| Two chapters from a book that will never be written, Pister | 9 |
| There's plenty of room at the bottom, Feynman | 43 |
| Infinitesimal machinery, Feynman | 50 |
| Silicon as a mechanical material, Petersen | 61 |
| Bulk micromachining of silicon, Kovacs, Maluf, Petersen | 99 |
| Surface micromachining for microelectromechanical systems, Bustillo, Howe, Muller | 115 |
| Resonant-microbridge vapor sensor | 137 |
| IC-processed electrostatic micro-motors, Fan, Tai, Muller | 145 |
| Laterally driven polysilicon resonant microstructures, Tang, Nguyen, Howe | 149 |
| Friction and wear in microfabricated harmonic side-drive motors, Mehregany, Senturia, Lang | 156 |
| Large displacement linear actuator, Brennan, Lim, Pisano, Chou | 162 |
| CMOS electrothermal microactuators, Parameswaran, Ristic, Chau, Robinson, Allegretto | 167 |
| Surface micromachined digitally force-balanced accelerometer with integrated CMOS detection circuitry, Yun, Howe, Gray | 171 |
| Hinged polysilicon structures with integrated CMOS TFTs, Pister | 177 |