. Lee, P. L. Chen, R. S. Muller and T. Shiosaki, "Ultrasonic Receiving Array Having Power Response," IEEE Ultrasonics Symposium, Chicago, IL, (October, 1979).

  183. P. L. Chen, T. Shiosaki, R. S. Muller, and R. M. White, "Silicon Cantilever-Beam Accelerometer Utilizing a PI-FET Capacitive Transducer," IEEE Intern. Solid-State Device Research Conf., University of Colorado, Boulder, CO (June 25-28, 1979).

  184. R. A. Blauschild and R. S. Muller, "An Integrated NMOS Voltage Reference," Workshop: IEEE Solid-State Circuits and Technology Committee and the VLSI Committee of the IEEE Electr. Dev. Society, Hilton Head Island, South Carolina,(Sept. 6-8, 1978).

  185. R. M. White, S. H. Kwan, C. T. Chuang, and R. S. Muller, "Integrated Ultrasonic Transducer," ARPA/AFML Review of Progress in Quantitative Non-Destructive Evaluation, Scripps Inst. of Oceanography, University of Calif., San Diego, (July 17-21, 1978).

  186. R. Amantea and R. S. Muller, "The Effects of Charge Injection on Avalanche-Injected Oxide Current," IEEE Solid-State Device Research Conference, Univ. of Calif., Santa Barbara, CA, (June 26-28, 1978).

  187. S. H. Kwan, R. M. White, and R. S. Muller, "Material and Device Constraints in Piezoelectric FET Strain Transducers," IEEE Solid-State Device Research Conference, Univ. of Calif., Santa Barbara, CA, (June 26-28, 1978).

  188. R. S. Blauschild, P. Tucci, R. G. Meyer, and R. S. Muller, "An NMOS Voltage Reference," IEEE Intern. Solid-State Circuits Conference, San Francisco, CA, (Feb. 15-17, 1978).

  189. S. H. Kwan, R. M. White, and R. S. Muller, "Integrated Ultrasonic Transducer," IEEE Ultrasonics Symposium, IEEE Catalog No. 77CH1264-1SU, Phoenix, AZ, (Oct. 26-28, 1977).

  190. R. Amantea and R. S. Muller, "The Effects of Charge Injection on Gated-Diode Breakdown," IEEE Solid-State Device Research Conference, Cornell University, Ithaca, NY, (June 27-29, 1977).

  191. R. W. Coen and R. S. Muller, "Experimental Determination of Carrier Velocities in Inversion Layers on Silicon," IEEE Solid-State Device Research Conference, Cornell University, Ithaca, NY, (June 27-29, 1977).

  192. S. H. Kwan, R. M. White, and R. S. Muller, "High-Frequency Strain Transducer for Acoustic-Wave Signal Processing," IEEE Solid-State Device Research Conference, Cornell University, Ithaca, NY, (June 27-29, 1977).

  193. S. H. Kwan, R. S. Muller, and R. M. White, "Integrated Ultrasonic Transducer," ARPA/AFML Conf. Review of Progress in Quantitative Nondestructive Evaluation of Materials, Cornell University, Ithaca, NY, (June 14-17, 1977).

  194. K. W. Yeh, S. H. Kwan, and R. S. Muller, "Detection of Acoustic Waves with PI-DMOS Transducers," IEEE Intern. Conf. on Solid-State Devices, Tokyo, Japan, (Sept.1-3, 1976).

  195. R. Amantea and R. S. Muller, "Studies of Localized Charge Injection in Surface-Avalanched PN Junctions," IEEE Intern. Conf. on Solid-State Devices, Tokyo, Japan, (Sept.1-3, 1976).

  196. T. Masuhara and R. S. Muller, "Analytical Techniques for the Design of DMOS Transistors," IEEE Intern. Conf. on Solid-State Devices, Tokyo, Japan, (Sept.1-3, 1976).

  197. K. W. Yeh and R. S. Muller, "Characterization and Fabrication of PI-DMOS Strain Transducers," Electrochemical Society Annual Meeting, Washington, D.C., (May 2-7, 1976).

  198. R. S. Muller and K. W. Yeh, "Piezoelectric Field-Effect Transducers," (invited) IEEE Workshop on Medical Applications of Micro-pressure Transducers, Case Western-Reserve University, Cleveland, Ohio, (Dec. 4-5, 1975).

  199. T. Masuhara and R. S. Muller, "Complementary DMOS Process for LSI," IEEE Intern. Electr. Dev. Meeting, Washington, D.C., (Dec. 1-3, 1975).

  200. K. W. Yeh, W. K. Wu, R. S. Muller and J. Washburn, "Characterization of RF Sputtered Zn0 Piezoelectric Films Using Transmission Electron Microscope," Electron Microscopy Society of America, MGM Grand Hotel, Las Vegas, NV, (Aug. 11-15, 1975).

  201. K. W. Yeh and R. S. Muller, "Piezoelectric Diffused MOS (PI-DMOS) Transistor as Strain Transducer," IEEE Intern. Solid-State Device Research Conf., Ottawa, Canada, (June 24-26, 1975).

  202. R. S. Muller, "Effective Recombination Velocity at a Buried Layer to Epitaxial Interface," IEEE Intern. Solid-State Device Research Conf., Ottawa, Canada, (June 24-26, 1975).

