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Prof. Roya Maboudian Joins BSAC as Faculty co-Director

It was announced at the BSAC IAB on September 17 2014, that the BSAC co-Directors have elected Professor Roya Maboudian (Chemical and Biomolecular Engineering), as our newest BSAC Faculty co-Director.  She brings important new capabilities to BSAC researchers and our members, from her pioneering work in the areas of new MEMS materials, processes, and devices.  She has frequently collaborated with us and a number of our member companies, often in areas related to harsh environments; silicon carbide materials, processes and devices; high temperature metallurgy; silicon germanium materials processes and devices; stiction; chemical sensing and more.

Roya has established an Applied Materials and Surface Science Laboratory in Tan Hall, where the original work on silicon carbide deposition at UC Berkeley was conducted using a custom-built, horizontal hot-wall low-pressure chemical vapor deposition reactor, in collaboration with Dr. Carlo Carraro.  She has been cited for her work in self-assembled monolayer antistiction coatings.  Other experimental tools in Maboudianrsquo;s group include atomic force microscopy, Raman spectroscopy, low-energy electron diffraction, X-ray photoelectron spectroscopy, contact angle analysis system, and MEMS reliability testing.

You can be certain you will see a lot more of Roya’s work expressed in BSAC research projects and reported at future IAB’s.

Roya Maboudian || Co-Director
Contact Information
University of California, Berkeley
Chemical and Biomolecular Engineering

(510) 643-7957
Director UC Berkeley
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Roya Maboudian is a professor of Chemical and Biomolecular Engineering and a Co-Director of the Berkeley Sensor & Actuator Center at UC Berkeley. She is currently serving as editor to the IEEE Journal of Microelectromechanical Systems (JMEMS), as associate editor to IEEE/SPIE Journal on Micro/Nanolithography, MEMS and MOEMS (JM3), and as advisory board member to ACS Applied Materials and Interfaces (AMI).
Professor Maboudian's research interest is in the surface/interface and materials science and engineering of micro/nanosystems, with applications in harsh-environment sensing, health and environmental monitoring, and energy technologies.
Professor Maboudian has co-authored over 260 papers in peer-reviewed archival journals. She is the recipient of several awards, including the Presidential Early Career Award for Scientists and Engineers (PECASE) from the White House, NSF Young Investigator award, and the Beckman Young Investigator award. She is a Fellow of the American Vacuum Society.
Prof. Maboudian received her B.S. degree in Electrical Engineering from the Catholic University of America, Washington, D.C., and her M.S. and Ph.D. degrees in Applied Physics from the California Institute of Technology in Pasadena.
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