Research Interests: MEMS, RF MEMS, resonator/filter design, nano technology
received his double B.S. degree in Power Mechanical Engineering and Electrical Engineering from National Tsing Hua University, Hsinchu, Taiwan, in 2004. He is currently working toward his Ph.D. degree, with Prof. Albert P. Pisano, in the Department of Mechanical Engineering, University of California, Berkeley, CA. His research interests include RF MEMS and nanotechnology. Yen has been a student member of IEEE since 2009.
HEaTS: AlN Narrowband RF Filters [BPN369]
The long-term objective of this project is to realize self-temperature compensating narrow
band filter bank for wireless communication systems. In this work, post-CMOS compatible aluminum
nitride (AlN) RF Lamb wave resonators (LWR) are used as building blocks. LWR have the advantages of
permitting multi-frequency devices with high Q (~3000) and low motional resistance (~100ohm).
Different approaches including overhang adjustment are used to finely select the resonance frequency
of LWR. Successful testing in high temperature up to 600C opens the potential applications of AlN
resonator technology in harsh environments.