CMOS convective accelerometers

• Thermopile based

  • suspended beam poly heater
  • suspended cantilevers differential thermopile configuration
    • Al - poly1 t-couples (Seebeck coeff. aab ~ 50 µV/K)

• Thermistor based

  • suspended cantilevers with polysilicon resistor heaters
    • tcr ~ +0.0009 W/K
  • Wheatstone bridge configuration

Previous slide

Next slide

Back to first slide

View graphic version