PATENTS

  1. U.S. Patent No. 8,079,246 , David Garmire, Hyuck Choo, Richard S. Muller, James Demmel, and Sanjay Govindjee, Integrated MEMS metrology device using complementary measuring combs , Regents of the University of California, December 20, 2011 .

  2. U.S. Patent No. 7,573,022 , Hyuck Choo, David Garmire, Richard S. Muller, and James Demmel, Method for fabricating vertically-offset interdigitated comb actuator device , Regents of the University of California, August 11, 2009 .

  3. U.S. Patent No. 7,564,559, Hyuck Choo, Richard S. Muller, David Garmire, James Demmel, and Rishi Kant, MEMS-based phase-shifting interferometer, Regents of the University of California, July 21, 2009.

  4. U.S. Patent No. 7,355,793 , Hyuck Choo and Richard S. Muller, Optical system applicable to improving the dynamic range of Shack-Hartmann sensors, Regents of the University of California, April 8, 2008.

  5. U.S. Patent No. 7,301,177 , Behrang Behin, Kam-Yin Lau, and Richard S. Muller, Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam, Regents of the University of California, November 27, 2007.

  6. U.S. Patent Application 20070026614, Choo, Hyuck; Garmire, David; Muller, Richard; Demmel, James, CMOS-compatible high-performance microscanners, including structures, high-yield simplified fabrication methods and applications, Regents of the University of California, February 1, 2007.

  7. U.S. Patent Application 20060262379, Choo, Hyuck; Muller, Richard, Optical switch using frequency-based addressing in a microelectromechanical systems array, Regents of the University of California, November 23, 2006.

  8. U.S. Patent No. 7,079,299, Robert A. Conant, Jocelyn T. Nee, Kam-Yin Lau, and Richard S. Muller, Staggered Torsional Electrostatic Combdrive and Method of Forming Same, Regents of the University of California, July 18, 2006.

  9. U.S. Patent No. 6,962,830, Behrang Behin, Kam-Yin Lau, and Richard S. Muller, Global Mechanical Stop, Regents of the University of California, November 8, 2005.

  10. U.S. Patent No. 6,897,539, Behrang Behin, Kam-Yin Lau, and Richard S. Muller, Method for Directing an Optical Beam and a Method for Manufacturing an Apparatus for Directing an Optical Beam, Regents of the University of California, May 24, 2005.

  11. U.S. Patent No. 6,758,983, Robert A. Conant, Jocelyn T. Nee, Kam-Yin Lau, and Richard S. Muller, Staggered Torsional Electrostatic Combdrive and Method of Forming Same, Regents of the University of California, July 6, 2004.

  12. U.S. Patent No. 5,945,898, Jack W. Judy and Richard S. Muller, Magnetic Microactuator, Regents of the University of California, August 31, 1999.

  13. U.S. Patent No. 5,867,297, Meng-Hsiung Kiang, Olav Solgaard, Kam Lau, and Richard S. Muller, Apparatus and Method for Optical Scanning with an Oscillatory Microelectromechanical System, Regents of the University of California, February 2, 1999.

  14. U.S. Patent No. 5,493,177, R.S. Muller, C.H. Mastrangelo, and Kirt R. Williams, Sealed Micromachined Vacuum and Gas-Filled Devices, Regents of the University of California, February 20, 1996.

  15. U.S. Patent No. 5,285,131, R.S. Muller and C.H. Mastrangelo, Vacuum Micromachined Silicon Incandescent Light, Regents of the University of California, February 8, 1994.

  16. U.S.Patent No. 5,252,881, R.S. Muller, L-S. Fan, and Y-C. Tai, IC-Processed Micromotors and Methods for their Fabrication, Regents of the University of California, October 12, 1993.

  17. U.S. Patent No. 4,816,125, R.S. Muller and E.S. Kim, IC Processed Piezoelectric Microphone, Regents of the University of California, (division of ser.no. 125,375, Nov 25, 1987, patent no. 4,783,821) March 28, 1989.

  18. U.S. Patent No. 4,783,821, R.S. Muller and E.S. Kim, IC Processed Piezoelectric Microphone, Regents of the University of California, November 8, 1988.

  19. U.S. Patent No. 4,740,410, R.S. Muller, L.S. Fan, and Y.C. Tai, Micromechanical Elements and Methods for Their Fabrication, Regents of the University of California, April 26, 1988.

  20. U.S. Patent No. 4,849,695, R.S. Muller and J.I. Goicolea, Null-Detection Magnetometers, Regents of the University of California, July 18, 1989.

  21. U.S. Patent No. 4,801,883, R.S. Muller and J.I. Goicolea, A Magneto-Coupler Isolator Incorporating A Carrier-Domain Magnetometer, Improvements in Carrier-Domain Magnetometers, and Systems Employing Them, Regents of the University of California, January 31, 1989.

  22. U.S. Patent No. 4,674,319, R.S. Muller and R.T. Howe, Integrated Circuit Sensor, Regents of the University of California, June 20, 1987.

  23. U.S. Patent No.b 4,608,865, R.S. Muller and D.L. Polla, Integrated Pyroelectric Sensor and Methods, Regents of the University of California, September 2, 1986.

  24. U.S. Patent No. 4,361,026, R.S. Muller and R.M. White, Method and Apparatus for Sensing Fluids Using Surface Acoustic Waves, Regents of the University of California, November 30, 1982.

  25. U.S. Patent No. 3,967,307, R.S. Muller and L.K. Russell, Lateral Bipolar Transistor For Integrated Circuits and Method for Forming the Same, Signetics Corporation, June 29, 1976.

  26. U.S. Patent No. 3,943,554, L.K. Russell, T.T. Dao, and R.S. Muller, Threshold Switching Integrated Circuit and Method for Forming the Same, Signetics Corporation, March 9, 1976.

  27. Canadian Patent No. 975658 (September 16, 1975), British Patent No. 1374231 (May 4, 1973), R.S. Muller and J. Conragan, Integrated Circuit with Remotely Driven Switch and Method, Signetics Corporation.

  28. U.S. Patent No. 3,585,415, R.S. Muller and J. Conragan, Stress-strain Transducer Charge Coupled to a Piezoelectric Material, Regents of the University of California, June 15, 1971.

  29. U.S. Patent No. 3,351,786, R.S. Muller and J. Conragan, Piezoelectric-Semiconductor, Electromechanical Transducer, the Regents of the University of California, November 7, 1967.

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Last updated 1 January 2012