Research Interests: Design and Fabrication of Micro-Electro Mechanical Sensors and Actuators; Piezoelectric Micromachined Ultrasonic Transducers; MEMS-based Resonators.
Sina Akhbari is currently a Ph.D. candidate in the Department of Mechanical Engineering at UC Berkeley. He received his B.Sc. (2012) in Mechanical Engineering from Sharif University of Technology, Tehran, Iran. He received his M.Sc. (2014) from the University of California at Berkeley as part of his PhD program and advanced toward PhD candidacy in the same year. He has been working on design and fabrication of MEMS Resonator Gyroscopes and Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) as part of Ph.D. research.
Highly Responsive pMUTs [BPN743]
Ultrasonic imaging is one of the most important and widely used medical imaging
techniques, which uses high-frequency sound waves to view soft tissues such as muscles, internal
organs as well as blood flowing through blood vessels in real time. With the advancement of
microelectromechanical systems (MEMS), ultrasonic devices operated based on plate flexural mode
have shown remarkable improvements in bandwidth, cost, and yield over the conventional thickness-
mode PZT sensors. MEMS fabrication technologies can be utilized to realize both capacitive (cMUTs)
and piezoelectric (pMUTs) micromachined ultrasonic transducers However, these devices could enjoy
much more widespread applications if they were adjustable, better focused with lower energy
requirements. This project aims to highly responsive pMUTs based on CMOS compatible fabrication
processes with the potential to replace the plate-based pMUTs for high electromechanical coupling
ultrasonic transducer arrays for applications in fingerprint IDs, body movement sensors, and hand-
held medical imagers