| Project ID |
BPN356 |
| Website |
|
| Start Date |
Wed 2009-Aug-19 07:14:21 |
| Last Updated |
Thu 2009-Sep-24 22:31:10 |
| Abstract |
Adriatic Research Institute (ARI) is a California non-profit corporation in Berkeley, CA. Through membership
in the Berkeley Microfabrication Laboratory Affiliates Program since 2001, we have enjoyed year-round
access to the 4" and 6" CMOS and MEMS fabrication facility on campus. Our own research projects
utilize a variety of SOI-based and other MEMS processes to fabricate fast two-axis micromirror scanners,
ultra-light mirrors, low-stress membranes, nanowires, etc. ARI also has an extensively equipped
electronics and MEMS design and test facility. All of these facilities, our experienced staff, and
customized short-courses are available to the public on consulting or contract basis. |
| Status |
Continuing |
| Funding Source |
|
| IAB Research Area |
Package, Process & Microassembly |
| Researcher(s) |
Veljko Milanovic |
| Advisor(s) |
John M. Huggins |
|
|
