EE245 Homework 6

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1. You have an L-shaped suspension composed of a horizontal beam anchored on one end and a vertical beam attached at the tip of the horizontal beam.  You may ignore the axial compliance of the two beams.  If you apply a pure force in x or y at the free end of the vertical beam, what deflection do you get in x, y, and theta?  What if you apply a moment? Generate the 3x3 compliance matrix relating the applied Fx, Fy, and M at the tip of the vertical beam to the x,y, theta deflections.
2. Calculate the numerical values for the matrix assuming that they are made in POLY1 in the MUMPS process, and that both beams are 2 microns wide and 200 microns long.  Use SUGAR to verify your matrix.  Paste the sugar code that you used here:  
3. Design an electrostatically actuated POLY1 structure in the MUMPS process that has a deflection of at least 20 microns.  You may apply up to 15Volts to your actuators.  Try to minimize the size of the smallest circumscribed square that will contain your layout.  Another free lunch for the smallest design.  Partners ok.  Put the size of the square here (length of a side in microns):   and paste the sugar code that describes the device here: 
 

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