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Richard S. Muller

image of Richard S. Muller

Professor in the Graduate School
Professor Emeritus
Electrical Engineering and Computer Sciences Department

Founding Director (1986, jointly with Richard M. White)
Berkeley Sensor & Actuator Center (BSAC)

Editor-in-Chief (1997-2012)
IEEE/ASME Journal of Microelectromechanical Systems

muller at berkeley dot edu
Phone: (510) 642-0614
FAX: (510) 643-6637

University of California, Berkeley
EECS Department
568 Cory Hall #1770
Berkeley, CA 94720-1770

Richard Lossing
403 Cory Hall
(510) 643-9827
rlossing at berkeley dot edu

Grant Administrator:
Tom Parsons
(510) 643-6690
tparsons at eecs dot berkeley dot edu

Sometimes confused with Richard A. Muller of UCB Physics Department and Lawrence Berkeley National Laboratory.

Research Interests

  • MEMS Micro-Optical Systems for Process Characterization
  • MEMS Biomedical Applications
  • MEMS Systems for Adaptive Optics

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  • Stevens Institute of Technology, Mechanical Engineer - 1955
  • California Institute of Technology, MS/Electrical Engineering - 1957
  • California Institute of Technology, PhD/Electrical Engineering and Physics - 1962

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Professional Activities

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  • Howard Hughes Graduate Fellowship California Institute of Technology -- 1955-57
  • National Science Foundation Fellowship California Institute of Technology -- 1959-62
  • Member National Academy of Engineering -- elected 1992
  • IEEE Life Fellow for contributions to solid-state sensors and to education in solid-state electronics --1988
  • IEEE. Royal Society of Edinburgh (RSE), Wolfson James Clerk Maxwell Award (with Richard M. White) -- 2013
  • IEEE Cledo Brunetti Award (with Roger T. Howe) for the invention of silicon surface-micromachining --1998
  • University of California Berkeley Citation -- 1994
  • Stevens Renaissance Award--1996
  • MEMS Career Award-- Transducers '99-- Transducers Research Foundation
  • IEEE Millennium Medal-- 2000
  • IEEE Electron Devices Society Distinguished Service Award -- 2007
  • NATO Fellowship to Technical University of Munich, Germany -- 1968-69
  • Fulbright Faculty Fellowship to Technical University of Munich, Germany -- 1982-83
  • Alexander von Humboldt Research Professorship at Technical University of Berlin, Germany -- 1989-90
  • Guest Professorship at Swiss Federal Institute of Technology, Zurich, Switzerland -- 1992
  • Edwin Howard Armstrong Memorial Lecturer at Columbia University, New York City -- 1988
  • Michael Faraday 200th Birthday Memorial Lecturer, Institute of Electrical Engineers, London, U.K. -- 1991

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Last updated January 7, 2016