Research Interests: RF MEMS resonators, oscillators, and filters; CMOS/MEMS integration; Piezoelectric MEMS technologies.
Chih-Ming Lin received the B.S. degree in civil engineering and the M.S. degree in applied mechanics from the National Taiwan University, Taipei, Taiwan, in 2001 and 2003, respectively, and the M.S. degree in electrical engineering and computer sciences and the Ph.D. degree in mechanical engineering from the University of California at Berkeley in 2012 and 2013, respectively.
From 2004 to 2005, he was a MEMS R&D engineer at the BenQ Corporation, Hsinchu, Taiwan, where he was involved in the development of the fully CMOS-integrated MEMS inkjet print heads. Since July 2013, he is a MEMS design engineer at the Silicon Labs Inc. and develop the high-performance CMOS-compatible MEMS oscillators based on the CMEMS platform. His research interests include acoustic wave devices, piezoelectirc and electrostatic devices, RF N/MEMS resonators, oscillators and filters, and CMOS-compatible N/MEMS technologies.
HEaTS: Temperature-Compensated & High-Q Aluminum Nitride Lamb Wave Resonators [BPN441]
The long-range goal of this project is to develop aluminum nitride (AlN) Lamb wave resonators with high Q, small frequency-temperature drift, multiple frequencies, and CMOS compatibility on one single chip.