  203. J. T. C. Chen and R. S. Muller, "Barrier Model for Carrier Transport at Weakly Inverted Silicon Surfaces," Intern. Solid-State Device Research Conf., University of Colorado, Boulder, CO, (June 26-28, 1973).

  204. R. S. Muller, "Performance of Resistive-Gated IGFET Structures," Eurocon 1971, 1st European IEEE-Sponsored Convention, Lausanne, Switzerland, (18-22 October 1971).

  205. R. S. Muller, "Progress in Research on Piezoelectric Field-Effect Mechano-Electric Transducers," Eurocon 1971, 1st European IEEE-Sponsored Convention, Lausanne, Switzerland, (18-22 October 1971).

  206. R. S. Muller, "Resistive-Gated IGFET Structures," IEEE Solid-State Device Research Conference, University of Michigan, Ann Arbor, (June 28, 1971).

  207. J.R. Fiebiger and R.S. Muller, "Effects of Low Energy Electron Beam Bombardment on Semiconductor Properties," 138th Mtg of the Electrochem. Soc., Atlantic City, New Jersey, (October, 1970).

  208. J. Conragan and R.S. Muller, "Piezoelectric Field-Effect Transistor Strain Transducers," IEEE Solid-State Sensors Symposium, Minneapolis, Minn., (June 18-19, 1970).

  209. R.S. Muller, "Experimental Studies of IGFET Transconductance Variations," Intern. Conf. on Properties and Uses of MIS Structures, Centre D'Etudes Nucleaires, Grenoble, France,(June 17-20, 1969).

  210. J. E. Schroeder and R.S. Muller, "Studies of IGFET's with Non-equipotential Gates," Intern. Solid-State Device Research Conf., University of Rochester, New York, (June 23-26, 1969).

  211. J. E. Schroeder and R.S. Muller, "Properties of a Field-Aided IGFET," European Solid-State Device Research Conference, IEEE, German Physical Society and the Society of Electrical Engineers, Munich, Germany, (March 24-27, 1969).

  212. T.I. Kamins and R.S. Muller, "Field-Effect Conductance Modulation in Extremely Thin Films of Cesium," IEEE Intern. Solid-State Device Research Conference, Univ. of Colorado, Boulder, CO, (June 19-21, 1968).

  213. J.R. Schroeder and R.S. Muller, "Numerical Calculation of the Field Distribution and Related Device Parameters for MOS Transistors in Saturation," Intern. Electr. Dev. Meeting, Washington DC, (Oct. 18-20, 1967).

  214. R.S. Muller, "Electron-Beam Probing of Semiconductor Materials and Devices," 2nd Symposium on Test Methods and Measurements of Semiconductor Devices, Budapest, Hungary, (April 26, 1967).

  215. R.S. Muller, "Piezoelectric MOS Transducers," European Solid-State Device Research Conf., Bad Nauheim, Germany, (April 20, 1967)

  216. J. R. Fiebiger and R.S. Muller, "An Evaluation of Vacuum-Deposited MIPS Electromechanical Transducers," IEEE Intern. Conf. on Electr. Dev., Washington, D.C., (Oct. 28, 1966).

  217. J. Conragan and R.S. Muller, "The Deposited Piezoelectric MOS Device as an Electromechanical Transducer," Specialists Conference on Thin-Film Electronics, sponsored by IEEE, NASA, ONR, and ARO, Johns Hopkins University, (April 14-15, 1965).

  218. R.S. Muller, "Theoretical Admittance Variation with Frequency in Insulators Having Traps Subject to Charge Injection," Intern. Conf. on Physics of Semiconductors, Paris, France, (July 19-24, 1964).

  219. D.V. Geppert, B.V. Dore, and R.S. Muller, "Graded-Gap, Thin-Film Schottky Barriers," Spring Meeting of the Electrochemical Society, Toronto, Canada, (May, 1964).

  220. R. Zuleeg and R.S. Muller, "Vapor-Deposited, Thin-Film Heterojunction Diodes," Conference on Solid-State Physics,Institute of Physics and the Physical Society, Bristol, England, (January 1-4, 1964).

  221. R.S. Muller and R. Zuleeg, "Space-Charge-Limited Currents and Schottky Emission Currents in Thin-Film CdS Diodes," Intern. Electr. Devices Meeting, Washington,D.C., (Oct.31 - Nov.1, 1963).

  222. R.S. Muller, "Schottky High-Field Emission at Au-CdS Rectifying Contacts," Solid-State Device Research Conference, Michigan State University, East Lansing, Michigan, (June 12-14, 1963).

  223. R.S. Muller, "A Unified Approach to the Theory of Space-Charge-Limited Currents in an Insulator with Traps," Summer Meeting of the Amer. Phys. Soc., APS Bull. 28-30, Edmonton, Alberta, Canada, (August 1963).

  224. R.S. Muller, "Detection of Trapping and Contact Properties Through Capacitance Measurements of Dielectric Crystals Subject to Charge Injection," Conference on Space-Charge Effects in Dielectrics, sponsored by the State University of New York and the U.S. Office of Naval Research, Westhampton Beach, Long Island, June 13-15, 1962 (Conference report in Physics Today; 30-34, October 1962).

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Last updated December 6, 2007