Research Interests: MEMS motion sensors, RF passive devices, High-frequency magnetismJob Interests: Industry R&D
Chen Yang received the PhD degree from Tsinghua University, Beijing, China, 2008, in Microelectronics. He is currently a Assistant Project Scientist at the Berkeley Sensor & Actuator Center, University of California, Berkeley. His research interests include MEMS gyro, RF passive devices, high-frequency magnetic material and integrated devices. Dr. Yang received the IEEE Electron Devices Society (EDS) Early Career Award in 2010, and the IEEE EDS PhD Student Fellowship Award in 2007.
Materials for High Quality-Factor Resonating Gyroscopes [BPN655]
This project will investigate new materials suitable for achieving Q-factors in excess of 1
million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and
surface losses will be performed using resonator test structures. The effect of doping and
microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined
cantilevers and double-ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond
(NCD) and microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying
levels of Boron doping, Deposition temperature and methane flow rate. Thermal conductivities of diamond
films were measured using TDTR technique for further mapping of theory and experiment. The dissipation
mechanisms were further explored over temperature range from 300-730 Kelvin.