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BPN722: 3D Ultrasonic Fingerprint Sensor On a Chip Using Piezoelectric Micromachined Ultrasonic Transducers (PMUT)

Project ID BPN722
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Start Date Wed 2013-Aug-14 21:51:30
Last Updated Wed 2015-Aug-12 17:35:50
Abstract We've successfully built a 500dpi, 4.75mm x 3.5mm monolithic ultrasonic fingerprint sensor on a chip with PMUT and integrated CMOS process. The sensor is resilient to common contamination such as dirt, sweat, and oil by penetrating through them, and the sensor has the capability of capturing inner-finger feature such as dermis fingerprint. The capability of generating a three- dimensional, volumetric image of the finger surface and the tissues beneath the finger surface makes it extremely difficult to deceive the sensor with phantom. The sensor images a fingerprint within 3-ms and 10-uJ, and its fully-integrated using AlN MEMS process as well as 0.18um CMOS process. The chip area is 5mm x 4mm.
Status Continuing
Funding Source BSAC Member Fees
IAB Research Area Physical Sensors & Devices
Researcher(s) Hao-Yen Tang, Joy Jiang, Utkarsh Singhal
Advisor(s) David A. Horsley, Bernhard E. Boser
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